{"id":"https://openalex.org/W1973265319","doi":"https://doi.org/10.1021/cm0104304","title":"Design, Synthesis, and Characterization of Carbon-Rich Cyclopolymers for 193 nm Microlithography","display_name":"Design, Synthesis, and Characterization of Carbon-Rich Cyclopolymers for 193 nm Microlithography","publication_year":2001,"publication_date":"2001-10-09","ids":{"openalex":"https://openalex.org/W1973265319","doi":"https://doi.org/10.1021/cm0104304","mag":"1973265319"},"language":"en","primary_location":{"id":"doi:10.1021/cm0104304","doi":"https://doi.org/10.1021/cm0104304","is_oa":false,"landing_page_url":"https://doi.org/10.1021/cm0104304","pdf_url":null,"source":{"id":"https://openalex.org/S66104727","display_name":"Chemistry of Materials","issn_l":"0897-4756","issn":["0897-4756","1520-5002"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320006","host_organization_name":"American Chemical Society","host_organization_lineage":["https://openalex.org/P4310320006"],"host_organization_lineage_names":["American Chemical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Chemistry of Materials","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5035923317","display_name":"Dario Pasini","orcid":"https://orcid.org/0000-0002-8273-3798","observed_orcids":["https://orcid.org/0000-0002-8273-3798"]},"institutions":[{"id":"https://openalex.org/I148283060","display_name":"Lawrence Berkeley National Laboratory","ror":"https://ror.org/02jbv0t02","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I148283060","https://openalex.org/I39565521"]},{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dario Pasini","raw_affiliation_strings":["Center for New Directions in Organic Synthesis, Department of Chemistry, University of California, Berkeley, California 94720-1460, and Division of Materials Science, Lawrence Berkeley National Laboratory, Berkeley, California"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for New Directions in Organic Synthesis, Department of Chemistry, University of California, Berkeley, California 94720-1460, and Division of Materials Science, Lawrence Berkeley National Laboratory, Berkeley, California","institution_ids":["https://openalex.org/I148283060","https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059981404","display_name":"John M. Klopp","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I148283060","display_name":"Lawrence Berkeley National Laboratory","ror":"https://ror.org/02jbv0t02","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I148283060","https://openalex.org/I39565521"]},{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"John M. Klopp","raw_affiliation_strings":["Center for New Directions in Organic Synthesis, Department of Chemistry, University of California, Berkeley, California 94720-1460, and Division of Materials Science, Lawrence Berkeley National Laboratory, Berkeley, California"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for New Directions in Organic Synthesis, Department of Chemistry, University of California, Berkeley, California 94720-1460, and Division of Materials Science, Lawrence Berkeley National Laboratory, Berkeley, California","institution_ids":["https://openalex.org/I148283060","https://openalex.org/I95457486"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5002152167","display_name":"Jean M. J. Fr\u00e9chet","orcid":"https://orcid.org/0000-0001-6419-0163","observed_orcids":["https://orcid.org/0000-0001-6419-0163"]},"institutions":[{"id":"https://openalex.org/I148283060","display_name":"Lawrence Berkeley National Laboratory","ror":"https://ror.org/02jbv0t02","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I148283060","https://openalex.org/I39565521"]},{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Jean M. J. Fr\u00e9chet","raw_affiliation_strings":["Center for New Directions in Organic Synthesis, Department of Chemistry, University of California, Berkeley, California 94720-1460, and Division of Materials Science, Lawrence Berkeley National Laboratory, Berkeley, California"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for New Directions in Organic Synthesis, Department of Chemistry, University of California, Berkeley, California 94720-1460, and Division of Materials Science, Lawrence Berkeley National