{"id":"https://openalex.org/W1989459459","doi":"https://doi.org/10.1557/proc-391-309","title":"Influence of Film Thickness and Capping Layer on the Mechanical Properties of Copper Films","display_name":"Influence of Film Thickness and Capping Layer on the Mechanical Properties of Copper Films","publication_year":1995,"publication_date":"1995-01-01","ids":{"openalex":"https://openalex.org/W1989459459","doi":"https://doi.org/10.1557/proc-391-309","mag":"1989459459"},"language":"en","primary_location":{"id":"doi:10.1557/proc-391-309","doi":"https://doi.org/10.1557/proc-391-309","is_oa":false,"landing_page_url":"https://doi.org/10.1557/proc-391-309","pdf_url":null,"source":{"id":"https://openalex.org/S2530005873","display_name":"MRS Proceedings","issn_l":"0272-9172","issn":["0272-9172","1946-4274"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MRS Proceedings","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113683780","display_name":"R.-M. Keller","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]},{"id":"https://openalex.org/I149899117","display_name":"Max Planck Society","ror":"https://ror.org/01hhn8329","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I149899117"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R.-M. Keller","raw_affiliation_strings":["Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart, Stuttgart, Seestr. 92, 70174, Germany","Max-Planck\u2013Institut f\u00fcr Metallforschung and University of Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart, Stuttgart, Seestr. 92, 70174, Germany","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]},{"raw_affiliation_string":"Max-Planck\u2013Institut f\u00fcr Metallforschung and University of Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108432185","display_name":"W.-M. Kuschke","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]},{"id":"https://openalex.org/I149899117","display_name":"Max Planck Society","ror":"https://ror.org/01hhn8329","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I149899117"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"W.-M. Kuschke","raw_affiliation_strings":["Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart, Stuttgart, Seestr. 92, 70174, Germany","Max-Planck\u2013Institut f\u00fcr Metallforschung and University of Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart, Stuttgart, Seestr. 92, 70174, Germany","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]},{"raw_affiliation_string":"Max-Planck\u2013Institut f\u00fcr Metallforschung and University of Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084449585","display_name":"Andre Kretschmann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]},{"id":"https://openalex.org/I149899117","display_name":"Max Planck Society","ror":"https://ror.org/01hhn8329","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I149899117"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Kretschmann","raw_affiliation_strings":["Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart, Stuttgart, Seestr. 92, 70174, Germany","Max-Planck\u2013Institut f\u00fcr Metallforschung and University of Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart, Stuttgart, Seestr. 92, 70174, Germany","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]},{"raw_affiliation_string":"Max-Planck\u2013Institut f\u00fcr Metallforschung and University of Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111889857","display_name":"Stefan Bader","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]},{"id":"https://openalex.org/I1324840837","display_name":"Hewlett-Packard (United States)","ror":"https://ror.org/059rn9488","country_code":"US","type":"company","lineage":["https://openalex.org/I1324840837"]},{"id":"https://openalex.org/I149899117","display_name":"Max Planck Society","ror":"https://ror.org/01hhn8329","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I149899117"]}],"countries":["DE","US"],"is_corresponding":false,"raw_author_name":"S. Bader","raw_affiliation_strings":["HP Integrated Circuit Business Division, OR, 97330, Corvallis, USA","Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"HP Integrated Circuit Business Division, OR, 97330, Corvallis, USA","institution_ids":["https://openalex.org/I1324840837"]},{"raw_affiliation_string":"Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054785616","display_name":"Richard P. Vinci","orcid":"https://orcid.org/0000-0002-3321-860X","observed_orcids":["https://orcid.org/0000-0002-3321-860X"]},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R.P. Vinci","raw_affiliation_strings":["Department of Materials Science and Eng., Stanford University, CA, 94305-2205, Stanford, USA","now at HP Integrated Circuit Business Division, Corvallis, OR 97330 Department of Materials Science and Eng., Stanford University, Stanford, CA 94305-2205"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Eng., Stanford University, CA, 94305-2205, Stanford, USA","institution_ids":["https://openalex.org/I97018004"]},{"raw_affiliation_string":"now at HP Integrated Circuit Business Division, Corvallis, OR 97330 Department of Materials Science and Eng., Stanford University, Stanford, CA 94305-2205","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5083348656","display_name":"Eduard Arzt","orcid":"https://orcid.org/0000-0002-0834-4540","observed_orcids":["https://orcid.org/0000-0002-0834-4540"]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]},{"id":"https://openalex.org/I149899117","display_name":"Max Planck Society","ror":"https://ror.org/01hhn8329","country_code":"DE","type":"nonprofit","lineage":["https://openalex.org/I149899117"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"E. Arzt","raw_affiliation_strings":["Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart, Stuttgart, Seestr. 