{"id":"https://openalex.org/W1980288592","doi":"https://doi.org/10.1016/j.tsf.2011.04.005","title":"Surface morphology and structure of ultra-thin magnesium oxide grown on (100) silicon by atomic layer deposition oxidation","display_name":"Surface morphology and structure of ultra-thin magnesium oxide grown on (100) silicon by atomic layer deposition oxidation","publication_year":2011,"publication_date":"2011-04-18","ids":{"openalex":"https://openalex.org/W1980288592","doi":"https://doi.org/10.1016/j.tsf.2011.04.005","mag":"1980288592"},"language":"en","primary_location":{"id":"doi:10.1016/j.tsf.2011.04.005","doi":"https://doi.org/10.1016/j.tsf.2011.04.005","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.tsf.2011.04.005","pdf_url":null,"source":{"id":"https://openalex.org/S84339699","display_name":"Thin Solid Films","issn_l":"0040-6090","issn":["0040-6090","1879-2731"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Thin Solid Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5044523940","display_name":"Nabil Rochdi","orcid":"https://orcid.org/0000-0002-7303-1065","observed_orcids":["https://orcid.org/0000-0002-7303-1065"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210160450","display_name":"Centre Interdisciplinaire de Nanoscience de Marseille","ror":"https://ror.org/0550dmh35","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"N. Rochdi","raw_affiliation_strings":["Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]},{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055436450","display_name":"K. Liudvikouskaya","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I7452641","display_name":"Belarusian State University of Informatics and Radioelectronics","ror":"https://ror.org/02sehzp52","country_code":"BY","type":"education","lineage":["https://openalex.org/I7452641"]}],"countries":["BY"],"is_corresponding":false,"raw_author_name":"K. Liudvikouskaya","raw_affiliation_strings":["Belarusian State University of Informatics and Radioelectronics, P. Browka 6, 220013 Minsk, Belarus","Belarusian State University of Informatics and Radioelectronics, P. Browka 6, 220013 Minsk, Belarus#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Belarusian State University of Informatics and Radioelectronics, P. Browka 6, 220013 Minsk, Belarus","institution_ids":["https://openalex.org/I7452641"]},{"raw_affiliation_string":"Belarusian State University of Informatics and Radioelectronics, P. Browka 6, 220013 Minsk, Belarus#TAB#","institution_ids":["https://openalex.org/I7452641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008206182","display_name":"Marion Descoins","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210160450","display_name":"Centre Interdisciplinaire de Nanoscience de Marseille","ror":"https://ror.org/0550dmh35","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Descoins","raw_affiliation_strings":["Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]},{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042680078","display_name":"Mahfoudh Ra\u00efssi","orcid":"https://orcid.org/0000-0001-6237-8701","observed_orcids":["https://orcid.org/0000-0001-6237-8701"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210160450","display_name":"Centre Interdisciplinaire de Nanoscience de Marseille","ror":"https://ror.org/0550dmh35","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Ra\u00efssi","raw_affiliation_strings":["Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]},{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069417443","display_name":"C. Coudreau","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210160450","display_name":"Centre Interdisciplinaire de Nanoscience de Marseille","ror":"https://ror.org/0550dmh35","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Coudreau","raw_affiliation_strings":["Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]},{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029641703","display_name":"J.\u2010L. Lazzari","orcid":"https://orcid.org/0000-0002-3315-2663","observed_orcids":["https://orcid.org/0000-0002-3315-2663"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210160450","display_name":"Centre Interdisciplinaire de Nanoscience de Marseille","ror":"https://ror.org/0550dmh35","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J.-L. Lazzari","raw_affiliation_strings":["Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]},{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079402174","display_name":"Hamid Oughaddou","orcid":"https://orcid.org/0000-0003-2296-5922","observed_orcids":["https://orcid.org/0000-0003-2296-5922"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210091594","display_name":"Institut Rayonnement-Mati\u00e8re de Saclay","ror":"https://ror.org/00cch2r34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210091594","https://openalex.org/I4210113668"]},{"id":"https://openalex.org/I4387155829","display_name":"Universit\u00e9 de Cergy-Pontoise","ror":"https://ror.org/03vs46t66","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210142324","https://openalex.org/I4387155829"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"H. Oughaddou","raw_affiliation_strings":["Commissariat \u00e0 l'Energie Atomique, DSM-IRAMIS-SPCSI, B\u00e2t. 462, Saclay, 91191, Gif-sur-Yvette cedex, France","Universit\u00e9 de Cergy-Pontoise, LAMAp, 95000 Cergy-Pontoise cedex, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Commissariat \u00e0 l'Energie Atomique, DSM-IRAMIS-SPCSI, B\u00e2t. 462, Saclay, 91191, Gif-sur-Yvette cedex, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210091594"]},{"raw_affiliation_string":"Universit\u00e9 de Cergy-Pontoise, LAMAp, 95000 Cergy-Pontoise cedex, France","institution_ids":["https://openalex.org/I4387155829"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111421904","display_name":"Fran\u00e7ois Arnaud d'Avitaya","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210160450","display_name":"Centre Interdisciplinaire de Nanoscience de Marseille","ror":"https://ror.org/0550dmh35","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"F. Arnaud D'Avitaya","raw_affiliation_strings":["Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universit\u00e9, Case 