{"id":"https://openalex.org/W1980330755","doi":"https://doi.org/10.1117/12.447382","title":"Use of a high-dispersion spectrograph for optimized visible and UV Raman measurements on semiconductor materials","display_name":"Use of a high-dispersion spectrograph for optimized visible and UV Raman measurements on semiconductor materials","publication_year":2001,"publication_date":"2001-10-31","ids":{"openalex":"https://openalex.org/W1980330755","doi":"https://doi.org/10.1117/12.447382","mag":"1980330755"},"language":"en","primary_location":{"id":"doi:10.1117/12.447382","doi":"https://doi.org/10.1117/12.447382","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.447382","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111972910","display_name":"Andrew Whitley","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Andrew Whitley","raw_affiliation_strings":["Jobin Yvon Moriba, Inc. (United States)","Jobin Yvon Moriba, Inc. (USA)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jobin Yvon Moriba, Inc. (United States)","institution_ids":[]},{"raw_affiliation_string":"Jobin Yvon Moriba, Inc. (USA)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000439021","display_name":"Fran Adar","orcid":"https://orcid.org/0000-0003-0298-5635","observed_orcids":["https://orcid.org/0000-0003-0298-5635"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Fran Adar","raw_affiliation_strings":["Jobin Yvon Moriba, Inc. (United States)","Jobin Yvon Moriba, Inc. (USA)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jobin Yvon Moriba, Inc. (United States)","institution_ids":[]},{"raw_affiliation_string":"Jobin Yvon Moriba, Inc. (USA)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010199143","display_name":"Sophie Nhu An Morel","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Sophie Morel","raw_affiliation_strings":["Jobin Yvon Moriba, S.A. (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jobin Yvon Moriba, S.A. (France)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043265442","display_name":"Myriam Moreau","orcid":"https://orcid.org/0000-0003-4720-4994","observed_orcids":["https://orcid.org/0000-0003-4720-4994"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Miriam Moreau","raw_affiliation_strings":["Jobin Yvon Moriba, S.A. (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jobin Yvon Moriba, S.A. (France)","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110010376","display_name":"Nancy R. Klymko","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Nancy R. Klymko","raw_affiliation_strings":["IBM (United States)","IBM USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM (United States)","institution_ids":["https://openalex.org/I1341412227"]},{"raw_affiliation_string":"IBM USA","institution_ids":["https://openalex.org/I1341412227"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.07109005,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"4469","issue":null,"first_page":"47","last_page":"56"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11324","display_name":"Spectroscopy Techniques in Biomedical and Chemical Research","score":0.5019999742507935,"subfield":{"id":"https://openalex.org/subfields/1304","display_name":"Biophysics"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T11324","display_name":"Spectroscopy Techniques in Biomedical and Chemical Research","score":0.5019999742507935,"subfield":{"id":"https://openalex.org/subfields/1304","display_name":"Biophysics"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.0812000036239624,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.04390000179409981,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/high-dispersion-spectrograph","display_name":"high-dispersion spectrometer","score":0.9829999804496765},{"id":"https://openalex.org/keywords/uv-raman-spectroscopy","display_name":"UV Raman spectroscopy","score":0.8539999723434448},{"id":"https://openalex.org/keywords/semiconductors","display_name":"semiconductors","score":0.753000020980835},{"id":"https://openalex.org/keywords/ingan","display_name":"InGaN","score":0.6510000228881836},{"id":"https://openalex.org/keywords/carbon-nanotubes","display_name":"carbon nanotubes","score":0.7549999952316284},{"id":"https://openalex.org/keywords/diamond","display_name":"diamond","score":0.8379999995231628},{"id":"https://openalex.org/keywords/thin-film-defects","display_name":"thin film defects","score":0.6800000071525574}],"concepts":[{"id":"https://openalex.org/C40003534","wikidata":"https://www.wikidata.org/wiki/Q862228","display_name":"Raman spectroscopy","level":2,"score":0.7541885375976562},{"id":"https://openalex.org/C2778861254","wikidata":"https://www.wikidata.org/wiki/Q912034","display_name":"Spectrograph","level":3,"score":0.7525323629379272},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7339407801628113},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6217755079269409},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5438464879989624},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5166623592376709},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.4862922132015228},{"id":"https://openalex.org/C124967146","wikidata":"https://www.wikidata.org/wiki/Q3457898","display_name":"Spectral resolution","level":3,"score":0.4829272925853729},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.4828951358795166},{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.47251662611961365},{"id":"https://openalex.org/C177562468","wikidata":"https://www.wikidata.org/wiki/Q182893","display_name":"Dispersion (optics)","level":2,"score":0.46145567297935486},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.44988375902175903},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1904079020023346},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11627393960952759},{"id":"https://openalex.org/C4839761","wikidata":"https://www.wikidata.org/wiki/Q212111","display_name":"Spectral line","level":2,"score":0.06942501664161682},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.447382","doi":"https://doi.org/10.1117/12.447382","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.447382","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1649765845","https://openalex.org/W2057427415","https://openalex.org/W2902337176","https://openalex.org/W2086870231","https://openalex.org/W2331549338","https://openalex.org/W2004030616","https://openalex.org/W2026469372","https://openalex.org/W1982376356","https://openalex.org/W4402455416","https://openalex.org/W2586793072"],"abstract_inverted_index":{"Implementation":[0],"of":[1,16,30,41,61,75,95],"higher":[2,33],"spectral":[3,72],"and":[4,44,55,57,93,102],"spatial":[5],"resolution":[6],"in":[7,22,89],"dispersive":[8],"Raman":[9,92],"microscopes,":[10],"including":[11],"access":[12,45],"to":[13,35,46],"a":[14,62],"variety":[15],"excitation":[17],"wavelengths,":[18,69],"has":[19],"proven":[20],"beneficial":[21],"the":[23,39,42],"semiconductor":[24],"industry.":[25],"UV":[26,68],"adaptations":[27],"accommodate":[28],"measurement":[29],"smaller":[31],"defects,":[32],"sensitivity":[34],"thin":[36],"films":[37],"(to":[38],"exclusion":[40],"substrate)":[43],"enhancement":[47],"conditions":[48],"for":[49,67],"materials":[50],"such":[51],"as":[52],"GaN-based":[53],"photodiodes":[54],"lasers,":[56],"diamond.":[58],"The":[59],"availability":[60],"high":[63],"dispersion":[64],"spectrograph,":[65],"especially":[66],"avoids":[70],"compromising":[71],"resolution.":[73],"Examples":[74],"successful":[76],"analysis":[77],"requiring":[78],"longer":[79],"focal":[80],"length,":[81],"mirror-based":[82],"spectrographs":[83],"are":[84],"shown;":[85],"these":[86],"include":[87],"stress":[88],"silicon-based":[90],"devices,":[91],"PL":[94],"InGaN":[96],"(which":[97],"provides":[98],"information":[99],"on":[100],"composition)":[101],"carbon":[103],"nanotube":[104],"studies.":[105]},"counts_by_year":[],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}