{"id":"https://openalex.org/W1985013933","doi":"https://doi.org/10.1117/12.50607","title":"High-power x-ray generation using transition radiation","display_name":"High-power x-ray generation using transition radiation","publication_year":1991,"publication_date":"1991-12-01","ids":{"openalex":"https://openalex.org/W1985013933","doi":"https://doi.org/10.1117/12.50607","mag":"1985013933"},"language":"en","primary_location":{"id":"doi:10.1117/12.50607","doi":"https://doi.org/10.1117/12.50607","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.50607","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5071629034","display_name":"M. A. Piestrup","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210149811","display_name":"Adelphi Technology (United States)","ror":"https://ror.org/04v95hh54","country_code":"US","type":"company","lineage":["https://openalex.org/I4210149811"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Melvin A. Piestrup","raw_affiliation_strings":["Adelphi Technology, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Adelphi Technology, Inc. (United States)","institution_ids":["https://openalex.org/I4210149811"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047009416","display_name":"David G. Boyers","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210149811","display_name":"Adelphi Technology (United States)","ror":"https://ror.org/04v95hh54","country_code":"US","type":"company","lineage":["https://openalex.org/I4210149811"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. G. Boyers","raw_affiliation_strings":["Adelphi Technology, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Adelphi Technology, Inc. (United States)","institution_ids":["https://openalex.org/I4210149811"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005242749","display_name":"Cary I. Pincus","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210149811","display_name":"Adelphi Technology (United States)","ror":"https://ror.org/04v95hh54","country_code":"US","type":"company","lineage":["https://openalex.org/I4210149811"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Cary I. Pincus","raw_affiliation_strings":["Adelphi Technology, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Adelphi Technology, Inc. (United States)","institution_ids":["https://openalex.org/I4210149811"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100429999","display_name":"Qiang Li","orcid":"https://orcid.org/0000-0002-7260-8280","observed_orcids":["https://orcid.org/0000-0002-7260-8280"]},"institutions":[{"id":"https://openalex.org/I4210149811","display_name":"Adelphi Technology (United States)","ror":"https://ror.org/04v95hh54","country_code":"US","type":"company","lineage":["https://openalex.org/I4210149811"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Qiang Li","raw_affiliation_strings":["Adelphi Technology, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Adelphi Technology, Inc. (United States)","institution_ids":["https://openalex.org/I4210149811"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081355772","display_name":"John Harris","orcid":"https://orcid.org/0009-0001-6088-099X","observed_orcids":["https://orcid.org/0009-0001-6088-099X"]},"institutions":[{"id":"https://openalex.org/I4210149811","display_name":"Adelphi Technology (United States)","ror":"https://ror.org/04v95hh54","country_code":"US","type":"company","lineage":["https://openalex.org/I4210149811"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. L. Harris","raw_affiliation_strings":["Adelphi Technology, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Adelphi Technology, Inc. (United States)","institution_ids":["https://openalex.org/I4210149811"]}]},{"author_position":"middle","author":{"id":null,"display_name":"J. C. Bergstrom","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I32625721","display_name":"University of Saskatchewan","ror":"https://ror.org/010x8gc63","country_code":"CA","type":"education","lineage":["https://openalex.org/I32625721"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"J. C. Bergstrom","raw_affiliation_strings":["Univ. of Saskatchewan (Canada)","Univ. of Saskatchewan, Canada#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Saskatchewan (Canada)","institution_ids":["https://openalex.org/I32625721"]},{"raw_affiliation_string":"Univ. of Saskatchewan, Canada#TAB#","institution_ids":["https://openalex.org/I32625721"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020705271","display_name":"H.S. Caplan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I32625721","display_name":"University of Saskatchewan","ror":"https://ror.org/010x8gc63","country_code":"CA","type":"education","lineage":["https://openalex.org/I32625721"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"H. S. Caplan","raw_affiliation_strings":["Univ. of Saskatchewan (Canada)","Univ. of Saskatchewan, Canada#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Saskatchewan (Canada)","institution_ids":["https://openalex.org/I32625721"]},{"raw_affiliation_string":"Univ. of Saskatchewan, Canada#TAB#","institution_ids":["https://openalex.org/I32625721"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019740870","display_name":"R. M. Silzer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I32625721","display_name":"University