{"id":"https://openalex.org/W1997239946","doi":"https://doi.org/10.1109/elnano.2013.6552063","title":"Improvement of piezoceramic scanners","display_name":"Improvement of piezoceramic scanners","publication_year":2013,"publication_date":"2013-04-01","ids":{"openalex":"https://openalex.org/W1997239946","doi":"https://doi.org/10.1109/elnano.2013.6552063","mag":"1997239946"},"language":"en","primary_location":{"id":"doi:10.1109/elnano.2013.6552063","doi":"https://doi.org/10.1109/elnano.2013.6552063","is_oa":false,"landing_page_url":"https://doi.org/10.1109/elnano.2013.6552063","pdf_url":null,"source":{"id":"https://openalex.org/S4363608171","display_name":"IEEE International Conference on Electronics and Nanotechnology (ELNANO)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE XXXIII International Scientific Conference Electronics and Nanotechnology (ELNANO)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"V. M. Sharapov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210108895","display_name":"Cherkasy State Technological University","ror":"https://ror.org/01m54ds80","country_code":"UA","type":"education","lineage":["https://openalex.org/I4210108895"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"V. M. Sharapov","raw_affiliation_strings":["Cherkasy State Technological University, Cherkasy, Ukraine","Cherkasy State Technol. Univ., Cherkasy, Ukraine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cherkasy State Technological University, Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]},{"raw_affiliation_string":"Cherkasy State Technol. Univ., Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028935157","display_name":"Sergey Filimonov","orcid":"https://orcid.org/0000-0003-1727-3286","observed_orcids":["https://orcid.org/0000-0003-1727-3286"]},"institutions":[{"id":"https://openalex.org/I4210108895","display_name":"Cherkasy State Technological University","ror":"https://ror.org/01m54ds80","country_code":"UA","type":"education","lineage":["https://openalex.org/I4210108895"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"S. A. Filimonov","raw_affiliation_strings":["Cherkasy State Technological University, Cherkasy, Ukraine","Cherkasy State Technol. Univ., Cherkasy, Ukraine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cherkasy State Technological University, Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]},{"raw_affiliation_string":"Cherkasy State Technol. Univ., Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048889128","display_name":"Zh. V. Sotula","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210108895","display_name":"Cherkasy State Technological University","ror":"https://ror.org/01m54ds80","country_code":"UA","type":"education","lineage":["https://openalex.org/I4210108895"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"Zh V. Sotula","raw_affiliation_strings":["Cherkasy State Technol. Univ., Cherkasy, Ukraine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cherkasy State Technol. Univ., Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061706132","display_name":"Constantine Bazilo","orcid":"https://orcid.org/0000-0002-1571-401X","observed_orcids":["https://orcid.org/0000-0002-1571-401X"]},"institutions":[{"id":"https://openalex.org/I4210108895","display_name":"Cherkasy State Technological University","ror":"https://ror.org/01m54ds80","country_code":"UA","type":"education","lineage":["https://openalex.org/I4210108895"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"K. V. Bazilo","raw_affiliation_strings":["Cherkasy State Technological University, Cherkasy, Ukraine","Cherkasy State Technol. Univ., Cherkasy, Ukraine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cherkasy State Technological University, Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]},{"raw_affiliation_string":"Cherkasy State Technol. Univ., Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5132818680","display_name":"L. Kunitskaya","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210108895","display_name":"Cherkasy State Technological University","ror":"https://ror.org/01m54ds80","country_code":"UA","type":"education","lineage":["https://openalex.org/I4210108895"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"L. G. Kunitskaya","raw_affiliation_strings":["Cherkasy State Technological University, Cherkasy, Ukraine","Cherkasy State Technol. Univ., Cherkasy, Ukraine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cherkasy State Technological University, Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]},{"raw_affiliation_string":"Cherkasy State