{"id":"https://openalex.org/W1995213650","doi":"https://doi.org/10.1109/omems.2006.1708260","title":"Integrated Micro-Displacement Sensor that can Measure Tilting or Linear Motion for an External Mirror","display_name":"Integrated Micro-Displacement Sensor that can Measure Tilting or Linear Motion for an External Mirror","publication_year":2006,"publication_date":"2006-01-01","ids":{"openalex":"https://openalex.org/W1995213650","doi":"https://doi.org/10.1109/omems.2006.1708260","mag":"1995213650"},"language":"en","primary_location":{"id":"doi:10.1109/omems.2006.1708260","doi":"https://doi.org/10.1109/omems.2006.1708260","is_oa":false,"landing_page_url":"https://doi.org/10.1109/omems.2006.1708260","pdf_url":null,"source":{"id":"https://openalex.org/S4306418786","display_name":"IEEE/LEOS International Conference on Optical MEMS","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102964854","display_name":"R. Sawada","orcid":"https://orcid.org/0000-0002-3131-3777","observed_orcids":["https://orcid.org/0000-0002-3131-3777"]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"R. Sawada","raw_affiliation_strings":["Department of Intelligent Machinery and Systems, Kyushu University, Fukuoka, Japan","Dept. of Intelligent Machinery & Syst., Kyushu Univ., Fukuoka"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Intelligent Machinery and Systems, Kyushu University, Fukuoka, Japan","institution_ids":["https://openalex.org/I135598925"]},{"raw_affiliation_string":"Dept. of Intelligent Machinery & Syst., Kyushu Univ., Fukuoka","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074618363","display_name":"Eiji Higurashi","orcid":"https://orcid.org/0000-0002-7154-4203","observed_orcids":["https://orcid.org/0000-0002-7154-4203"]},"institutions":[{"id":"https://openalex.org/I4405287038","display_name":"Research Center for Advanced Science and Technology, The University of Tokyo","ror":"https://ror.org/03xzehp18","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287038","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"E. Higurashi","raw_affiliation_strings":["Research Center for Advanced Science and Technology, University of Tokyo, Tokyo, Japan","The University of Tokyo"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Center for Advanced Science and Technology, University of Tokyo, Tokyo, Japan","institution_ids":["https://openalex.org/I4405287038","https://openalex.org/I74801974"]},{"raw_affiliation_string":"The University of Tokyo","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048017248","display_name":"Shingo Sanada","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. Sanada","raw_affiliation_strings":["Department of Intelligent Machinery and Systems, Kyushu University, Fukuoka, Japan","Kyushu University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Intelligent Machinery and Systems, Kyushu University, Fukuoka, Japan","institution_ids":["https://openalex.org/I135598925"]},{"raw_affiliation_string":"Kyushu University","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053049790","display_name":"Daisuke Chino","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"D. Chino","raw_affiliation_strings":["Department of Intelligent Machinery and Systems, Kyushu University, Fukuoka, Japan","Kyushu University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Intelligent Machinery and Systems, Kyushu University, Fukuoka, Japan","institution_ids":["https://openalex.org/I135598925"]},{"raw_affiliation_string":"Kyushu University","institution_ids":["https://openalex.org/I135598925"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5015144911","display_name":"Itaru Ishikawa","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I135598925","display_name":"Kyushu University","ror":"https://ror.org/00p4k0j84","country_code":"JP","type":"education","lineage":["https://openalex.org/I135598925"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"I. Ishikawa","raw_affiliation_strings":["Department of Intelligent Machinery and Systems, Kyushu University, Fukuoka, Japan","Kyushu University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Intelligent Machinery and Systems, Kyushu University, Fukuoka, Japan","institution_ids":["https://openalex.org/I135598925"]},{"raw_affiliation_string":"Kyushu University","institution_ids":["https://openalex.org/I135598925"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.5297,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.5612664,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"52","last_page":"53"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9320999979972839,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.9320999979972839,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.012199999764561653,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14158","display_name":"Optical