{"id":"https://openalex.org/W1991521579","doi":"https://doi.org/10.1243/095440605x31841","title":"Analysis and Fabrication Process of an Electro-Magnetically Actuated Valveless Micropump with Two Parallel Flexible Diaphragms","display_name":"Analysis and Fabrication Process of an Electro-Magnetically Actuated Valveless Micropump with Two Parallel Flexible Diaphragms","publication_year":2005,"publication_date":"2005-09-01","ids":{"openalex":"https://openalex.org/W1991521579","doi":"https://doi.org/10.1243/095440605x31841","mag":"1991521579"},"language":"en","primary_location":{"id":"doi:10.1243/095440605x31841","doi":"https://doi.org/10.1243/095440605x31841","is_oa":false,"landing_page_url":"https://doi.org/10.1243/095440605x31841","pdf_url":null,"source":{"id":"https://openalex.org/S164426212","display_name":"Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science","issn_l":"0263-7154","issn":["0263-7154","0954-4062","2041-2983","2058-3397"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320017","host_organization_name":"SAGE Publishing","host_organization_lineage":["https://openalex.org/P4310320017"],"host_organization_lineage_names":["SAGE Publishing"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011865422","display_name":"Yufeng Su","orcid":"https://orcid.org/0000-0003-1675-1776","observed_orcids":["https://orcid.org/0000-0003-1675-1776"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Y Su","raw_affiliation_strings":["Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101827050","display_name":"Wenyuan Chen","orcid":"https://orcid.org/0000-0002-0973-5922","observed_orcids":["https://orcid.org/0000-0002-0973-5922"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"W Chen","raw_affiliation_strings":["Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100746912","display_name":"Feng Cui","orcid":"https://orcid.org/0009-0009-9617-9124","observed_orcids":["https://orcid.org/0009-0009-9617-9124"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"F Cui","raw_affiliation_strings":["Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100385514","display_name":"Wenjie Zhang","orcid":"https://orcid.org/0000-0002-7753-695X","observed_orcids":["https://orcid.org/0000-0002-7753-695X","https://orcid.org/0009-0006-7757-6536","https://orcid.org/0009-0007-2231-4253"]},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"W Zhang","raw_affiliation_strings":["Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, People's Republic of China","institution_ids":["https://openalex.org/I183067930"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I183067930"],"apc_list":{"value":4150,"currency":"USD","value_usd":4150},"apc_paid":null,"fwci":0.6335,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.7278071,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"219","issue":"9","first_page":"1007","last_page":"1014"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.6410999894142151,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.6410999894142151,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.3440000116825104,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11486","display_name":"Micro and Nano Robotics","score":0.00419999985024333,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/valveless-micropump","display_name":"valveless micropump","score":0.9940000176429749},{"id":"https://openalex.org/keywords/electromagnetic-actuation","display_name":"electromagnetic actuation","score":0.7799999713897705},{"id":"https://openalex.org/keywords/flexible-diaphragm","display_name":"flexible diaphragm","score":0.800000011920929},{"id":"https://openalex.org/keywords/pdms-film","display_name":"PDMS film","score":0.6420000195503235},{"id":"https://openalex.org/keywords/nozzle-flow-characteristics","display_name":"nozzle flow characteristics","score":0.5059999823570251},{"id":"https://openalex.org/keywords/wet-etching","display_name":"wet etching","score":0.5889999866485596},{"id":"https://openalex.org/keywords/microfluidics","display_name":"microfluidics","score":0.5059999823570251}],"concepts":[{"id":"https://openalex.org/C76272257","wikidata":"https://www.wikidata.org/wiki/Q1933964","display_name":"Micropump","level":2,"score":0.9785318374633789},{"id":"https://openalex.org/C164292776","wikidata":"https://www.wikidata.org/wiki/Q5271779","display_name":"Diaphragm (acoustics)","level":3,"score":0.7473097443580627},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6654148101806641},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5939391255378723},{"id":"https://openalex.org/C56200935","wikidata":"https://www.wikidata.org/wiki/Q250840","display_name":"Nozzle","level":2,"score":0.5840538740158081},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5475001931190491},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5376893281936646},{"id":"https://openalex.org/C30403606","wikidata":"https://www.wikidata.org/wiki/Q2981904","display_name":"Electromagnetic