{"id":"https://openalex.org/W1978674904","doi":"https://doi.org/10.1063/1.2356850","title":"Wideband and hysteresis-free regulation of piezoelectric actuator based on induced current for high-speed scanning probe microscopy","display_name":"Wideband and hysteresis-free regulation of piezoelectric actuator based on induced current for high-speed scanning probe microscopy","publication_year":2006,"publication_date":"2006-10-01","ids":{"openalex":"https://openalex.org/W1978674904","doi":"https://doi.org/10.1063/1.2356850","mag":"1978674904"},"language":"en","primary_location":{"id":"doi:10.1063/1.2356850","doi":"https://doi.org/10.1063/1.2356850","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.2356850","pdf_url":null,"source":{"id":"https://openalex.org/S31010182","display_name":"Review of Scientific Instruments","issn_l":"0034-6748","issn":["0034-6748","1089-7623","1527-2400"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Review of Scientific Instruments","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5024701451","display_name":"Masami Kageshima","orcid":"https://orcid.org/0000-0002-9146-2096","observed_orcids":["https://orcid.org/0000-0002-9146-2096"]},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masami Kageshima","raw_affiliation_strings":["CREST Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and CREST, Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CREST Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780","https://openalex.org/I98285908"]},{"raw_affiliation_string":"Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and CREST, Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780","https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011202234","display_name":"Shinsuke Togo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shinsuke Togo","raw_affiliation_strings":["Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113055466","display_name":"Yan Jun Li","orcid":"https://orcid.org/0000-0001-7845-326X","observed_orcids":["https://orcid.org/0000-0001-7845-326X"]},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yan Jun Li","raw_affiliation_strings":["CREST Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and CREST, Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CREST Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780","https://openalex.org/I98285908"]},{"raw_affiliation_string":"Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and CREST, Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780","https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022469770","display_name":"Yoshitaka Naitoh","orcid":"https://orcid.org/0000-0001-6420-7682","observed_orcids":["https://orcid.org/0000-0001-6420-7682"]},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshitaka Naitoh","raw_affiliation_strings":["CREST Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and CREST, Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CREST Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780","https://openalex.org/I98285908"]},{"raw_affiliation_string":"Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and CREST, Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780","https://openalex.org/I98285908"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071929627","display_name":"Yasuhiro Sugawara","orcid":"https://orcid.org/0000-0002-1233-5313","observed_orcids":["https://orcid.org/0000-0002-1233-5313"]},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]},{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yasuhiro Sugawara","raw_affiliation_strings":["CREST Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and CREST, Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CREST Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780"]},{"raw_affiliation_string":"Osaka University Department of Applied Physics, Graduate School of Engineering, , 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and , Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780","https://openalex.org/I98285908"]},{"raw_affiliation_string":"Department of Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan and CREST, Japan Science and Technology Agency, Kawaguchi Center Bldg., 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan","institution_ids":["https://openalex.org/I4210086780","https://openalex.org/I98285908"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.2366,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.83898544,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"77","issue":"10","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectric-actuators","display_name":"piezoelectric actuators","score":0.9459999799728394},{"id":"https://openalex.org/keywords/velocity-feedback-control","display_name":"velocity feedback","score":0.7139999866485596},{"id":"https://openalex.org/keywords/hysteresis-compensation","display_name":"hysteresis compensation","score":0.8970000147819519},{"id":"https://openalex.org/keywords/resonance-compensation","display_name":"resonance compensation","score":0.7250000238418579},{"id":"https://openalex.org/keywords/feedback-control","display_name":"feedback control","score":0.7609999775886536},{"id":"https://openalex.org/keywords/scanning-probe-microscopy","display_name":"scanning