of Saskatchewan","ror":"https://ror.org/010x8gc63","country_code":"CA","type":"education","lineage":["https://openalex.org/I32625721"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"R. M. Silzer","raw_affiliation_strings":["Univ. of Saskatchewan (Canada)","Univ. of Saskatchewan, Canada#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Saskatchewan (Canada)","institution_ids":["https://openalex.org/I32625721"]},{"raw_affiliation_string":"Univ. of Saskatchewan, Canada#TAB#","institution_ids":["https://openalex.org/I32625721"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111752645","display_name":"D. M. Skopik","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I32625721","display_name":"University of Saskatchewan","ror":"https://ror.org/010x8gc63","country_code":"CA","type":"education","lineage":["https://openalex.org/I32625721"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"D. M. Skopik","raw_affiliation_strings":["Univ. of Saskatchewan (Canada)","Univ. of Saskatchewan, Canada#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Saskatchewan (Canada)","institution_ids":["https://openalex.org/I32625721"]},{"raw_affiliation_string":"Univ. of Saskatchewan, Canada#TAB#","institution_ids":["https://openalex.org/I32625721"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102817624","display_name":"Michael J. Moran","orcid":"https://orcid.org/0009-0001-4193-0066","observed_orcids":["https://orcid.org/0009-0001-4193-0066"]},"institutions":[{"id":"https://openalex.org/I1282311441","display_name":"Lawrence Livermore National Laboratory","ror":"https://ror.org/041nk4h53","country_code":"US","type":"facility","lineage":["https://openalex.org/I1282311441","https://openalex.org/I1330989302","https://openalex.org/I198811213","https://openalex.org/I4210138311"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Michael J. Moran","raw_affiliation_strings":["Lawrence Livermore National Lab. (United States)","Lawrence Livermore National Laboratories (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lawrence Livermore National Lab. (United States)","institution_ids":["https://openalex.org/I1282311441"]},{"raw_affiliation_string":"Lawrence Livermore National Laboratories (United States)","institution_ids":["https://openalex.org/I1282311441"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071175901","display_name":"Xavier K. Maruyama","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I35364215","display_name":"Naval Postgraduate School","ror":"https://ror.org/033yfkj90","country_code":"US","type":"education","lineage":["https://openalex.org/I1330347796","https://openalex.org/I3130687028","https://openalex.org/I35364215"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Xavier K. Maruyama","raw_affiliation_strings":["Naval Postgraduate School, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Naval Postgraduate School, United States","institution_ids":["https://openalex.org/I35364215"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.11877448,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"1552","issue":null,"first_page":"214","last_page":"214"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10559","display_name":"Particle Accelerators and Free-Electron Lasers","score":0.8618000149726868,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10559","display_name":"Particle Accelerators and Free-Electron Lasers","score":0.8618000149726868,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12762","display_name":"Crystallography and Radiation Phenomena","score":0.04699999839067459,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.028699999675154686,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/transition-radiation","display_name":"transition radiation","score":0.9850000143051147},{"id":"https://openalex.org/keywords/x-ray-sources","display_name":"X-ray sources","score":0.7789999842643738},{"id":"https://openalex.org/keywords/electron-beam","display_name":"electron beam","score":0.5569999814033508},{"id":"https://openalex.org/keywords/thin-metal-foils","display_name":"thin metal foils","score":0.8080000281333923},{"id":"https://openalex.org/keywords/x-ray-lithography","display_name":"X-ray lithography","score":0.7850000262260437},{"id":"https://openalex.org/keywords/laue-diffraction","display_name":"Laue diffraction","score":0.8199999928474426},{"id":"https://openalex.org/keywords/biological-crystals","display_name":"biological crystals","score":0.6690000295639038},{"id":"https://openalex.org/keywords/photoresist-exposure","display_name":"photoresist exposure","score":0.847000002861023},{"id":"https://openalex.org/keywords/aluminum-radiators","display_name":"aluminum radiators","score":0.9559999704360962},{"id":"https://openalex.org/keywords/quasi-monochromatic-x-rays","display_name":"quasi-monochromatic X-rays","score":0.7369999885559082},{"id":"https://openalex.org/keywords/integrated-circuit-fabrication","display_name":"integrated circuit