{"id":"https://openalex.org/W1990808237","doi":"https://doi.org/10.1143/jjap.45.6417","title":"Si/TiOX/Pt/TaOX Electrodes Fabricated by Sputtering for Electrochemical Ozone Generation","display_name":"Si/TiOX/Pt/TaOX Electrodes Fabricated by Sputtering for Electrochemical Ozone Generation","publication_year":2006,"publication_date":"2006-08-01","ids":{"openalex":"https://openalex.org/W1990808237","doi":"https://doi.org/10.1143/jjap.45.6417","mag":"1990808237"},"language":"en","primary_location":{"id":"doi:10.1143/jjap.45.6417","doi":"https://doi.org/10.1143/jjap.45.6417","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.45.6417","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.45.6417/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1143/JJAP.45.6417/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5086776204","display_name":"Kazuhiro Kaneda","orcid":"https://orcid.org/0000-0003-1729-8571","observed_orcids":["https://orcid.org/0000-0003-1729-8571"]},"institutions":[{"id":"https://openalex.org/I161296585","display_name":"Tokyo University of Science","ror":"https://ror.org/05sj3n476","country_code":"JP","type":"education","lineage":["https://openalex.org/I161296585"]},{"id":"https://openalex.org/I3412056","display_name":"Sanyo (Japan)","ror":"https://ror.org/03wrs2f16","country_code":"JP","type":"company","lineage":["https://openalex.org/I3412056"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuhiro Kaneda","raw_affiliation_strings":["Faculty of Science, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan","Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Science, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan","institution_ids":["https://openalex.org/I161296585"]},{"raw_affiliation_string":"Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan","institution_ids":["https://openalex.org/I3412056"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019521086","display_name":"Mineo Ikematsu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I3412056","display_name":"Sanyo (Japan)","ror":"https://ror.org/03wrs2f16","country_code":"JP","type":"company","lineage":["https://openalex.org/I3412056"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Mineo Ikematsu","raw_affiliation_strings":["Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan","institution_ids":["https://openalex.org/I3412056"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020691067","display_name":"Kenta Kitsuka","orcid":"https://orcid.org/0009-0005-4361-6555","observed_orcids":["https://orcid.org/0009-0005-4361-6555"]},"institutions":[{"id":"https://openalex.org/I3412056","display_name":"Sanyo (Japan)","ror":"https://ror.org/03wrs2f16","country_code":"JP","type":"company","lineage":["https://openalex.org/I3412056"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kenta Kitsuka","raw_affiliation_strings":["Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan","institution_ids":["https://openalex.org/I3412056"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Masahiro Iseki","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I3412056","display_name":"Sanyo (Japan)","ror":"https://ror.org/03wrs2f16","country_code":"JP","type":"company","lineage":["https://openalex.org/I3412056"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahiro Iseki","raw_affiliation_strings":["Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan","institution_ids":["https://openalex.org/I3412056"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041128500","display_name":"Hidefumi Matsuura","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I3412056","display_name":"Sanyo (Japan)","ror":"https://ror.org/03wrs2f16","country_code":"JP","type":"company","lineage":["https://openalex.org/I3412056"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hidefumi Matsuura","raw_affiliation_strings":["Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan","institution_ids":["https://openalex.org/I3412056"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047438688","display_name":"Tohru Higuchi","orcid":"https://orcid.org/0000-0002-5145-9992","observed_orcids":["https://orcid.org/0000-0002-5145-9992","https://orcid.org/0000-0002-0491-5545"]},"institutions":[{"id":"https://openalex.org/I161296585","display_name":"Tokyo University of Science","ror":"https://ror.org/05sj3n476","country_code":"JP","type":"education","lineage":["https://openalex.org/I161296585"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tohru Higuchi","raw_affiliation_strings":["Faculty of Science, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Science, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan","institution_ids":["https://openalex.org/I161296585"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111501061","display_name":"Takeshi Hattori","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I161296585","display_name":"Tokyo University