913, Campus de Luminy, 13288 Marseille cedex 9, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]},{"raw_affiliation_string":"Centre Interdisciplinaire de Nanoscience de Marseille (CINaM), CNRS UPR 3118, Aix-Marseille Universite, Case 913, Campus de Luminy, 13288 Marseille cedex 9 (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5044523940"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210160450"],"apc_list":{"value":3120,"currency":"USD","value_usd":3120},"apc_paid":null,"fwci":0.2167,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.59838244,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":97},"biblio":{"volume":"519","issue":"19","first_page":"6302","last_page":"6306"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9735999703407288,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9735999703407288,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13531","display_name":"Surface and Thin Film Phenomena","score":0.005799999926239252,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.004100000020116568,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/magnesium-oxide","display_name":"magnesium oxide","score":0.7609999775886536},{"id":"https://openalex.org/keywords/ultrathin-oxide-films","display_name":"ultrathin oxide films","score":0.8090000152587891},{"id":"https://openalex.org/keywords/silicon-100-surface","display_name":"silicon (100) surface","score":0.7870000004768372},{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"atomic layer deposition","score":0.8019999861717224},{"id":"https://openalex.org/keywords/oxidation","display_name":"oxidation","score":0.6589999794960022},{"id":"https://openalex.org/keywords/surface-reconstruction","display_name":"surface reconstruction","score":0.8949999809265137},{"id":"https://openalex.org/keywords/hydrogen-terminated-silicon","display_name":"hydrogen-terminated silicon","score":0.7870000004768372},{"id":"https://openalex.org/keywords/mgo-dissolution","display_name":"MgO dissolution","score":0.7850000262260437},{"id":"https://openalex.org/keywords/surface-morphology","display_name":"surface morphology","score":0.48899999260902405}],"concepts":[{"id":"https://openalex.org/C543218039","wikidata":"https://www.wikidata.org/wiki/Q660","display_name":"Magnesium","level":2,"score":0.7515268921852112},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.7116313576698303},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.614136815071106},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.5988142490386963},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.5757400989532471},{"id":"https://openalex.org/C88380143","wikidata":"https://www.wikidata.org/wiki/Q416674","display_name":"Dissolution","level":2,"score":0.5482455492019653},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.5311267375946045},{"id":"https://openalex.org/C2779476251","wikidata":"https://www.wikidata.org/wiki/Q7515030","display_name":"Silicon oxynitride","level":4,"score":0.47129642963409424},{"id":"https://openalex.org/C7070889","wikidata":"https://www.wikidata.org/wiki/Q902488","display_name":"Monolayer","level":2,"score":0.47119972109794617},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.4580066204071045},{"id":"https://openalex.org/C2779105228","wikidata":"https://www.wikidata.org/wiki/Q2286029","display_name":"Silicon oxide","level":4,"score":0.44142186641693115},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4407416880130768},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.42878830432891846},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.4210721552371979},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.3621706962585449},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3463316559791565},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.32347652316093445},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.254158079624176},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.177228182554245},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1016/j.tsf.2011.04.005","doi":"https://doi.org/10.1016/j.tsf.2011.04.005","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.tsf.2011.04.005","pdf_url":null,"source":{"id":"https://openalex.org/S84339699","display_name":"Thin Solid Films","issn_l":"0040-6090","issn":["0040-6090","1879-2731"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Thin Solid Films","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-00603279v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-00603279","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Thin Solid Films, 2011, 519 (19), pp.6302-6306","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W1971919951","https://openalex.org/W1975690147","https://openalex.org/W1978856335","https://openalex.org/W1984141849","https://openalex.org/W1985385095","https://openalex.org/W1986165255","https://openalex.org/W1989509244","https://openalex.org/W1994798443","https://openalex.org/W2010339750","https://openalex.org/W2010797600","https://openalex.org/W2021156059","https://openalex.org/W2023212843","https://openalex.org/W2023907781","https://openalex.org/W2041354504","https://openalex.org/W2042473487","https://openalex.org/W2042791029","https://openalex.org/W2044368999","https://openalex.org/W2044484232","https://openalex.org/W2046229218","https://openalex.org/W2052978316","https://openalex.org/W2058950575","https://openalex.org/W2061636610","https://openalex.org/W2071477795","https://openalex.org/W2084838123","https://openalex.org/W2091409606","https://openalex.org/W2094701139","https://openalex.org/W2101529310","https://openalex.org/W2138150364"],"related_works":["https://openalex.org/W2094960714","https://openalex.org/W2790443617","https://openalex.org/W2198640838","https://openalex.org/W7033992041","https://openalex.org/W7147086132","https://openalex.org/W2078688127","https://openalex.org/W2008299253","https://openalex.org/W1969601663","https://openalex.org/W2168441813","https://openalex.org/W2049945085"],"abstract_inverted_index":null,"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":4},{"year":2018,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}