{"id":"https://openalex.org/W1994036271","doi":"https://doi.org/10.1155/2012/180437","title":"High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument withIn SituAFM","display_name":"High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument withIn SituAFM","publication_year":2011,"publication_date":"2011-10-18","ids":{"openalex":"https://openalex.org/W1994036271","doi":"https://doi.org/10.1155/2012/180437","mag":"1994036271"},"language":"en","primary_location":{"id":"doi:10.1155/2012/180437","doi":"https://doi.org/10.1155/2012/180437","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2012/180437","pdf_url":"https://downloads.hindawi.com/journals/amse/2012/180437.pdf","source":{"id":"https://openalex.org/S155241436","display_name":"Advances in Materials Science and Engineering","issn_l":"1687-8434","issn":["1687-8434","1687-8442"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","poland-20"],"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869","https://openalex.org/P4310320595"],"host_organization_lineage_names":["Hindawi Publishing Corporation","Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advances in Materials Science and Engineering","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W1994036271"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://downloads.hindawi.com/journals/amse/2012/180437.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004033478","display_name":"James A. Whitby","orcid":"https://orcid.org/0000-0002-5716-6875","observed_orcids":["https://orcid.org/0000-0002-5716-6875"]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":true,"raw_author_name":"James A. Whitby","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071245065","display_name":"Fredrik \u00d6stlund","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210107453","display_name":"Tofwerk (Switzerland)","ror":"https://ror.org/01wpzjj95","country_code":"CH","type":"company","lineage":["https://openalex.org/I4210107453"]},{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Fredrik \u00d6stlund","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","TOFWERK AG, Uttigenstrasse 22, 3600 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]},{"raw_affiliation_string":"TOFWERK AG, Uttigenstrasse 22, 3600 Thun, Switzerland","institution_ids":["https://openalex.org/I4210107453"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Peter Horvath","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Peter Horvath","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052746161","display_name":"Mihai S. Gabureac","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Mihai Gabureac","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052916248","display_name":"Jessica L. Riesterer","orcid":"https://orcid.org/0000-0003-1084-2773","observed_orcids":["https://orcid.org/0000-0003-1084-2773"]},"institutions":[{"id":"https://openalex.org/I2800102766","display_name":"Idaho National Laboratory","ror":"https://ror.org/00ty2a548","country_code":"US","type":"facility","lineage":["https://openalex.org/I1325736334","https://openalex.org/I1330989302","https://openalex.org/I2800102766","https://openalex.org/I2801818860"]},{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH","US"],"is_corresponding":false,"raw_author_name":"Jessica L. Riesterer","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","Idaho National Laboratory, Idaho Falls, ID 83415, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]},{"raw_affiliation_string":"Idaho National Laboratory, Idaho Falls, ID 83415, USA","institution_ids":["https://openalex.org/I2800102766"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051725744","display_name":"Ivo Utke","orcid":"https://orcid.org/0000-0002-9877-2601","observed_orcids":["https://orcid.org/0000-0002-9877-2601"]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Ivo Utke","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043384452","display_name":"Markus Hohl","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210107453","display_name":"Tofwerk (Switzerland)","ror":"https://ror.org/01wpzjj95","country_code":"CH","type":"company","lineage":["https://openalex.org/I4210107453"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Markus Hohl","raw_affiliation_strings":["TOFWERK AG, Uttigenstrasse 22, 3600 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TOFWERK AG, Uttigenstrasse 22, 3600 Thun, Switzerland","institution_ids":["https://openalex.org/I4210107453"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111564082","display_name":"Libor Sedl\u00e1\u010dek","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I105419764","display_name":"Tescan (Czechia)","ror":"https://ror.org/0556an218","country_code":"CZ","type":"company","lineage":["https://openalex.org/I105419764"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"Libor