{"id":"https://openalex.org/W1996143157","doi":"https://doi.org/10.1063/1.119563","title":"The effect of the boron doping level on the thermal behavior of end-of-range defects in silicon","display_name":"The effect of the boron doping level on the thermal behavior of end-of-range defects in silicon","publication_year":1997,"publication_date":"1997-07-21","ids":{"openalex":"https://openalex.org/W1996143157","doi":"https://doi.org/10.1063/1.119563","mag":"1996143157"},"language":"en","primary_location":{"id":"doi:10.1063/1.119563","doi":"https://doi.org/10.1063/1.119563","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.119563","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001412200","display_name":"Caroline Bonafos","orcid":"https://orcid.org/0000-0001-5140-6690","observed_orcids":["https://orcid.org/0000-0001-5140-6690"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210135147","display_name":"Centre d\u2019\u00c9laboration de Mat\u00e9riaux et d\u2019\u00c9tudes Structurales","ror":"https://ror.org/03kwnqq69","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I196454796","https://openalex.org/I4210098836","https://openalex.org/I4210135147","https://openalex.org/I4405258862"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Bonafos","raw_affiliation_strings":["CEMES/CNRS, 31055 Toulouse Cedex, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEMES/CNRS, 31055 Toulouse Cedex, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210135147"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024168567","display_name":"A. Claverie","orcid":"https://orcid.org/0000-0003-2211-4618","observed_orcids":["https://orcid.org/0000-0003-2211-4618"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210135147","display_name":"Centre d\u2019\u00c9laboration de Mat\u00e9riaux et d\u2019\u00c9tudes Structurales","ror":"https://ror.org/03kwnqq69","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I196454796","https://openalex.org/I4210098836","https://openalex.org/I4210135147","https://openalex.org/I4405258862"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Claverie","raw_affiliation_strings":["CEMES/CNRS, 31055 Toulouse Cedex, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEMES/CNRS, 31055 Toulouse Cedex, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210135147"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055755772","display_name":"Daniel Alquier","orcid":"https://orcid.org/0000-0003-1345-8195","observed_orcids":["https://orcid.org/0000-0003-1345-8195"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"D. Alquier","raw_affiliation_strings":["LAAS/CNRS, 31077 Toulouse Cedex, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LAAS/CNRS, 31077 Toulouse Cedex, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111552773","display_name":"Christian Bergaud","orcid":"https://orcid.org/0000-0003-0093-9600","observed_orcids":["https://orcid.org/0000-0003-0093-9600"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Bergaud","raw_affiliation_strings":["LAAS/CNRS, 31077 Toulouse Cedex, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LAAS/CNRS, 31077 Toulouse Cedex, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108926775","display_name":"A. Mart\u00ednez","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I190497903","display_name":"Laboratoire d'Analyse et d'Architecture des Syst\u00e8mes","ror":"https://ror.org/03vcm6439","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I190497903","https://openalex.org/I193033237","https://openalex.org/I196454796","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210152422","https://openalex.org/I4210159245","https://openalex.org/I4405258862","https://openalex.org/I4405259414"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Martinez","raw_affiliation_strings":["LAAS/CNRS, 31077 Toulouse Cedex, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LAAS/CNRS, 31077 Toulouse Cedex, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I190497903"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110850014","display_name":"Larbi La\u00e2nab","orcid":"https://orcid.org/0000-0001-9806-5205","observed_orcids":["https://orcid.org/0000-0001-9806-5205"]},"institutions":[{"id":"https://openalex.org/I126477371","display_name":"Mohammed V University","ror":"https://ror.org/00r8w8f84","country_code":"MA","type":"education","lineage":["https://openalex.org/I126477371"]}],"countries":["MA"],"is_corresponding":false,"raw_author_name":"L. La\u00e2nab","raw_affiliation_strings":["Centre de Microscopie Electronique, Facult\u00e9 des Sciences, Rabat, Maroc"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre de Microscopie Electronique, Facult\u00e9 des Sciences, Rabat, Maroc","institution_ids":["https://openalex.org/I126477371"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032500954","display_name":"D. Mathiot","orcid":"https://orcid.org/0000-0003-2845-3776","observed_orcids":["https://orcid.org/0000-0003-2845-3776"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"D. Mathiot","raw_affiliation_strings":["Laboratoire Phase, CNRS, 67037 Strasbourg, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire Phase, CNRS, 67037 