{"id":"https://openalex.org/W1991850486","doi":"https://doi.org/10.1117/12.2053272","title":"Destruction of monocrystalline silicon with nanosecond pulsed fiber laser accompanied by the oxidation of ablation microparticles","display_name":"Destruction of monocrystalline silicon with nanosecond pulsed fiber laser accompanied by the oxidation of ablation microparticles","publication_year":2013,"publication_date":"2013-11-27","ids":{"openalex":"https://openalex.org/W1991850486","doi":"https://doi.org/10.1117/12.2053272","mag":"1991850486"},"language":"en","primary_location":{"id":"doi:10.1117/12.2053272","doi":"https://doi.org/10.1117/12.2053272","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2053272","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5046297678","display_name":"Vadim P. Veiko","orcid":"https://orcid.org/0000-0002-1803-7931","observed_orcids":["https://orcid.org/0000-0002-1803-7931"]},"institutions":[{"id":"https://openalex.org/I173089394","display_name":"ITMO University","ror":"https://ror.org/04txgxn49","country_code":"RU","type":"education","lineage":["https://openalex.org/I173089394"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"V. P. Veiko","raw_affiliation_strings":["National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)","institution_ids":["https://openalex.org/I173089394"]}]},{"author_position":"middle","author":{"id":null,"display_name":"A. M. Skvortsov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I173089394","display_name":"ITMO University","ror":"https://ror.org/04txgxn49","country_code":"RU","type":"education","lineage":["https://openalex.org/I173089394"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"A. M. Skvortsov","raw_affiliation_strings":["National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)","institution_ids":["https://openalex.org/I173089394"]}]},{"author_position":"middle","author":{"id":null,"display_name":"C. T. Huynh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I173089394","display_name":"ITMO University","ror":"https://ror.org/04txgxn49","country_code":"RU","type":"education","lineage":["https://openalex.org/I173089394"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"C. T. Huynh","raw_affiliation_strings":["National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)","institution_ids":["https://openalex.org/I173089394"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102807282","display_name":"Andrew A. Petrov","orcid":"https://orcid.org/0000-0002-2853-6478","observed_orcids":["https://orcid.org/0000-0002-2853-6478"]},"institutions":[{"id":"https://openalex.org/I173089394","display_name":"ITMO University","ror":"https://ror.org/04txgxn49","country_code":"RU","type":"education","lineage":["https://openalex.org/I173089394"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"A. A. Petrov","raw_affiliation_strings":["National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Research Univ. of Information Technologies, Mechanics and Optics (Russian Federation)","institution_ids":["https://openalex.org/I173089394"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I173089394"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"9065","issue":null,"first_page":"90650U","last_page":"90650U"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13232","display_name":"Laser-Ablation Synthesis of Nanoparticles","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/single-crystal-silicon","display_name":"monocrystalline silicon","score":0.9359999895095825},{"id":"https://openalex.org/keywords/laser-ablation","display_name":"laser ablation","score":0.8920000195503235},{"id":"https://openalex.org/keywords/ytterbium-doped-fiber-laser","display_name":"ytterbium-doped fiber laser","score":0.9359999895095825},{"id":"https://openalex.org/keywords/nanosecond-pulsed-laser","display_name":"nanosecond pulsed laser","score":0.8930000066757202},{"id":"https://openalex.org/keywords/particle-oxidation","display_name":"particle oxidation","score":0.8500000238418579},{"id":"https://openalex.org/keywords/scanning-speed","display_name":"scanning speed","score":0.8450000286102295},{"id":"https://openalex.org/keywords/pulse-repetition-frequency","display_name":"pulse repetition rate","score":0.9240000247955322},{"id":"https://openalex.org/keywords/radiation-dose","display_name":"radiation dose","score":0.8629999756813049}],"concepts":[{"id":"https://openalex.org/C26953177","wikidata":"https://www.wikidata.org/wiki/Q3960534","display_name":"Monocrystalline silicon","level":3,"score":0.8715261220932007},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7360863089561462},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.697424590587616},{"id":"https://openalex.org/C51141536","wikidata":"https://www.wikidata.org/wiki/Q838801","display_name":"Nanosecond","level":3,"score":0.6915687322616577},{"id":"https://openalex.org/C2778902805","wikidata":"https://www.wikidata.org/wiki/Q322177","display_name":"Ablation","level":2,"score":0.6492713689804077},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6199814677238464},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5287171006202698},{"id":"https://openalex.org/C17163034","wikidata":"https://www.wikidata.org/wiki/Q390528","display_name":"Fiber laser","level":3,"score":0.49578365683555603},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.45120370388031006},{"id":"https://openalex.org/C519885992","wikidata":"https://www.wikidata.org/wiki/Q161","display_name":"Fiber","level":2,"score":0.4016474783420563},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.34639081358909607},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.16936913132667542},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.05838197469711304},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.2053272","doi":"https://doi.org/10.1117/12.2053272","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2053272","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321079","display_name":"Russian Foundation for Basic Research","ror":"https://ror.org/02mh1ke95"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1965633552","https://openalex.org/W1994984489","https://openalex.org/W1996118667","https://openalex.org/W2030305202","https://openalex.org/W2067985452","https://openalex.org/W2081866642","https://openalex.org/W4292230197","https://openalex.org/W6667709424"],"related_works":["https://openalex.org/W1047994263","https://openalex.org/W4416648522","https://openalex.org/W2612721571","https://openalex.org/W2090815291","https://openalex.org/W2472335539","https://openalex.org/W2790975122","https://openalex.org/W2080522994","https://openalex.org/W7133398391","https://openalex.org/W2058981325","https://openalex.org/W2095119368"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"we":[3],"report":[4],"an":[5],"observation":[6],"of":[7,9,19,34,46,54,72,80,92,103,109],"process":[8],"local":[10],"destruction":[11],"monocrystalline":[12],"silicon":[13],"with":[14,24],"a":[15,25,50,58],"scanning":[16,86],"beam":[17,83],"irradiation":[18,47],"pulse":[20,88],"ytterbium":[21],"fiber":[22],"laser":[23,82,93],"wavelength":[26],"\u03bb=":[27],"1062":[28],"nm,":[29],"accompanied":[30],"by":[31],"the":[32,43,55,70,73,78,81,107],"oxidation":[33,66,102],"ablation":[35,108],"microparticles.":[36,56,110],"It":[37],"is":[38,63],"shown":[39],"that":[40],"depending":[41],"on":[42],"power":[44,61],"density":[45,62],"was":[48],"observed":[49,64],"large":[51],"scatter":[52],"size":[53],"From":[57],"certain":[59],"average":[60],"beginning":[65],"particulate":[67],"emitted":[68],"from":[69],"surface":[71],"irradiated":[74],"area.":[75],"By":[76],"varying":[77],"parameters":[79],"such":[84],"as":[85],"speed,":[87],"repetition":[89],"rate,":[90],"overlap":[91],"spot,":[94],"radiation":[95],"dose":[96],"can":[97],"be":[98],"achieved":[99],"almost":[100],"complete":[101],"all":[104],"formed":[105],"during":[106]},"counts_by_year":[],"updated_date":"2026-11-05T12:25:35.769452","created_date":"2016-06-24T00:00:00"}