{"id":"https://openalex.org/W1995138535","doi":"https://doi.org/10.1063/1.3393273","title":"Ellipsometry investigation of the amorphous-to-microcrystalline transition in a-Si:H under hydrogen-plasma treatment","display_name":"Ellipsometry investigation of the amorphous-to-microcrystalline transition in a-Si:H under hydrogen-plasma treatment","publication_year":2010,"publication_date":"2010-04-15","ids":{"openalex":"https://openalex.org/W1995138535","doi":"https://doi.org/10.1063/1.3393273","mag":"1995138535"},"language":"en","primary_location":{"id":"doi:10.1063/1.3393273","doi":"https://doi.org/10.1063/1.3393273","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.3393273","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038179209","display_name":"Aomar Hadjadj","orcid":"https://orcid.org/0000-0001-9457-3923","observed_orcids":["https://orcid.org/0000-0001-9457-3923"]},"institutions":[{"id":"https://openalex.org/I96226040","display_name":"Universit\u00e9 de Reims Champagne-Ardenne","ror":"https://ror.org/03hypw319","country_code":"FR","type":"education","lineage":["https://openalex.org/I96226040"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"A. Hadjadj","raw_affiliation_strings":["Universit\u00e9 de Reims 1 Groupe de Recherche En Sciences Pour l'Ing\u00e9nieur (GRESPI/Mat\u00e9riaux Fonctionnels, EA 4301), , 51687 Reims, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e9 de Reims 1 Groupe de Recherche En Sciences Pour l'Ing\u00e9nieur (GRESPI/Mat\u00e9riaux Fonctionnels, EA 4301), , 51687 Reims, France","institution_ids":["https://openalex.org/I96226040"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009182354","display_name":"N. Pham","orcid":"https://orcid.org/0000-0002-2349-9364","observed_orcids":["https://orcid.org/0000-0002-2349-9364"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I142476485","display_name":"\u00c9cole Polytechnique","ror":"https://ror.org/05hy3tk52","country_code":"FR","type":"education","lineage":["https://openalex.org/I142476485","https://openalex.org/I4210145102"]},{"id":"https://openalex.org/I4210122671","display_name":"Laboratoire de Physique des Interfaces et des Couches Minces","ror":"https://ror.org/023f9y602","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I142476485","https://openalex.org/I4210095849","https://openalex.org/I4210122671","https://openalex.org/I4210145102"]},{"id":"https://openalex.org/I96226040","display_name":"Universit\u00e9 de Reims Champagne-Ardenne","ror":"https://ror.org/03hypw319","country_code":"FR","type":"education","lineage":["https://openalex.org/I96226040"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"N. Pham","raw_affiliation_strings":["Ecole Polytechnique 2 Laboratoire de Physique des Interfaces et Couches Minces (LPICM, UMR 7647 CNRS), , 91128 Palaiseau, France","Universit\u00e9 de Reims 1 Groupe de Recherche En Sciences Pour l'Ing\u00e9nieur (GRESPI/Mat\u00e9riaux Fonctionnels, EA 4301), , 51687 Reims, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole Polytechnique 2 Laboratoire de Physique des Interfaces et Couches Minces (LPICM, UMR 7647 CNRS), , 91128 Palaiseau, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I142476485","https://openalex.org/I4210122671"]},{"raw_affiliation_string":"Universit\u00e9 de Reims 1 Groupe de Recherche En Sciences Pour l'Ing\u00e9nieur (GRESPI/Mat\u00e9riaux Fonctionnels, EA 4301), , 51687 Reims, France","institution_ids":["https://openalex.org/I96226040"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066921816","display_name":"Pere Roca i Cabarrocas","orcid":"https://orcid.org/0000-0003-2241-2762","observed_orcids":["https://orcid.org/0000-0003-2241-2762"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I142476485","display_name":"\u00c9cole Polytechnique","ror":"https://ror.org/05hy3tk52","country_code":"FR","type":"education","lineage":["https://openalex.org/I142476485","https://openalex.org/I4210145102"]},{"id":"https://openalex.org/I4210122671","display_name":"Laboratoire de Physique des Interfaces et des Couches Minces","ror":"https://ror.org/023f9y602","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I142476485","https://openalex.org/I4210095849","https://openalex.org/I4210122671","https://openalex.org/I4210145102"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Roca i Cabarrocas","raw_affiliation_strings":["Ecole Polytechnique 2 Laboratoire de Physique des Interfaces et Couches Minces (LPICM, UMR 7647 CNRS), , 91128 Palaiseau, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole Polytechnique 2 Laboratoire de Physique des Interfaces et Couches Minces (LPICM, UMR 7647 CNRS), , 91128 Palaiseau, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I142476485","https://openalex.org/I4210122671"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000190079","display_name":"O. Jbara","orcid":"https://orcid.org/0009-0002-5221-6391","observed_orcids":["https://orcid.org/0009-0002-5221-6391"]},"institutions":[{"id":"https://openalex.org/I96226040","display_name":"Universit\u00e9 