{"id":"https://openalex.org/W2000957533","doi":"https://doi.org/10.1088/0022-3727/27/11/028","title":"Pulsed microwave discharge: a very efficient H atom source","display_name":"Pulsed microwave discharge: a very efficient H atom source","publication_year":1994,"publication_date":"1994-11-14","ids":{"openalex":"https://openalex.org/W2000957533","doi":"https://doi.org/10.1088/0022-3727/27/11/028","mag":"2000957533"},"language":"en","primary_location":{"id":"doi:10.1088/0022-3727/27/11/028","doi":"https://doi.org/10.1088/0022-3727/27/11/028","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0022-3727/27/11/028","pdf_url":"https://iopscience.iop.org/article/10.1088/0022-3727/27/11/028/pdf","source":{"id":"https://openalex.org/S111927887","display_name":"Journal of Physics D Applied Physics","issn_l":"0022-3727","issn":["0022-3727","1361-6463"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Physics D: Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1088/0022-3727/27/11/028/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001058538","display_name":"Antoine Rousseau","orcid":"https://orcid.org/0000-0002-8965-5307","observed_orcids":["https://orcid.org/0000-0002-8965-5307"]},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404","https://openalex.org/I277688954"]},{"id":"https://openalex.org/I4210134955","display_name":"Laboratoire de Physique des Gaz et des Plasmas","ror":"https://ror.org/04bgjpg77","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210134955"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A Rousseau","raw_affiliation_strings":["Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I4210134955"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007934420","display_name":"L. Tomasini","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404","https://openalex.org/I277688954"]},{"id":"https://openalex.org/I4210134955","display_name":"Laboratoire de Physique des Gaz et des Plasmas","ror":"https://ror.org/04bgjpg77","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210134955"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"L Tomasini","raw_affiliation_strings":["Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I4210134955"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111807399","display_name":"G\u00e9rard Gousset","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404","https://openalex.org/I277688954"]},{"id":"https://openalex.org/I4210134955","display_name":"Laboratoire de Physique des Gaz et des Plasmas","ror":"https://ror.org/04bgjpg77","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210134955"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G Gousset","raw_affiliation_strings":["Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I4210134955"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113980798","display_name":"C. Boisse-Laporte","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404","https://openalex.org/I277688954"]},{"id":"https://openalex.org/I4210134955","display_name":"Laboratoire de Physique des Gaz et des Plasmas","ror":"https://ror.org/04bgjpg77","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210134955"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C Boisse-Laporte","raw_affiliation_strings":["Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I4210134955"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5107895810","display_name":"P. Leprince","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404","https://openalex.org/I277688954"]},{"id":"https://openalex.org/I4210134955","display_name":"Laboratoire de Physique des Gaz et des Plasmas","ror":"https://ror.org/04bgjpg77","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210134955"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P Leprince","raw_affiliation_strings":["Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I4210134955"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":0.9599,"has_fulltext":true,"cited_by_count":40,"citation_normalized_percentile":{"value":0.70342174,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"27","issue":"11","first_page":"2439","last_page":"2441"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.7437000274658203,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.7437000274658203,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10642","display_name":"Atmospheric-Pressure Plasma Applications","score":0.227400004863739,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10523","display_name":"Atomic and Molecular Physics","score":0.012799999676644802,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pulsed-microwave-discharge","display_name":"pulsed microwave discharge","score":0.9800000190734863},{"id":"https://openalex.org/keywords/low-pressure-discharge","display_name":"low-pressure discharge","score":0.5960000157356262},{"id":"https://openalex.org/keywords/wall-recombination","display_name":"wall recombination","score":0.7250000238418579},{"id":"https://openalex.org/keywords/chemical-actinometry","display_name":"actinometry","score":0.7979999780654907},{"id":"https://openalex.org/keywords/electron-density","display_name":"electron density","score":0.8209999799728394}],"concepts":[{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.766342282295227},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.7203356027603149},{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.6792348027229309},{"id":"https://openalex.org/C39248633","wikidata":"https://www.wikidata.org/wiki/Q1159201","display_name":"Gas-filled