Strasbourg, France","institution_ids":["https://openalex.org/I1294671590"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.8847,"has_fulltext":false,"cited_by_count":32,"citation_normalized_percentile":{"value":0.88991827,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"71","issue":"3","first_page":"365","last_page":"367"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.4927000105381012,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.4927000105381012,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.3707999885082245,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.10130000114440918,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/end-of-range-defects","display_name":"end-of-range defects","score":0.9660000205039978},{"id":"https://openalex.org/keywords/boron-doping","display_name":"boron doping","score":0.8539999723434448},{"id":"https://openalex.org/keywords/silicon","display_name":"silicon","score":0.8410000205039978},{"id":"https://openalex.org/keywords/rapid-thermal-annealing","display_name":"rapid thermal annealing","score":0.8169999718666077},{"id":"https://openalex.org/keywords/interstitial-dislocation-loops","display_name":"interstitial loops","score":0.7490000128746033},{"id":"https://openalex.org/keywords/self-diffusion","display_name":"self-diffusion","score":0.9350000023841858},{"id":"https://openalex.org/keywords/trapping-efficiency","display_name":"trap efficiency","score":0.8320000171661377},{"id":"https://openalex.org/keywords/transient-enhanced-diffusion","display_name":"transient enhanced diffusion","score":0.8799999952316284}],"concepts":[{"id":"https://openalex.org/C501308230","wikidata":"https://www.wikidata.org/wiki/Q618","display_name":"Boron","level":2,"score":0.8679395914077759},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.7365123629570007},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7322746515274048},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.7072694301605225},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.59834885597229},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.5840142369270325},{"id":"https://openalex.org/C550623735","wikidata":"https://www.wikidata.org/wiki/Q867","display_name":"Germanium","level":3,"score":0.5679166913032532},{"id":"https://openalex.org/C125099081","wikidata":"https://www.wikidata.org/wiki/Q935396","display_name":"Getter","level":2,"score":0.5064684152603149},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3874010443687439},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2853914499282837},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.25501468777656555},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.17527517676353455},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.1734544038772583},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.119563","doi":"https://doi.org/10.1063/1.119563","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.119563","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1995050231","https://openalex.org/W2007009549","https://openalex.org/W2012660318","https://openalex.org/W2013749437","https://openalex.org/W2045537317","https://openalex.org/W2081445031","https://openalex.org/W2085274001","https://openalex.org/W2087906220"],"related_works":["https://openalex.org/W33630165","https://openalex.org/W2067550055","https://openalex.org/W2061795059","https://openalex.org/W2088511608","https://openalex.org/W2141925257","https://openalex.org/W2664106836","https://openalex.org/W2070678844","https://openalex.org/W2086504994","https://openalex.org/W4317952032","https://openalex.org/W2012339330"],"abstract_inverted_index":{"The":[0],"effect":[1],"of":[2,11,87,92,113,118,140],"the":[3,7,45,57,62,70,85,90,95,102,105,114,135],"doping":[4,46],"level":[5,47],"on":[6,24],"formation":[8,86],"and":[9,37,98,122],"growth":[10],"end-of-range":[12],"(EOR)":[13],"defects":[14,72],"is":[15,64,120],"studied.":[16],"Transmission":[17],"electron":[18],"microscopy":[19],"observations":[20],"have":[21],"been":[22],"performed":[23],"boron":[25,93,119,129],"doped":[26],"Si":[27,126],"wafers":[28],"(from":[29],"1015":[30],"to":[31,39,49,104],"1020":[32],"atom3)":[33],"preamorphized":[34],"with":[35,134],"germanium":[36],"subjected":[38],"rapid":[40],"thermal":[41],"annealing.":[42],"When":[43],"increasing":[44],"up":[48],"a":[50,54,99,131],"few":[51],"1018":[52],"atom3,":[53],"delay":[55],"in":[56],"coarsening":[58],"process":[59],"encountered":[60],"by":[61,79],"loops":[63],"observed":[65],"while":[66],"above":[67],"this":[68],"threshold":[69],"EOR":[71],"quickly":[73],"disappear.":[74],"These":[75],"results":[76],"are":[77],"interpreted":[78],"considering":[80],"three":[81],"possibly":[82],"concomitant":[83],"phenomena:":[84],"boron/Si-interstitial":[88],"clusters,":[89],"gettering":[91],"at":[94],"loop":[96],"periphery,":[97],"change":[100],"from":[101,138],"intrinsic":[103],"extrinsic":[106],"regime":[107],"for":[108],"self-diffusion.":[109],"Moreover,":[110],"an":[111],"estimate":[112],"effective":[115],"trapping":[116],"efficiency":[117],"reached":[121],"gives":[123],"about":[124],"1\u00b10.3":[125],"interstitial":[127],"per":[128],"atom,":[130],"value":[132],"consistent":[133],"one":[136],"obtained":[137],"studies":[139],"B":[141],"transient":[142],"enhanced":[143],"diffusion.":[144]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}