Systems and Laser Technology","score":0.008700000122189522,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/micro-displacement-sensor","display_name":"micro-displacement sensor","score":0.8610000014305115},{"id":"https://openalex.org/keywords/optical-displacement-measurement","display_name":"optical displacement measurement","score":0.6430000066757202},{"id":"https://openalex.org/keywords/vertical-cavity-surface-emitting-lasers","display_name":"vertical-cavity surface-emitting lasers","score":0.8669999837875366},{"id":"https://openalex.org/keywords/photodiode-array","display_name":"photodiode array","score":0.7369999885559082},{"id":"https://openalex.org/keywords/linear-displacement-measurement","display_name":"linear displacement measurement","score":0.6570000052452087},{"id":"https://openalex.org/keywords/micromirrors","display_name":"micromirrors","score":0.5920000076293945},{"id":"https://openalex.org/keywords/scanning-microscope","display_name":"scanning microscope","score":0.578000009059906},{"id":"https://openalex.org/keywords/nanometer-resolution","display_name":"nanometer resolution","score":0.5899999737739563}],"concepts":[{"id":"https://openalex.org/C751236","wikidata":"https://www.wikidata.org/wiki/Q175943","display_name":"Photodiode","level":2,"score":0.8060133457183838},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7535189390182495},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.650449275970459},{"id":"https://openalex.org/C106246969","wikidata":"https://www.wikidata.org/wiki/Q2009618","display_name":"Vertical-cavity surface-emitting laser","level":3,"score":0.5738584399223328},{"id":"https://openalex.org/C2780009758","wikidata":"https://www.wikidata.org/wiki/Q6804172","display_name":"Measure (data warehouse)","level":2,"score":0.5623743534088135},{"id":"https://openalex.org/C135339813","wikidata":"https://www.wikidata.org/wiki/Q2835","display_name":"Retroreflector","level":3,"score":0.551328182220459},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.5163735151290894},{"id":"https://openalex.org/C67649825","wikidata":"https://www.wikidata.org/wiki/Q196538","display_name":"Microscope","level":2,"score":0.4667511284351349},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4650000333786011},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.41655904054641724},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.40146276354789734},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.08283182978630066},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/omems.2006.1708260","doi":"https://doi.org/10.1109/omems.2006.1708260","is_oa":false,"landing_page_url":"https://doi.org/10.1109/omems.2006.1708260","pdf_url":null,"source":{"id":"https://openalex.org/S4306418786","display_name":"IEEE/LEOS International Conference on Optical MEMS","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320311508","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2027536762"],"related_works":["https://openalex.org/W2015748489","https://openalex.org/W2425434952","https://openalex.org/W2027536762","https://openalex.org/W2165323405","https://openalex.org/W1965898300","https://openalex.org/W1971275639","https://openalex.org/W2160433293","https://openalex.org/W2110481586","https://openalex.org/W2040300940","https://openalex.org/W2049438821"],"abstract_inverted_index":{"An":[0],"integrated":[1,98],"optical":[2],"micro-displacement":[3],"sensor":[4,21],"was":[5],"developed":[6],"that":[7,31],"uses":[8],"the":[9,40,45,81],"beam":[10],"diverging":[11],"from":[12],"a":[13,24,58,70],"vertical":[14],"cavity":[15],"surface":[16],"emitting":[17],"laser":[18],"(VCSEL).":[19],"The":[20,52,77,87],"consists":[22],"of":[23,26,61,74,80],"VCSEL":[25],"1.5":[27],"mmtimes1.5":[28],"mmtimes1":[29],"mm":[30],"is":[32,54,85],"surrounded":[33],"by":[34],"three":[35],"photodiodes.":[36],"It":[37],"can":[38,89],"measure":[39],"linear":[41],"distance":[42],"traveled":[43],"or":[44,64],"tilting":[46,83],"angle":[47,84],"for":[48,57,69],"an":[49],"external":[50],"mirror.":[51],"resolution":[53],"10":[55],"nm":[56,68],"measurement":[59,72],"range":[60,73,79],"0.4":[62],"mm,":[63],"less":[65],"than":[66],"40":[67],"wider":[71],"1.8":[75],"mm.":[76],"full":[78],"measurable":[82],"5deg.":[86],"sensors":[88],"be":[90],"incorporated":[91],"into":[92],"devices":[93],"with":[94],"micro-mirrors,":[95],"such":[96],"as":[97],"scanning":[99],"microscopes":[100]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2026-10-24T09:50:30.924529","created_date":"2016-06-24T00:00:00"}