{"id":"https://openalex.org/W2000881411","doi":"https://doi.org/10.1088/0957-0233/19/9/094001","title":"Sub-micron resolution CT for failure analysis and process development","display_name":"Sub-micron resolution CT for failure analysis and process development","publication_year":2008,"publication_date":"2008-07-24","ids":{"openalex":"https://openalex.org/W2000881411","doi":"https://doi.org/10.1088/0957-0233/19/9/094001","mag":"2000881411"},"language":"en","primary_location":{"id":"doi:10.1088/0957-0233/19/9/094001","doi":"https://doi.org/10.1088/0957-0233/19/9/094001","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0957-0233/19/9/094001","pdf_url":null,"source":{"id":"https://openalex.org/S109302362","display_name":"Measurement Science and Technology","issn_l":"0957-0233","issn":["0957-0233","1361-6501"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-2","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Measurement Science and Technology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001578866","display_name":"Michael Feser","orcid":"https://orcid.org/0009-0004-7859-5208","observed_orcids":["https://orcid.org/0009-0004-7859-5208"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M Feser","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007091603","display_name":"Jeff Gelb","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J Gelb","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005718505","display_name":"Huibin Chang","orcid":"https://orcid.org/0000-0002-8833-8940","observed_orcids":["https://orcid.org/0000-0002-8833-8940"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H Chang","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049457415","display_name":"Hongtao Cui","orcid":"https://orcid.org/0000-0001-8470-2701","observed_orcids":["https://orcid.org/0000-0001-8470-2701"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H Cui","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044395444","display_name":"Fred Duewer","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"F Duewer","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110047557","display_name":"S. H. Lau","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S H Lau","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037916969","display_name":"A. Tkachuk","orcid":"https://orcid.org/0009-0002-4168-9353","observed_orcids":["https://orcid.org/0009-0002-4168-9353"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A Tkachuk","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5112928917","display_name":"W. Yun","orcid":"https://orcid.org/0000-0002-7472-8067","observed_orcids":["https://orcid.org/0000-0002-7472-8067"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"W Yun","raw_affiliation_strings":["Xradia Inc., 5052 Commercial Circle, Concord, CA 94520 (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Xradia Inc., 5052 Commercial Circle, Concord, CA 94520 (United States)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":4.378,"has_fulltext":false,"cited_by_count":106,"citation_normalized_percentile":{"value":0.9382615,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":100},"biblio":{"volume":"19","issue":"9","first_page":"094001","last_page":"094001"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11183","display_name":"Advanced X-ray Imaging Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11183","display_name":"Advanced X-ray Imaging Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12386","display_name":"Advanced X-ray and CT Imaging","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11949","display_name":"Nuclear Physics and Applications","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/high-resolution-x-ray-imaging","display_name":"high-resolution X-ray imaging","score":0.5139999985694885},{"id":"https://openalex.org/keywords/microfocus-x-ray-source","display_name":"microfocus X-ray source","score":0.8489999771118164},{"id":"https://openalex.org/keywords/high-resolution-detectors","display_name":"high-resolution detectors","score":0.7020000219345093},{"id":"https://openalex.org/keywords/x-ray-optical-elements","display_name":"X-ray optical elements","score":0.9330000281333923},{"id":"https://openalex.org/keywords/flip-chip-packages","display_name":"flip-chip packages","score":0.6899999976158142},{"id":"https://openalex.org/keywords/phase-contrast-imaging","display_name":"phase contrast imaging","score":0.8539999723434448},{"id":"https://openalex.org/keywords/zernike-phase-contrast","display_name":"Zernike phase contrast","score":0.9819999933242798},{"id":"https://openalex.org/keywords/failure-analysis","display_name":"failure