{"id":"https://openalex.org/W1985132671","doi":"https://doi.org/10.1117/12.284474","title":"Optical interferometric characterization of membrane curvature in boron-doped Si microstructures","display_name":"Optical interferometric characterization of membrane curvature in boron-doped Si microstructures","publication_year":1997,"publication_date":"1997-09-05","ids":{"openalex":"https://openalex.org/W1985132671","doi":"https://doi.org/10.1117/12.284474","mag":"1985132671"},"language":"en","primary_location":{"id":"doi:10.1117/12.284474","doi":"https://doi.org/10.1117/12.284474","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.284474","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5040167450","display_name":"Jason W. Weigold","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jason W. Weigold","raw_affiliation_strings":["University of Michigan , USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Michigan , USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Wen Han Juan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Wen Han Juan","raw_affiliation_strings":["University of Michigan , USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Michigan , USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072671774","display_name":"S. W. Pang","orcid":"https://orcid.org/0000-0002-4330-0877","observed_orcids":["https://orcid.org/0000-0002-4330-0877"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Stella W. Pang","raw_affiliation_strings":["University of Michigan , USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Michigan , USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052258825","display_name":"Jeffrey T. Borenstein","orcid":"https://orcid.org/0000-0002-4482-3274","observed_orcids":["https://orcid.org/0000-0002-4482-3274"]},"institutions":[{"id":"https://openalex.org/I1343143571","display_name":"Draper Laboratory","ror":"https://ror.org/04378d909","country_code":"US","type":"funder","lineage":["https://openalex.org/I1343143571"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jeffrey T. Borenstein","raw_affiliation_strings":["Charles Stark Draper Lab.,Inc. (USA)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Charles Stark Draper Lab.,Inc. (USA)","institution_ids":["https://openalex.org/I1343143571"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.13499797,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"3223","issue":null,"first_page":"142","last_page":"148"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/membrane-curvature","display_name":"membrane curvature","score":0.8820000290870667},{"id":"https://openalex.org/keywords/silicon-microstructures","display_name":"silicon microstructures","score":0.7239999771118164},{"id":"https://openalex.org/keywords/boron-doped-silicon","display_name":"boron-doped silicon","score":0.921999990940094},{"id":"https://openalex.org/keywords/optical-interferometry","display_name":"optical interferometry","score":0.7559999823570251},{"id":"https://openalex.org/keywords/clamped-clamped-beam","display_name":"clamped-clamped beam","score":0.8370000123977661},{"id":"https://openalex.org/keywords/cantilever-beam","display_name":"cantilever beam","score":0.8989999890327454},{"id":"https://openalex.org/keywords/resonators","display_name":"resonators","score":0.5989999771118164},{"id":"https://openalex.org/keywords/beam-stiffness","display_name":"beam stiffness","score":0.40400001406669617}],"concepts":[{"id":"https://openalex.org/C171635847","wikidata":"https://www.wikidata.org/wiki/Q406983","display_name":"Micrometer","level":2,"score":0.8289880156517029},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7512534260749817},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.6610704064369202},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.6031036972999573},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5465304255485535},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5154246091842651},{"id":"https://openalex.org/C195065555","wikidata":"https://www.wikidata.org/wiki/Q214881","display_name":"Curvature","level":2,"score":0.4793177843093872},{"id":"https://openalex.org/C68710425","wikidata":"https://www.wikidata.org/wiki/Q5275442","display_name":"Diffusion process","level":3,"score":0.47367674112319946},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.4445737302303314},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.43656036257743835},{"id":"https://openalex.org/C87210426","wikidata":"https://www.wikidata.org/wiki/Q1072476","display_name":"Bending","level":2,"score":0.42377984523773193},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3813631236553192},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C3017618536","wikidata":"https://www.wikidata.org/wiki/Q304994","display_name":"Innovation diffusion","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C56739046","wikidata":"https://www.wikidata.org/wiki/Q192060","display_name":"Knowledge management","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.284474","doi":"https://doi.org/10.1117/12.284474","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.284474","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2058973003","https://openalex.org/W1711857086","https://openalex.org/W2004150160","https://openalex.org/W1760495643","https://openalex.org/W2377173241","https://openalex.org/W2001041051","https://openalex.org/W2049099260","https://openalex.org/W2026282564","https://openalex.org/W2089772037","https://openalex.org/W2078205883"],"abstract_inverted_index":{"Optical":[0,192],"interferometry":[1],"has":[2],"been":[3],"applied":[4],"to":[5,49,56,69,73,88,91,108,138,179],"determine":[6],"the":[7,42,140,157,196],"membrane":[8,57],"curvature":[9,58],"of":[10,41,44,104,119,195],"p++Si":[11],"beams.":[12],"Clamped-clamped":[13],"Si":[14,46],"beams":[15,18,47,61,66,82],"and":[16,26,31,78,173],"cantilevered":[17,99],"were":[19,67,136,177],"fabricated":[20,124,145],"with":[21,130,151],"an":[22,147],"etch-":[23,148,159],"diffusion":[24,135,149,161],"process":[25,30,129,150],"a":[27,102,111,117,126,131,152],"dissolved":[28,127],"wafer":[29,128],"characterized.":[32],"This":[33],"measurement":[34,40],"technique":[35],"allows":[36],"for":[37,191,200],"very":[38],"precise":[39],"bending":[43,86],"released":[45],"due":[48,55,72,87,90,107],"stress,":[50,109],"thus":[51],"small":[52],"height":[53],"variations":[54],"in":[59],"clamped-clamped":[60],"can":[62],"be":[63,180],"resolved.":[64],"Cantilevered":[65],"found":[68,137,178],"bend":[70,139],"more":[71],"stress":[74],"as":[75,143],"length":[76],"increased":[77,93],"width":[79],"decreased.":[80],"Thicker":[81],"also":[83],"showed":[84],"less":[85],"stresses":[89],"their":[92],"stiffness.":[94],"A":[95],"6.0":[96],"micrometer":[97,106,113,168,171,175],"thick":[98,114,176],"beam":[100,115],"had":[101,116],"deflection":[103,118],"12.4":[105],"while":[110],"36.7":[112],"only":[120],"0.2":[121],"micrometer.":[122],"Beams":[123],"using":[125,146],"12":[132],"h":[133,154],"B":[134],"same":[141],"amount":[142],"those":[144],"4":[153,170],"diffusion.":[155],"Using":[156],"deep":[158],"shallow":[160],"process,":[162],"resonating":[163],"elements":[164],"that":[165],"are":[166],"20":[167],"long,":[169],"wide,":[172],"28":[174],"perfectly":[181],"flat":[182],"without":[183],"any":[184],"bending.\u00a9":[185],"(1997)":[186],"COPYRIGHT":[187],"SPIE--The":[188],"International":[189],"Society":[190],"Engineering.":[193],"Downloading":[194],"abstract":[197],"is":[198],"permitted":[199],"personal":[201],"use":[202],"only.":[203]},"counts_by_year":[],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}