{"id":"https://openalex.org/W1996255182","doi":"https://doi.org/10.1002/seup.200211106","title":"CMOS Single Chip Gas Detection Systems \u2014 Part I","display_name":"CMOS Single Chip Gas Detection Systems \u2014 Part I","publication_year":2002,"publication_date":"2002-12-01","ids":{"openalex":"https://openalex.org/W1996255182","doi":"https://doi.org/10.1002/seup.200211106","mag":"1996255182"},"language":"en","primary_location":{"id":"doi:10.1002/seup.200211106","doi":"https://doi.org/10.1002/seup.200211106","is_oa":false,"landing_page_url":"https://doi.org/10.1002/seup.200211106","pdf_url":null,"source":{"id":"https://openalex.org/S119534862","display_name":"Sensors Update","issn_l":"1432-2404","issn":["1432-2404","1616-8984"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors Update","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001983294","display_name":"Christoph Hagleitner","orcid":"https://orcid.org/0000-0002-6815-7835","observed_orcids":["https://orcid.org/0000-0002-6815-7835"]},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"C. Hagleitner","raw_affiliation_strings":["Physical Electronics Lab, ETH, Zu\u0308rich, Switzerland","Physical Electronics Lab, ETH, Z\u00fcrich, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Electronics Lab, ETH, Zu\u0308rich, Switzerland","institution_ids":["https://openalex.org/I35440088"]},{"raw_affiliation_string":"Physical Electronics Lab, ETH, Z\u00fcrich, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000470100","display_name":"Andreas R. Hierlemann","orcid":"https://orcid.org/0000-0002-3838-2468","observed_orcids":["https://orcid.org/0000-0002-3838-2468"]},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"A. Hierlemann","raw_affiliation_strings":["Physical Electronics Lab, ETH, Zu\u0308rich, Switzerland","Physical Electronics Lab, ETH, Z\u00fcrich, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Electronics Lab, ETH, Zu\u0308rich, Switzerland","institution_ids":["https://openalex.org/I35440088"]},{"raw_affiliation_string":"Physical Electronics Lab, ETH, Z\u00fcrich, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067362832","display_name":"Oliver Brand","orcid":"https://orcid.org/0000-0001-7438-1094","observed_orcids":["https://orcid.org/0000-0001-7438-1094"]},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"O. Brand","raw_affiliation_strings":["Physical Electronics Lab, ETH, Zu\u0308rich, Switzerland","Physical Electronics Lab, ETH, Z\u00fcrich, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Electronics Lab, ETH, Zu\u0308rich, Switzerland","institution_ids":["https://openalex.org/I35440088"]},{"raw_affiliation_string":"Physical Electronics Lab, ETH, Z\u00fcrich, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111716432","display_name":"H. Baltes","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"H. Baltes","raw_affiliation_strings":["Physical Electronics Lab, ETH, Zu\u0308rich, Switzerland","Physical Electronics Lab, ETH, Z\u00fcrich, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Electronics Lab, ETH, Zu\u0308rich, Switzerland","institution_ids":["https://openalex.org/I35440088"]},{"raw_affiliation_string":"Physical Electronics Lab, ETH, Z\u00fcrich, Switzerland","institution_ids":["https://openalex.org/I35440088"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I35440088"],"apc_list":null,"apc_paid":null,"fwci":2.3422,"has_fulltext":false,"cited_by_count":34,"citation_normalized_percentile":{"value":0.87477357,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"11","issue":"1","first_page":"101","last_page":"155"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.926800012588501,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.926800012588501,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.03550000116229057,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.013899999670684338,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gas-sensor-arrays","display_name":"gas sensor arrays","score":0.7919999957084656},{"id":"https://openalex.org/keywords/cmos-mems","display_name":"CMOS-MEMS","score":0.9160000085830688},{"id":"https://openalex.org/keywords/monolithic-integration","display_name":"monolithic integration","score":0.7170000076293945},{"id":"https://openalex.org/keywords/volatile-organic-compounds","display_name":"volatile organic compounds","score":0.8420000076293945},{"id":"https://openalex.org/keywords/batch-fabrication","display_name":"batch fabrication","score":0.578000009059906},{"id":"https://openalex.org/keywords/temperature-sensors","display_name":"temperature