{"id":"https://openalex.org/W1975972969","doi":"https://doi.org/10.1108/15982688200200004","title":"Screening Synchronously Occurred Multiple Abnormal Quality Characteristics in a Silicon Wafer Slicing Process","display_name":"Screening Synchronously Occurred Multiple Abnormal Quality Characteristics in a Silicon Wafer Slicing Process","publication_year":2002,"publication_date":"2002-04-17","ids":{"openalex":"https://openalex.org/W1975972969","doi":"https://doi.org/10.1108/15982688200200004","mag":"1975972969"},"language":"en","primary_location":{"id":"doi:10.1108/15982688200200004","doi":"https://doi.org/10.1108/15982688200200004","is_oa":false,"landing_page_url":"https://doi.org/10.1108/15982688200200004","pdf_url":null,"source":{"id":"https://openalex.org/S26927318","display_name":"Asian Journal on Quality","issn_l":"1598-2688","issn":["1598-2688","2054-555X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core"],"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Asian Journal on Quality","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063521794","display_name":"Chin\u2010Tsai Lin","orcid":"https://orcid.org/0000-0003-2994-450X","observed_orcids":["https://orcid.org/0000-0003-2994-450X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Chin\u2010Tsai Lin","raw_affiliation_strings":["Department of Management Information, Yunapei Institute of Science"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Management Information, Yunapei Institute of Science","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061663220","display_name":"Chie\u2010Bein Chen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I33096239","display_name":"National Dong Hwa University","ror":"https://ror.org/00mng9617","country_code":"TW","type":"education","lineage":["https://openalex.org/I33096239"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chie\u2010Bein Chen","raw_affiliation_strings":["Institute of International Business, National Dong Hwa University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of International Business, National Dong Hwa University","institution_ids":["https://openalex.org/I33096239"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5027156929","display_name":"Che\u2010Wei Chang","orcid":"https://orcid.org/0000-0002-3675-4512","observed_orcids":["https://orcid.org/0000-0002-3675-4512"]},"institutions":[{"id":"https://openalex.org/I192703390","display_name":"Ming Chuan University","ror":"https://ror.org/02pgvzy25","country_code":"TW","type":"education","lineage":["https://openalex.org/I192703390"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Che\u2010Wei Chang","raw_affiliation_strings":["Graduate Institute of Management Science, Ming Chaun University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate Institute of Management Science, Ming Chaun University","institution_ids":["https://openalex.org/I192703390"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.0526,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.79518304,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"3","issue":"1","first_page":"48","last_page":"60"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12905","display_name":"Management Systems and Quality Improvement","score":0.0,"subfield":{"id":"https://openalex.org/subfields/1408","display_name":"Strategy and Management"},"field":{"id":"https://openalex.org/fields/14","display_name":"Business, Management and Accounting"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-wafer-slicing","display_name":"silicon wafer slicing","score":0.9879999756813049},{"id":"https://openalex.org/keywords/sawing","display_name":"sawing","score":0.753000020980835},{"id":"https://openalex.org/keywords/multiple-quality-characteristics","display_name":"multiple quality characteristics","score":0.8859999775886536},{"id":"https://openalex.org/keywords/wafer-thickness","display_name":"wafer thickness","score":0.7950000166893005},{"id":"https://openalex.org/keywords/process-monitoring","display_name":"process monitoring","score":0.5149999856948853}],"concepts":[{"id":"https://openalex.org/C74746147","wikidata":"https://www.wikidata.org/wiki/Q5324652","display_name":"EWMA chart","level":4,"score":0.9075742363929749},{"id":"https://openalex.org/C196985124","wikidata":"https://www.wikidata.org/wiki/Q1369242","display_name":"Control