{"id":"https://openalex.org/W1990961553","doi":"https://doi.org/10.1117/12.2035726","title":"Simulation and signal analysis of Akiyama probe applied to atomic force microscope","display_name":"Simulation and signal analysis of Akiyama probe applied to atomic force microscope","publication_year":2013,"publication_date":"2013-10-10","ids":{"openalex":"https://openalex.org/W1990961553","doi":"https://doi.org/10.1117/12.2035726","mag":"1990961553"},"language":"en","primary_location":{"id":"doi:10.1117/12.2035726","doi":"https://doi.org/10.1117/12.2035726","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2035726","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100648285","display_name":"Longlong Wang","orcid":"https://orcid.org/0000-0002-3346-0121","observed_orcids":["https://orcid.org/0000-0002-3346-0121"]},"institutions":[{"id":"https://openalex.org/I162868743","display_name":"Tianjin University","ror":"https://ror.org/012tb2g32","country_code":"CN","type":"education","lineage":["https://openalex.org/I162868743"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Longlong Wang","raw_affiliation_strings":["Tianjin Univ, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tianjin Univ, China","institution_ids":["https://openalex.org/I162868743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101176966","display_name":"Mingzhen Lu","orcid":"https://orcid.org/0009-0007-8508-8986","observed_orcids":["https://orcid.org/0009-0007-8508-8986"]},"institutions":[{"id":"https://openalex.org/I4210162136","display_name":"National Institute of Metrology","ror":"https://ror.org/05dw0p167","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210162136"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mingzhen Lu","raw_affiliation_strings":["National Institute of Metrology (China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute of Metrology (China)","institution_ids":["https://openalex.org/I4210162136"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060012186","display_name":"Tong Guo","orcid":"https://orcid.org/0000-0001-9517-6006","observed_orcids":["https://orcid.org/0000-0001-9517-6006"]},"institutions":[{"id":"https://openalex.org/I162868743","display_name":"Tianjin University","ror":"https://ror.org/012tb2g32","country_code":"CN","type":"education","lineage":["https://openalex.org/I162868743"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tong Guo","raw_affiliation_strings":["Tianjin Univ, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tianjin Univ, China","institution_ids":["https://openalex.org/I162868743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112038001","display_name":"Sitian Gao","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210162136","display_name":"National Institute of Metrology","ror":"https://ror.org/05dw0p167","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210162136"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Sitian Gao","raw_affiliation_strings":["National Institute of Metrology (China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute of Metrology (China)","institution_ids":["https://openalex.org/I4210162136"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103181194","display_name":"Huakun Zhang","orcid":"https://orcid.org/0000-0002-1909-1964","observed_orcids":["https://orcid.org/0000-0002-1909-1964"]},"institutions":[{"id":"https://openalex.org/I4210162136","display_name":"National Institute of Metrology","ror":"https://ror.org/05dw0p167","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210162136"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huakun Zhang","raw_affiliation_strings":["National Institute of Metrology (China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute of Metrology (China)","institution_ids":["https://openalex.org/I4210162136"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.3345,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.75238962,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"8916","issue":null,"first_page":"89160W","last_page":"89160W"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/modal-analysis","display_name":"modal analysis","score":0.6949999928474426},{"id":"https://openalex.org/keywords/resonant-frequency","display_name":"resonant frequency","score":0.984000027179718},{"id":"https://openalex.org/keywords/finite-element-analysis","display_name":"finite element analysis","score":0.8429999947547913},{"id":"https://openalex.org/keywords/tip-sample-interaction","display_name":"tip-sample interaction","score":0.9440000057220459},{"id":"https://openalex.org/keywords/nanometer-resolution","display_name":"nanometer resolution","score":0.6759999990463257},{"id":"https://openalex.org/keywords/critical-dimension-metrology","display_name":"critical dimension measurement","score":0.9120000004768372}],"concepts":[{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.6006747484207153},{"id":"https://openalex.org/C181635281","wikidata":"https://www.wikidata.org/wiki/Q2799395","display_name":"Magnetic force microscope","level":4,"score":0.5152328610420227},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4996979236602783},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.45321011543273926},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.43749210238456726},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3263140022754669},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.24055570363998413},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21142399311065674},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C32546565","wikidata":"https://www.wikidata.org/wiki/Q856711","display_name":"Magnetization","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.2035726","doi":"https://doi.org/10.1117/12.2035726","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2035726","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320335774","display_name":"Key Technologies Research and Development Program","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2533884401","https://openalex.org/W2161591937","https://openalex.org/W1990178094","https://openalex.org/W2041387184","https://openalex.org/W2625047743","https://openalex.org/W1988055347","https://openalex.org/W1977090848","https://openalex.org/W2097108063","https://openalex.org/W1982622735","https://openalex.org/W2014287677"],"abstract_inverted_index":{"Atomic":[0],"force":[1],"microscope":[2],"is":[3,40],"one":[4],"of":[5],"indispensable":[6],"measurement":[7,85],"tools":[8],"in":[9],"nano/micronano":[10],"precision":[11],"manufacture":[12],"and":[13,25,47,62,74,80],"critical":[14],"dimension":[15],"measurement.":[16],"To":[17],"expand":[18],"its":[19],"industry":[20],"application,":[21],"a":[22,41],"novel":[23],"head":[24],"system":[26,90,95],"are":[27,50],"newly":[28],"designed":[29],"combined":[30],"with":[31],"Nanosensors":[32],"cooperation\u2019s":[33],"patented":[34],"probe":[35],"\u2014":[36],"Akiyama":[37],"probe,":[38],"which":[39],"self-sensing":[42],"probe.":[43],"The":[44],"modal":[45],"analysis":[46],"resonance":[48],"frequency":[49],"obtained":[51],"by":[52],"finite":[53],"element(FE)":[54],"simulations.":[55],"Using":[56],"the":[57,60,69,72,78,84,87,93,99],"Locked-in":[58],"amplifier,":[59],"effective":[61],"available":[63],"signal":[64],"can":[65,97],"be":[66],"abtained.":[67],"Through":[68],"experiment":[70],"analysis,":[71],"retracting":[73],"extending":[75],"curve":[76],"reflects":[77],"tip":[79],"sample":[81],"interaction.":[82],"Furthermore,":[83],"on":[86],"calibrated":[88],"position":[89],"demonstrates":[91],"that":[92],"whole":[94],"resolution":[96],"reach":[98],"nanometer":[100],"scale.":[101]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}
