{"id":"https://openalex.org/W2000703650","doi":"https://doi.org/10.1080/00207216908900006","title":"Dependence of cathode sputtering rate on the current in a glow discharge\u2020","display_name":"Dependence of cathode sputtering rate on the current in a glow discharge\u2020","publication_year":1969,"publication_date":"1969-07-01","ids":{"openalex":"https://openalex.org/W2000703650","doi":"https://doi.org/10.1080/00207216908900006","mag":"2000703650"},"language":"en","primary_location":{"id":"doi:10.1080/00207216908900006","doi":"https://doi.org/10.1080/00207216908900006","is_oa":false,"landing_page_url":"https://doi.org/10.1080/00207216908900006","pdf_url":null,"source":{"id":"https://openalex.org/S36304393","display_name":"International Journal of Electronics","issn_l":"0020-7217","issn":["0020-7217","1362-3060"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Electronics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079206753","display_name":"V.I. Orlinov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24768866","display_name":"Bulgarian Academy of Sciences","ror":"https://ror.org/01x8hew03","country_code":"BG","type":"government","lineage":["https://openalex.org/I24768866"]},{"id":"https://openalex.org/I4210117802","display_name":"Institute of Electronics","ror":"https://ror.org/0299eyn73","country_code":"BG","type":"nonprofit","lineage":["https://openalex.org/I24768866","https://openalex.org/I4210117802"]}],"countries":["BG"],"is_corresponding":false,"raw_author_name":"V. ORLINOV","raw_affiliation_strings":["Institute of Electronics, Bulgarian Academy of Sciences, Sofia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Bulgarian Academy of Sciences, Sofia","institution_ids":["https://openalex.org/I24768866","https://openalex.org/I4210117802"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5060397279","display_name":"Georgi M. Mladenov","orcid":"https://orcid.org/0000-0002-2126-2814","observed_orcids":["https://orcid.org/0000-0002-2126-2814"]},"institutions":[{"id":"https://openalex.org/I24768866","display_name":"Bulgarian Academy of Sciences","ror":"https://ror.org/01x8hew03","country_code":"BG","type":"government","lineage":["https://openalex.org/I24768866"]},{"id":"https://openalex.org/I4210117802","display_name":"Institute of Electronics","ror":"https://ror.org/0299eyn73","country_code":"BG","type":"nonprofit","lineage":["https://openalex.org/I24768866","https://openalex.org/I4210117802"]}],"countries":["BG"],"is_corresponding":false,"raw_author_name":"G. MLADENOV","raw_affiliation_strings":["Institute of Electronics, Bulgarian Academy of Sciences, Sofia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Bulgarian Academy of Sciences, Sofia","institution_ids":["https://openalex.org/I24768866","https://openalex.org/I4210117802"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5506,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.80793866,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"27","issue":"1","first_page":"65","last_page":"73"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9897000193595886,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9897000193595886,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.007300000172108412,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/glow-discharge","display_name":"glow discharge","score":0.8669999837875366},{"id":"https://openalex.org/keywords/discharge-current-dependence","display_name":"discharge current dependence","score":0.8159999847412109},{"id":"https://openalex.org/keywords/gas-pressure-dependence","display_name":"gas pressure dependence","score":0.9150000214576721},{"id":"https://openalex.org/keywords/ion-energy-distribution","display_name":"ion energy distribution","score":0.847000002861023},{"id":"https://openalex.org/keywords/thin-film-deposition","display_name":"thin film deposition","score":0.6480000019073486}],"concepts":[{"id":"https://openalex.org/C49110097","wikidata":"https://www.wikidata.org/wiki/Q175233","display_name":"Cathode","level":2,"score":0.8454760313034058},{"id":"https://openalex.org/C522602180","wikidata":"https://www.wikidata.org/wiki/Q654","display_name":"Neon","level":3,"score":0.7521729469299316},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.7454336881637573},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6093471050262451},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.6059388518333435},{"id":"https://openalex.org/C2776595061","wikidata":"https://www.wikidata.org/wiki/Q1427934","display_name":"Glow