{"id":"https://openalex.org/W1981065713","doi":"https://doi.org/10.1134/s1063782613060146","title":"Effect of ion treatment on the properties of In2O3:Sn films","display_name":"Effect of ion treatment on the properties of In2O3:Sn films","publication_year":2013,"publication_date":"2013-06-01","ids":{"openalex":"https://openalex.org/W1981065713","doi":"https://doi.org/10.1134/s1063782613060146","mag":"1981065713"},"language":"en","primary_location":{"id":"doi:10.1134/s1063782613060146","doi":"https://doi.org/10.1134/s1063782613060146","is_oa":false,"landing_page_url":"https://doi.org/10.1134/s1063782613060146","pdf_url":null,"source":{"id":"https://openalex.org/S66392791","display_name":"Semiconductors","issn_l":"1063-7826","issn":["1063-7826","1090-6479"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["dongbi-d","jufo-1","norway-1","poland-70"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Semiconductors","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5014926097","display_name":"P. N. Krylov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I57570584","display_name":"Udmurt State University","ror":"https://ror.org/00yp6m473","country_code":"RU","type":"education","lineage":["https://openalex.org/I57570584"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"P. N. Krylov","raw_affiliation_strings":["Udmurt State University, Universitetskaya 1, Izhevsk, 426034, Russia","Udmurt State University, Izhevsk, Russia#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Udmurt State University, Universitetskaya 1, Izhevsk, 426034, Russia","institution_ids":["https://openalex.org/I57570584"]},{"raw_affiliation_string":"Udmurt State University, Izhevsk, Russia#TAB#","institution_ids":["https://openalex.org/I57570584"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078015867","display_name":"\u0420. \u041c. \u0417\u0430\u043a\u0438\u0440\u043e\u0432\u0430","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I57570584","display_name":"Udmurt State University","ror":"https://ror.org/00yp6m473","country_code":"RU","type":"education","lineage":["https://openalex.org/I57570584"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"R. M. Zakirova","raw_affiliation_strings":["Udmurt State University, Universitetskaya 1, Izhevsk, 426034, Russia","Udmurt State University, Izhevsk, Russia#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Udmurt State University, Universitetskaya 1, Izhevsk, 426034, Russia","institution_ids":["https://openalex.org/I57570584"]},{"raw_affiliation_string":"Udmurt State University, Izhevsk, Russia#TAB#","institution_ids":["https://openalex.org/I57570584"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018428290","display_name":"\u0418. \u0412. \u0424\u0435\u0434\u043e\u0442\u043e\u0432\u0430","orcid":"https://orcid.org/0009-0008-9782-5709","observed_orcids":["https://orcid.org/0009-0008-9782-5709"]},"institutions":[{"id":"https://openalex.org/I57570584","display_name":"Udmurt State University","ror":"https://ror.org/00yp6m473","country_code":"RU","type":"education","lineage":["https://openalex.org/I57570584"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"I. V. Fedotova","raw_affiliation_strings":["Udmurt State University, Universitetskaya 1, Izhevsk, 426034, Russia","Udmurt State University, Izhevsk, Russia#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Udmurt State University, Universitetskaya 1, Izhevsk, 426034, Russia","institution_ids":["https://openalex.org/I57570584"]},{"raw_affiliation_string":"Udmurt State University, Izhevsk, Russia#TAB#","institution_ids":["https://openalex.org/I57570584"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026984333","display_name":"\u0413\u0438\u043b\u044c\u043c\u0443\u0442\u0434\u0438\u043d\u043e\u0432 \u0424\u0430\u0430\u0442 \u0417\u0430\u043b\u0430\u043b\u0443\u0442\u0434\u0438\u043d\u043e\u0432\u0438\u0447","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1313323035","display_name":"Russian Academy of Sciences","ror":"https://ror.org/05qrfxd25","country_code":"RU","type":"government","lineage":["https://openalex.org/I1313323035"]},{"id":"https://openalex.org/I4210120482","display_name":"Physico-Technical Institute","ror":"https://ror.org/02jj4k517","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210096333","https://openalex.org/I4210119369","https://openalex.org/I4210120482"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"F. Z. Gilmutdinov","raw_affiliation_strings":["Physical-Technical Institute, Ural Branch, Russian Academy of Sciences, ul. Kirova 132, Izhevsk, 426000, Russia","Physical-Technical Institute, Ural Branch, Russian Academy of Sciences, Izhevsk, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical-Technical Institute, Ural Branch, Russian Academy of Sciences, ul. Kirova 132, Izhevsk, 426000, Russia","institution_ids":["https://openalex.org/I1313323035","https://openalex.org/I4210120482"]},{"raw_affiliation_string":"Physical-Technical Institute, Ural Branch, Russian Academy of Sciences, Izhevsk, Russia","institution_ids":["https://openalex.org/I1313323035","https://openalex.org/I4210120482"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5014926097"],"corresponding_institution_ids":["https://openalex.org/I57570584"],"apc_list":null,"apc_paid":null,"fwci":0.5578,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.68993263,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":95},"biblio":{"volume":"47","issue":"6","first_page":"870","last_page":"874"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.5952000021934509,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.5952000021934509,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.3495999872684479,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.008700000122189522,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/indium-tin-oxide","display_name":"indium