de Reims Champagne-Ardenne","ror":"https://ror.org/03hypw319","country_code":"FR","type":"education","lineage":["https://openalex.org/I96226040"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"O. Jbara","raw_affiliation_strings":["Universit\u00e9 de Reims 1 Groupe de Recherche En Sciences Pour l'Ing\u00e9nieur (GRESPI/Mat\u00e9riaux Fonctionnels, EA 4301), , 51687 Reims, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e9 de Reims 1 Groupe de Recherche En Sciences Pour l'Ing\u00e9nieur (GRESPI/Mat\u00e9riaux Fonctionnels, EA 4301), , 51687 Reims, France","institution_ids":["https://openalex.org/I96226040"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062844007","display_name":"G. Djellouli","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I96226040","display_name":"Universit\u00e9 de Reims Champagne-Ardenne","ror":"https://ror.org/03hypw319","country_code":"FR","type":"education","lineage":["https://openalex.org/I96226040"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Djellouli","raw_affiliation_strings":["Universit\u00e9 de Reims 1 Groupe de Recherche En Sciences Pour l'Ing\u00e9nieur (GRESPI/Mat\u00e9riaux Fonctionnels, EA 4301), , 51687 Reims, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e9 de Reims 1 Groupe de Recherche En Sciences Pour l'Ing\u00e9nieur (GRESPI/Mat\u00e9riaux Fonctionnels, EA 4301), , 51687 Reims, France","institution_ids":["https://openalex.org/I96226040"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3500,"currency":"USD","value_usd":3500},"apc_paid":null,"fwci":2.3835,"has_fulltext":false,"cited_by_count":26,"citation_normalized_percentile":{"value":0.87917065,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":98},"biblio":{"volume":"107","issue":"8","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.3878999948501587,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.3878999948501587,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.3434999883174896,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.06300000101327896,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hydrogenated-amorphous-silicon","display_name":"hydrogenated amorphous silicon","score":0.9520000219345093},{"id":"https://openalex.org/keywords/a-si-h-thin-films","display_name":"a-Si:H thin films","score":0.8690000176429749},{"id":"https://openalex.org/keywords/hydrogen-plasma-treatment","display_name":"hydrogen plasma treatment","score":0.9520000219345093},{"id":"https://openalex.org/keywords/chemical-transport","display_name":"chemical transport","score":0.6110000014305115},{"id":"https://openalex.org/keywords/boron-doping","display_name":"boron doping","score":0.671999990940094},{"id":"https://openalex.org/keywords/phosphorus-doping","display_name":"phosphorus doping","score":0.9980000257492065},{"id":"https://openalex.org/keywords/nanoparticle-nucleation","display_name":"nanoparticle nucleation","score":0.7110000252723694},{"id":"https://openalex.org/keywords/crystallite-growth","display_name":"crystallite growth","score":0.6430000066757202},{"id":"https://openalex.org/keywords/etch-rate","display_name":"etch rate","score":0.7279999852180481},{"id":"https://openalex.org/keywords/film-porosity","display_name":"film porosity","score":0.4659999907016754},{"id":"https://openalex.org/keywords/transition-kinetics","display_name":"transition kinetics","score":0.31299999356269836}],"concepts":[{"id":"https://openalex.org/C18293161","wikidata":"https://www.wikidata.org/wiki/Q898774","display_name":"Ellipsometry","level":3,"score":0.8367892503738403},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.7125958204269409},{"id":"https://openalex.org/C201370411","wikidata":"https://www.wikidata.org/wiki/Q388283","display_name":"Microcrystalline","level":2,"score":0.6871610879898071},{"id":"https://openalex.org/C61048295","wikidata":"https://www.wikidata.org/wiki/Q909022","display_name":"Nucleation","level":2,"score":0.6397206783294678},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5999855995178223},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.5594357848167419},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5180542469024658},{"id":"https://openalex.org/C137637335","wikidata":"https://www.wikidata.org/wiki/Q899604","display_name":"Crystallite","level":2,"score":0.49310609698295593},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.4245520234107971},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.3669264018535614},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2637373208999634},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.2634392976760864},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.2505002021789551},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20954644680023193},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.07032200694084167},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.3393273","doi":"https://doi.org/10.1063/1.3393273","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.3393273","pdf_url":null,"source":{"id":"https://openalex.org/S187991544","display_name":"Journal