{"id":"https://openalex.org/W1991691583","doi":"https://doi.org/10.1007/s10845-013-0791-5","title":"An empirical study of design-of-experiment data mining for yield-loss diagnosis for semiconductor manufacturing","display_name":"An empirical study of design-of-experiment data mining for yield-loss diagnosis for semiconductor manufacturing","publication_year":2013,"publication_date":"2013-05-27","ids":{"openalex":"https://openalex.org/W1991691583","doi":"https://doi.org/10.1007/s10845-013-0791-5","mag":"1991691583"},"language":"en","primary_location":{"id":"doi:10.1007/s10845-013-0791-5","doi":"https://doi.org/10.1007/s10845-013-0791-5","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s10845-013-0791-5","pdf_url":null,"source":{"id":"https://openalex.org/S161464388","display_name":"Journal of Intelligent Manufacturing","issn_l":"0956-5515","issn":["0956-5515","1572-8145"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["abdc-b","anvur-scientific","cwts-core","dongbi-b","jufo-2","norway-2","poland-140","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Intelligent Manufacturing","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5020132059","display_name":"Chen\u2013Fu Chien","orcid":"https://orcid.org/0000-0003-3328-4946","observed_orcids":["https://orcid.org/0000-0003-3328-4946"]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Chen-Fu Chien","raw_affiliation_strings":["Department of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, 30013, Taiwan","Dept. of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, Taiwan 30013#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, 30013, Taiwan","institution_ids":["https://openalex.org/I25846049"]},{"raw_affiliation_string":"Dept. of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, Taiwan 30013#TAB#","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028910589","display_name":"Kuo-Hao Chang","orcid":"https://orcid.org/0000-0002-3828-960X","observed_orcids":["https://orcid.org/0000-0002-3828-960X"]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kuo-Hao Chang","raw_affiliation_strings":["Department of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, 30013, Taiwan","Dept. of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, Taiwan 30013#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, 30013, Taiwan","institution_ids":["https://openalex.org/I25846049"]},{"raw_affiliation_string":"Dept. of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, Taiwan 30013#TAB#","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061829253","display_name":"Wen-Chih Wang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wen-Chih Wang","raw_affiliation_strings":["Department of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, 30013, Taiwan","Dept. of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, Taiwan 30013#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, 30013, Taiwan","institution_ids":["https://openalex.org/I25846049"]},{"raw_affiliation_string":"Dept. of Industrial Engineering and Engineering Management, National Tsing Hua University, Hsinchu, Taiwan 30013#TAB#","institution_ids":["https://openalex.org/I25846049"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5020132059"],"corresponding_institution_ids":["https://openalex.org/I25846049"],"apc_list":{"value":3290,"currency":"USD","value_usd":3290},"apc_paid":null,"fwci":2.7324,"has_fulltext":false,"cited_by_count":63,"citation_normalized_percentile":{"value":0.89979314,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"25","issue":"5","first_page":"961","last_page":"972"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11798","display_name":"Optimal Experimental Design Methods","score":0.43140000104904175,"subfield":{"id":"https://openalex.org/subfields/1803","display_name":"Management Science and Operations Research"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T11798","display_name":"Optimal Experimental Design Methods","score":0.43140000104904175,"subfield":{"id":"https://openalex.org/subfields/1803","display_name":"Management Science and Operations Research"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.24130000174045563,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14484","display_name":"Technology and Data Analysis","score":0.06459999829530716,"subfield":{"id":"https://openalex.org/subfields/1710","display_name":"Information Systems"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/experimental-design","display_name":"experimental design","score":0.8709999918937683},{"id":"https://openalex.org/keywords/semiconductor-manufacturing","display_name":"semiconductor manufacturing","score":0.9890000224113464},{"id":"https://openalex.org/keywords/data-mining","display_name":"data mining","score":0.7099999785423279},{"id":"https://openalex.org/keywords/higher-order-interactions","display_name":"higher-order interactions","score":0.6940000057220459},{"id":"https://openalex.org/keywords/multicollinearity","display_name":"multicollinearity","score":0.9559999704360962},{"id":"https://openalex.org/keywords/knowledge-extraction","display_name":"knowledge