chart","level":3,"score":0.7579053640365601},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7015389800071716},{"id":"https://openalex.org/C2776190703","wikidata":"https://www.wikidata.org/wiki/Q488148","display_name":"Slicing","level":2,"score":0.6759014129638672},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6426777839660645},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5465202331542969},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.5403014421463013},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.5389874577522278},{"id":"https://openalex.org/C190812933","wikidata":"https://www.wikidata.org/wiki/Q28923","display_name":"Chart","level":2,"score":0.48020753264427185},{"id":"https://openalex.org/C155386361","wikidata":"https://www.wikidata.org/wiki/Q1649571","display_name":"Process control","level":3,"score":0.4272868037223816},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.3838239908218384},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.16236913204193115},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.15694090723991394},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14383473992347717},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C136764020","wikidata":"https://www.wikidata.org/wiki/Q466","display_name":"World Wide Web","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1108/15982688200200004","doi":"https://doi.org/10.1108/15982688200200004","is_oa":false,"landing_page_url":"https://doi.org/10.1108/15982688200200004","pdf_url":null,"source":{"id":"https://openalex.org/S26927318","display_name":"Asian Journal on Quality","issn_l":"1598-2688","issn":["1598-2688","2054-555X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core"],"host_organization":"https://openalex.org/P4310319811","host_organization_name":"Emerald Publishing Limited","host_organization_lineage":["https://openalex.org/P4310319811"],"host_organization_lineage_names":["Emerald Publishing Limited"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Asian Journal on Quality","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2052423160","https://openalex.org/W2064215184","https://openalex.org/W2345714568","https://openalex.org/W2062117544","https://openalex.org/W2037414131","https://openalex.org/W1606040274","https://openalex.org/W1968797898","https://openalex.org/W2022751805","https://openalex.org/W2898539653","https://openalex.org/W1977698405"],"abstract_inverted_index":{"Silicon":[0],"wafer":[1],"slicing":[2],"manufacturing":[3,78],"process":[4,27,40,88,163],"exhibits":[5],"several":[6,42],"characteristics.":[7],"They":[8],"are:":[9],"(1)":[10],"the":[11,26,39,77,86,93,105,118,123,131,141,162],"product":[12],"type":[13],"is":[14,30,36,67,101,114,137,157,165],"small":[15],"batch":[16],"production,":[17],"(2)":[18],"saw":[19],"cutting":[20],"must":[21,56],"be":[22,57],"very":[23],"precise,":[24],"(3)":[25],"run":[28],"time":[29],"long,":[31],"and":[32,53,60,143],"(4)":[33],"inspecting":[34],"samples":[35,84],"difficult.":[37],"Furthermore,":[38],"involves":[41],"synchronously":[43,124],"occurred":[44,125],"multiple":[45,64,126],"quality":[46,65,74,94,107,120,127,164],"characteristics,":[47],"such":[48],"as":[49],"thickness":[50],"(THK),":[51],"bow":[52],"warp,":[54],"which":[55],"closely":[58],"monitored":[59],"controlled.":[61],"Synchronously":[62],"monitoring":[63,71],"characteristics":[66,128],"more":[68,166],"expensive":[69],"than":[70],"a":[72,134],"single":[73],"characteristic":[75,121],"in":[76,85],"process.":[79,132],"The":[80,149],"sizes":[81],"of":[82,145],"inspected":[83],"existing":[87],"are":[89],"difficult":[90],"to":[91,103,116,129,139,159],"maintain":[92],"control":[95,108,155],"chart.":[96,109],"Grey":[97,110],"situation":[98,111],"decision":[99,112,147],"method":[100,113],"used":[102,115,158],"screen":[104,117],"worst":[106,119],"from":[122],"monitor":[130],"Finally,":[133],"case":[135],"study":[136],"presented":[138],"demonstrate":[140],"feasibility":[142],"effectiveness":[144],"proposed":[146],"method.":[148],"exponential":[150],"weighted":[151],"moving":[152],"average":[153],"(EWMA)":[154],"chart":[156],"verify":[160],"that":[161],"reliable.":[167]},"counts_by_year":[],"updated_date":"2026-08-12T21:12:35.861297","created_date":"2016-06-24T00:00:00"}