{"id":"https://openalex.org/W1995195016","doi":"https://doi.org/10.1007/s004600050172","title":"Formation of alumina fine particles by a magnetron sputtering \u2014 gas aggregation method","display_name":"Formation of alumina fine particles by a magnetron sputtering \u2014 gas aggregation method","publication_year":1997,"publication_date":"1997-03-01","ids":{"openalex":"https://openalex.org/W1995195016","doi":"https://doi.org/10.1007/s004600050172","mag":"1995195016"},"language":"en","primary_location":{"id":"doi:10.1007/s004600050172","doi":"https://doi.org/10.1007/s004600050172","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s004600050172","pdf_url":null,"source":{"id":"https://openalex.org/S4210225287","display_name":"Zeitschrift f\u00fcr Physik D Atoms Molecules and Clusters","issn_l":"0178-7683","issn":["0178-7683","1431-5866"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Zeitschrift f\u00fcr Physik D Atoms, Molecules and Clusters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5039574304","display_name":"Masahiro Goto","orcid":"https://orcid.org/0000-0002-1003-2781","observed_orcids":["https://orcid.org/0000-0002-1003-2781"]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"M. Goto","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","National Industrial Research Institute of NAGOYA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]},{"raw_affiliation_string":"National Industrial Research Institute of NAGOYA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023884060","display_name":"J. Murakami","orcid":"https://orcid.org/0000-0001-7857-7860","observed_orcids":["https://orcid.org/0000-0001-7857-7860"]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"J. Murakami","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","National Industrial Research Institute of NAGOYA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]},{"raw_affiliation_string":"National Industrial Research Institute of NAGOYA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087769759","display_name":"Y. Tai","orcid":"https://orcid.org/0009-0008-7894-8391","observed_orcids":["https://orcid.org/0009-0008-7894-8391"]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Y. Tai","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","National Industrial Research Institute of NAGOYA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]},{"raw_affiliation_string":"National Industrial Research Institute of NAGOYA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029577393","display_name":"Kazuyoshi Yoshimura","orcid":"https://orcid.org/0000-0002-4769-9694","observed_orcids":["https://orcid.org/0000-0002-4769-9694"]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Yoshimura","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","National Industrial Research Institute of NAGOYA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]},{"raw_affiliation_string":"National Industrial Research Institute of NAGOYA","institution_ids":[]}]},{"author_position":"middle","author":{"id":null,"display_name":"K. Igarashi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Igarashi","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","National Industrial Research Institute of NAGOYA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]},{"raw_affiliation_string":"National Industrial Research Institute of NAGOYA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050833085","display_name":"Sakae Tanemura","orcid":"https://orcid.org/0000-0002-5612-6724","observed_orcids":["https://orcid.org/0000-0002-5612-6724"]},"institutions":[{"id":"https://openalex.org/I4210131458","display_name":"Nagoya Industrial Science Research Institute","ror":"https://ror.org/02xkqh785","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210131458"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. Tanemura","raw_affiliation_strings":["National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","National Industrial Research Institute of NAGOYA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Industrial Research Institute of Nagoya, 1 Hirate-cho, Kita-ku, Nagoya 462, Japan","institution_ids":["https://openalex.org/I4210131458"]},{"raw_affiliation_string":"National Industrial Research Institute of NAGOYA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210131458"],"apc_list":null,"apc_paid":null,"fwci":2.5353,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.88543245,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"40","issue":"1","first_page":"115","last_page":"118"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13104","display_name":"Chemical and Physical Properties of Materials","score":0.43290001153945923,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13104","display_name":"Chemical and Physical Properties of Materials","score":0.43290001153945923,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13232","display_name":"Laser-Ablation Synthesis of Nanoparticles","score":0.2110999971628189,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10132","display_name":"Advanced ceramic materials synthesis","score":0.0966000035405159,"subfield":{"id":"https://openalex.org/subfields/2503","display_name":"Ceramics and Composites"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/alumina-particles","display_name":"alumina particles","score":0.8009999990463257},{"id":"https://openalex.org/keywords/magnetron-sputtering","display_name":"magnetron sputtering","score":0.8960000276565552},{"id":"https://openalex.org/keywords/gas-aggregation","display_name":"gas aggregation","score":0.9750000238418579},{"id":"https://openalex.org/keywords/fine-particles","display_name":"fine particles","score":0.6330000162124634},{"id":"https://openalex.org/keywords/particle-size","display_name":"particle size","score":0.8479999899864197},{"id":"https://openalex.org/keywords/sputtering-temperature","display_name":"sputtering temperature","score":0.7049999833106995}],"concepts":[{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.7053319215774536},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.6423632502555847},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6417065858840942},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.5817925333976746},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5811573266983032},{"id":"https://openalex.org/C2778517922","wikidata":"https://www.wikidata.org/wiki/Q7140482","display_name":"Particle (ecology)","level":2,"score":0.5481704473495483},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.5292387008666992},{"id":"https://openalex.org/C187530423","wikidata":"https://www.wikidata.org/wiki/Q7140503","display_name":"Particle size","level":2,"score":0.5076884031295776},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.40432414412498474},{"id":"https://openalex.org/C159467904","wikidata":"https://www.wikidata.org/wiki/Q2001702","display_name":"Chemical physics","level":1,"score":0.38985660672187805},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.36954790353775024},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.26432275772094727},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2478901743888855},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.22746747732162476},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1890583038330078},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09149584174156189},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.048085927963256836},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/s004600050172","doi":"https://doi.org/10.1007/s004600050172","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s004600050172","pdf_url":null,"source":{"id":"https://openalex.org/S4210225287","display_name":"Zeitschrift f\u00fcr Physik D Atoms Molecules and Clusters","issn_l":"0178-7683","issn":["0178-7683","1431-5866"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Zeitschrift f\u00fcr Physik D Atoms, Molecules and Clusters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1964662465","https://openalex.org/W1978856109","https://openalex.org/W2050909661","https://openalex.org/W2077857258","https://openalex.org/W2115468636","https://openalex.org/W2149460485","https://openalex.org/W6727464173"],"related_works":["https://openalex.org/W2342571136","https://openalex.org/W2017025959","https://openalex.org/W1987871754","https://openalex.org/W1546199754","https://openalex.org/W2051215172","https://openalex.org/W2080758228","https://openalex.org/W3133030207","https://openalex.org/W2625091851","https://openalex.org/W1989644337","https://openalex.org/W2018360673"],"abstract_inverted_index":null,"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}