{"id":"https://openalex.org/W2001072016","doi":"https://doi.org/10.1117/12.879781","title":"Hotspot fixing using ILT","display_name":"Hotspot fixing using ILT","publication_year":2011,"publication_date":"2011-03-04","ids":{"openalex":"https://openalex.org/W2001072016","doi":"https://doi.org/10.1117/12.879781","mag":"2001072016"},"language":"en","primary_location":{"id":"doi:10.1117/12.879781","doi":"https://doi.org/10.1117/12.879781","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.879781","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110603132","display_name":"Woojoo Sim","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Woojoo Sim","raw_affiliation_strings":["SAMSUNG Electronics (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083182271","display_name":"Sunggon Jung","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sunggon Jung","raw_affiliation_strings":["SAMSUNG Electronics (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101735158","display_name":"Hyunjong Lee","orcid":"https://orcid.org/0009-0005-2893-351X","observed_orcids":["https://orcid.org/0009-0005-2893-351X","https://orcid.org/0000-0001-7782-1809"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyun-Jong Lee","raw_affiliation_strings":["SAMSUNG Electronics (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110237073","display_name":"Sungsoo Suh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sungsoo Suh","raw_affiliation_strings":["SAMSUNG Electronics (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034699370","display_name":"Jung-Hoon Ser","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jung-Hoon Ser","raw_affiliation_strings":["SAMSUNG Electronics (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111527003","display_name":"Seong-Woon Choi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Seong-Woon Choi","raw_affiliation_strings":["SAMSUNG Electronics (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100810807","display_name":"Chang-Jin Kang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Chang-Jin Kang","raw_affiliation_strings":["SAMSUNG Electronics (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036866128","display_name":"Thomas C. Cecil","orcid":"https://orcid.org/0000-0001-9079-4198","observed_orcids":["https://orcid.org/0000-0001-9079-4198"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Thomas Cecil","raw_affiliation_strings":["Luminescent Technologies, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Luminescent Technologies, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067672188","display_name":"Christopher Ashton","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Christopher Ashton","raw_affiliation_strings":["Luminescent Technologies, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Luminescent Technologies, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070286557","display_name":"D.L. Irby","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"David Irby","raw_affiliation_strings":["Luminescent Technologies, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Luminescent Technologies, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003552367","display_name":"Xin Zhou","orcid":"https://orcid.org/0009-0000-0896-5999","observed_orcids":["https://orcid.org/0009-0000-0896-5999"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Xin Zhou","raw_affiliation_strings":["Luminescent Technologies, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Luminescent Technologies, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061766707","display_name":"Donghwan Son","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"D.H. Son","raw_affiliation_strings":["Luminescent Technologies, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Luminescent Technologies, Inc. (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100858476","display_name":"Guangming Xiao","orcid":"https://orcid.org/0009-0008-4758-8098","observed_orcids":["https://orcid.org/0009-0008-4758-8098"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Guangming Xiao","raw_affiliation_strings":["Luminescent Technologies, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Luminescent Technologies, Inc. (United States)","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100403326","display_name":"David S. Kim","orcid":"https://orcid.org/0000-0003-3621-4476","observed_orcids":["https://orcid.org/0000-0003-3621-4476"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"David Kim","raw_affiliation_strings":["Luminescent Technologies, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Luminescent Technologies, Inc. (United States)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.6977,"has_fulltext":false,"cited_by_count":17,"citation_normalized_percentile":{"value":0.81367635,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":96},"biblio":{"volume":"7973","issue":null,"first_page":"79731L","last_page":"79731L"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11522","display_name":"VLSI