tin oxide","score":0.9430000185966492},{"id":"https://openalex.org/keywords/ito-thin-films","display_name":"ITO thin films","score":0.8500000238418579},{"id":"https://openalex.org/keywords/rf-magnetron-sputtering","display_name":"RF magnetron sputtering","score":0.800000011920929},{"id":"https://openalex.org/keywords/film-conductivity","display_name":"film conductivity","score":0.5289999842643738},{"id":"https://openalex.org/keywords/crystallization","display_name":"crystallization","score":0.7889999747276306},{"id":"https://openalex.org/keywords/optical-absorption-edge","display_name":"optical absorption edge","score":0.8709999918937683},{"id":"https://openalex.org/keywords/texture-evolution","display_name":"texture evolution","score":0.722000002861023},{"id":"https://openalex.org/keywords/substrate-temperature","display_name":"substrate temperature","score":0.9190000295639038},{"id":"https://openalex.org/keywords/amorphous-films","display_name":"amorphous films","score":0.7260000109672546}],"concepts":[{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.7561304569244385},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6874066591262817},{"id":"https://openalex.org/C203036418","wikidata":"https://www.wikidata.org/wiki/Q284256","display_name":"Crystallization","level":2,"score":0.6368570327758789},{"id":"https://openalex.org/C32737372","wikidata":"https://www.wikidata.org/wiki/Q417718","display_name":"Indium tin oxide","level":3,"score":0.6292543411254883},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.621476948261261},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.5963888168334961},{"id":"https://openalex.org/C543292547","wikidata":"https://www.wikidata.org/wiki/Q1094","display_name":"Indium","level":2,"score":0.5848550200462341},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5114516019821167},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5024442672729492},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.48250508308410645},{"id":"https://openalex.org/C2781195486","wikidata":"https://www.wikidata.org/wiki/Q289436","display_name":"Texture (cosmology)","level":3,"score":0.45600569248199463},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.41363027691841125},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.3572050631046295},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.3240831196308136},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.259846568107605},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.21523120999336243},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.18173953890800476},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1707356870174408},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.08777216076850891},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1134/s1063782613060146","doi":"https://doi.org/10.1134/s1063782613060146","is_oa":false,"landing_page_url":"https://doi.org/10.1134/s1063782613060146","pdf_url":null,"source":{"id":"https://openalex.org/S66392791","display_name":"Semiconductors","issn_l":"1063-7826","issn":["1063-7826","1090-6479"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["dongbi-d","jufo-1","norway-1","poland-70"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Semiconductors","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1535313585","https://openalex.org/W1549965759","https://openalex.org/W1969497679","https://openalex.org/W2028580153","https://openalex.org/W2047031971","https://openalex.org/W2049566395","https://openalex.org/W2053129192","https://openalex.org/W2063660264","https://openalex.org/W2069307514","https://openalex.org/W2080001141","https://openalex.org/W2133907673","https://openalex.org/W2138985858","https://openalex.org/W2163680990","https://openalex.org/W4285719527"],"related_works":["https://openalex.org/W2027497629","https://openalex.org/W2032770700","https://openalex.org/W2006975530","https://openalex.org/W2137047893","https://openalex.org/W2998169886","https://openalex.org/W1966744717","https://openalex.org/W2909727229","https://openalex.org/W2090885656","https://openalex.org/W4407158248","https://openalex.org/W1973814022"],"abstract_inverted_index":{"Variations":[0],"in":[1,69,90],"the":[2,23,32,39,49,70,81,91],"properties":[3],"of":[4,31,42,80],"Indium-Tin-Oxide":[5],"(ITO)":[6],"films":[7],"grown":[8],"by":[9],"reactive":[10],"HF":[11],"(high-frequency)":[12],"magnetron":[13],"deposition":[14,36],"with":[15],"simultaneous":[16],"ion":[17,59],"treatment":[18,30,60,65],"are":[19,61],"studied":[20],"depending":[21],"on":[22],"ion-treatment":[24,92],"current":[25,93],"and":[26,44,66,77],"substrate":[27],"temperature.":[28],"Ion":[29,64],"growing":[33],"film":[34,75],"during":[35],"insignificantly":[37],"changes":[38],"relative":[40],"content":[41],"tin":[43],"indium,":[45],"but":[46],"significantly":[47],"increases":[48],"conductivity.":[50],"Films":[51],"obtained":[52],"at":[53],"a":[54,78],"temperature":[55,72],"below":[56],"50\u00b0C":[57],"without":[58],"X-ray":[62],"amorphous.":[63],"an":[67],"increase":[68,89],"condensation":[71],"lead":[73],"to":[74,85],"crystallization":[76],"shift":[79],"optical":[82],"absorption":[83],"edge":[84],"short":[86],"wave-lengths.":[87],"An":[88],"causes":[94],"texture":[95],"formation.":[96]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}