{"id":"https://openalex.org/W1996988073","doi":"https://doi.org/10.1116/1.1809618","title":"High resolution electron beam lithography using a chemically amplified calix[4]arene based resist","display_name":"High resolution electron beam lithography using a chemically amplified calix[4]arene based resist","publication_year":2004,"publication_date":"2004-11-01","ids":{"openalex":"https://openalex.org/W1996988073","doi":"https://doi.org/10.1116/1.1809618","mag":"1996988073"},"language":"en","primary_location":{"id":"doi:10.1116/1.1809618","doi":"https://doi.org/10.1116/1.1809618","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.1809618","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074411703","display_name":"Holger Sailer","orcid":"https://orcid.org/0000-0001-6035-5776","observed_orcids":["https://orcid.org/0000-0001-6035-5776"]},"institutions":[{"id":"https://openalex.org/I8087733","display_name":"University of T\u00fcbingen","ror":"https://ror.org/03a1kwz48","country_code":"DE","type":"education","lineage":["https://openalex.org/I8087733"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Sailer","raw_affiliation_strings":["University of T\u00fcbingen Institute of Applied Physics, , Auf der Morgenstelle 10, 72076 T\u00fcbingen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of T\u00fcbingen Institute of Applied Physics, , Auf der Morgenstelle 10, 72076 T\u00fcbingen, Germany","institution_ids":["https://openalex.org/I8087733"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084300435","display_name":"Alexander Ruderisch","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I8087733","display_name":"University of T\u00fcbingen","ror":"https://ror.org/03a1kwz48","country_code":"DE","type":"education","lineage":["https://openalex.org/I8087733"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Ruderisch","raw_affiliation_strings":["University of T\u00fcbingen Institute of Organic Chemistry, , Auf der Morgenstelle 18, 72076 T\u00fcbingen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of T\u00fcbingen Institute of Organic Chemistry, , Auf der Morgenstelle 18, 72076 T\u00fcbingen, Germany","institution_ids":["https://openalex.org/I8087733"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060452917","display_name":"W. Henschel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I8087733","display_name":"University of T\u00fcbingen","ror":"https://ror.org/03a1kwz48","country_code":"DE","type":"education","lineage":["https://openalex.org/I8087733"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"W. Henschel","raw_affiliation_strings":["University of T\u00fcbingen Institute of Applied Physics, , Auf der Morgenstelle 10, 72076 T\u00fcbingen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of T\u00fcbingen Institute of Applied Physics, , Auf der Morgenstelle 10, 72076 T\u00fcbingen, Germany","institution_ids":["https://openalex.org/I8087733"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024186868","display_name":"Volker Schurig","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I8087733","display_name":"University of T\u00fcbingen","ror":"https://ror.org/03a1kwz48","country_code":"DE","type":"education","lineage":["https://openalex.org/I8087733"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"V. Schurig","raw_affiliation_strings":["University of T\u00fcbingen Institute of Organic Chemistry, , Auf der Morgenstelle 18, 72076 T\u00fcbingen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of T\u00fcbingen Institute of Organic Chemistry, , Auf der Morgenstelle 18, 72076 T\u00fcbingen, Germany","institution_ids":["https://openalex.org/I8087733"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5045450410","display_name":"Dieter P. Kern","orcid":"https://orcid.org/0000-0001-5388-0257","observed_orcids":["https://orcid.org/0000-0001-5388-0257"]},"institutions":[{"id":"https://openalex.org/I8087733","display_name":"University of T\u00fcbingen","ror":"https://ror.org/03a1kwz48","country_code":"DE","type":"education","lineage":["https://openalex.org/I8087733"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D. P. Kern","raw_affiliation_strings":["University of T\u00fcbingen Institute of Applied Physics, , Auf der Morgenstelle 10, 72076 T\u00fcbingen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of T\u00fcbingen Institute of Applied Physics, , Auf der Morgenstelle 10, 72076 T\u00fcbingen, Germany","institution_ids":["https://openalex.org/I8087733"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I8087733"],"apc_list":null,"apc_paid":null,"fwci":0.3114,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.62122198,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"22","issue":"6","first_page":"3485","last_page":"3488"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10578","display_name":"Supramolecular Chemistry and Complexes","score":0.0010000000474974513,"subfield":{"id":"https://openalex.org/subfields/1605","display_name":"Organic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electron-beam-lithography","display_name":"electron beam lithography","score":0.9449999928474426},{"id":"https://openalex.org/keywords/calix-4-arene","display_name":"calix[4]arene","score":0.8980000019073486},{"id":"https://openalex.org/keywords/chemical-amplification","display_name":"chemical