coil","level":2,"score":0.5362085700035095},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.41720378398895264},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3814927339553833},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31740623712539673},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22128674387931824},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.14026987552642822},{"id":"https://openalex.org/C157138929","wikidata":"https://www.wikidata.org/wiki/Q570","display_name":"Loudspeaker","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1243/095440605x31841","doi":"https://doi.org/10.1243/095440605x31841","is_oa":false,"landing_page_url":"https://doi.org/10.1243/095440605x31841","pdf_url":null,"source":{"id":"https://openalex.org/S164426212","display_name":"Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science","issn_l":"0263-7154","issn":["0263-7154","0954-4062","2041-2983","2058-3397"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":"https://openalex.org/P4310320017","host_organization_name":"SAGE Publishing","host_organization_lineage":["https://openalex.org/P4310320017"],"host_organization_lineage_names":["SAGE Publishing"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.5199999809265137}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1533058090","https://openalex.org/W1857849419","https://openalex.org/W2000680124","https://openalex.org/W2009031107","https://openalex.org/W2012155033","https://openalex.org/W2042480005","https://openalex.org/W2056584136","https://openalex.org/W2081293496","https://openalex.org/W2084494033","https://openalex.org/W2111487050","https://openalex.org/W2126847964","https://openalex.org/W2130045603","https://openalex.org/W2154862646","https://openalex.org/W2158344354","https://openalex.org/W3118407220","https://openalex.org/W4377003399","https://openalex.org/W4385293748"],"related_works":["https://openalex.org/W2066627322","https://openalex.org/W2791541157","https://openalex.org/W2012301972","https://openalex.org/W2358466158","https://openalex.org/W2082425385","https://openalex.org/W2156044244","https://openalex.org/W2382752424","https://openalex.org/W2016969326","https://openalex.org/W2102009089","https://openalex.org/W2378159453"],"abstract_inverted_index":{"This":[0],"article":[1],"presents":[2],"a":[3,30,36,43,57,98,175],"parallel":[4],"dynamic":[5],"passive":[6],"valveless":[7,15,23],"micropump,":[8],"which":[9,136],"consists":[10],"of":[11,63,67,88,95,109,118,146,159,166,183,192],"three":[12],"layers":[13],"-":[14],"pump":[16,24],"body,":[17],"diaphragm,":[18],"and":[19,51,77,85,92,142,150,162,189],"electromagnetic":[20],"coil.":[21],"The":[22,128],"body":[25],"is":[26,35,54,100,113,122,186,195],"wetly":[27],"etched":[28],"in":[29,124,132],"silicon":[31,44,58],"wafer,":[32],"the":[33,52,61,64,68,70,89,96,104,110,125,139,144,147,156,160,163,167,181,184,190,193],"diaphragm":[34,72,185],"polydimethyl":[37],"siloxane":[38],"(PDMS)":[39],"film":[40],"spun":[41],"on":[42,56],"wafer":[45],"with":[46],"embedded":[47,123],"permanent":[48,119],"magnet":[49],"posts,":[50],"coil":[53,161],"electroplated":[55],"substrate.":[59],"Under":[60],"actuation":[62,157],"magnetic":[65,84,120],"field":[66],"coil,":[69],"flexible":[71,90],"can":[73,137],"be":[74],"displaced":[75],"upwards":[76],"downwards.":[78],"In":[79,102],"this":[80],"article,":[81],"after":[82],"analysing":[83],"mechanical":[86],"characteristics":[87],"membrane":[91],"direction":[93],"dependence":[94],"nozzle,":[97],"micropump":[99,194],"designed.":[101],"addition,":[103],"relative":[105],"length":[106],"(":[107],"L/d)":[108],"micropump's":[111],"nozzle":[112],"4.":[114],"A":[115],"7\u00d77":[116],"array":[117],"posts":[121],"PDMS":[126],"film.":[127],"two":[129],"diaphragms":[130],"work":[131],"an":[133],"anti-step":[134],"mode,":[135],"relieve":[138],"liquid":[140],"shock":[141],"increase":[143],"discharge":[145,191],"micropump.":[148,168],"ANSYS\u00ae":[149],"Matlab\u00ae":[151],"are":[152],"adopted":[153],"to":[154],"analyse":[155],"effect":[158],"flow":[164],"characteristic":[165],"Results":[169],"show":[170],"that":[171],"when":[172],"actuated":[173],"under":[174],"0.3":[176],"A,":[177],"100":[178],"Hz":[179],"current,":[180],"displacement":[182],">30":[187],"\u03bcm":[188],"\u03b56":[196],"\u03bc1/s.":[197]},"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-06-24T00:00:00"}