{"id":"https://openalex.org/W1982940783","doi":"https://doi.org/10.1117/12.2024144","title":"Angle and wavelength resolved light scattering measurement of optical surfaces and thin films","display_name":"Angle and wavelength resolved light scattering measurement of optical surfaces and thin films","publication_year":2013,"publication_date":"2013-09-07","ids":{"openalex":"https://openalex.org/W1982940783","doi":"https://doi.org/10.1117/12.2024144","mag":"1982940783"},"language":"en","primary_location":{"id":"doi:10.1117/12.2024144","doi":"https://doi.org/10.1117/12.2024144","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2024144","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112175354","display_name":"Sven Schr\u00f6der","orcid":"https://orcid.org/0000-0001-6812-362X","observed_orcids":["https://orcid.org/0000-0001-6812-362X"]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Sven Schr\u00f6der","raw_affiliation_strings":["Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084012761","display_name":"David Unglaub","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"David Unglaub","raw_affiliation_strings":["Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058087558","display_name":"Alexander von Finck","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Alexander von Finck","raw_affiliation_strings":["Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071970689","display_name":"Matthias Hauptvogel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Matthias Hauptvogel","raw_affiliation_strings":["Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043755398","display_name":"Marcus Trost","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Marcus Trost","raw_affiliation_strings":["Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046726456","display_name":"Tobias Herffurth","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Tobias Herffurth","raw_affiliation_strings":["Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082015403","display_name":"Angela Duparr\u00e9","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210115660","display_name":"Fraunhofer Institute for Applied Optics and Precision Engineering","ror":"https://ror.org/02afjh072","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210115660","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Angela Duparr\u00e9","raw_affiliation_strings":["Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)","institution_ids":["https://openalex.org/I4210115660"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112557317","display_name":"John C. Stover","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210101749","display_name":"The Scatter Works (United States)","ror":"https://ror.org/014r8q346","country_code":"US","type":"company","lineage":["https://openalex.org/I4210101749"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"John C. Stover","raw_affiliation_strings":["The Scatter Works, Inc. (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The Scatter Works, Inc. (United States)","institution_ids":["https://openalex.org/I4210101749"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.2449,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.77080624,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"8838","issue":null,"first_page":"883802","last_page":"883802"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/angle-resolved-light-scattering","display_name":"angle-resolved light scattering","score":0.8820000290870667},{"id":"https://openalex.org/keywords/optical-surface-roughness","display_name":"optical surface roughness","score":0.7649999856948853},{"id":"https://openalex.org/keywords/thin-film-coatings","display_name":"thin film coatings","score":0.9139999747276306},{"id":"https://openalex.org/keywords/subsurface-damage","display_name":"subsurface damage","score":0.7519999742507935},{"id":"https://openalex.org/keywords/optical-defects","display_name":"optical defects","score":0.7379999756813049},{"id":"https://openalex.org/keywords/tunable-lasers","display_name":"tunable lasers","score":0.5960000157356262},{"id":"https://openalex.org/keywords/optical-component-characterization","display_name":"optical component characterization","score":0.414000004529953}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7880868315696716},{"id":"https://openalex.org/C191486275","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Scattering","level":2,"score":0.6806848049163818},{"id":"https://openalex.org/C46244369","wikidata":"https://www.wikidata.org/wiki/Q193709","display_name":"Rayleigh scattering","level":2,"score":0.6634253859519958},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6619853973388672},{"id":"https://openalex.org/C120456961","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Light