Sedl\u00e1\u010dek","raw_affiliation_strings":["Tescan a. s., Libu\u0161ina t\u0159\u00edda 21, 623 00 Brno, Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tescan a. s., Libu\u0161ina t\u0159\u00edda 21, 623 00 Brno, Czech Republic","institution_ids":["https://openalex.org/I105419764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022396320","display_name":"Jaroslav Jiru\u0161e","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I105419764","display_name":"Tescan (Czechia)","ror":"https://ror.org/0556an218","country_code":"CZ","type":"company","lineage":["https://openalex.org/I105419764"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"Jaroslav Jiru\u0161e","raw_affiliation_strings":["Tescan a. s., Libu\u0161ina t\u0159\u00edda 21, 623 00 Brno, Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tescan a. s., Libu\u0161ina t\u0159\u00edda 21, 623 00 Brno, Czech Republic","institution_ids":["https://openalex.org/I105419764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043782978","display_name":"Vinzenz Friedli","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Vinzenz Friedli","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","Specs Z\u00fcrich GmbH, Technoparkstrasse 1, 8005 Z\u00fcrich, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]},{"raw_affiliation_string":"Specs Z\u00fcrich GmbH, Technoparkstrasse 1, 8005 Z\u00fcrich, Switzerland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052291165","display_name":"Mikha\u00ebl Bechelany","orcid":"https://orcid.org/0000-0002-2913-2846","observed_orcids":["https://orcid.org/0000-0002-2913-2846"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210159287","display_name":"Institut Europ\u00e9en des Membranes","ror":"https://ror.org/04nmj9827","country_code":"FR","type":"facility","lineage":["https://openalex.org/I11935315","https://openalex.org/I1294671590","https://openalex.org/I19894307","https://openalex.org/I4210128300","https://openalex.org/I4210159287"]},{"id":"https://openalex.org/I4387154756","display_name":"Universit\u00e9 Montpellier 2","ror":"https://ror.org/00wh4bp03","country_code":"FR","type":"education","lineage":["https://openalex.org/I19894307","https://openalex.org/I4387154756"]},{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH","FR"],"is_corresponding":false,"raw_author_name":"Mikhael Bechelany","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","Institut Europ\u00e9en des Membranes (UR CNRS 5635), Universit\u00e9 Montpellier 2, Place Eug\u00e8ne Bataillon, 34095 Montpellier, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]},{"raw_affiliation_string":"Institut Europ\u00e9en des Membranes (UR CNRS 5635), Universit\u00e9 Montpellier 2, Place Eug\u00e8ne Bataillon, 34095 Montpellier, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210159287","https://openalex.org/I4387154756"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081623412","display_name":"Johann Michler","orcid":"https://orcid.org/0000-0001-8860-4068","observed_orcids":["https://orcid.org/0000-0001-8860-4068"]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Johann Michler","raw_affiliation_strings":["EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"EMPA, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]}],"institutions":[],"countries_distinct_count":4,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5004033478"],"corresponding_institution_ids":["https://openalex.org/I71824836"],"apc_list":{"value":2670,"currency":"USD","value_usd":2670},"apc_paid":{"value":2670,"currency":"USD","value_usd":2670},"fwci":3.2478,"has_fulltext":true,"cited_by_count":90,"citation_normalized_percentile":{"value":0.91616822,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":95,"max":99},"biblio":{"volume":"2012","issue":null,"first_page":"1","last_page":"13"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.986299991607666,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.986299991607666,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13552","display_name":"Advanced Materials Characterization Techniques","score":0.010200000368058681,"subfield":{"id":"https://openalex.org/subfields/2500","display_name":"General Materials Science"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10683","display_name":"Mass Spectrometry Techniques and Applications","score":0.0013000000035390258,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/focused-ion-beam","display_name":"focused ion beam","score":0.5630000233650208},{"id":"https://openalex.org/keywords/in-situ-atomic-force-microscopy","display_name":"in situ atomic force microscopy","score":0.8259999752044678},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"surface roughness","score":0.7310000061988831},{"id":"https://openalex.org/keywords/mass-resolution","display_name":"mass