{"id":"https://openalex.org/W1990752680","doi":"https://doi.org/10.1016/0959-3527(90)90124-c","title":"III\u2013V dry processing from R&D to production","display_name":"III\u2013V dry processing from R&D to production","publication_year":1990,"publication_date":"1990-08-01","ids":{"openalex":"https://openalex.org/W1990752680","doi":"https://doi.org/10.1016/0959-3527(90)90124-c","mag":"1990752680"},"language":"en","primary_location":{"id":"doi:10.1016/0959-3527(90)90124-c","doi":"https://doi.org/10.1016/0959-3527(90)90124-c","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0959-3527(90)90124-c","pdf_url":null,"source":{"id":"https://openalex.org/S4210170136","display_name":"Euro III-Vs Review","issn_l":"0959-3527","issn":["0959-3527","1878-2914"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Euro III-Vs Review","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064275502","display_name":"Jy K. Bhardwaj","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Jy Bhardwaj","raw_affiliation_strings":["Technical Manager, STS Ltd, Prince of Wales Ind. Est. Abercan, Newport, Gwent NP1 5A4, USA Tel: 0495 244459, Fax: 0495 249478"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technical Manager, STS Ltd, Prince of Wales Ind. Est. Abercan, Newport, Gwent NP1 5A4, USA Tel: 0495 244459, Fax: 0495 249478","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":["https://openalex.org/A5064275502"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"3","issue":"4","first_page":"40","last_page":"41"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.8461999893188477,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.8461999893188477,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.03840000182390213,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.0333000011742115,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/iii-v-semiconductors","display_name":"III-V semiconductors","score":0.9200000166893005},{"id":"https://openalex.org/keywords/dry-process","display_name":"dry process","score":0.949999988079071},{"id":"https://openalex.org/keywords/device-fabrication","display_name":"device fabrication","score":0.8960000276565552},{"id":"https://openalex.org/keywords/process-scaling","display_name":"process scaling","score":0.7620000243186951}],"concepts":[{"id":"https://openalex.org/C2778348673","wikidata":"https://www.wikidata.org/wiki/Q739302","display_name":"Production (economics)","level":2,"score":0.7186757326126099},{"id":"https://openalex.org/C21880701","wikidata":"https://www.wikidata.org/wiki/Q2144042","display_name":"Process engineering","level":1,"score":0.5157821178436279},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.3751063048839569},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.37471115589141846},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.25849449634552},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.050943970680236816},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/0959-3527(90)90124-c","doi":"https://doi.org/10.1016/0959-3527(90)90124-c","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0959-3527(90)90124-c","pdf_url":null,"source":{"id":"https://openalex.org/S4210170136","display_name":"Euro III-Vs Review","issn_l":"0959-3527","issn":["0959-3527","1878-2914"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Euro III-Vs Review","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.7207000255584717}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W1971947867","https://openalex.org/W1978769214","https://openalex.org/W2092797041"],"related_works":["https://openalex.org/W4230600510","https://openalex.org/W2408790300","https://openalex.org/W3171152429","https://openalex.org/W4392604203","https://openalex.org/W2901815073","https://openalex.org/W2017558523","https://openalex.org/W4254510932","https://openalex.org/W94595694","https://openalex.org/W2045519160","https://openalex.org/W2947267666"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}