extraction","score":0.7239999771118164},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"wafer fabrication","score":0.6190000176429749},{"id":"https://openalex.org/keywords/artificial-intelligence-in-manufacturing","display_name":"artificial intelligence in manufacturing","score":0.37700000405311584}],"concepts":[{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.7502978444099426},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5238121747970581},{"id":"https://openalex.org/C189285262","wikidata":"https://www.wikidata.org/wiki/Q1332350","display_name":"Multicollinearity","level":3,"score":0.5120351910591125},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.5081043243408203},{"id":"https://openalex.org/C120936955","wikidata":"https://www.wikidata.org/wiki/Q2155640","display_name":"Empirical research","level":2,"score":0.4950181841850281},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.49068939685821533},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.4658091366291046},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.44083642959594727},{"id":"https://openalex.org/C2987888538","wikidata":"https://www.wikidata.org/wiki/Q2986369","display_name":"Semiconductor industry","level":2,"score":0.42557260394096375},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.4229901134967804},{"id":"https://openalex.org/C34559072","wikidata":"https://www.wikidata.org/wiki/Q2334061","display_name":"Design of experiments","level":2,"score":0.4173828065395355},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4128043055534363},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.2515857219696045},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.20643478631973267},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0962577760219574},{"id":"https://openalex.org/C152877465","wikidata":"https://www.wikidata.org/wiki/Q208042","display_name":"Regression analysis","level":2,"score":0.0960715115070343},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/s10845-013-0791-5","doi":"https://doi.org/10.1007/s10845-013-0791-5","is_oa":false,"landing_page_url":"https://doi.org/10.1007/s10845-013-0791-5","pdf_url":null,"source":{"id":"https://openalex.org/S161464388","display_name":"Journal of Intelligent Manufacturing","issn_l":"0956-5515","issn":["0956-5515","1572-8145"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["abdc-b","anvur-scientific","cwts-core","dongbi-b","jufo-2","norway-2","poland-140","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Intelligent Manufacturing","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5378999710083008,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"sustainable_development_goals_aurora":[{"score":0.6100000143051147,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":47,"referenced_works":["https://openalex.org/W208128215","https://openalex.org/W236410074","https://openalex.org/W651150315","https://openalex.org/W1955600018","https://openalex.org/W1969597348","https://openalex.org/W1975617480","https://openalex.org/W1984782131","https://openalex.org/W1994062596","https://openalex.org/W1998103843","https://openalex.org/W2006762481","https://openalex.org/W2014538668","https://openalex.org/W2017049928","https://openalex.org/W2017262225","https://openalex.org/W2022529231","https://openalex.org/W2025516544","https://openalex.org/W2032099903","https://openalex.org/W2033626294","https://openalex.org/W2035969035","https://openalex.org/W2041282815","https://openalex.org/W2044855549","https://openalex.org/W2046207381","https://openalex.org/W2055180707","https://openalex.org/W2056945148","https://openalex.org/W2066289742","https://openalex.org/W2077170102","https://openalex.org/W2080575622","https://openalex.org/W2086534040","https://openalex.org/W2088096179","https://openalex.org/W2092195818","https://openalex.org/W2094566035","https://openalex.org/W2104441235","https://openalex.org/W2115511303","https://openalex.org/W2120148445","https://openalex.org/W2120826257","https://openalex.org/W2121044470","https://openalex.org/W2129523275","https://openalex.org/W2131682353","https://openalex.org/W2140190241","https://openalex.org/W2143515036","https://openalex.org/W2160188693","https://openalex.org/W2493581502","https://openalex.org/W2791467530","https://openalex.org/W4248947980","https://openalex.org/W4256170606","https://openalex.org/W4297923966","https://openalex.org/W6680704940","https://openalex.org/W6840926024"],"related_works":["https://openalex.org/W2044855549","https://openalex.org/W2140614032","https://openalex.org/W7097178321","https://openalex.org/W2083506210","https://openalex.org/W2624057763","https://openalex.org/W2365896267","https://openalex.org/W2099635824","https://openalex.org/W2021909223","https://openalex.org/W2028584803","https://openalex.org/W2325241931"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":6},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":9},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":10},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-06-24T00:00:00"}