{"id":"https://openalex.org/W1998277791","doi":"https://doi.org/10.1016/j.apsusc.2011.01.075","title":"Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating","display_name":"Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating","publication_year":2011,"publication_date":"2011-01-26","ids":{"openalex":"https://openalex.org/W1998277791","doi":"https://doi.org/10.1016/j.apsusc.2011.01.075","mag":"1998277791"},"language":"en","primary_location":{"id":"doi:10.1016/j.apsusc.2011.01.075","doi":"https://doi.org/10.1016/j.apsusc.2011.01.075","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.apsusc.2011.01.075","pdf_url":null,"source":{"id":"https://openalex.org/S42323631","display_name":"Applied Surface Science","issn_l":"0169-4332","issn":["0169-4332","1873-5584"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-2","ki-jl-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Surface Science","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112575797","display_name":"Yanhui Zhao","orcid":"https://orcid.org/0009-0006-0918-5963","observed_orcids":["https://orcid.org/0009-0006-0918-5963"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210126304","display_name":"Institute of Metal Research","ror":"https://ror.org/03pa1rf77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yanhui Zhao","raw_affiliation_strings":["Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109092354","display_name":"Guoqiang Lin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27357992","display_name":"Dalian University of Technology","ror":"https://ror.org/023hj5876","country_code":"CN","type":"education","lineage":["https://openalex.org/I27357992"]},{"id":"https://openalex.org/I4405271909","display_name":"Key Laboratory of Materials Modification by Laser, Ion and Electron Beams","ror":"https://ror.org/038beqt86","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405271909"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guoqiang Lin","raw_affiliation_strings":["Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Ministry of Education, Dalian 116024, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Ministry of Education, Dalian 116024, China","institution_ids":["https://openalex.org/I27357992","https://openalex.org/I4405271909"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111467153","display_name":"Jinquan Xiao","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210126304","display_name":"Institute of Metal Research","ror":"https://ror.org/03pa1rf77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinquan Xiao","raw_affiliation_strings":["Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082688171","display_name":"Wenchang Lang","orcid":"https://orcid.org/0000-0002-5274-3020","observed_orcids":["https://orcid.org/0000-0002-5274-3020"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210126304","display_name":"Institute of Metal Research","ror":"https://ror.org/03pa1rf77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenchang Lang","raw_affiliation_strings":["Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100319435","display_name":"Chuang Dong","orcid":"https://orcid.org/0000-0001-5631-9641","observed_orcids":["https://orcid.org/0000-0001-5631-9641"]},"institutions":[{"id":"https://openalex.org/I27357992","display_name":"Dalian University of Technology","ror":"https://ror.org/023hj5876","country_code":"CN","type":"education","lineage":["https://openalex.org/I27357992"]},{"id":"https://openalex.org/I4405271909","display_name":"Key Laboratory of Materials Modification by Laser, Ion and Electron Beams","ror":"https://ror.org/038beqt86","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405271909"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chuang Dong","raw_affiliation_strings":["Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Ministry of Education, Dalian 116024, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Ministry of Education, Dalian 116024, China","institution_ids":["https://openalex.org/I27357992","https://openalex.org/I4405271909"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046195255","display_name":"Jun Gong","orcid":"https://orcid.org/0000-0002-4402-1263","observed_orcids":["https://orcid.org/0000-0002-4402-1263"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210126304","display_name":"Institute of Metal Research","ror":"https://ror.org/03pa1rf77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Gong","raw_affiliation_strings":["Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5107933858","display_name":"Chao Sun","orcid":"https://orcid.org/0000-0001-6902-8202","observed_orcids":["https://orcid.org/0000-0001-6902-8202"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210126304","display_name":"Institute of Metal Research","ror":"https://ror.org/03pa1rf77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chao