and FPGA Design Techniques","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/inverse-lithography","display_name":"inverse lithography technology","score":0.9190000295639038},{"id":"https://openalex.org/keywords/optical-proximity-correction","display_name":"optical proximity correction","score":0.7979999780654907},{"id":"https://openalex.org/keywords/low-k1-lithography","display_name":"low-k1 lithography","score":0.8809999823570251},{"id":"https://openalex.org/keywords/resolution-enhancement","display_name":"resolution enhancement","score":0.6589999794960022},{"id":"https://openalex.org/keywords/photomask-design","display_name":"mask design","score":0.7139999866485596},{"id":"https://openalex.org/keywords/model-matching","display_name":"model matching","score":0.6050000190734863},{"id":"https://openalex.org/keywords/computational-time","display_name":"computational time","score":0.6290000081062317}],"concepts":[{"id":"https://openalex.org/C146481406","wikidata":"https://www.wikidata.org/wiki/Q105131","display_name":"Hotspot (geology)","level":2,"score":0.768308699131012},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6863805055618286},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6682828664779663},{"id":"https://openalex.org/C78371743","wikidata":"https://www.wikidata.org/wiki/Q1672829","display_name":"Optical proximity correction","level":3,"score":0.5187221169471741},{"id":"https://openalex.org/C113775141","wikidata":"https://www.wikidata.org/wiki/Q428691","display_name":"Computer engineering","level":1,"score":0.3528459072113037},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34875279664993286},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14523941278457642},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.12452280521392822},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08414745330810547},{"id":"https://openalex.org/C8058405","wikidata":"https://www.wikidata.org/wiki/Q46255","display_name":"Geophysics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.879781","doi":"https://doi.org/10.1117/12.879781","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.879781","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.4943999946117401}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2016667617","https://openalex.org/W2082026379","https://openalex.org/W2125662749","https://openalex.org/W2126188035","https://openalex.org/W2138948620"],"related_works":["https://openalex.org/W2315481269","https://openalex.org/W817528573","https://openalex.org/W2005239734","https://openalex.org/W2089315939","https://openalex.org/W7123591607","https://openalex.org/W3198499620","https://openalex.org/W2017521492","https://openalex.org/W1985138891","https://openalex.org/W3013432474","https://openalex.org/W2016667617"],"abstract_inverted_index":{"For":[0],"low":[1],"k1":[2],"lithography":[3,66],"the":[4,47,88,92,111,121,138,160],"resolution":[5,15],"of":[6,34,49,76,91,115],"critical":[7],"patterns":[8],"on":[9],"large":[10,36,78],"designs":[11],"can":[12,69],"require":[13],"advanced":[14],"enhancement":[16],"techniques":[17],"for":[18,54],"masks":[19],"including":[20],"scattering":[21],"bars,":[22],"complicated":[23],"mask":[24,42,144],"edge":[25],"segmentation":[26],"and":[27,131,140,154],"placement,":[28],"etc.":[29],"Often":[30],"only":[31],"a":[32,35,77,98,106,116],"portion":[33],"layout":[37,50],"will":[38,119,150],"need":[39],"this":[40,60],"sophisticated":[41],"design":[43,79],"(the":[44],"hotspot),":[45],"with":[46],"remainder":[48],"being":[51],"relatively":[52],"simple":[53,89],"OPC":[55,82,132,141],"methods":[56],"to":[57,72,86,102,109],"correct.":[58],"In":[59],"paper":[61],"we":[62],"show":[63,151],"how":[64],"inverse":[65],"technology":[67],"(ILT)":[68],"be":[70,103],"used":[71,85,104],"correct":[73,87,110],"selected":[74],"regions":[75],"after":[80],"standard":[81],"has":[83],"been":[84],"portions":[90,114],"layout.":[93],"The":[94],"hotspot":[95,161],"approach":[96],"allows":[97],"computationally":[99],"intensive":[100],"ILT":[101,130,139],"in":[105,159],"limited":[107],"way":[108],"most":[112,122],"difficult":[113],"design.":[117],"We":[118,149],"discuss":[120],"important":[123],"issues":[124],"such":[125],"as:":[126],"model":[127],"matching":[128],"between":[129],"corrections;":[133],"transition":[134],"region":[135],"corrections":[136],"near":[137],"boundary":[142],"region;":[143],"complexity;":[145],"total":[146],"combined":[147],"runtime.":[148],"both":[152],"simulated":[153],"actual":[155],"wafer":[156],"lithographic":[157],"improvements":[158],"regions.":[162]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-11-09T13:22:03.289127","created_date":"2016-06-24T00:00:00"}