{"id":"https://openalex.org/W1998686147","doi":"https://doi.org/10.1143/jjap.30.939","title":"YBaCuO Epitaxial Film Formation by Magnetron Sputtering with Facing Targets I. Effects of Target and Substrate Positions","display_name":"YBaCuO Epitaxial Film Formation by Magnetron Sputtering with Facing Targets I. Effects of Target and Substrate Positions","publication_year":1991,"publication_date":"1991-05-01","ids":{"openalex":"https://openalex.org/W1998686147","doi":"https://doi.org/10.1143/jjap.30.939","mag":"1998686147"},"language":"en","primary_location":{"id":"doi:10.1143/jjap.30.939","doi":"https://doi.org/10.1143/jjap.30.939","is_oa":false,"landing_page_url":"https://doi.org/10.1143/jjap.30.939","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111693053","display_name":"Osamu Michikami","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2251713219","display_name":"NTT (Japan)","ror":"https://ror.org/00berct97","country_code":"JP","type":"company","lineage":["https://openalex.org/I2251713219"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Osamu Michikami Osamu Michikami","raw_affiliation_strings":["NTT Applied Electronic Laboratories, Tokai, Ibaraki 319-11"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"NTT Applied Electronic Laboratories, Tokai, Ibaraki 319-11","institution_ids":["https://openalex.org/I2251713219"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109989162","display_name":"Masayoshi Asahi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2251713219","display_name":"NTT (Japan)","ror":"https://ror.org/00berct97","country_code":"JP","type":"company","lineage":["https://openalex.org/I2251713219"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masayoshi Asahi Masayoshi Asahi","raw_affiliation_strings":["NTT Applied Electronic Laboratories, Tokai, Ibaraki 319-11"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"NTT Applied Electronic Laboratories, Tokai, Ibaraki 319-11","institution_ids":["https://openalex.org/I2251713219"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I2251713219"],"apc_list":{"value":2210,"currency":"USD","value_usd":2210},"apc_paid":null,"fwci":3.6349,"has_fulltext":false,"cited_by_count":35,"citation_normalized_percentile":{"value":0.93485288,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"30","issue":"5R","first_page":"939","last_page":"939"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.6660000085830688,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.6660000085830688,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11808","display_name":"Superconducting Materials and Applications","score":0.22269999980926514,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.07769999653100967,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/yba2cu3o7-delta","display_name":"YBa2Cu3O7-\u03b4","score":0.9240000247955322},{"id":"https://openalex.org/keywords/epitaxial-films","display_name":"epitaxial thin films","score":0.8659999966621399},{"id":"https://openalex.org/keywords/magnetron-sputtering","display_name":"magnetron sputtering","score":0.8420000076293945},{"id":"https://openalex.org/keywords/target-position","display_name":"target position","score":0.6129999756813049},{"id":"https://openalex.org/keywords/substrate-position","display_name":"substrate position","score":0.9959999918937683},{"id":"https://openalex.org/keywords/mgo-100-substrate","display_name":"MgO(001) substrate","score":0.8859999775886536},{"id":"https://openalex.org/keywords/stoichiometry","display_name":"stoichiometry","score":0.722000002861023},{"id":"https://openalex.org/keywords/superconducting-transition-temperature","display_name":"superconducting transition temperature","score":0.8970000147819519},{"id":"https://openalex.org/keywords/crystallinity","display_name":"crystallinity","score":0.718999981880188},{"id":"https://openalex.org/keywords/film-uniformity","display_name":"film uniformity","score":0.8669999837875366},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.9039999842643738},{"id":"https://openalex.org/keywords/high-temperature-superconductors","display_name":"high-temperature