tube","level":2,"score":0.6331708431243896},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6203116774559021},{"id":"https://openalex.org/C125989502","wikidata":"https://www.wikidata.org/wiki/Q5281443","display_name":"Discharge pressure","level":3,"score":0.560547947883606},{"id":"https://openalex.org/C58312451","wikidata":"https://www.wikidata.org/wiki/Q4817200","display_name":"Atom (system on chip)","level":2,"score":0.5355629324913025},{"id":"https://openalex.org/C168566512","wikidata":"https://www.wikidata.org/wiki/Q403898","display_name":"Actinometer","level":3,"score":0.512395441532135},{"id":"https://openalex.org/C125485243","wikidata":"https://www.wikidata.org/wiki/Q905186","display_name":"Electron density","level":3,"score":0.47412586212158203},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.47359541058540344},{"id":"https://openalex.org/C21881925","wikidata":"https://www.wikidata.org/wiki/Q3503313","display_name":"Power density","level":3,"score":0.47050637006759644},{"id":"https://openalex.org/C188224857","wikidata":"https://www.wikidata.org/wiki/Q905291","display_name":"Ion source","level":3,"score":0.44884735345840454},{"id":"https://openalex.org/C2780848588","wikidata":"https://www.wikidata.org/wiki/Q210494","display_name":"Power Balance","level":3,"score":0.4462847113609314},{"id":"https://openalex.org/C2986567525","wikidata":"https://www.wikidata.org/wiki/Q747066","display_name":"Microwave power","level":3,"score":0.444673091173172},{"id":"https://openalex.org/C97039730","wikidata":"https://www.wikidata.org/wiki/Q552565","display_name":"Pulsed power","level":3,"score":0.4394872784614563},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.425899475812912},{"id":"https://openalex.org/C22175881","wikidata":"https://www.wikidata.org/wiki/Q7201785","display_name":"Electron temperature","level":3,"score":0.41627609729766846},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3697708249092102},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.34352582693099976},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10857453942298889},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C131097465","wikidata":"https://www.wikidata.org/wiki/Q178898","display_name":"Gas compressor","level":2,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1088/0022-3727/27/11/028","doi":"https://doi.org/10.1088/0022-3727/27/11/028","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0022-3727/27/11/028","pdf_url":"https://iopscience.iop.org/article/10.1088/0022-3727/27/11/028/pdf","source":{"id":"https://openalex.org/S111927887","display_name":"Journal of Physics D Applied Physics","issn_l":"0022-3727","issn":["0022-3727","1361-6463"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Physics D: Applied Physics","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1088/0022-3727/27/11/028","doi":"https://doi.org/10.1088/0022-3727/27/11/028","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0022-3727/27/11/028","pdf_url":"https://iopscience.iop.org/article/10.1088/0022-3727/27/11/028/pdf","source":{"id":"https://openalex.org/S111927887","display_name":"Journal of Physics D Applied Physics","issn_l":"0022-3727","issn":["0022-3727","1361-6463"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Physics D: Applied Physics","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2000957533.pdf","grobid_xml":"https://content.openalex.org/works/W2000957533.grobid-xml"},"referenced_works_count":8,"referenced_works":["https://openalex.org/W1270298401","https://openalex.org/W1997914461","https://openalex.org/W2001206520","https://openalex.org/W2053569892","https://openalex.org/W2058821122","https://openalex.org/W2059794503","https://openalex.org/W2071005880","https://openalex.org/W2140531113"],"related_works":["https://openalex.org/W2140531113","https://openalex.org/W1991490358","https://openalex.org/W2087931351","https://openalex.org/W1964249291","https://openalex.org/W1975313531","https://openalex.org/W4247337219","https://openalex.org/W1991463312","https://openalex.org/W1964651737","https://openalex.org/W1985904295","https://openalex.org/W2008262433"],"abstract_inverted_index":{"We":[0,21,78],"describe":[1],"a":[2,11,80],"very":[3],"efficient":[4],"source":[5],"of":[6,38,47],"H":[7,48,54,97],"atoms":[8,49],"generated":[9],"by":[10,50,59],":":[12],"low-pressure":[13],"(1":[14],"Torr)":[15],"pulsed":[16,32,71,85],"microwave":[17,27],"discharge":[18,33,40,92],"(2.45":[19],"GHz).":[20],"show":[22],"that":[23],"the":[24,36,39,45,74],"low":[25],"mean":[26],"power":[28,66],"density":[29,90],"applied":[30],"in":[31,64,70],"limits":[34],"considerably":[35],"heating":[37],"tube":[41],"wall,":[42],"and":[43,84,95],"hence,":[44],"loss":[46],"wall":[51],"recombination.":[52],"The":[53],"atom":[55,98],"molar":[56],"ratio,":[57],"measured":[58],"actinometry,":[60],"increases":[61],"from":[62],"30%":[63],"continuous":[65,83],"to":[67],"nearly":[68],"100%":[69],"power,":[72,86],"for":[73,88,96],"same":[75],"instantaneous":[76],"power.":[77],"present":[79],"comparison":[81],"between":[82],"both":[87],"electron":[89],"(and":[91],"balance":[93],"parameters)":[94],"density.":[99]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2018,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":3}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}