{"id":"https://openalex.org/W2002311629","doi":"https://doi.org/10.1117/12.396520","title":"Scanning silicon micromirror using a bidirectionally movable magnetic microactuator","display_name":"Scanning silicon micromirror using a bidirectionally movable magnetic microactuator","publication_year":2000,"publication_date":"2000-08-22","ids":{"openalex":"https://openalex.org/W2002311629","doi":"https://doi.org/10.1117/12.396520","mag":"2002311629"},"language":"en","primary_location":{"id":"doi:10.1117/12.396520","doi":"https://doi.org/10.1117/12.396520","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.396520","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006744737","display_name":"Hyoung Jin Cho","orcid":"https://orcid.org/0000-0002-6563-4317","observed_orcids":["https://orcid.org/0000-0002-6563-4317"]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hyoung J. Cho","raw_affiliation_strings":["Univ. of Cincinnati (United States)","University of Cincinnati UNITED STATES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Cincinnati (United States)","institution_ids":["https://openalex.org/I63135867"]},{"raw_affiliation_string":"University of Cincinnati UNITED STATES","institution_ids":["https://openalex.org/I63135867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100411409","display_name":"Jun Yan","orcid":"https://orcid.org/0000-0003-2099-7162","observed_orcids":["https://orcid.org/0000-0003-2099-7162"]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jun Yan","raw_affiliation_strings":["Univ. of Cincinnati (United States)","University of Cincinnati UNITED STATES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Cincinnati (United States)","institution_ids":["https://openalex.org/I63135867"]},{"raw_affiliation_string":"University of Cincinnati UNITED STATES","institution_ids":["https://openalex.org/I63135867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111519123","display_name":"Stephen T. Kowel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Stephen T. Kowel","raw_affiliation_strings":["Univ. of Cincinnati (United States)","University of Cincinnati UNITED STATES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Cincinnati (United States)","institution_ids":["https://openalex.org/I63135867"]},{"raw_affiliation_string":"University of Cincinnati UNITED STATES","institution_ids":["https://openalex.org/I63135867"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036344518","display_name":"Fred R. Beyette","orcid":"https://orcid.org/0000-0001-8704-7810","observed_orcids":["https://orcid.org/0000-0001-8704-7810"]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Fred R. Beyette, Jr.","raw_affiliation_strings":["Univ. of Cincinnati (United States)","University of Cincinnati UNITED STATES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Cincinnati (United States)","institution_ids":["https://openalex.org/I63135867"]},{"raw_affiliation_string":"University of Cincinnati UNITED STATES","institution_ids":["https://openalex.org/I63135867"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5066761849","display_name":"Chong H. Ahn","orcid":"https://orcid.org/0000-0002-1006-7204","observed_orcids":["https://orcid.org/0000-0002-1006-7204"]},"institutions":[{"id":"https://openalex.org/I63135867","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079","country_code":"US","type":"education","lineage":["https://openalex.org/I63135867"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Chong H. Ahn","raw_affiliation_strings":["Univ. of Cincinnati (United States)","University of Cincinnati UNITED STATES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Cincinnati (United States)","institution_ids":["https://openalex.org/I63135867"]},{"raw_affiliation_string":"University of Cincinnati UNITED STATES","institution_ids":["https://openalex.org/I63135867"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I63135867"],"apc_list":null,"apc_paid":null,"fwci":0.9557,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.73567616,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"4178","issue":null,"first_page":"106","last_page":"115"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11486","display_name":"Micro and Nano Robotics","score":0.