of Applied Physics","issn_l":"0021-8979","issn":["0021-8979","1089-7550","1520-8850"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":50,"referenced_works":["https://openalex.org/W1575636801","https://openalex.org/W1924911799","https://openalex.org/W1967118526","https://openalex.org/W1970121107","https://openalex.org/W1981247648","https://openalex.org/W1983985198","https://openalex.org/W1987820481","https://openalex.org/W1993074311","https://openalex.org/W1995586028","https://openalex.org/W1997740729","https://openalex.org/W2000086839","https://openalex.org/W2001778576","https://openalex.org/W2004706511","https://openalex.org/W2006818609","https://openalex.org/W2013399123","https://openalex.org/W2014779783","https://openalex.org/W2018595827","https://openalex.org/W2018809026","https://openalex.org/W2023972233","https://openalex.org/W2025031408","https://openalex.org/W2025145231","https://openalex.org/W2025798905","https://openalex.org/W2029328213","https://openalex.org/W2029511800","https://openalex.org/W2034010375","https://openalex.org/W2037856044","https://openalex.org/W2039462193","https://openalex.org/W2045038458","https://openalex.org/W2048021500","https://openalex.org/W2048703885","https://openalex.org/W2058249651","https://openalex.org/W2058272142","https://openalex.org/W2060018469","https://openalex.org/W2063084614","https://openalex.org/W2063799122","https://openalex.org/W2066422546","https://openalex.org/W2068483539","https://openalex.org/W2069126214","https://openalex.org/W2070255410","https://openalex.org/W2072658656","https://openalex.org/W2072994309","https://openalex.org/W2075711838","https://openalex.org/W2081649825","https://openalex.org/W2083921716","https://openalex.org/W2088151819","https://openalex.org/W2094170791","https://openalex.org/W2121026460","https://openalex.org/W2154231562","https://openalex.org/W2185534294","https://openalex.org/W4251902322"],"related_works":["https://openalex.org/W1984577973","https://openalex.org/W2029328213","https://openalex.org/W2068483539","https://openalex.org/W2791719032","https://openalex.org/W2025798905","https://openalex.org/W2272026394","https://openalex.org/W1968746868","https://openalex.org/W2058490576","https://openalex.org/W2011423333","https://openalex.org/W2066165582"],"abstract_inverted_index":{"We":[0],"have":[1],"investigated":[2],"by":[3,101,159],"ellipsometry":[4,33,52,81],"the":[5,43,60,64,69,95,102,111,140,146,152,156,161,171,186],"structural":[6],"evolution":[7,75],"of":[8,27,42,59,110,139,148,163,179],"intrinsic":[9,86],"and":[10,72,87,130,176],"doped":[11],"hydrogenated":[12],"amorphous":[13],"silicon":[14],"(a-Si:H)":[15],"thin":[16],"films":[17],"during":[18,94],"their":[19],"exposure":[20],"to":[21,62,145,185],"a":[22,39,91,107,116,136],"hydrogen":[23,65,118],"plasma":[24,96],"in":[25,68],"conditions":[26],"chemical":[28],"transport.":[29],"The":[30,79],"real-time":[31],"kinetic":[32],"trajectory":[34],"at":[35,56],"4.2":[36],"eV":[37],"allowed":[38],"precise":[40],"determination":[41],"amorphous-to-microcrystalline":[44,123],"(a\u2192\u03bcc)":[45],"phase":[46,124],"transition":[47,61,133],"time.":[48],"In":[49],"situ":[50],"spectroscopic":[51],"spectra":[53],"were":[54],"collected":[55],"both":[57],"sides":[58],"identify":[63],"induced":[66],"changes":[67],"film":[70],"structure":[71],"its":[73],"time":[74],"under":[76],"hydrogen-plasma":[77],"exposure.":[78],"whole":[80],"diagnostics":[82],"reveal":[83],"that,":[84],"while":[85],"phosphorus-doped":[88],"a-Si:H":[89,99],"present":[90],"similar":[92],"trend":[93],"treatment,":[97],"boron-doped":[98],"differs":[100],"following":[103],"special":[104],"features:":[105],"(i)":[106],"rapid":[108],"formation":[109,162],"hydrogen-rich":[112],"subsurface":[113],"layer":[114],"with":[115],"high":[117],"excess.":[119],"(ii)":[120],"An":[121],"early":[122],"transition.":[125],"(iii)":[126],"A":[127],"less":[128],"porous":[129],"small-grains":[131],"formed":[132],"layer.":[134],"Such":[135],"particular":[137],"behavior":[138],"p-type":[141],"material":[142],"is":[143],"attributed":[144],"effects":[147],"boron":[149],"which,":[150],"on":[151,170],"one":[153],"hand,":[154,173],"reduces":[155],"etching":[157],"rate":[158],"hindering":[160],"volatile":[164],"species":[165],"such":[166],"as":[167],"SiH4":[168],"and,":[169],"other":[172],"promotes":[174],"quick":[175],"repeated":[177],"nucleation":[178],"nanoparticles":[180],"and/or":[181],"crystallites":[182],"which":[183],"contribute":[184],"growth":[187],"film.":[188]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":5}],"updated_date":"2026-10-12T09:40:04.860316","created_date":"2016-06-24T00:00:00"}