Technol. Univ., Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5075026841","display_name":"V. M. Zaika","orcid":"https://orcid.org/0000-0001-5965-0233","observed_orcids":["https://orcid.org/0000-0001-5965-0233"]},"institutions":[{"id":"https://openalex.org/I4210108895","display_name":"Cherkasy State Technological University","ror":"https://ror.org/01m54ds80","country_code":"UA","type":"education","lineage":["https://openalex.org/I4210108895"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"V. M. Zaika","raw_affiliation_strings":["Cherkasy State Technological University, Cherkasy, Ukraine","Cherkasy State Technol. Univ., Cherkasy, Ukraine"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cherkasy State Technological University, Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]},{"raw_affiliation_string":"Cherkasy State Technol. Univ., Cherkasy, Ukraine","institution_ids":["https://openalex.org/I4210108895"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210108895"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"144","last_page":"146"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9603999853134155,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9603999853134155,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.023000000044703484,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.010999999940395355,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectric-actuators","display_name":"piezoelectric actuators","score":0.7360000014305115},{"id":"https://openalex.org/keywords/scanning-probe-microscope","display_name":"scanning probe microscope","score":0.8960000276565552},{"id":"https://openalex.org/keywords/scanner-design","display_name":"scanner design","score":0.628000020980835},{"id":"https://openalex.org/keywords/finite-element-analysis","display_name":"finite element analysis","score":0.460999995470047}],"concepts":[{"id":"https://openalex.org/C2779751349","wikidata":"https://www.wikidata.org/wiki/Q1474480","display_name":"Scanner","level":2,"score":0.8214882612228394},{"id":"https://openalex.org/C2778393539","wikidata":"https://www.wikidata.org/wiki/Q4913759","display_name":"Bimorph","level":3,"score":0.6977844834327698},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5250356197357178},{"id":"https://openalex.org/C67649825","wikidata":"https://www.wikidata.org/wiki/Q196538","display_name":"Microscope","level":2,"score":0.4562566876411438},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.4075385630130768},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3828901946544647},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.36083146929740906},{"id":"https://openalex.org/C199639397","wikidata":"https://www.wikidata.org/wiki/Q1788588","display_name":"Engineering drawing","level":1,"score":0.3481251001358032},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3455720841884613},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2265397310256958},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.21135863661766052},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1307305097579956}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/elnano.2013.6552063","doi":"https://doi.org/10.1109/elnano.2013.6552063","is_oa":false,"landing_page_url":"https://doi.org/10.1109/elnano.2013.6552063","pdf_url":null,"source":{"id":"https://openalex.org/S4363608171","display_name":"IEEE International Conference on Electronics and Nanotechnology (ELNANO)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE XXXIII International Scientific Conference Electronics and Nanotechnology (ELNANO)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2110167104"],"related_works":["https://openalex.org/W7148338221","https://openalex.org/W2887289060","https://openalex.org/W7139242136","https://openalex.org/W7217609630","https://openalex.org/W2146948933","https://openalex.org/W1974277306","https://openalex.org/W7007263117","https://openalex.org/W2070275737","https://openalex.org/W2366235605","https://openalex.org/W1997008433"],"abstract_inverted_index":{"The":[0,9,21],"article":[1],"is":[2,19,42],"devoted":[3],"to":[4],"the":[5,24,28,54,57],"problems":[6],"of":[7,11,17,23,30,34,50,56],"piezoscanners.":[8],"analysis":[10],"existent":[12],"domestic":[13],"and":[14,44,47],"foreign":[15],"constructions":[16],"piezoscanners":[18],"conducted.":[20],"design":[22],"piezoceramic":[25],"scanner":[26],"on":[27],"basis":[29],"flat":[31],"bimorph":[32],"piezoelements":[33],"a":[35],"trapezial":[36],"form":[37],"for":[38],"scanning":[39],"probe":[40],"microscopes":[41],"offered":[43],"investigated.":[45],"Built":[46],"probed":[48],"model":[49],"this":[51],"scanners":[52],"through":[53],"package":[55],"program":[58],"Femlab":[59],"3.5.":[60]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":5}],"updated_date":"2026-10-26T11:51:55.731654","created_date":"2016-06-24T00:00:00"}