resolution","score":0.32600000500679016}],"concepts":[{"id":"https://openalex.org/C77671233","wikidata":"https://www.wikidata.org/wiki/Q556046","display_name":"Secondary ion mass spectrometry","level":3,"score":0.8316637277603149},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7783164381980896},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.6791737079620361},{"id":"https://openalex.org/C162356407","wikidata":"https://www.wikidata.org/wiki/Q180809","display_name":"Mass spectrometry","level":2,"score":0.6355253458023071},{"id":"https://openalex.org/C188224857","wikidata":"https://www.wikidata.org/wiki/Q905291","display_name":"Ion source","level":3,"score":0.5152345299720764},{"id":"https://openalex.org/C67649825","wikidata":"https://www.wikidata.org/wiki/Q196538","display_name":"Microscope","level":2,"score":0.5101574063301086},{"id":"https://openalex.org/C98960154","wikidata":"https://www.wikidata.org/wiki/Q3983322","display_name":"Time of flight","level":2,"score":0.5013771057128906},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.49550187587738037},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.4889918565750122},{"id":"https://openalex.org/C197977467","wikidata":"https://www.wikidata.org/wiki/Q550608","display_name":"Field ion microscope","level":3,"score":0.45564988255500793},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.43920278549194336},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.4245326817035675},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.36064934730529785},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.35314691066741943},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.24981915950775146},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.2329401969909668},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0909571647644043},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06490910053253174},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1155/2012/180437","doi":"https://doi.org/10.1155/2012/180437","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2012/180437","pdf_url":"https://downloads.hindawi.com/journals/amse/2012/180437.pdf","source":{"id":"https://openalex.org/S155241436","display_name":"Advances in Materials Science and Engineering","issn_l":"1687-8434","issn":["1687-8434","1687-8442"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","poland-20"],"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869","https://openalex.org/P4310320595"],"host_organization_lineage_names":["Hindawi Publishing Corporation","Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advances in Materials Science and Engineering","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-01692106v1","doi":null,"is_oa":true,"landing_page_url":"https://hal.umontpellier.fr/hal-01692106","pdf_url":"https://hal.umontpellier.fr/hal-01692106v1/file/180437.pdf","source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Advances in Materials Science and Engineering, 2012, 2012, pp.1 - 13. &#x27E8;10.1155/2012/180437&#x27E9;","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:dora:empa_1403","doi":null,"is_oa":true,"landing_page_url":"https://www.dora.lib4ri.ch/empa/item/empa:1403","pdf_url":"https://www.dora.lib4ri.ch/empa/dload/empa:1403/PDF/view","source":{"id":"https://openalex.org/S4306401298","display_name":"DORA Empa (Swiss Federal Laboratories for Materials Science and Technology (Empa))","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I71824836","host_organization_name":"Empa","host_organization_lineage":["https://openalex.org/I71824836"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Advances in Materials Science and Engineering","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:doaj.org/article:eaeebff03f0a452da05750683fcaff68","doi":null,"is_oa":false,"landing_page_url":"https://doaj.org/article/eaeebff03f0a452da05750683fcaff68","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Advances in Materials Science and Engineering, Vol 2012 (2012)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1155/2012/180437","doi":"https://doi.org/10.1155/2012/180437","is_oa":true,"landing_page_url":"https://doi.org/10.1155/2012/180437","pdf_url":"https://downloads.hindawi.com/journals/amse/2012/180437.pdf","source":{"id":"https://openalex.org/S155241436","display_name":"Advances in Materials Science and Engineering","issn_l":"1687-8434","issn":["1687-8434","1687-8442"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","poland-20"],"host_organization":"https://openalex.org/P4310319869","host_organization_name":"Hindawi Publishing Corporation","host_organization_lineage":["https://openalex.org/P4310319869","https://openalex.org/P4310320595"],"host_organization_lineage_names":["Hindawi Publishing Corporation","Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advances in Materials Science and