discharge","level":3,"score":0.6055343747138977},{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.5472148060798645},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.5457238554954529},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.5429600477218628},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.4543118476867676},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.4464869499206543},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4415147304534912},{"id":"https://openalex.org/C547737533","wikidata":"https://www.wikidata.org/wiki/Q696","display_name":"Argon","level":2,"score":0.3112640976905823},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2385675311088562},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.16254469752311707},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.13073259592056274},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11829304695129395},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.08563008904457092},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.08344092965126038},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1080/00207216908900006","doi":"https://doi.org/10.1080/00207216908900006","is_oa":false,"landing_page_url":"https://doi.org/10.1080/00207216908900006","pdf_url":null,"source":{"id":"https://openalex.org/S36304393","display_name":"International Journal of Electronics","issn_l":"0020-7217","issn":["0020-7217","1362-3060"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Electronics","raw_type":"journal-article"},{"id":"mag:3008345921","doi":null,"is_oa":false,"landing_page_url":"http://ui.adsabs.harvard.edu/abs/1969pig..conf..117O/abstract","pdf_url":null,"source":{"id":"https://openalex.org/S4306522540","display_name":"pig","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"pig","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1533059746","https://openalex.org/W2032273277","https://openalex.org/W2051364304","https://openalex.org/W2054474251","https://openalex.org/W2056043936","https://openalex.org/W2064900423","https://openalex.org/W2067153617","https://openalex.org/W2083150806","https://openalex.org/W2084644987","https://openalex.org/W2126039962"],"related_works":["https://openalex.org/W1983997423","https://openalex.org/W1980479679","https://openalex.org/W2073259075","https://openalex.org/W4239350694","https://openalex.org/W3126060270","https://openalex.org/W2051364304","https://openalex.org/W2064900423","https://openalex.org/W1974709951","https://openalex.org/W2096483195","https://openalex.org/W2084644987"],"abstract_inverted_index":{"The":[0,46,60],"experimental":[1,47,142],"dependence":[2,61,96],"of":[3,19,32,40,54,62,85,97,100,106,115,126,147,154,157],"cathode":[4,20,121,132],"sputtering":[5],"rate":[6],"W":[7,57],"on":[8,66,103],"dischargo":[9],"current":[10],"I":[11],"in":[12,71,130,149,163],"a":[13,33,43,52],"glow":[14],"discharge":[15],"for":[16,36,144],"the":[17,30,38,55,63,67,72,86,95,98,104,107,110,112,116,120,124,127,131,137,141,145,155,170],"combination":[18],"material":[21],"nichrome":[22],"and":[23,123,140],"filling":[24],"gas":[25,68,128],"neon":[26],"was":[27,79,89,150],"investigated":[28],"with":[29,165],"help":[31],"microbalance":[34],"method":[35],"determining":[37],"thickness":[39],"films":[41],"by":[42,169],"quartz":[44],"oscillator.":[45],"results":[48,143],"approximate":[49],"well":[50],"to":[51,76,119],"relation":[53,87],"type":[56],"\u223c":[58],"Im.":[59],"coefficient":[64,148],"m":[65],"pressure":[69],"p":[70],"range":[73],"from":[74],"2":[75],"35":[77],"Torr":[78],"also":[80],"investigated.":[81],"A":[82],"theoretical":[83,138],"evaluation":[84,139],"W(I)":[88],"made,":[90],"which":[91,161],"takes":[92],"into":[93],"account":[94],"number":[99],"sputtered":[101,117],"particles":[102,118],"energy":[105],"ions":[108],"striking":[109],"cathode,":[111],"back":[113],"diffusion":[114],"surface":[122],"change":[125],"density":[129],"region.":[133],"Good":[134],"agreement":[135,164],"between":[136],"value":[146],"obtained.":[151],"An":[152],"explanation":[153],"variation":[156],"m(p)":[158],"is":[159,162],"given,":[160],"some":[166],"previous":[167],"investigations":[168],"authors.":[171]},"counts_by_year":[],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}