Sun","raw_affiliation_strings":["Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Metals Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210126304"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5112575797"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210126304"],"apc_list":{"value":3930,"currency":"USD","value_usd":3930},"apc_paid":null,"fwci":1.6049,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.80460221,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"257","issue":"13","first_page":"5694","last_page":"5697"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13470","display_name":"Surface Treatment and Coatings","score":0.0012000000569969416,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/titanium-nitride","display_name":"titanium nitride","score":0.8980000019073486},{"id":"https://openalex.org/keywords/thin-films","display_name":"thin films","score":0.9539999961853027},{"id":"https://openalex.org/keywords/stainless-steel-substrate","display_name":"stainless steel substrate","score":0.847000002861023},{"id":"https://openalex.org/keywords/film-deposition-rate","display_name":"film deposition rate","score":0.6060000061988831},{"id":"https://openalex.org/keywords/film-substrate-adhesion","display_name":"film-substrate adhesion","score":0.7360000014305115},{"id":"https://openalex.org/keywords/microhardness","display_name":"microhardness","score":0.9940000176429749},{"id":"https://openalex.org/keywords/droplet-formation","display_name":"droplet formation","score":0.6949999928474426}],"concepts":[{"id":"https://openalex.org/C118442862","wikidata":"https://www.wikidata.org/wiki/Q899143","display_name":"Ion plating","level":3,"score":0.8920259475708008},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.8437850475311279},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8081667423248291},{"id":"https://openalex.org/C77590175","wikidata":"https://www.wikidata.org/wiki/Q3506009","display_name":"Shielded cable","level":2,"score":0.8057999610900879},{"id":"https://openalex.org/C2778489163","wikidata":"https://www.wikidata.org/wiki/Q415638","display_name":"Titanium nitride","level":4,"score":0.7299575805664062},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.597145676612854},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5743674635887146},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.547655463218689},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5184482932090759},{"id":"https://openalex.org/C506065880","wikidata":"https://www.wikidata.org/wiki/Q716","display_name":"Titanium","level":2,"score":0.5172713398933411},{"id":"https://openalex.org/C84416704","wikidata":"https://www.wikidata.org/wiki/Q188666","display_name":"Adhesion","level":2,"score":0.4605187177658081},{"id":"https://openalex.org/C2776985018","wikidata":"https://www.wikidata.org/wiki/Q7202314","display_name":"Plating (geology)","level":2,"score":0.44614213705062866},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.44432106614112854},{"id":"https://openalex.org/C165720898","wikidata":"https://www.wikidata.org/wiki/Q3150000","display_name":"Indentation hardness","level":3,"score":0.4400272071361542},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.42292866110801697},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.26313316822052},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.13779717683792114},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.12299561500549316},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C8058405","wikidata":"https://www.wikidata.org/wiki/Q46255","display_name":"Geophysics","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.apsusc.2011.01.075","doi":"https://doi.org/10.1016/j.apsusc.2011.01.075","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.apsusc.2011.01.075","pdf_url":null,"source":{"id":"https://openalex.org/S42323631","display_name":"Applied Surface Science","issn_l":"0169-4332","issn":["0169-4332","1873-5584"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-2","ki-jl-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Surface Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G4557133033","display_name":"\u9ad8\u8d28\u91cf\u8d85\u786c\u7eb3\u7c73\u591a\u5c42\u8584\u819c\u7684\u5236\u5907\u53ca\u5176\u8d85\u786c\u6548\u5e94\u7814\u7a76","funder_award_id":"50801062","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W152925103","https://openalex.org/W2044702892","https://openalex.org/W2051906283","https://openalex.org/W2059285810","https://openalex.org/W2061168320","https://openalex.org/W2072665940"],"related_works":["https://openalex.org/W2349306506","https://openalex.org/W2035647838","https://openalex.org/W2054504878","https://openalex.org/W2011845246","https://openalex.org/W2021843760","https://openalex.org/W2003691062","https://openalex.org/W2356760854","https://openalex.org/W2405158347","https://openalex.org/W2390278644","https://openalex.org/W1989889523"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":3},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}