analysis","score":0.6100000143051147}],"concepts":[{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5897080302238464},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.5460188984870911},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4965746998786926},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.37487852573394775},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.3407973051071167},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1949690282344818},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07798731327056885},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.07569625973701477}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1088/0957-0233/19/9/094001","doi":"https://doi.org/10.1088/0957-0233/19/9/094001","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0957-0233/19/9/094001","pdf_url":null,"source":{"id":"https://openalex.org/S109302362","display_name":"Measurement Science and Technology","issn_l":"0957-0233","issn":["0957-0233","1361-6501"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-2","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Measurement Science and Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W640331812","https://openalex.org/W1996255014","https://openalex.org/W2011156041","https://openalex.org/W2019239851","https://openalex.org/W2034180664","https://openalex.org/W2037521346","https://openalex.org/W2040994137","https://openalex.org/W2049296605","https://openalex.org/W2049603955","https://openalex.org/W2053201987","https://openalex.org/W2058228912","https://openalex.org/W2078322918","https://openalex.org/W2093078797","https://openalex.org/W2158135489"],"related_works":["https://openalex.org/W2001655367","https://openalex.org/W6980690345","https://openalex.org/W2336926293","https://openalex.org/W7100099765","https://openalex.org/W2186412692","https://openalex.org/W2541788863","https://openalex.org/W2078322918","https://openalex.org/W2106806936","https://openalex.org/W2974420950","https://openalex.org/W6991584956"],"abstract_inverted_index":{"Many":[0],"modern":[1],"industrial":[2],"processes":[3],"and":[4,18,67,130,193,205],"research":[5,230],"applications":[6,231],"place":[7],"increasingly":[8],"higher":[9,46],"demands":[10],"on":[11],"x-ray":[12,40,53,85,96,124,177,257],"computed":[13],"tomography":[14],"(CT)":[15],"imaging":[16,33,131,151,217,238,262],"resolution":[17,34,47,112,173],"sensitivity":[19],"for":[20,83,127,162,190,222,229,233,254,270],"low-contrast":[21,194],"specimens":[22,223,241],"with":[23,93,224],"a":[24,89,94,135,181],"low":[25,226],"atomic":[26],"number.":[27],"The":[28,71],"three":[29],"approaches":[30,64],"to":[31,248],"increasing":[32],"are":[35,65,134],"(1)":[36],"reduction":[37],"in":[38,77,101,152,211,242],"the":[39,153,159,198,212,234,237,261],"spot":[41],"size,":[42],"(2)":[43],"use":[44],"of":[45,52,62,113,139,214,239,263],"detectors":[48],"or":[49,60,266,272],"(3)":[50],"employment":[51],"optical":[54,125,178],"elements.":[55],"Systems":[56],"that":[57],"pursue":[58],"one":[59,170],"more":[61],"these":[63],"available":[66],"under":[68],"continued":[69],"development.":[70],"Xradia":[72,199],"MicroXCT\u2122":[73],"projection-type":[74],"microscope":[75],"described":[76],"this":[78,102],"paper":[79],"has":[80],"been":[81],"optimized":[82,189],"high-resolution":[84,90],"CT":[86,103,121,174,258],"by":[87],"employing":[88],"detector":[91],"paired":[92],"microfocus":[95],"source.":[97],"Large":[98],"working":[99],"distances":[100],"system":[104],"enable":[105,218],"full":[106],"tomographic":[107],"data":[108],"collection":[109],"at":[110],"micrometre":[111],"large":[114,182],"samples,":[115],"such":[116,196],"as":[117,156,158,169,197],"flip-chip":[118],"packages.":[119],"X-ray":[120],"instruments":[122,145,175,188],"using":[123],"elements":[126,179],"condenser":[128],"optics":[129],"objective":[132],"lenses":[133],"new":[136,187,203,207],"development":[137,161],"capable":[138],"reaching":[140],"sub-50":[141,255],"nm":[142,256],"resolution.":[143],"These":[144],"find":[146],"various":[147],"applications,":[148],"including":[149],"die-level":[150],"semiconductor":[154],"industry":[155],"well":[157],"process":[160],"fuel":[163],"cells,":[164],"which":[165,228],"we":[166],"describe":[167],"here":[168],"application.":[171],"Sub-micron":[172],"without":[176],"have":[180],"application":[183],"base":[184],"already;":[185],"however,":[186],"soft":[191],"materials":[192],"specimens,":[195],"nanoXCT\u2122,":[200],"offer":[201],"completely":[202],"capabilities":[204],"open":[206],"applications.":[208,274],"New":[209],"developments":[210],"area":[213],"phase":[215,252],"contrast":[216,221,253],"unprecedented":[219],"image":[220],"very":[225],"absorption,":[227],"enables":[232,260],"first":[235],"time":[236],"many":[240],"their":[243],"natural":[244],"state":[245],"(e.g.,":[246],"arteries":[247],"examine":[249],"calcification).":[250],"Zernike":[251],"even":[259],"single":[264],"cell":[265],"thin":[267],"tissue":[268],"slices":[269],"biological":[271],"medical":[273]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":8},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":20},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":11},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":10},{"year":2013,"cited_by_count":7},{"year":2012,"cited_by_count":8}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}