fabrication","score":0.41100001335144043}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6512595415115356},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5982422828674316},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5966952443122864},{"id":"https://openalex.org/C134406635","wikidata":"https://www.wikidata.org/wiki/Q1439684","display_name":"Photoresist","level":3,"score":0.550116240978241},{"id":"https://openalex.org/C143715953","wikidata":"https://www.wikidata.org/wiki/Q332107","display_name":"Transition radiation","level":3,"score":0.5096359252929688},{"id":"https://openalex.org/C153385146","wikidata":"https://www.wikidata.org/wiki/Q18335","display_name":"Radiation","level":2,"score":0.503231942653656},{"id":"https://openalex.org/C16332341","wikidata":"https://www.wikidata.org/wiki/Q212871","display_name":"Synchrotron radiation","level":2,"score":0.47009655833244324},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4609471261501312},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.44856545329093933},{"id":"https://openalex.org/C41794268","wikidata":"https://www.wikidata.org/wiki/Q1408939","display_name":"X-ray lithography","level":4,"score":0.44331279397010803},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.43769535422325134},{"id":"https://openalex.org/C63034144","wikidata":"https://www.wikidata.org/wiki/Q1163026","display_name":"Radiator (engine cooling)","level":2,"score":0.4161613881587982},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3641290068626404},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.10243943333625793},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.50607","doi":"https://doi.org/10.1117/12.50607","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.50607","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320338381","display_name":"SLAC National Accelerator Laboratory","ror":"https://ror.org/05gzmn429"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2058619711","https://openalex.org/W3080698301","https://openalex.org/W2040007846","https://openalex.org/W2079146870","https://openalex.org/W1970381682","https://openalex.org/W1985793046","https://openalex.org/W2045523294","https://openalex.org/W2010627857","https://openalex.org/W2077794315","https://openalex.org/W2077132962"],"abstract_inverted_index":{"In":[0,135,203],"experiments":[1],"using":[2,55,137],"targets":[3],"consisting":[4],"of":[5,18,52,69,75,117,126,132,151,164,199,212,221],"many":[6],"thin":[7],"metal":[8],"foils,":[9],"we":[10,63,143,194,205],"have":[11,44,64,144,206],"demonstrated":[12],"that":[13,208,263],"a":[14,81,170],"narrow,":[15],"forward-directed":[16],"cone":[17],"transition":[19,213,226],"radiation":[20,214],"in":[21],"the":[22,46,66,87,93,100,115,124,138,152,209,233,242],"0.8":[23],"to":[24,228],"60":[25],"keV":[26],"spectral":[27,47],"range":[28],"can":[29],"be":[30,216],"generated":[31],"by":[32],"electron":[33,58,255],"beams":[34],"with":[35,197],"moderate":[36],"energies":[37],"(between":[38],"17":[39],"and":[40,48,96,120,140,252],"500":[41],"MeV).":[42],"We":[43],"measured":[45,65,79],"spatial":[49],"photon":[50],"densities":[51],"these":[53,70],"radiators":[54,142,227],"low":[56],"current":[57],"beams.":[59],"Using":[60,190],"high":[61],"currents,":[62],"total":[67,73],"power":[68,74],"radiators.":[71],"A":[72],"15.2":[76],"mW":[77,85,91,98],"was":[78,184],"from":[80,86,92,99],"beryllium":[82],"radiator,":[83,89,95],"8.1":[84],"aluminum":[88],"4.8":[90],"titanium":[94],"3.6":[97],"copper":[101],"radiator.":[102],"These":[103],"values":[104],"matched":[105],"calculated":[106,207],"predictions":[107],"within":[108],"experimental":[109],"error.":[110],"Both":[111],"x-ray":[112,243],"lithography":[113],"for":[114,123,161,181,187,218,265],"production":[116],"integrated":[118],"circuits":[119],"Laue":[121,219],"diffraction":[122,220],"study":[125],"biological":[127,222],"materials":[128],"are":[129],"possible":[130],"applications":[131],"this":[133],"radiation.":[134],"particular,":[136],"Al":[139],"Be":[141],"exposed":[145],"photoresist-coated":[146],"silicon":[147],"wafers.":[148],"Exposure":[149],"times":[150],"bare":[153],"resist":[154,168],"were":[155],"as":[156,158],"short":[157],"120":[159],"s":[160],"5":[162,188],"cm2":[163],"wafer":[165],"area":[166],"(this":[167],"had":[169],"230":[171],"mj/cm2":[172],"energy":[173,258],"dose":[174],"per":[175],"unit":[176],"area).":[177],"The":[178,247],"shortest":[179],"time":[180],"mask/wafer":[182],"exposure":[183],"180":[185],"seconds":[186],"cm2.":[189],"an":[191,254],"Intel":[192],"mask,":[193],"obtained":[195],"lithographs":[196],"features":[198],"0.5":[200],"micrometers":[201],".":[202],"addition,":[204],"quasi-monochromatic":[210,251],"bandwidth":[211],"would":[215],"feasible":[217],"crystals.":[223],"By":[224],"designing":[225],"emit":[229],"x":[230],"rays":[231],"at":[232],"foil":[234],"material's":[235],"K-,":[236],"L-,":[237],"or":[238],"M-shell":[239],"photo-absorption":[240],"edge,":[241],"spectrum":[244],"is":[245,249,259],"narrowed.":[246],"sources":[248],"then":[250],"uses":[253],"beam":[256],"whose":[257],"considerably":[260],"lower":[261],"than":[262],"needed":[264],"synchrotron":[266],"sources.":[267]},"counts_by_year":[],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}