{"id":"https://openalex.org/W2000536832","doi":"https://doi.org/10.1117/12.712625","title":"Heuristics for truncating the number of optical kernels in Hopkins image calculations for model-based OPC treatment","display_name":"Heuristics for truncating the number of optical kernels in Hopkins image calculations for model-based OPC treatment","publication_year":2007,"publication_date":"2007-03-16","ids":{"openalex":"https://openalex.org/W2000536832","doi":"https://doi.org/10.1117/12.712625","mag":"2000536832"},"language":"en","primary_location":{"id":"doi:10.1117/12.712625","doi":"https://doi.org/10.1117/12.712625","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.712625","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5057893119","display_name":"Christian D. Zuniga","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210092175","display_name":"ASML (United States)","ror":"https://ror.org/00gtpjy03","country_code":"US","type":"company","lineage":["https://openalex.org/I4210092175","https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Christian Zuniga","raw_affiliation_strings":["ASML MaskTools, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML MaskTools, Inc. (United States)","institution_ids":["https://openalex.org/I4210092175"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5088882443","display_name":"Edita Tejnil","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210092175","display_name":"ASML (United States)","ror":"https://ror.org/00gtpjy03","country_code":"US","type":"company","lineage":["https://openalex.org/I4210092175","https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Edita Tejnil","raw_affiliation_strings":["ASML Mask Tools Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Mask Tools Inc. (United States)","institution_ids":["https://openalex.org/I4210092175"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210092175"],"apc_list":null,"apc_paid":null,"fwci":2.0084,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.83726772,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"6520","issue":null,"first_page":"65203I","last_page":"65203I"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.00139999995008111,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optical-proximity-correction","display_name":"optical proximity correction","score":0.9919999837875366},{"id":"https://openalex.org/keywords/singular-value-decomposition","display_name":"singular value decomposition","score":0.9070000052452087},{"id":"https://openalex.org/keywords/partially-coherent-imaging","display_name":"partially coherent imaging","score":0.640999972820282},{"id":"https://openalex.org/keywords/lithography-simulation","display_name":"lithography simulation","score":0.781000018119812},{"id":"https://openalex.org/keywords/critical-dimension-error","display_name":"critical dimension error","score":0.8339999914169312},{"id":"https://openalex.org/keywords/model-calibration","display_name":"model calibration","score":0.48899999260902405},{"id":"https://openalex.org/keywords/computational-efficiency","display_name":"computational efficiency","score":0.5839999914169312}],"concepts":[{"id":"https://openalex.org/C127705205","wikidata":"https://www.wikidata.org/wiki/Q5748245","display_name":"Heuristics","level":2,"score":0.6891374588012695},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6568504571914673},{"id":"https://openalex.org/C74193536","wikidata":"https://www.wikidata.org/wiki/Q574844","display_name":"Kernel (algebra)","level":2,"score":0.6306484937667847},{"id":"https://openalex.org/C45374587","wikidata":"https://www.wikidata.org/wiki/Q12525525","display_name":"Computation","level":2,"score":0.5777310729026794},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.552328884601593},{"id":"https://openalex.org/C78371743","wikidata":"https://www.wikidata.org/wiki/Q1672829","display_name":"Optical proximity correction","level":3,"score":0.5377272963523865},{"id":"https://openalex.org/C173801870","wikidata":"https://www.wikidata.org/wiki/Q201413","display_name":"Heuristic","level":2,"score":0.50146484375},{"id":"https://openalex.org/C459310","wikidata":"https://www.wikidata.org/wiki/Q117801","display_name":"Computational science","level":1,"score":0.3361169397830963},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.21826326847076416},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.1862022578716278},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.0},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.712625","doi":"https://doi.org/10.1117/12.712625","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.712625","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2023887637","https://openalex.org/W2007539025","https://openalex.org/W2044773743","https://openalex.org/W1982760250","https://openalex.org/W2046800778","https://openalex.org/W2386110724","https://openalex.org/W2374095217","https://openalex.org/W4206746851","https://openalex.org/W2067388435","https://openalex.org/W2812626180"],"abstract_inverted_index":{"In":[0,172],"the":[1,23,28,42,54,64,70,112,115,126,129,137,148,163,169,183,197,228,231,237,250],"application":[2],"of":[3,27,77,79,99,114,128,185,199,233,243,252],"model-based":[4],"optical":[5,65,90,105,116,130],"proximity":[6],"correction":[7],"(OPC)":[8],"to":[9,20,40,111,147,160,167,195],"a":[10,75,97,177,189,205,211,241,256],"full":[11,46],"chip":[12,47],"layout,":[13],"lithography":[14,206],"simulators":[15],"require":[16],"fast":[17,58],"imaging":[18,72,91],"algorithms":[19],"quickly":[21],"obtain":[22,168],"critical":[24],"dimensions":[25],"(CDs)":[26],"printed":[29],"features.":[30],"Model":[31],"accuracy":[32],"is":[33,93,153],"frequently":[34],"traded-off":[35],"for":[36,45,57,181,215,255],"speed":[37],"in":[38,69,165,204,210],"order":[39,166],"shorten":[41],"computation":[43],"time":[44],"design.":[48],"The":[49,88,119,218,246],"sum-of-coherent":[50],"systems":[51,106],"approximation":[52,62],"represents":[53],"current":[55],"standard":[56],"image":[59],"computation.":[60],"This":[61],"decomposes":[63],"system":[66,92,117],"response":[67],"function":[68,242],"Hopkins":[71],"equation":[73],"into":[74],"sum":[76,98],"products":[78],"its":[80],"eigenfunctions,":[81],"or":[82,230],"kernels,":[83],"via":[84],"singular":[85],"value":[86],"decomposition.":[87],"partially-coherent":[89],"then":[94,248],"represented":[95],"as":[96,227,240],"images":[100],"formed":[101],"by":[102],"coherently":[103],"illuminated":[104],"with":[107],"transfer":[108],"functions":[109],"corresponding":[110],"kernels":[113,141,200,253],"response.":[118],"eigenvalues":[120],"usually":[121],"decay":[122],"quickly,":[123],"depending":[124],"on":[125,222],"properties":[127],"system.":[131],"Current":[132],"models":[133],"will":[134],"typically":[135],"use":[136],"first":[138],"few":[139,190],"dominant":[140],"since":[142],"each":[143],"additional":[144],"kernel":[145],"adds":[146],"computational":[149],"time.":[150],"However,":[151],"there":[152],"no":[154],"general":[155],"guideline":[156],"that":[157,192,201],"indicates":[158],"where":[159],"cut":[161],"off":[162],"series":[164],"necessary":[170],"accuracy.":[171,258],"this":[173],"paper,":[174],"we":[175],"propose":[176],"generally":[178],"applicable":[179],"heuristic":[180],"choosing":[182],"number":[184,198,251],"kernels.":[186],"We":[187],"describe":[188],"heuristics":[191,219,247],"show":[193,249],"how":[194],"truncate":[196],"are":[202,220],"included":[203],"model":[207,214],"calibration,":[208],"resulting":[209],"more":[212],"efficient":[213],"OPC":[216],"treatment.":[217],"based":[221],"various":[223],"eigenvalue":[224],"measures":[225],"such":[226],"energy":[229],"degree":[232],"coherence":[234],"and":[235],"express":[236],"CD":[238],"error":[239],"these":[244],"measures.":[245],"needed":[254],"given":[257]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}