{"id":"https://openalex.org/W1973459136","doi":"https://doi.org/10.1016/j.sna.2014.05.031","title":"A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges","display_name":"A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges","publication_year":2014,"publication_date":"2014-06-06","ids":{"openalex":"https://openalex.org/W1973459136","doi":"https://doi.org/10.1016/j.sna.2014.05.031","mag":"1973459136"},"language":"en","primary_location":{"id":"doi:10.1016/j.sna.2014.05.031","doi":"https://doi.org/10.1016/j.sna.2014.05.031","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.sna.2014.05.031","pdf_url":null,"source":{"id":"https://openalex.org/S16945967","display_name":"Sensors and Actuators A Physical","issn_l":"0924-4247","issn":["0924-4247","1873-3069"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors and Actuators A: Physical","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5021712995","display_name":"Xian Li Huang","orcid":"https://orcid.org/0000-0002-8788-9185","observed_orcids":["https://orcid.org/0000-0002-8788-9185"]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xian Huang","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, PR China","Shenzhen Graduate School, Peking University, Shenzhen, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, PR China","institution_ids":["https://openalex.org/I20231570"]},{"raw_affiliation_string":"Shenzhen Graduate School, Peking University, Shenzhen, PR China","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064674645","display_name":"Dacheng Zhang","orcid":"https://orcid.org/0000-0002-3614-6605","observed_orcids":["https://orcid.org/0000-0002-3614-6605","https://orcid.org/0000-0002-7165-367X"]},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Dacheng Zhang","raw_affiliation_strings":["Institute of Microelectronics, Peking University, Beijing, PR China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Peking University, Beijing, PR China","institution_ids":["https://openalex.org/I20231570"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5064674645"],"corresponding_institution_ids":["https://openalex.org/I20231570"],"apc_list":{"value":3750,"currency":"USD","value_usd":3750},"apc_paid":null,"fwci":4.2467,"has_fulltext":false,"cited_by_count":129,"citation_normalized_percentile":{"value":0.94318114,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":100},"biblio":{"volume":"216","issue":null,"first_page":"176","last_page":"189"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.0,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-pressure-sensor","display_name":"piezoresistive pressure sensor","score":0.9710000157356262},{"id":"https://openalex.org/keywords/low-pressure-sensing","display_name":"low-pressure sensing","score":0.8050000071525574},{"id":"https://openalex.org/keywords/resonant-frequency","display_name":"resonant frequency","score":0.6510000228881836},{"id":"https://openalex.org/keywords/mems-pressure-sensor","display_name":"MEMS pressure sensor","score":0.6330000162124634}],"concepts":[{"id":"https://openalex.org/C164292776","wikidata":"https://www.wikidata.org/wiki/Q5271779","display_name":"Diaphragm (acoustics)","level":3,"score":0.752206563949585},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.7356709241867065},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.7026665210723877},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6990761160850525},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.6531094312667847},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6364607810974121},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.47685444355010986},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.46435168385505676},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.44070667028427124},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.41875195503234863},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.33696019649505615},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.25722500681877136},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2306477129459381},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.20650887489318848},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.1815955936908722},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.12189075350761414},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07752111554145813},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/j.sna.2014.05.031","doi":"https://doi.org/10.1016/j.sna.2014.05.031","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.sna.2014.05.031","pdf_url":null,"source":{"id":"https://openalex.org/S16945967","display_name":"Sensors and Actuators A Physical","issn_l":"0924-4247","issn":["0924-4247","1873-3069"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors and Actuators A: Physical","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"id":"https://metadata.un.org/sdg/14","display_name":"Life below water","score":0.8100000023841858}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W1973468826","https://openalex.org/W1974266516","https://openalex.org/W1981156881","https://openalex.org/W1990260760","https://openalex.org/W1994945485","https://openalex.org/W2002257666","https://openalex.org/W2023759381","https://openalex.org/W2031960932","https://openalex.org/W2035394251","https://openalex.org/W2057991348","https://openalex.org/W2071364586","https://openalex.org/W2108656687","https://openalex.org/W2113285583","https://openalex.org/W2128303997","https://openalex.org/W2153098667","https://openalex.org/W2159233708","https://openalex.org/W2160741644","https://openalex.org/W3034530591"],"related_works":["https://openalex.org/W2077068968","https://openalex.org/W2027058450","https://openalex.org/W3187805083","https://openalex.org/W2083806491","https://openalex.org/W2012818309","https://openalex.org/W2341838124","https://openalex.org/W2290642979","https://openalex.org/W2783517744","https://openalex.org/W2610526373","https://openalex.org/W2232750050"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":7},{"year":2025,"cited_by_count":10},{"year":2024,"cited_by_count":14},{"year":2023,"cited_by_count":8},{"year":2022,"cited_by_count":15},{"year":2021,"cited_by_count":20},{"year":2020,"cited_by_count":13},{"year":2019,"cited_by_count":7},{"year":2018,"cited_by_count":10},{"year":2017,"cited_by_count":8},{"year":2016,"cited_by_count":9},{"year":2015,"cited_by_count":5},{"year":2014,"cited_by_count":2}],"updated_date":"2026-11-01T11:40:01.658920","created_date":"2016-06-24T00:00:00"}