Laboratory, Berkeley, California","institution_ids":["https://openalex.org/I148283060","https://openalex.org/I95457486"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5002152167"],"corresponding_institution_ids":["https://openalex.org/I148283060","https://openalex.org/I95457486"],"apc_list":{"value":4500,"currency":"USD","value_usd":4500},"apc_paid":null,"fwci":2.0916,"has_fulltext":false,"cited_by_count":43,"citation_normalized_percentile":{"value":0.85757881,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"13","issue":"11","first_page":"4136","last_page":"4146"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9595000147819519,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9595000147819519,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10405","display_name":"Advanced Polymer Synthesis and Characterization","score":0.019700000062584877,"subfield":{"id":"https://openalex.org/subfields/1605","display_name":"Organic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12570","display_name":"Photopolymerization techniques and applications","score":0.006899999920278788,"subfield":{"id":"https://openalex.org/subfields/1605","display_name":"Organic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cyclopolymers","display_name":"cyclopolymers","score":0.9850000143051147},{"id":"https://openalex.org/keywords/photoresist","display_name":"photoresist","score":0.8960000276565552},{"id":"https://openalex.org/keywords/cyclopolymerization","display_name":"cyclopolymerization","score":0.9399999976158142},{"id":"https://openalex.org/keywords/optical-transparency","display_name":"optical transparency","score":0.8740000128746033},{"id":"https://openalex.org/keywords/acrylate-monomers","display_name":"acrylate monomers","score":0.7229999899864197},{"id":"https://openalex.org/keywords/olefinic-double-bonds","display_name":"olefinic double bonds","score":0.8949999809265137},{"id":"https://openalex.org/keywords/maleic-anhydride","display_name":"maleic anhydride","score":0.8569999933242798},{"id":"https://openalex.org/keywords/acrylic-acid","display_name":"acrylic acid","score":0.9089999794960022},{"id":"https://openalex.org/keywords/molecular-weight-control","display_name":"molecular weight control","score":0.796999990940094},{"id":"https://openalex.org/keywords/photoresist-synthesis","display_name":"photoresist synthesis","score":0.5879999995231628}],"concepts":[{"id":"https://openalex.org/C2780443040","wikidata":"https://www.wikidata.org/wiki/Q3737863","display_name":"Bifunctional","level":3,"score":0.8045814037322998},{"id":"https://openalex.org/C134406635","wikidata":"https://www.wikidata.org/wiki/Q1439684","display_name":"Photoresist","level":3,"score":0.7824407815933228},{"id":"https://openalex.org/C166940927","wikidata":"https://www.wikidata.org/wiki/Q178827","display_name":"Monomer","level":3,"score":0.6825375556945801},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6497567892074585},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6230651140213013},{"id":"https://openalex.org/C188027245","wikidata":"https://www.wikidata.org/wiki/Q750446","display_name":"Polymer chemistry","level":1,"score":0.5838330388069153},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.48976612091064453},{"id":"https://openalex.org/C2780503075","wikidata":"https://www.wikidata.org/wiki/Q324628","display_name":"Acrylic acid","level":4,"score":0.47026950120925903},{"id":"https://openalex.org/C2777666793","wikidata":"https://www.wikidata.org/wiki/Q412377","display_name":"Maleic anhydride","level":4,"score":0.43282854557037354},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.41777315735816956},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.41172194480895996},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3482220768928528},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.26641395688056946},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.264886736869812},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.22313496470451355},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.19834047555923462},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19771435856819153},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.15310510993003845},{"id":"https://openalex.org/C15920480","wikidata":"https://www.wikidata.org/wiki/Q421281","display_name":"Copolymer","level":3,"score":0.14036279916763306},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.09719982743263245},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1021/cm0104304","doi":"https://doi.org/10.1021/cm0104304","is_oa":false,"landing_page_url":"https://doi.org/10.1021/cm0104304","pdf_url":null,"source":{"id":"https://openalex.org/S66104727","display_name":"Chemistry