92, 70174, Germany","Max-Planck\u2013Institut f\u00fcr Metallforschung and University of Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Max-Planck-Institut f\u00fcr Metallforschung and University of Stuttgart, Stuttgart, Seestr. 92, 70174, Germany","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]},{"raw_affiliation_string":"Max-Planck\u2013Institut f\u00fcr Metallforschung and University of Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346","https://openalex.org/I149899117"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.3085,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.46727728,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"391","issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9541000127792358,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9541000127792358,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.04270000010728836,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10460","display_name":"Electronic Packaging and Soldering Technologies","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/copper-thin-films","display_name":"copper thin films","score":0.9729999899864197},{"id":"https://openalex.org/keywords/film-thickness","display_name":"film thickness","score":0.843999981880188},{"id":"https://openalex.org/keywords/capping-layer","display_name":"capping layer","score":0.9729999899864197},{"id":"https://openalex.org/keywords/mechanical-properties","display_name":"mechanical properties","score":0.8769999742507935},{"id":"https://openalex.org/keywords/thermal-stress","display_name":"thermal stress","score":0.6850000023841858},{"id":"https://openalex.org/keywords/x-ray-diffraction-peak-width","display_name":"X-ray diffraction peak width","score":0.7590000033378601},{"id":"https://openalex.org/keywords/grain-size","display_name":"grain size","score":0.9769999980926514},{"id":"https://openalex.org/keywords/dislocation-density","display_name":"dislocation density","score":0.9980000257492065},{"id":"https://openalex.org/keywords/substrate-curvature","display_name":"substrate curvature","score":0.6309999823570251},{"id":"https://openalex.org/keywords/diffusion","display_name":"diffusion","score":0.43799999356269836},{"id":"https://openalex.org/keywords/dislocation-processes","display_name":"dislocation processes","score":0.5419999957084656}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.9420773983001709},{"id":"https://openalex.org/C159122135","wikidata":"https://www.wikidata.org/wiki/Q737571","display_name":"Dislocation","level":2,"score":0.662063479423523},{"id":"https://openalex.org/C544778455","wikidata":"https://www.wikidata.org/wiki/Q753","display_name":"Copper","level":2,"score":0.5915554761886597},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5687915086746216},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5600832104682922},{"id":"https://openalex.org/C195065555","wikidata":"https://www.wikidata.org/wiki/Q214881","display_name":"Curvature","level":2,"score":0.4963391423225403},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.48307397961616516},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4811440706253052},{"id":"https://openalex.org/C192191005","wikidata":"https://www.wikidata.org/wiki/Q466491","display_name":"Grain size","level":2,"score":0.4377925395965576},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.4168641269207001},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.18371227383613586},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.1030832827091217},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1557/proc-391-309","doi":"https://doi.org/10.1557/proc-391-309","is_oa":false,"landing_page_url":"https://doi.org/10.1557/proc-391-309","pdf_url":null,"source":{"id":"https://openalex.org/S2530005873","display_name":"MRS Proceedings","issn_l":"0272-9172","issn":["0272-9172","1946-4274"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MRS Proceedings","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1573952179","https://openalex.org/W1965327818","https://openalex.org/W2009455386","https://openalex.org/W2021469466","https://openalex.org/W2079784186","https://openalex.org/W2164187733","https://openalex.org/W2320479124","https://openalex.org/W2562039948","https://openalex.org/W4239773069","https://openalex.org/W4240388653"],"related_works":["https://openalex.org/W2330060824","https://openalex.org/W2320825992","https://openalex.org/W2320711541","https://openalex.org/W2009889293","https://openalex.org/W2081924161","https://openalex.org/W2559911955","https://openalex.org/W2025600080","https://openalex.org/W2319736942","https://openalex.org/W4239773069","https://openalex.org/W2059415333"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}