of Science","ror":"https://ror.org/05sj3n476","country_code":"JP","type":"education","lineage":["https://openalex.org/I161296585"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takeshi Hattori","raw_affiliation_strings":["Faculty of Science, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Science, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan","institution_ids":["https://openalex.org/I161296585"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113547665","display_name":"Takeyo Tsukamoto","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I161296585","display_name":"Tokyo University of Science","ror":"https://ror.org/05sj3n476","country_code":"JP","type":"education","lineage":["https://openalex.org/I161296585"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takeyo Tsukamoto","raw_affiliation_strings":["Faculty of Science, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Faculty of Science, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo 162-8601, Japan","institution_ids":["https://openalex.org/I161296585"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113973627","display_name":"Masashi Yasuda","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I3412056","display_name":"Sanyo (Japan)","ror":"https://ror.org/03wrs2f16","country_code":"JP","type":"company","lineage":["https://openalex.org/I3412056"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masashi Yasuda","raw_affiliation_strings":["Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Human Ecology Research Center, Sanyo Electric Co., Ltd., 1-1-1 Sakata, Oizumi, Ora, Gunma 370-0596, Japan","institution_ids":["https://openalex.org/I3412056"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2210,"currency":"USD","value_usd":2210},"apc_paid":null,"fwci":1.2879,"has_fulltext":true,"cited_by_count":11,"citation_normalized_percentile":{"value":0.79740534,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"45","issue":"8R","first_page":"6417","last_page":"6417"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10030","display_name":"Electrocatalysts for Energy Conversion","score":0.6176999807357788,"subfield":{"id":"https://openalex.org/subfields/2105","display_name":"Renewable Energy, Sustainability and the Environment"},"field":{"id":"https://openalex.org/fields/21","display_name":"Energy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10030","display_name":"Electrocatalysts for Energy Conversion","score":0.6176999807357788,"subfield":{"id":"https://openalex.org/subfields/2105","display_name":"Renewable Energy, Sustainability and the Environment"},"field":{"id":"https://openalex.org/fields/21","display_name":"Energy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10210","display_name":"Advanced oxidation water treatment","score":0.2581000030040741,"subfield":{"id":"https://openalex.org/subfields/2312","display_name":"Water Science and Technology"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10642","display_name":"Plasma Applications and Diagnostics","score":0.0771000012755394,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrochemical-ozone-generation","display_name":"electrochemical ozone generation","score":0.9940000176429749},{"id":"https://openalex.org/keywords/sputtered-electrodes","display_name":"sputtered electrodes","score":0.7649999856948853},{"id":"https://openalex.org/keywords/platinum-anode","display_name":"platinum anode","score":0.652999997138977},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.4659999907016754},{"id":"https://openalex.org/keywords/perchloric-acid-electrolyte","display_name":"perchloric acid electrolyte","score":0.9269999861717224},{"id":"https://openalex.org/keywords/electrode-potential","display_name":"electrode potential","score":0.8859999775886536},{"id":"https://openalex.org/keywords/current-density","display_name":"current density","score":0.48899999260902405}],"concepts":[{"id":"https://openalex.org/C99541287","wikidata":"https://www.wikidata.org/wiki/Q898591","display_name":"Saturated calomel electrode","level":5,"score":0.8127975463867188},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.7358950972557068},{"id":"https://openalex.org/C46994269","wikidata":"https://www.wikidata.org/wiki/Q2499543","display_name":"Palladium-hydrogen electrode","level":5,"score":0.6020147204399109},{"id":"https://openalex.org/C52859227","wikidata":"https://www.wikidata.org/wiki/Q7877","display_name":"Electrochemistry","level":3,"score":0.5982956886291504},{"id":"https://openalex.org/C514619126","wikidata":"https://www.wikidata.org/wiki/Q1123","display_name":"Tantalum","level":2,"score":0.5971699953079224},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5380672216415405},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.5103082060813904},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5064328908920288},{"id":"https://openalex.org/C106064622","wikidata":"https://www.wikidata.org/wiki/Q3279780","display_name":"Quinhydrone