{"id":"https://openalex.org/W1973165216","doi":"https://doi.org/10.1088/0957-4484/12/3/323","title":"Nanoparticle engineering and control of tin oxide microstructures for chemical microsensor applications","display_name":"Nanoparticle engineering and control of tin oxide microstructures for chemical microsensor applications","publication_year":2001,"publication_date":"2001-08-28","ids":{"openalex":"https://openalex.org/W1973165216","doi":"https://doi.org/10.1088/0957-4484/12/3/323","mag":"1973165216"},"language":"en","primary_location":{"id":"doi:10.1088/0957-4484/12/3/323","doi":"https://doi.org/10.1088/0957-4484/12/3/323","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0957-4484/12/3/323","pdf_url":"https://iopscience.iop.org/article/10.1088/0957-4484/12/3/323/pdf","source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1088/0957-4484/12/3/323/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045373249","display_name":"Balaji Panchapakesan","orcid":"https://orcid.org/0000-0002-0860-3602","observed_orcids":["https://orcid.org/0000-0002-0860-3602"]},"institutions":[{"id":"https://openalex.org/I66946132","display_name":"University of Maryland, College Park","ror":"https://ror.org/047s2c258","country_code":"US","type":"education","lineage":["https://openalex.org/I66946132"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Balaji Panchapakesan","raw_affiliation_strings":["Department of Mechanical Engineering and Institute for Systems Research, University of Maryland, College Park, MD 20742, USA","Department of Mechanical Engineering & Institute for Systems Research, University of Maryland, College Park, MD 20742, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering and Institute for Systems Research, University of Maryland, College Park, MD 20742, USA","institution_ids":["https://openalex.org/I66946132"]},{"raw_affiliation_string":"Department of Mechanical Engineering & Institute for Systems Research, University of Maryland, College Park, MD 20742, USA","institution_ids":["https://openalex.org/I66946132"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023886935","display_name":"Don L. DeVoe","orcid":"https://orcid.org/0000-0002-7740-9993","observed_orcids":["https://orcid.org/0000-0002-7740-9993"]},"institutions":[{"id":"https://openalex.org/I66946132","display_name":"University of Maryland, College Park","ror":"https://ror.org/047s2c258","country_code":"US","type":"education","lineage":["https://openalex.org/I66946132"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Don L DeVoe","raw_affiliation_strings":["Department of Mechanical Engineering and Institute for Systems Research, University of Maryland, College Park, MD 20742, USA","Department of Mechanical Engineering & Institute for Systems Research, University of Maryland, College Park, MD 20742, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering and Institute for Systems Research, University of Maryland, College Park, MD 20742, USA","institution_ids":["https://openalex.org/I66946132"]},{"raw_affiliation_string":"Department of Mechanical Engineering & Institute for Systems Research, University of Maryland, College Park, MD 20742, USA","institution_ids":["https://openalex.org/I66946132"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088892088","display_name":"Mark R Widmaier","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mark R Widmaier","raw_affiliation_strings":["Hitachi Instruments Inc., Gaithersburg, MD 20899, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hitachi Instruments Inc., Gaithersburg, MD 20899, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068825603","display_name":"Richard E. Cavicchi","orcid":"https://orcid.org/0000-0002-2815-1172","observed_orcids":["https://orcid.org/0000-0002-2815-1172"]},"institutions":[{"id":"https://openalex.org/I1321296531","display_name":"National Institute of Standards and Technology","ror":"https://ror.org/05xpvk416","country_code":"US","type":"government","lineage":["https://openalex.org/I1321296531","https://openalex.org/I1343035065"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Richard Cavicchi","raw_affiliation_strings":["Process Measurements Division, Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Process Measurements Division, Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA","institution_ids":["https://openalex.org/I1321296531"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109280384","display_name":"Steve