of Materials","issn_l":"0897-4756","issn":["0897-4756","1520-5002"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320006","host_organization_name":"American Chemical Society","host_organization_lineage":["https://openalex.org/P4310320006"],"host_organization_lineage_names":["American Chemical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Chemistry of Materials","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306084","display_name":"U.S. Department of Energy","ror":"https://ror.org/01bj3aw27"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":39,"referenced_works":["https://openalex.org/W377692183","https://openalex.org/W1967484955","https://openalex.org/W1973103259","https://openalex.org/W1983210868","https://openalex.org/W1988770626","https://openalex.org/W1995528667","https://openalex.org/W1997832827","https://openalex.org/W2001565177","https://openalex.org/W2001796407","https://openalex.org/W2009925624","https://openalex.org/W2011481058","https://openalex.org/W2013450445","https://openalex.org/W2014466059","https://openalex.org/W2015911412","https://openalex.org/W2025484979","https://openalex.org/W2025535879","https://openalex.org/W2026185946","https://openalex.org/W2033163986","https://openalex.org/W2048704392","https://openalex.org/W2056906242","https://openalex.org/W2063334744","https://openalex.org/W2074223027","https://openalex.org/W2074784262","https://openalex.org/W2075639479","https://openalex.org/W2077932107","https://openalex.org/W2078994018","https://openalex.org/W2080267153","https://openalex.org/W2081852577","https://openalex.org/W2082512103","https://openalex.org/W2087193712","https://openalex.org/W2087233928","https://openalex.org/W2094301950","https://openalex.org/W2145930691","https://openalex.org/W2168598996","https://openalex.org/W2317189209","https://openalex.org/W2327575505","https://openalex.org/W2602830748","https://openalex.org/W2608385810","https://openalex.org/W2949732692"],"related_works":["https://openalex.org/W1998527869","https://openalex.org/W2063334744","https://openalex.org/W2014671150","https://openalex.org/W2081852577","https://openalex.org/W1994481720","https://openalex.org/W1983210868","https://openalex.org/W2068595024","https://openalex.org/W2496833779","https://openalex.org/W1964019056","https://openalex.org/W2066862000"],"abstract_inverted_index":{"A":[0],"series":[1],"of":[2,38,58,62,77,88,97],"cyclopolymers":[3],"designed":[4,40],"for":[5],"use":[6],"in":[7],"193":[8,26],"nm":[9,27],"photoresist":[10],"materials":[11,19,65],"has":[12],"been":[13],"synthesized":[14],"and":[15,28,45,54,73],"characterized.":[16],"These":[17],"novel":[18],"that":[20],"provide":[21],"both":[22],"optical":[23],"transparency":[24],"at":[25],"also":[29],"reactive":[30],"ion":[31],"etch":[32,78],"resistance":[33],"are":[34],"obtained":[35],"via":[36],"cyclopolymerization":[37,81],"suitably":[39],"bifunctional":[41],"monomers":[42],"incorporating":[43],"acrylic":[44,101],"olefinic":[46],"double":[47],"bonds.":[48],"The":[49,80],"approach":[50],"is":[51,83],"highly":[52],"versatile":[53],"allows":[55],"the":[56,70,74,89,95,108],"preparation":[57],"a":[59],"broad":[60],"array":[61],"structurally":[63],"related":[64],"with":[66],"different":[67],"substituents":[68],"providing":[69],"imaging":[71],"function":[72],"desired":[75],"level":[76],"resistance.":[79],"process":[82],"experimentally":[84],"forgiving,":[85],"enabling":[86],"control":[87],"molecular":[90],"weight":[91],"as":[92,94,100],"well":[93],"incorporation":[96],"comonomers":[98],"such":[99],"acid":[102],"or":[103],"maleic":[104],"anhydride":[105],"to":[106],"fine-tune":[107],"lithographic":[109],"properties.":[110]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":6},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2012,"cited_by_count":2}],"updated_date":"2026-08-21T09:56:20.448147","created_date":"2016-06-24T00:00:00"}