{"id":"https://openalex.org/W2000665748","doi":"https://doi.org/10.1063/1.3548350","title":"Multi-Wavelength Raman and Photoluminescence Characterization of Implanted Silicon Before and After Rapid Thermal Annealing","display_name":"Multi-Wavelength Raman and Photoluminescence Characterization of Implanted Silicon Before and After Rapid Thermal Annealing","publication_year":2011,"publication_date":"2011-01-01","ids":{"openalex":"https://openalex.org/W2000665748","doi":"https://doi.org/10.1063/1.3548350","mag":"2000665748"},"language":"en","primary_location":{"id":"doi:10.1063/1.3548350","doi":"https://doi.org/10.1063/1.3548350","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.3548350","pdf_url":null,"source":{"id":"https://openalex.org/S2764696622","display_name":"AIP conference proceedings","issn_l":"0094-243X","issn":["0094-243X","1551-7616","1935-0465"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"AIP Conference Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056082957","display_name":"Woo Sik Yoo","orcid":"https://orcid.org/0000-0002-1479-8450","observed_orcids":["https://orcid.org/0000-0002-1479-8450"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Woo Sik Yoo","raw_affiliation_strings":["WaferMasters, Inc., 246 East Gish Road., San Jose, CA 95112, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"WaferMasters, Inc., 246 East Gish Road., San Jose, CA 95112, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043267169","display_name":"Takeshi Ueda","orcid":"https://orcid.org/0000-0002-2352-2122","observed_orcids":["https://orcid.org/0000-0002-2352-2122"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Takeshi Ueda","raw_affiliation_strings":["WaferMasters, Inc., 246 East Gish Road., San Jose, CA 95112, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"WaferMasters, Inc., 246 East Gish Road., San Jose, CA 95112, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5104053013","display_name":"Toshikazu Ishigaki","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Toshikazu Ishigaki","raw_affiliation_strings":["WaferMasters, Inc., 246 East Gish Road., San Jose, CA 95112, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"WaferMasters, Inc., 246 East Gish Road., San Jose, CA 95112, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111539419","display_name":"Kitaek Kang","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kitaek Kang","raw_affiliation_strings":["WaferMasters, Inc., 246 East Gish Road., San Jose, CA 95112, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"WaferMasters, Inc., 246 East Gish Road., San Jose, CA 95112, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018101394","display_name":"Jiro Matsuo","orcid":"https://orcid.org/0000-0003-0684-3677","observed_orcids":["https://orcid.org/0000-0003-0684-3677"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jiro Matsuo","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074923815","display_name":"Masataka Kase","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Masataka Kase","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020399656","display_name":"Takaaki Aoki","orcid":"https://orcid.org/0000-0002-5926-4903","observed_orcids":["https://orcid.org/0000-0002-5926-4903"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Takaaki Aoki","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5073910564","display_name":"Toshio Seki","orcid":"https://orcid.org/0000-0002-0834-1657","observed_orcids":["https://orcid.org/0000-0002-0834-1657"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Toshio Seki","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":5.7705,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.95495675,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"204","last_page":"207"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.448199987411499,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.448199987411499,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.35420000553131104,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.07190000265836716,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/boron-implantation","display_name":"boron implantation","score":0.8690000176429749},{"id":"https://openalex.org/keywords/rapid-thermal-annealing","display_name":"rapid thermal annealing","score":0.8640000224113464},{"id":"https://openalex.org/keywords/silicon-wafers","display_name":"silicon wafers","score":0.824999988079071},{"id":"https://openalex.org/keywords/photoluminescence","display_name":"photoluminescence","score":0.9980000257492065},{"id":"https://openalex.org/keywords/dopant-activation","display_name":"dopant activation","score":0.8669999837875366},{"id":"https://openalex.org/keywords/dopant-distribution","display_name":"dopant distribution","score":0.7850000262260437},{"id":"https://openalex.org/keywords/nonradiative-recombination-centers","display_name":"nonradiative recombination centers","score":0.9179999828338623},{"id":"https://openalex.org/keywords/crystal-defects","display_name":"crystal defects","score":0.5440000295639038},{"id":"https://openalex.org/keywords/online-process-monitoring","display_name":"real-time process monitoring","score":0.7639999985694885}],"concepts":[{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.8810253143310547},{"id":"https://openalex.org/C85080765","wikidata":"https://www.wikidata.org/wiki/Q614893","display_name":"Photoluminescence","level":2,"score":0.8443557024002075},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8239088654518127},{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.7135573029518127},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6893888711929321},{"id":"https://openalex.org/C46275449","wikidata":"https://www.wikidata.org/wiki/Q2458815","display_name":"Crystallinity","level":2,"score":0.6187891960144043},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.584794819355011},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.5794464349746704},{"id":"https://openalex.org/C2780081452","wikidata":"https://www.wikidata.org/wiki/Q5297293","display_name":"Dopant Activation","level":4,"score":0.5388270616531372},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4905039668083191},{"id":"https://openalex.org/C501308230","wikidata":"https://www.wikidata.org/wiki/Q618","display_name":"Boron","level":2,"score":0.483949214220047},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.43813151121139526},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3916969895362854},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.31154102087020874},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2549690306186676},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0877218246459961},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.04544338583946228},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.3548350","doi":"https://doi.org/10.1063/1.3548350","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.3548350","pdf_url":null,"source":{"id":"https://openalex.org/S2764696622","display_name":"AIP conference proceedings","issn_l":"0094-243X","issn":["0094-243X","1551-7616","1935-0465"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"AIP Conference Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2086103622"],"related_works":["https://openalex.org/W2044799557","https://openalex.org/W2336425575","https://openalex.org/W7096908646","https://openalex.org/W2256124085","https://openalex.org/W2037196206","https://openalex.org/W2138211365","https://openalex.org/W2030923124","https://openalex.org/W6947905456","https://openalex.org/W4321077602","https://openalex.org/W2051802857"],"abstract_inverted_index":{"Boron":[0],"implanted":[1,64],"(B":[2],"5":[3],"keV":[4],"3\u00d71015":[5],"cm\u22122)":[6],"Si":[7],"wafers":[8,65],"before":[9],"and":[10,22,33,49,51,60,71,79,87],"after":[11],"rapid":[12],"thermal":[13],"annealing":[14],"(RTA)":[15],"were":[16,66],"characterized":[17,68],"using":[18],"multi\u2010wavelength":[19],"Raman":[20,70,78],"spectroscopy":[21],"photoluminescence":[23],"(PL)":[24],"measurement":[25],"techniques.":[26,96],"Strong":[27],"correlation":[28],"among":[29],"Raman,":[30],"PL":[31,72,80],"spectra":[32],"RTA":[34],"conditions":[35],"are":[36],"observed.":[37],"By":[38],"selecting":[39],"appropriate":[40],"excitation":[41],"wavelengths,":[42],"approximate":[43],"dopant":[44,47],"profiles,":[45],"crystallinity,":[46],"activation,":[48],"location":[50],"density":[52],"of":[53,62],"non\u2010radiative":[54],"recombination":[55],"centers":[56],"(originated":[57],"by":[58,69],"defects":[59],"damage)":[61],"B":[63],"successfully":[67],"measurements":[73],"without":[74],"making":[75],"contact.":[76],"Multi\u2010wavelength":[77],"can":[81],"provide":[82],"advantages":[83],"as":[84],"inline":[85],"process":[86],"material":[88],"monitoring":[89],"techniques":[90],"in":[91],"addition":[92],"to":[93],"conventional":[94],"characterization":[95]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-08-01T09:00:35.917206","created_date":"2016-06-24T00:00:00"}