Semancik","orcid":"https://orcid.org/0000-0002-3930-7726","observed_orcids":["https://orcid.org/0000-0002-3930-7726"]},"institutions":[{"id":"https://openalex.org/I1321296531","display_name":"National Institute of Standards and Technology","ror":"https://ror.org/05xpvk416","country_code":"US","type":"government","lineage":["https://openalex.org/I1321296531","https://openalex.org/I1343035065"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Steve Semancik","raw_affiliation_strings":["Process Measurements Division, Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Process Measurements Division, Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA","institution_ids":["https://openalex.org/I1321296531"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":8.7846,"has_fulltext":true,"cited_by_count":94,"citation_normalized_percentile":{"value":0.97914164,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"12","issue":"3","first_page":"336","last_page":"349"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tin-oxide","display_name":"tin oxide","score":0.746999979019165},{"id":"https://openalex.org/keywords/sno2-thin-films","display_name":"SnO2 thin films","score":0.9449999928474426},{"id":"https://openalex.org/keywords/chemical-microsensors","display_name":"chemical microsensors","score":0.8140000104904175},{"id":"https://openalex.org/keywords/grain-size-control","display_name":"grain size control","score":0.8059999942779541},{"id":"https://openalex.org/keywords/micro-hotplate","display_name":"micro-hotplate","score":0.8190000057220459},{"id":"https://openalex.org/keywords/vapor-deposition","display_name":"vapor deposition","score":0.703000009059906},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.824999988079071},{"id":"https://openalex.org/keywords/metal-nanoparticles","display_name":"metal nanoparticles","score":0.5070000290870667},{"id":"https://openalex.org/keywords/ethanol-sensing","display_name":"ethanol gas sensing","score":0.6639999747276306},{"id":"https://openalex.org/keywords/gas-sensing","display_name":"gas sensing","score":0.6769999861717224}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8953521251678467},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.7130976915359497},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.565392255783081},{"id":"https://openalex.org/C192191005","wikidata":"https://www.wikidata.org/wiki/Q466491","display_name":"Grain size","level":2,"score":0.5574135780334473},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.542647659778595},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5157663822174072},{"id":"https://openalex.org/C2780924660","wikidata":"https://www.wikidata.org/wiki/Q205123","display_name":"Tin oxide","level":3,"score":0.5065642595291138},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.48571500182151794},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.47839534282684326},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.46058765053749084},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.4272296130657196},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.2791920304298401},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1088/0957-4484/12/3/323","doi":"https://doi.org/10.1088/0957-4484/12/3/323","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0957-4484/12/3/323","pdf_url":"https://iopscience.iop.org/article/10.1088/0957-4484/12/3/323/pdf","source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1088/0957-4484/12/3/323","doi":"https://doi.org/10.1088/0957-4484/12/3/323","is_oa":true,"landing_page_url":"https://doi.org/10.1088/0957-4484/12/3/323","pdf_url":"https://iopscience.iop.org/article/10.1088/0957-4484/12/3/323/pdf","source":{"id":"https://openalex.org/S206811868","display_name":"Nanotechnology","issn_l":"0957-4484","issn":["0957-4484","1361-6528"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-2","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Nanotechnology","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306084","display_name":"U.S. Department of Energy","ror":"https://ror.org/01bj3aw27"},{"id":"https://openalex.org/F4320332178","display_name":"National Institute of Standards and