amplification","score":0.8149999976158142},{"id":"https://openalex.org/keywords/photoresist","display_name":"photoresist","score":0.7429999709129333},{"id":"https://openalex.org/keywords/cationic-polymerization","display_name":"cationic polymerization","score":0.7829999923706055},{"id":"https://openalex.org/keywords/epoxides","display_name":"epoxides","score":0.6290000081062317},{"id":"https://openalex.org/keywords/triarylsulfonium-salts","display_name":"triarylsulfonium salts","score":0.9700000286102295},{"id":"https://openalex.org/keywords/photoacid-generator","display_name":"photoacid generator","score":0.9179999828338623},{"id":"https://openalex.org/keywords/high-resolution-patterning","display_name":"high-resolution patterning","score":0.671999990940094}],"concepts":[{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.9317384362220764},{"id":"https://openalex.org/C83263248","wikidata":"https://www.wikidata.org/wiki/Q423503","display_name":"Calixarene","level":3,"score":0.8555955290794373},{"id":"https://openalex.org/C183882617","wikidata":"https://www.wikidata.org/wiki/Q3046749","display_name":"Cationic polymerization","level":2,"score":0.749407947063446},{"id":"https://openalex.org/C200274948","wikidata":"https://www.wikidata.org/wiki/Q256845","display_name":"Electron-beam lithography","level":4,"score":0.6489408016204834},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6376136541366577},{"id":"https://openalex.org/C2776920199","wikidata":"https://www.wikidata.org/wiki/Q408028","display_name":"Epoxide","level":3,"score":0.5765044689178467},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.5528481006622314},{"id":"https://openalex.org/C44228677","wikidata":"https://www.wikidata.org/wiki/Q181898","display_name":"Polymerization","level":3,"score":0.5242759585380554},{"id":"https://openalex.org/C111771559","wikidata":"https://www.wikidata.org/wiki/Q66295","display_name":"Derivative (finance)","level":2,"score":0.4617692530155182},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.4448205232620239},{"id":"https://openalex.org/C188027245","wikidata":"https://www.wikidata.org/wiki/Q750446","display_name":"Polymer chemistry","level":1,"score":0.38736778497695923},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3704795837402344},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.21512219309806824},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.20625022053718567},{"id":"https://openalex.org/C32909587","wikidata":"https://www.wikidata.org/wiki/Q11369","display_name":"Molecule","level":2,"score":0.15269625186920166},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.10498502850532532},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.10293462872505188},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.058202505111694336},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C106159729","wikidata":"https://www.wikidata.org/wiki/Q2294553","display_name":"Financial economics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.1809618","doi":"https://doi.org/10.1116/1.1809618","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.1809618","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321114","display_name":"Bundesministerium f\u00fcr Bildung und Forschung","ror":"https://ror.org/04pz7b180"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1963503744","https://openalex.org/W1980097527","https://openalex.org/W1988090103","https://openalex.org/W2035566134","https://openalex.org/W2056921376","https://openalex.org/W2060195579","https://openalex.org/W2070876453","https://openalex.org/W2076271817","https://openalex.org/W2078961875","https://openalex.org/W2082983861","https://openalex.org/W2085237633","https://openalex.org/W2094690566","https://openalex.org/W2095258021","https://openalex.org/W2147165693","https://openalex.org/W2147221225","https://openalex.org/W2497768772"],"related_works":["https://openalex.org/W2078961875","https://openalex.org/W1964723337","https://openalex.org/W2035566134","https://openalex.org/W2056921376","https://openalex.org/W1988408212","https://openalex.org/W2069847878","https://openalex.org/W2041335846","https://openalex.org/W2376495194","https://openalex.org/W2002356819","https://openalex.org/W7015912329"],"abstract_inverted_index":{"The":[0,7,58],"calix[4]arene":[1,45],"based":[2,65],"resist":[3,66],"tetrakis(oxiran-2-ylmethoxy)-tetra-tert-butylcalix[4]arene":[4],"is":[5,33],"presented.":[6],"well":[8],"known":[9],"chemical":[10],"amplification":[11],"techniques":[12],"can":[13],"be":[14],"applied":[15],"to":[16,43],"the":[17,38],"nonpolymeric":[18],"class":[19],"of":[20,37,40,62],"calixarenes":[21],"resulting":[22],"in":[23],"area":[24],"doses":[25],"below":[26],"100\u03bcC\u2215cm2":[27],"at":[28],"30keV":[29],"beam":[30],"energy.":[31],"This":[32],"achieved":[34],"by":[35],"application":[36],"concept":[39],"cationic":[41],"polymerization":[42],"a":[44,53],"derivative":[46],"bearing":[47],"four":[48],"epoxide":[49],"residues":[50],"together":[51],"with":[52],"photoacid":[54],"generating":[55],"triarylsulfonium":[56],"salt.":[57],"high":[59],"resolution":[60],"capabilities":[61],"this":[63],"calixarene":[64],"remain":[67],"mainly":[68],"intact":[69],"under":[70],"optimized":[71],"bake":[72],"parameters.":[73]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}