probe microscopy","score":0.7770000100135803},{"id":"https://openalex.org/keywords/high-speed-scanning","display_name":"high-speed scanning","score":0.6899999976158142},{"id":"https://openalex.org/keywords/piezoelectric-stack-actuator","display_name":"piezoelectric stack","score":0.8289999961853027},{"id":"https://openalex.org/keywords/operational-amplifier-circuits","display_name":"operational amplifier circuits","score":0.6669999957084656},{"id":"https://openalex.org/keywords/displacement-feedback","display_name":"displacement feedback","score":0.6589999794960022}],"concepts":[{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.7844666242599487},{"id":"https://openalex.org/C2780202535","wikidata":"https://www.wikidata.org/wiki/Q4524457","display_name":"Wideband","level":2,"score":0.7373346090316772},{"id":"https://openalex.org/C123299182","wikidata":"https://www.wikidata.org/wiki/Q190837","display_name":"Hysteresis","level":2,"score":0.6817660927772522},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.5975964069366455},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.585464358329773},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5279271602630615},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5158585906028748},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4851432740688324},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.47744637727737427},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.4409328103065491},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.42381733655929565},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28441351652145386},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2833334803581238},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2111714482307434},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.16078203916549683},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.10760095715522766},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.10042497515678406},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08727341890335083},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.08518558740615845},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.2356850","doi":"https://doi.org/10.1063/1.2356850","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.2356850","pdf_url":null,"source":{"id":"https://openalex.org/S31010182","display_name":"Review of Scientific Instruments","issn_l":"0034-6748","issn":["0034-6748","1089-7623","1527-2400"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Review of Scientific Instruments","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1968498274","https://openalex.org/W1988970245","https://openalex.org/W1995571561","https://openalex.org/W1998099464","https://openalex.org/W2024060504","https://openalex.org/W2043985362","https://openalex.org/W2063214469","https://openalex.org/W2068604503","https://openalex.org/W2092300894","https://openalex.org/W2167235502"],"related_works":["https://openalex.org/W214793071","https://openalex.org/W2148009876","https://openalex.org/W2616091699","https://openalex.org/W2012731066","https://openalex.org/W2147179583","https://openalex.org/W2123372955","https://openalex.org/W4205534077","https://openalex.org/W174973342","https://openalex.org/W2052793300","https://openalex.org/W2035823185"],"abstract_inverted_index":{"A":[0],"novel":[1],"closed-loop":[2],"regulation":[3],"of":[4,20,25,51,61,71,123,140],"a":[5,57,101,109],"piezoelectric":[6,66],"actuator":[7,73,125,142],"is":[8],"presented":[9],"to":[10,42,106,134,143],"implement":[11],"wideband":[12],"and":[13,34,47,64,146],"hysteresis-free":[14],"motion":[15],"required":[16],"for":[17],"high-speed":[18],"operation":[19],"scanning":[21],"probe":[22],"microscopy.":[23],"Velocity":[24],"the":[26,31,38,45,52,72,80,93,124,141,154],"actuator\u2019s":[27,81],"displacement":[28,39,82,91,139],"detected":[29],"via":[30],"induced":[32],"current":[33],"its":[35],"integration":[36],"giving":[37],"were":[40],"used":[41],"actively":[43],"compensate":[44],"resonances":[46],"hysteresis.":[48],"The":[49,68],"validity":[50],"idea":[53],"was":[54,76,96,112,132],"demonstrated":[55],"using":[56],"prototype":[58],"circuit":[59],"composed":[60],"operational":[62],"amplifiers":[63],"multilayered":[65],"actuators.":[67],"fundamental":[69],"resonance":[70],"at":[74],"260kHz":[75],"completely":[77],"eliminated":[78],"from":[79,104,153],"with":[83,127],"an":[84,89,128],"appropriate":[85],"velocity":[86],"feedback.":[87],"With":[88],"additional":[90],"feedback":[92],"gain":[94],"error":[95],"suppressed":[97,133],"within":[98],"\u00b15dB":[99],"over":[100],"frequency":[102],"range":[103],"dc":[105],"1MHz,":[107],"while":[108],"\u221245\u00b0":[110],"bandwidth":[111],"also":[113],"maintained":[114],"as":[115,117],"wide":[116],"250kHz.":[118],"In":[119],"addition,":[120],"intrinsic":[121],"hysteresis":[122],"measured":[126],"8kHz":[129],"sinusoidal":[130],"signal":[131],"below":[135],"1%.":[136],"Responses":[137],"in":[138],"burst":[144],"oscillation":[145],"square":[147],"wave":[148],"inputs":[149],"exhibited":[150],"clear":[151],"improvement":[152],"uncompensated":[155],"responses.":[156]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2016-06-24T00:00:00"}