electrode","level":5,"score":0.5063158273696899},{"id":"https://openalex.org/C40290423","wikidata":"https://www.wikidata.org/wiki/Q653954","display_name":"Reference electrode","level":4,"score":0.4898192584514618},{"id":"https://openalex.org/C508106653","wikidata":"https://www.wikidata.org/wiki/Q36933","display_name":"Ozone","level":2,"score":0.4882638454437256},{"id":"https://openalex.org/C69118416","wikidata":"https://www.wikidata.org/wiki/Q477099","display_name":"Working electrode","level":4,"score":0.48550844192504883},{"id":"https://openalex.org/C518104683","wikidata":"https://www.wikidata.org/wiki/Q880","display_name":"Platinum","level":3,"score":0.48098671436309814},{"id":"https://openalex.org/C68801617","wikidata":"https://www.wikidata.org/wiki/Q162908","display_name":"Electrolyte","level":3,"score":0.4773057699203491},{"id":"https://openalex.org/C123480859","wikidata":"https://www.wikidata.org/wiki/Q900576","display_name":"Reversible hydrogen electrode","level":5,"score":0.4760708212852478},{"id":"https://openalex.org/C89395315","wikidata":"https://www.wikidata.org/wiki/Q181232","display_name":"Anode","level":3,"score":0.46325549483299255},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.45957183837890625},{"id":"https://openalex.org/C18787249","wikidata":"https://www.wikidata.org/wiki/Q11025104","display_name":"Electrode potential","level":4,"score":0.4577518701553345},{"id":"https://openalex.org/C120768872","wikidata":"https://www.wikidata.org/wiki/Q898559","display_name":"Standard hydrogen electrode","level":5,"score":0.4176938235759735},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3492756485939026},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.2995278239250183},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.15405407547950745},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.1495007872581482},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.12892720103263855},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1143/jjap.45.6417","doi":"https://doi.org/10.1143/jjap.45.6417","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.45.6417","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.45.6417/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1143/jjap.45.6417","doi":"https://doi.org/10.1143/jjap.45.6417","is_oa":true,"landing_page_url":"https://doi.org/10.1143/jjap.45.6417","pdf_url":"https://iopscience.iop.org/article/10.1143/JJAP.45.6417/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1990808237.pdf","grobid_xml":"https://content.openalex.org/works/W1990808237.grobid-xml"},"referenced_works_count":15,"referenced_works":["https://openalex.org/W1558738607","https://openalex.org/W1652710875","https://openalex.org/W1968558593","https://openalex.org/W1982324627","https://openalex.org/W1990351121","https://openalex.org/W2003533963","https://openalex.org/W2006255953","https://openalex.org/W2027603649","https://openalex.org/W2055656145","https://openalex.org/W2059139487","https://openalex.org/W2074981158","https://openalex.org/W2076034350","https://openalex.org/W2144068401","https://openalex.org/W2160105216","https://openalex.org/W2173427359"],"related_works":["https://openalex.org/W2026799986","https://openalex.org/W2317862706","https://openalex.org/W2024936007","https://openalex.org/W2055656145","https://openalex.org/W2005676032","https://openalex.org/W2000787527","https://openalex.org/W2944955233","https://openalex.org/W2120647641","https://openalex.org/W2143882993","https://openalex.org/W1974312045"],"abstract_inverted_index":{"We":[0],"fabricated":[1],"an":[2,35],"electrode":[3,16,33,44,79,88,112,125],"for":[4,115],"electrochemical":[5,73,117],"generation":[6,56,118],"of":[7,14,19,31,63,77,94,107,119,122],"ozone":[8,55,120],"by":[9],"sputtering.":[10],"The":[11,28,111],"vertical":[12],"structure":[13],"the":[15,32,43,46,52,72,75,78,105,108,116],"was":[17,34,57,80,102,113],"composed":[18],"silicon/titanium":[20],"oxide/platinum/tantalum":[21],"oxide":[22],"(Si/TiO":[23],"X":[24,26],"/Pt/TaO":[25],").":[27],"catalyst":[29],"layer":[30],"insulator":[36],"comprising":[37],"only":[38],"tantalum":[39],"oxide.":[40],"By":[41],"using":[42],"as":[45,51],"anode":[47],"and":[48,68,100],"perchloric":[49],"acid":[50],"electrolyte":[53],"solution,":[54],"observed":[58],"at":[59,90],"a":[60,85,91],"current":[61,92],"density":[62,93],"ca.":[64,81,95],"40":[65,96],"mA/cm":[66,97],"2":[67,98],"above.":[69],"According":[70],"to":[71],"measurement,":[74],"potential":[76,106],"8":[82],"V":[83],"[vs":[84],"saturated":[86],"calomel":[87],"(SCE)]":[89],",":[99],"it":[101],"higher":[103],"than":[104],"Pt":[109],"electrode.":[110],"efficient":[114],"because":[121],"its":[123],"high":[124],"potential.":[126]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2026-10-29T09:56:32.521200","created_date":"2016-06-24T00:00:00"}