superconductors","score":0.9380000233650208}],"concepts":[{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.7901760339736938},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.7683696746826172},{"id":"https://openalex.org/C46275449","wikidata":"https://www.wikidata.org/wiki/Q2458815","display_name":"Crystallinity","level":2,"score":0.7372545599937439},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6931999921798706},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.6718655228614807},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6113835573196411},{"id":"https://openalex.org/C144082473","wikidata":"https://www.wikidata.org/wiki/Q213185","display_name":"Stoichiometry","level":2,"score":0.599441409111023},{"id":"https://openalex.org/C2779463800","wikidata":"https://www.wikidata.org/wiki/Q5062222","display_name":"Center (category theory)","level":2,"score":0.5831936001777649},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.5825791954994202},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.536690890789032},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.49811530113220215},{"id":"https://openalex.org/C54101563","wikidata":"https://www.wikidata.org/wiki/Q124131","display_name":"Superconductivity","level":2,"score":0.4556903541088104},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.44923973083496094},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.3912582993507385},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.18704506754875183},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1731981635093689},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.15877258777618408},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1545969843864441},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.08468374609947205},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07567587494850159},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.06549105048179626},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.056903451681137085},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1143/jjap.30.939","doi":"https://doi.org/10.1143/jjap.30.939","is_oa":false,"landing_page_url":"https://doi.org/10.1143/jjap.30.939","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1979090282","https://openalex.org/W1982446991","https://openalex.org/W1986295972","https://openalex.org/W1988276600","https://openalex.org/W1991525586","https://openalex.org/W1992535411","https://openalex.org/W1995349266","https://openalex.org/W1996176269","https://openalex.org/W2009004229","https://openalex.org/W2026158104","https://openalex.org/W2032551484","https://openalex.org/W2043755168","https://openalex.org/W2044903501","https://openalex.org/W2070104974","https://openalex.org/W2080604251","https://openalex.org/W2470214058"],"related_works":["https://openalex.org/W2034088363","https://openalex.org/W2498744063","https://openalex.org/W2039395481","https://openalex.org/W2073666278","https://openalex.org/W2054683571","https://openalex.org/W2021344565","https://openalex.org/W2017170990","https://openalex.org/W2022509315","https://openalex.org/W2292913851","https://openalex.org/W2077370331"],"abstract_inverted_index":{"YBa2Cu3O7-\u03b4":[0],"(YBCO)":[1],"thin":[2,69],"films":[3,51,90],"were":[4,56,58,98],"prepared":[5],"on":[6,28],"non-rotating":[7],"MgO(100)":[8],"substrates":[9],"at":[10,47,115,123],"630\u00b0C":[11],"using":[12],"dc":[13],"magnetron":[14],"sputtering":[15],"with":[16,52,91],"facing":[17],"targets":[18],"(dc-MSFT)":[19],"and":[20,25,41,81,119],"the":[21,63,66,106,116,130],"influence":[22],"of":[23,68,92,105],"target":[24],"substrate":[26],"positions":[27,46],"film":[29,70],"characteristics,":[30],"such":[31],"as":[32],"superconducting":[33],"properties,":[34],"composition":[35,67],"(C":[36],"Cu/Y,":[37],"C":[38,79,82],"Ba/Y),":[39],"crystallinity":[40],"uniformity":[42],"was":[43,111],"investigated.":[44],"Spatial":[45],"which":[48],"as-grown":[49],"epitaxial":[50],"T":[53,93],"ce=90":[54],"K":[55,97],"deposited":[57],"consequently":[59],"found.":[60],"Away":[61],"from":[62,72,129],"center":[64,117],"position,":[65],"deviated":[71],"a":[73,85,101,124],"stoichiometric":[74],"composition,":[75],"that":[76],"is,":[77],"both":[78],"Cu/Y":[80],"Ba/Y":[83],"had":[84],"tendency":[86],"to":[87],"decrease.":[88],"As-grown":[89],"ce":[94],"over":[95],"88":[96],"obtained":[99],"in":[100],"5\u00d75":[102],"cm2":[103],"area":[104],"substrate.":[107],"The":[108],"deposition":[109],"rate":[110],"about":[112],"20":[113],"\u00c5/min":[114],"position":[118,125],"decreased":[120],"by":[121],"22%":[122],"2.5":[126],"cm":[127],"away":[128],"center.":[131]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2016-06-24T00:00:00"}