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scanning-micromirror","display_name":"scanning micromirror","score":0.9129999876022339},{"id":"https://openalex.org/keywords/silicon-micromirrors","display_name":"silicon micromirrors","score":0.8790000081062317},{"id":"https://openalex.org/keywords/magnetic-microactuators","display_name":"magnetic microactuators","score":0.9760000109672546},{"id":"https://openalex.org/keywords/bidirectional-actuation","display_name":"bidirectional actuation","score":0.8259999752044678},{"id":"https://openalex.org/keywords/moems","display_name":"MOEMS","score":0.906000018119812},{"id":"https://openalex.org/keywords/uv-liga","display_name":"UV-LIGA","score":0.7519999742507935},{"id":"https://openalex.org/keywords/permanent-magnet-array","display_name":"permanent magnet array","score":0.6019999980926514},{"id":"https://openalex.org/keywords/electroplating","display_name":"electroplating","score":0.7839999794960022},{"id":"https://openalex.org/keywords/electromagnet","display_name":"electromagnet","score":0.7590000033378601},{"id":"https://openalex.org/keywords/laser-beam-deflection","display_name":"laser beam deflection","score":0.6340000033378601},{"id":"https://openalex.org/keywords/reflectivity","display_name":"reflectivity","score":0.41600000858306885}],"concepts":[{"id":"https://openalex.org/C58373989","wikidata":"https://www.wikidata.org/wiki/Q6839208","display_name":"Microactuator","level":3,"score":0.8728892207145691},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7511393427848816},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6965599060058594},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5495150089263916},{"id":"https://openalex.org/C18645525","wikidata":"https://www.wikidata.org/wiki/Q1369469","display_name":"Digital micromirror device","level":2,"score":0.542612612247467},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.500917911529541},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.49548614025115967},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.4895097017288208},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.4731496572494507},{"id":"https://openalex.org/C106997767","wikidata":"https://www.wikidata.org/wiki/Q178032","display_name":"Electromagnet","level":3,"score":0.44895896315574646},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.43138042092323303},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.4271323084831238},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.41518110036849976},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.4118579924106598},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.18589970469474792},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.18032503128051758},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17627492547035217},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.396520","doi":"https://doi.org/10.1117/12.396520","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.396520","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320310256","display_name":"University of Cincinnati","ror":"https://ror.org/01e3m7079"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1982702611","https://openalex.org/W2346844721","https://openalex.org/W2148707952","https://openalex.org/W2166272328","https://openalex.org/W2324386294","https://openalex.org/W3128361144","https://openalex.org/W2138262593","https://openalex.org/W4387191474","https://openalex.org/W2277486695","https://openalex.org/W6889004920"],"abstract_inverted_index":{"In":[0],"this":[1,61],"work,":[2],"a":[3,8,37,131],"scanning":[4,126,149],"silicon":[5,74],"micromirror":[6,85,150],"using":[7,49],"bi-":[9],"directionally":[10],"movable":[11],"magnetic":[12,30,66,116],"microactuator":[13],"is":[14,86,170,175],"designed,":[15],"fabricated":[16],"and":[17,57,142],"characterized.":[18],"Although":[19],"there":[20],"have":[21],"been":[22],"technical":[23],"difficulties":[24],"in":[25,29,77,101],"realizing":[26],"bi-directional":[27],"motion":[28],"MOEMS":[31],"devices":[32],"for":[33,41,179],"the":[34,90,97,103,113,120,125,137,157,167,180],"lack":[35],"of":[36,52,99,115,124,139,159,166],"suitable":[38],"structuring":[39],"technique":[40],"permanent":[42],"magnet":[43],"components,":[44],"we":[45],"overcome":[46],"those":[47],"by":[48,88,119,130],"UV-LIGA":[50],"process":[51],"thick":[53],"CONiMnP":[54],"alloy":[55],"films":[56,67],"arrays.":[58],"Based":[59],"on":[60,73,112],"new":[62],"fabrication":[63],"technique,":[64],"hard":[65],"or":[68,109],"arrays":[69],"are":[70,105,128],"directly":[71],"electroplated":[72],"cantilever":[75],"beams":[76],"order":[78],"to":[79,96],"compose":[80],"moving":[81],"mirror":[82],"parts.":[83],"A":[84,147],"constructed":[87],"combining":[89],"beam":[91,134,169],"with":[92,136,183],"an":[93,143],"electromagnet.":[94],"According":[95],"change":[98],"current":[100,158],"electromagnets,":[102],"micromirrors":[104],"deflected":[106],"either":[107],"upward":[108],"downward":[110],"depending":[111],"direction":[114],"field":[117],"generated":[118],"electromagnets.":[121],"Optical":[122],"properties":[123],"mirrors":[127,181],"measured":[129],"He-Ne":[132],"laser":[133,168],"source":[135],"wavelength":[138],"632.8":[140],"nm":[141],"optical":[144],"power":[145],"detector.":[146],"prototype":[148],"shows":[151],"+/-":[152,160],"60":[153],"micrometers":[154],"deflections":[155],"at":[156],"100":[161],"mA.":[162],"The":[163,173],"Gaussian":[164],"profile":[165],"well":[171],"preserved.":[172],"reflectance":[174],"above":[176],"98":[177],"percent":[178],"coated":[182],"aluminum":[184],"films.":[185]},"counts_by_year":[],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}