Engineering","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G7874073385","display_name":"Multi-functional Analytical Focussed ion beam tool for nanotechnology","funder_award_id":"214042","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"},{"id":"https://openalex.org/G8499432083","display_name":null,"funder_award_id":"9208.1 PFNM-NM","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"}],"funders":[{"id":"https://openalex.org/F4320320300","display_name":"European Commission","ror":"https://ror.org/00k4n6c32"},{"id":"https://openalex.org/F4320320998","display_name":"Kommission f\u00fcr Technologie und Innovation","ror":"https://ror.org/012y9zp98"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1994036271.pdf","grobid_xml":"https://content.openalex.org/works/W1994036271.grobid-xml"},"referenced_works_count":43,"referenced_works":["https://openalex.org/W183040186","https://openalex.org/W1965225958","https://openalex.org/W1966453708","https://openalex.org/W1969150987","https://openalex.org/W1971583017","https://openalex.org/W1972155913","https://openalex.org/W1977207317","https://openalex.org/W1983934054","https://openalex.org/W1992647099","https://openalex.org/W1993243846","https://openalex.org/W1994408645","https://openalex.org/W2022798137","https://openalex.org/W2024386332","https://openalex.org/W2028777442","https://openalex.org/W2039963473","https://openalex.org/W2040826306","https://openalex.org/W2047205370","https://openalex.org/W2049941679","https://openalex.org/W2053320857","https://openalex.org/W2057581780","https://openalex.org/W2061553202","https://openalex.org/W2067159021","https://openalex.org/W2073141336","https://openalex.org/W2073323755","https://openalex.org/W2076947043","https://openalex.org/W2077661092","https://openalex.org/W2078338244","https://openalex.org/W2080432917","https://openalex.org/W2084686405","https://openalex.org/W2087535378","https://openalex.org/W2092729964","https://openalex.org/W2093356045","https://openalex.org/W2095544502","https://openalex.org/W2099006585","https://openalex.org/W2101754373","https://openalex.org/W2114107830","https://openalex.org/W2128235404","https://openalex.org/W2139666137","https://openalex.org/W2159704105","https://openalex.org/W2162337824","https://openalex.org/W2165268091","https://openalex.org/W2320450941","https://openalex.org/W4234366074"],"related_works":["https://openalex.org/W7221718485","https://openalex.org/W4412909147","https://openalex.org/W2905551702","https://openalex.org/W4286207877","https://openalex.org/W3129259654","https://openalex.org/W4385072136","https://openalex.org/W2081783229","https://openalex.org/W2994945300","https://openalex.org/W3109277997","https://openalex.org/W2091647611"],"abstract_inverted_index":{"We":[0,102],"describe":[1],"the":[2,38,44,48,52,60,77,82,106,122],"design":[3],"and":[4,56,72,129],"performance":[5],"of":[6,62,76,86,96,108],"an":[7,116],"orthogonal":[8],"time-of-flight":[9],"(TOF)":[10],"secondary":[11],"ion":[12,22,54,91],"mass":[13,45,67],"spectrometer":[14],"that":[15],"can":[16],"be":[17,139],"retrofitted":[18],"to":[19,43,50,65,138],"existing":[20],"focused":[21],"beam":[23,55],"(FIB)":[24],"instruments.":[25],"In":[26],"particular,":[27],"a":[28,87,109],"simple":[29],"interface":[30],"has":[31],"been":[32],"developed":[33],"for":[34],"FIB/SEM":[35],"instruments":[36],"from":[37,141],"manufacturer":[39],"Tescan.":[40],"Orthogonal":[41],"extraction":[42],"analyser":[46],"obviates":[47],"need":[49],"pulse":[51],"primary":[53],"does":[57],"not":[58],"require":[59],"use":[61],"monoisotopic":[63],"gallium":[64,88],"preserve":[66],"resolution.":[68],"The":[69],"high-duty":[70],"cycle":[71],"reasonable":[73],"collection":[74],"efficiency":[75],"new":[78],"instrument":[79],"combined":[80],"with":[81],"high":[83],"spatial":[84],"resolution":[85],"liquid":[89],"metal":[90],"source":[92],"allow":[93,132],"chemical":[94,136],"observation":[95],"features":[97],"smaller":[98],"than":[99],"50":[100],"nm.":[101],"have":[103],"also":[104,131],"demonstrated":[105],"integration":[107],"scanning":[110],"probe":[111],"microscope":[112,119],"(SPM)":[113],"operated":[114],"as":[115],"atomic":[117],"force":[118],"(AFM)":[120],"within":[121],"FIB/SEM-SIMS":[123],"chamber.":[124],"This":[125],"provides":[126],"roughness":[127],"information,":[128],"will":[130],"true":[133],"three":[134],"dimensional":[135],"images":[137],"reconstructed":[140],"SIMS":[142],"measurements.":[143]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":8},{"year":2024,"cited_by_count":5},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":10},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":9},{"year":2018,"cited_by_count":10},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":5},{"year":2012,"cited_by_count":5}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}