sensors","score":0.7519999742507935},{"id":"https://openalex.org/keywords/digital-interfaces","display_name":"digital interfaces","score":0.7269999980926514},{"id":"https://openalex.org/keywords/indoor-air-quality-monitoring","display_name":"indoor air quality monitoring","score":0.7350000143051147},{"id":"https://openalex.org/keywords/pollution-monitoring","display_name":"pollution monitoring","score":0.9549999833106995}],"concepts":[{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7891292572021484},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.628069281578064},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.604416012763977},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.5906895399093628},{"id":"https://openalex.org/C74763872","wikidata":"https://www.wikidata.org/wiki/Q5276157","display_name":"Digital sensors","level":2,"score":0.5540496706962585},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.5403326749801636},{"id":"https://openalex.org/C113843644","wikidata":"https://www.wikidata.org/wiki/Q901882","display_name":"Interface (matter)","level":4,"score":0.4942922592163086},{"id":"https://openalex.org/C138331895","wikidata":"https://www.wikidata.org/wiki/Q11650","display_name":"Electronics","level":2,"score":0.4723671078681946},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4666421711444855},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4271719753742218},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4267200231552124},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.37874627113342285},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.3332459330558777},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.29903724789619446},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2023380696773529},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C55352822","wikidata":"https://www.wikidata.org/wiki/Q5558978","display_name":"Gibbs isotherm","level":3,"score":0.0},{"id":"https://openalex.org/C58226133","wikidata":"https://www.wikidata.org/wiki/Q1324199","display_name":"Pulmonary surfactant","level":2,"score":0.0},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1002/seup.200211106","doi":"https://doi.org/10.1002/seup.200211106","is_oa":false,"landing_page_url":"https://doi.org/10.1002/seup.200211106","pdf_url":null,"source":{"id":"https://openalex.org/S119534862","display_name":"Sensors Update","issn_l":"1432-2404","issn":["1432-2404","1616-8984"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors Update","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":118,"referenced_works":["https://openalex.org/W13254485","https://openalex.org/W31370333","https://openalex.org/W54671025","https://openalex.org/W118952169","https://openalex.org/W154082048","https://openalex.org/W626271856","https://openalex.org/W1522554481","https://openalex.org/W1523937552","https://openalex.org/W1536945048","https://openalex.org/W1548437293","https://openalex.org/W1550233951","https://openalex.org/W1555082248","https://openalex.org/W1563735048","https://openalex.org/W1575202549","https://openalex.org/W1587506698","https://openalex.org/W1672697766","https://openalex.org/W1685916560","https://openalex.org/W1858405936","https://openalex.org/W1869216031","https://openalex.org/W1879488296","https://openalex.org/W1964011495","https://openalex.org/W1964249310","https://openalex.org/W1970360530","https://openalex.org/W1972039953","https://openalex.org/W1972399768","https://openalex.org/W1972897285","https://openalex.org/W1973732831","https://openalex.org/W1975152486","https://openalex.org/W1975926196","https://openalex.org/W1976705459","https://openalex.org/W1981009111","https://openalex.org/W1985327642","https://openalex.org/W1987035454","https://openalex.org/W1990311671","https://openalex.org/W1995293381","https://openalex.org/W1995437468","https://openalex.org/W1997811146","https://openalex.org/W1998809141","https://openalex.org/W1999822381","https://openalex.org/W2000648832","https://openalex.org/W2001458054","https://openalex.org/W2001900252","https://openalex.org/W2005429182","https://openalex.org/W2007117032","https://openalex.org/W2019741857","https://openalex.org/W2022304480","https://openalex.org/W2026302983","https://openalex.org/W2027439907","https://openalex.org/W2030552522","https://openalex.org/W2030588028","https://openalex.org/W2033501276","https://openalex.org/W2034564031","https://openalex.org/W2035455201","https://openalex.org/W2037872512","https://openalex.org/W2042935756","https://openalex.org/W2043193946","https://openalex.org/W2048761776","https://openalex.org/W2048855587","https://openalex.org/W2052513028","https://openalex.org/W2053641296","https://openalex.org/W2054136596","https://openalex.org/W2054996105","https://openalex.org/W2056683067","https://openalex.org/W2058639948","https://openalex.org/W2058681501","https://openalex.org/W2059005095","https://openalex.org/W2060305793","https://openalex.org/W2066956399","https://openalex.org/W2067589847","https://openalex.org/W2070599701","https://openalex.org/W2082239675","https://openalex.org/W2082981272","https://openalex.org/W2083486153","https://openalex.org/W2085061513","https://openalex.org/W2086143148","https://openalex.org/W2091200623","https://openalex.org/W2093145235","https://openalex.org/W2094044829","https://openalex.org/W2094087345","https://openalex.org/W2097196720","https://openalex.org/W2098205039","https://openalex.org/W2098927292","https://openalex.org/W2102524343","https://openalex.org/W2102634163","https://openalex.org/W2103198996","https://openalex.org/W2109526415","https://openalex.org/W2111810696","https://openalex.org/W2122267593","https://openalex.org/W2123660966","https://openalex.org/W2124384929","https://openalex.org/W2124539410","https://openalex.org/W2127885490","https://openalex.org/W2128769470","https://openalex.org/W2129974713","https://openalex.org/W2134977951","https://openalex.org/W2141911137","https://openalex.org/W2142753319","https://openalex.org/W2148187789","https://openalex.org/W2150694036","https://openalex.org/W2153082104","https://openalex.org/W2157955844","https://openalex.org/W2162036161","https://openalex.org/W2163523513","https://openalex.org/W2169662285","https://openalex.org/W2169868332","https://openalex.org/W2177026027","https://openalex.org/W2179972517","https://openalex.org/W2293599327","https://openalex.org/W2484962638","https://openalex.org/W2499427636","https://openalex.org/W2751051772","https://openalex.org/W2906989858","https://openalex.org/W3120561962","https://openalex.org/W3142247765","https://openalex.org/W4211107032","https://openalex.org/W4242968069","https://openalex.org/W4247450796","https://openalex.org/W4253049972"],"related_works":["https://openalex.org/W2082981272","https://openalex.org/W2127078480","https://openalex.org/W4247450796","https://openalex.org/W1630952276","https://openalex.org/W2145154329","https://openalex.org/W1512832724","https://openalex.org/W1792602983","https://openalex.org/W2121444990","https://openalex.org/W1993211530","https://openalex.org/W2036682406"],"abstract_inverted_index":{"Abstract":[0],"The":[1,103,120],"current":[2],"trend":[3],"to":[4,9,46,95],"control":[5],"indoor":[6],"air\u2010quality":[7],"and":[8,20,64,89,116,124],"monitor":[10],"environmental":[11],"pollution":[12],"has":[13],"created":[14],"a":[15,43,65,81,113,117],"strong":[16],"demand":[17],"for":[18,24],"miniaturized":[19],"inexpensive":[21],"gas":[22,59,100],"sensors":[23],"volatile":[25],"organic":[26],"compounds":[27],"(VOCs).":[28],"Gas":[29],"sensor":[30,48,60],"arrays":[31],"based":[32],"on":[33,80],"industrial":[34],"CMOS\u2010processes":[35],"combined":[36],"with":[37],"post\u2010CMOS":[38],"micromachining":[39],"(CMOS":[40],"MEMS)":[41],"are":[42],"promising":[44],"approach":[45],"low\u2010cost":[47],"devices.":[49],"In":[50],"this":[51,136],"article,":[52],"the":[53,72,106,132],"state":[54],"of":[55,57,74,135],"research":[56],"CMOS\u2010based":[58],"systems":[61],"is":[62,68],"reviewed,":[63],"platform":[66],"technology":[67],"described,":[69],"which":[70],"provides":[71],"possibility":[73],"monolithically":[75],"integrating":[76],"several":[77],"different":[78],"transducers":[79,123],"single":[82],"chip.":[83],"A":[84],"design":[85],"environment,":[86],"batch\u2010fabrication":[87],"processes,":[88],"fast":[90],"testing":[91],"procedures":[92],"were":[93],"developed":[94],"realize":[96],"an":[97],"example":[98],"single\u2010chip":[99],"detection":[101],"system.":[102],"chip":[104],"includes":[105],"transducers,":[107],"their":[108,125],"biasing":[109],"circuitry,":[110],"reference":[111],"elements,":[112],"digital":[114],"interface,":[115],"temperature":[118],"sensor.":[119],"three":[121],"polymer\u2010based":[122],"interface":[126],"electronics":[127],"will":[128],"be":[129],"detailed":[130],"in":[131],"second":[133],"part":[134],"article":[137],"[1].":[138]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":5}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}