Technology","ror":"https://ror.org/05xpvk416"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1973165216.pdf","grobid_xml":"https://content.openalex.org/works/W1973165216.grobid-xml"},"referenced_works_count":28,"referenced_works":["https://openalex.org/W1514427291","https://openalex.org/W1972036934","https://openalex.org/W1973486492","https://openalex.org/W1973774524","https://openalex.org/W1981082036","https://openalex.org/W1986440288","https://openalex.org/W1987609776","https://openalex.org/W1994375804","https://openalex.org/W2007061422","https://openalex.org/W2008907613","https://openalex.org/W2010950172","https://openalex.org/W2017596751","https://openalex.org/W2018178206","https://openalex.org/W2030484161","https://openalex.org/W2031271802","https://openalex.org/W2034406197","https://openalex.org/W2038187145","https://openalex.org/W2079225902","https://openalex.org/W2080269426","https://openalex.org/W2081170610","https://openalex.org/W2081367274","https://openalex.org/W2091054976","https://openalex.org/W2105048743","https://openalex.org/W2105490625","https://openalex.org/W2135146850","https://openalex.org/W2149823471","https://openalex.org/W2157955844","https://openalex.org/W2330990357"],"related_works":["https://openalex.org/W2151198200","https://openalex.org/W1976850117","https://openalex.org/W2149823471","https://openalex.org/W7020841941","https://openalex.org/W2030419782","https://openalex.org/W4206853692","https://openalex.org/W1983790940","https://openalex.org/W2021093623","https://openalex.org/W4389720851","https://openalex.org/W2889694779"],"abstract_inverted_index":{"The":[0,27,155],"use":[1,115],"of":[2,12,41,46,75,109,116,149,162,185,199,217,225,228,246],"metal":[3],"nanoparticles":[4],"as":[5,120,124],"seed":[6,125,164],"layers":[7,126,165],"for":[8,127,152,190],"controlling":[9],"the":[10,39,59,90,99,106,110,114,147,163,170,183,197,215],"microstructures":[11],"tin":[13],"oxide":[14,188],"(SnO":[15],"2":[16,33,71,77,101,132,173],")":[17],"films":[18],"on":[19,31,58,89],"temperature":[20,108,118,207],"controllable":[21,208],"micromachined":[22],"platforms":[23],"has":[24],"been":[25],"investigated.":[26],"study":[28],"is":[29],"focused":[30],"SnO":[32,70,76,100,131,172],"due":[34],"to":[35,68,168,221,242],"its":[36],"importance":[37],"in":[38,139,142,240],"field":[40],"chemical":[42,153,191],"microsensors.":[43],"Nanoparticle":[44],"seeds":[45],"iron,":[47],"cobalt,":[48],"nickel,":[49],"copper":[50],"and":[51,83,104,160,175],"silver":[52],"were":[53],"formed":[54],"by":[55,62],"vapour":[56],"deposition":[57],"microhotplates":[60],"followed":[61],"annealing":[63],"at":[64],"500":[65],"\u00b0C":[66],"prior":[67],"self-aligned":[69],"deposition.":[72],"Significant":[73],"control":[74],"grain":[78,102,133,136,176],"sizes,":[79],"ranging":[80],"between":[81,97],"20":[82],"121":[84],"nm,":[85],"was":[86,95,166],"achieved":[87],"depending":[88],"seed-layer":[91,111],"type.":[92],"A":[93],"correlation":[94],"found":[96,167],"decreasing":[98],"size":[103,159],"increasing":[105],"melting":[107],"metals,":[112],"suggesting":[113],"high":[117,140],"metals":[119],"being":[121],"appropriate":[122],"choices":[123],"obtaining":[128],"a":[129,223,244],"smaller":[130],"structure.":[134],"Smaller":[135],"diameters":[137],"resulted":[138],"sensitivity":[141],"90":[143],"ppm":[144],"ethanol":[145],"illustrating":[146],"benefits":[148],"nanoparticle":[150,204],"seeding":[151],"sensing.":[154],"initial":[156],"morphology,":[157],"particle":[158],"distribution":[161],"dictate":[169],"final":[171],"morphology":[174],"size.":[177],"This":[178,211],"paper":[179,212],"not":[180],"only":[181],"demonstrates":[182,196,214],"possibility":[184,216],"depositing":[186],"nanostructured":[187],"materials":[189],"microsensor":[192],"applications,":[193],"but":[194],"also":[195,213],"feasibility":[198],"conducting":[200],"combinatorial":[201],"research":[202],"into":[203],"growth":[205],"using":[206,218],"microhotplate":[209],"platforms.":[210],"multi-element":[219],"arrays":[220],"form":[222],"range":[224],"different":[226],"types":[227],"devices":[229],"that":[230],"could":[231],"be":[232],"used":[233],"with":[234],"suitable":[235],"olfactory":[236],"signal":[237],"processing":[238],"techniques":[239],"order":[241],"identify":[243],"variety":[245],"gases.":[247]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":4},{"year":2013,"cited_by_count":5},{"year":2012,"cited_by_count":6}],"updated_date":"2026-09-12T09:15:50.089291","created_date":"2016-06-24T00:00:00"}