scattering","level":3,"score":0.6242592930793762},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.5611295700073242},{"id":"https://openalex.org/C176443586","wikidata":"https://www.wikidata.org/wiki/Q5598487","display_name":"Grazing-incidence small-angle scattering","level":5,"score":0.5275297164916992},{"id":"https://openalex.org/C98239406","wikidata":"https://www.wikidata.org/wiki/Q6934570","display_name":"Multiangle light scattering","level":4,"score":0.517507791519165},{"id":"https://openalex.org/C133848361","wikidata":"https://www.wikidata.org/wiki/Q4764027","display_name":"Angular resolution (graph drawing)","level":2,"score":0.4959274232387543},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.451002299785614},{"id":"https://openalex.org/C71597924","wikidata":"https://www.wikidata.org/wiki/Q2890543","display_name":"Optical coating","level":3,"score":0.4504186511039734},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.43489038944244385},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.3955591320991516},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3784095048904419},{"id":"https://openalex.org/C142199849","wikidata":"https://www.wikidata.org/wiki/Q3027672","display_name":"Inelastic scattering","level":3,"score":0.2323489487171173},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22310802340507507},{"id":"https://openalex.org/C76308580","wikidata":"https://www.wikidata.org/wiki/Q8041568","display_name":"X-ray Raman scattering","level":4,"score":0.1489850878715515},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.12681236863136292},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1117/12.2024144","doi":"https://doi.org/10.1117/12.2024144","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2024144","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},{"id":"pmh:oai:publica.fraunhofer.de:publica/380890","doi":null,"is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/380890","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.4099999964237213}],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320335322","display_name":"European Regional Development Fund","ror":"https://ror.org/00k4n6c32"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2060763410","https://openalex.org/W2328970646","https://openalex.org/W2467280123","https://openalex.org/W2004009434","https://openalex.org/W2608124184","https://openalex.org/W1503503015","https://openalex.org/W2320784387","https://openalex.org/W2165385982","https://openalex.org/W3020994674","https://openalex.org/W4223443072"],"abstract_inverted_index":{"Light":[0,18],"scattering":[1,19,57,84,104],"metrology":[2,58],"has":[3],"become":[4,60],"more":[5,7,113],"and":[6,16,31,36,47,93,141,146,157],"important":[8],"with":[9,71,132],"the":[10,27,51,82,102,168],"development":[11,169],"of":[12,29,44,135,143,170],"cutting-edge":[13],"optical":[14,34,45,49],"components":[15],"systems.":[17],"is":[20],"also":[21],"a":[22,153,158,171],"very":[23],"versatile":[24],"tool":[25],"for":[26,40,53,118,174],"characterization":[28],"nanostructures":[30],"defects.":[32],"While":[33],"engineering":[35],"manufacturing":[37],"are":[38,129,162],"striving":[39],"ever":[41],"increasing":[42],"resolution":[43],"devices":[46],"lowest":[48,94],"losses,":[50],"demands":[52,128],"highly":[54],"resolved":[55,177],"light":[56],"have":[59],"extremely":[61],"challenging.":[62],"In":[63],"this":[64],"sense,":[65],"\u201chighly":[66],"resolved\u201d":[67],"means:":[68],"(i)":[69],"measurements":[70,120,179],"high":[72],"angular":[73],"resolution,":[74],"not":[75],"just":[76],"in":[77],"one":[78],"plane":[79],"but":[80],"within":[81],"entire":[83],"sphere,":[85],"(ii)":[86],"small":[87],"near-angle":[88],"limits,":[89],"(iii)":[90],"highest":[91],"sensitivities":[92],"instrument":[95,173],"signatures":[96],"close":[97],"to":[98,125],"or":[99],"even":[100],"below":[101],"Rayleigh":[103],"limit,":[105],"as":[106,108],"well":[107],"(iv)":[109],"at-wavelength":[110],"operation":[111],"and,":[112],"recently,":[114],"spectral":[115],"resolution.":[116],"Instruments":[117],"scatter":[119,160,178],"developed":[121],"at":[122],"Fraunhofer":[123],"IOF":[124],"meet":[126],"these":[127],"presented":[130],"together":[131],"practical":[133],"examples":[134],"application":[136],"comprising":[137],"roughness,":[138],"sub-surface":[139],"damage,":[140],"defects":[142],"polished":[144],"surfaces":[145],"thin":[147],"film":[148],"coatings.":[149],"Compact":[150],"tools":[151],"like":[152],"table-top":[154],"3D":[155],"scatterometer":[156],"CMOS-based":[159],"sensor":[161],"presented.":[163],"Finally,":[164],"we":[165],"report":[166],"on":[167,181],"new":[172],"spectroscopic":[175],"angle":[176],"based":[180],"an":[182],"OPO":[183],"tunable":[184],"laser.":[185]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-09-03T10:48:47.769340","created_date":"2025-10-10T00:00:00"}