{"id":"https://openalex.org/W1999590690","doi":"https://doi.org/10.1116/1.572564","title":"Interfacial reaction during metallization of cured polyimide: An XPS study","display_name":"Interfacial reaction during metallization of cured polyimide: An XPS study","publication_year":1984,"publication_date":"1984-04-01","ids":{"openalex":"https://openalex.org/W1999590690","doi":"https://doi.org/10.1116/1.572564","mag":"1999590690"},"language":"en","primary_location":{"id":"doi:10.1116/1.572564","doi":"https://doi.org/10.1116/1.572564","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.572564","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5107979775","display_name":"N. J. Chou","orcid":"https://orcid.org/0000-0002-1754-988X","observed_orcids":["https://orcid.org/0000-0002-1754-988X"]},"institutions":[{"id":"https://openalex.org/I4210114115","display_name":"IBM Research - Thomas J. Watson Research Center","ror":"https://ror.org/0265w5591","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"N. J. Chou","raw_affiliation_strings":["IBM T. J. Watson Research Center, Yorktown Heights, New York 10598"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM T. J. Watson Research Center, Yorktown Heights, New York 10598","institution_ids":["https://openalex.org/I4210114115"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5082199982","display_name":"Chuanbing Tang","orcid":"https://orcid.org/0000-0002-0242-8241","observed_orcids":["https://orcid.org/0000-0002-0242-8241"]},"institutions":[{"id":"https://openalex.org/I4210114115","display_name":"IBM Research - Thomas J. Watson Research Center","ror":"https://ror.org/0265w5591","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. H. Tang","raw_affiliation_strings":["IBM T. J. Watson Research Center, Yorktown Heights, New York 10598"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM T. J. Watson Research Center, Yorktown Heights, New York 10598","institution_ids":["https://openalex.org/I4210114115"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210114115"],"apc_list":null,"apc_paid":null,"fwci":4.4637,"has_fulltext":false,"cited_by_count":220,"citation_normalized_percentile":{"value":0.9463807,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"2","issue":"2","first_page":"751","last_page":"755"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.6606000065803528,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.6606000065803528,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12084","display_name":"Synthesis and properties of polymers","score":0.2493000030517578,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.018300000578165054,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metallization","display_name":"metallization","score":0.8510000109672546},{"id":"https://openalex.org/keywords/interfacial-reaction","display_name":"interfacial reaction","score":0.8889999985694885},{"id":"https://openalex.org/keywords/chromium","display_name":"chromium","score":0.7080000042915344},{"id":"https://openalex.org/keywords/nickel","display_name":"nickel","score":1.0},{"id":"https://openalex.org/keywords/copper","display_name":"copper","score":1.0},{"id":"https://openalex.org/keywords/silver","display_name":"silver","score":0.9869999885559082},{"id":"https://openalex.org/keywords/core-level-spectra","display_name":"core-level spectra","score":0.5370000004768372},{"id":"https://openalex.org/keywords/thermodynamic-calculation","display_name":"thermodynamic calculation","score":0.6480000019073486},{"id":"https://openalex.org/keywords/room-temperature-deposition","display_name":"room-temperature deposition","score":0.6190000176429749}],"concepts":[{"id":"https://openalex.org/C2775913835","wikidata":"https://www.wikidata.org/wiki/Q7113777","display_name":"Overlayer","level":2,"score":0.9526022672653198},{"id":"https://openalex.org/C2780965675","wikidata":"https://www.wikidata.org/wiki/Q145958","display_name":"Polyimide","level":3,"score":0.8892947435379028},{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.8549776077270508},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6948687434196472},{"id":"https://openalex.org/C7070889","wikidata":"https://www.wikidata.org/wiki/Q902488","display_name":"Monolayer","level":2,"score":0.6608996391296387},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6550787687301636},{"id":"https://openalex.org/C544153396","wikidata":"https://www.wikidata.org/wiki/Q11426","display_name":"Metal","level":2,"score":0.5589601993560791},{"id":"https://openalex.org/C84416704","wikidata":"https://www.wikidata.org/wiki/Q188666","display_name":"Adhesion","level":2,"score":0.507262647151947},{"id":"https://openalex.org/C540031477","wikidata":"https://www.wikidata.org/wiki/Q629","display_name":"Oxygen","level":2,"score":0.47433963418006897},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4499642550945282},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4049391746520996},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3815996050834656},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.2609182298183441},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.256033718585968},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.25438791513442993},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.16293728351593018},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.15008246898651123},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.11827465891838074},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.572564","doi":"https://doi.org/10.1116/1.572564","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.572564","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2056159295","https://openalex.org/W2083819665","https://openalex.org/W2021798710","https://openalex.org/W2507059154","https://openalex.org/W1976042009","https://openalex.org/W2008568674","https://openalex.org/W2113786419","https://openalex.org/W1964586567","https://openalex.org/W1990734750","https://openalex.org/W100852978"],"abstract_inverted_index":{"To":[0],"characterize":[1],"the":[2,60,69,89,93,112,119],"intrinsic":[3],"adhesion":[4],"properties":[5],"of":[6,23,42,59,118],"various":[7,63],"metal\u2013polyimide":[8],"systems":[9],"we":[10],"have":[11],"used":[12,127],"x-ray":[13],"photoelectron":[14],"spectroscopy":[15],"(XPS)":[16],"to":[17,128],"monitor":[18],"interfacial":[19],"reactions":[20],"during":[21,140],"metallization":[22,141],"cured":[24,55],"polyimide":[25],"at":[26,142],"room":[27,143],"temperature.":[28,144],"In":[29],"situ":[30],"measurements":[31],"were":[32,49],"made":[33],"in":[34,62,92,122],"a":[35,53,131],"UHV":[36],"system":[37],"when":[38],"monolayers":[39],"and":[40,71,73,85,96],"submonolayers":[41],"Cr,":[43],"Ni,":[44],"Cu,":[45],"or":[46],"Ag":[47,97],"film":[48],"successively":[50],"deposited":[51],"on":[52],"freshly":[54],"PI":[56,139],"substrate.":[57],"Examination":[58],"changes":[61],"core":[64],"electron":[65],"spectra":[66],"associated":[67],"with":[68,76,88,138],"substrate":[70],"overlayer":[72],"their":[74],"comparison":[75],"expected":[77],"escape":[78],"length":[79],"effect":[80],"indicate":[81],"that":[82,105],"while":[83],"Cr":[84],"Ni":[86],"react":[87],"pendent":[90,120],"oxygen":[91,121],"substrate,":[94],"Cu":[95],"do":[98],"not.":[99],"A":[100],"simple":[101],"thermodynamic":[102],"calculation":[103],"shows":[104],"limiting":[106],"values":[107],"can":[108],"be":[109,126],"derived":[110],"for":[111],"effective":[113],"partial":[114],"molar":[115],"free":[116],"energy":[117],"PI,":[123],"which":[124],"may":[125],"predict":[129],"whether":[130],"given":[132],"metal":[133],"will":[134],"form":[135],"chemical":[136],"bonds":[137]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":3},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}