{"id":"https://openalex.org/W1972014149","doi":"https://doi.org/10.12693/aphyspola.121.172","title":"Effect of the Plasma Deposition Parameters on the Properties of Ti/TiC Multilayers for Hard Coatings Applications","display_name":"Effect of the Plasma Deposition Parameters on the Properties of Ti/TiC Multilayers for Hard Coatings Applications","publication_year":2012,"publication_date":"2012-01-01","ids":{"openalex":"https://openalex.org/W1972014149","doi":"https://doi.org/10.12693/aphyspola.121.172","mag":"1972014149"},"language":"en","primary_location":{"id":"doi:10.12693/aphyspola.121.172","doi":"https://doi.org/10.12693/aphyspola.121.172","is_oa":true,"landing_page_url":"https://doi.org/10.12693/aphyspola.121.172","pdf_url":"https://doi.org/10.12693/aphyspola.121.172","source":{"id":"https://openalex.org/S63733671","display_name":"Acta Physica Polonica A","issn_l":"0587-4246","issn":["0587-4246","1898-794X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310317485","host_organization_name":"Polish Academy of Sciences","host_organization_lineage":["https://openalex.org/P4310317485"],"host_organization_lineage_names":["Polish Academy of Sciences"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Acta Physica Polonica A","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://doi.org/10.12693/aphyspola.121.172","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5059631020","display_name":"Nadia Saoula","orcid":"https://orcid.org/0000-0002-3642-2972","observed_orcids":["https://orcid.org/0000-0002-3642-2972"]},"institutions":[{"id":"https://openalex.org/I4210102186","display_name":"Centre de D\u00e9veloppement des Technologies Avanc\u00e9es","ror":"https://ror.org/01ay87255","country_code":"DZ","type":"facility","lineage":["https://openalex.org/I4210102186"]}],"countries":["DZ"],"is_corresponding":false,"raw_author_name":"N. Saoula","raw_affiliation_strings":["Plasma Discharges Group, DMIL, CDTA, P.O. Box 17, Baba hassen, Algiers, Algeria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Plasma Discharges Group, DMIL, CDTA, P.O. Box 17, Baba hassen, Algiers, Algeria","institution_ids":["https://openalex.org/I4210102186"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020499607","display_name":"Karim Henda","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210102186","display_name":"Centre de D\u00e9veloppement des Technologies Avanc\u00e9es","ror":"https://ror.org/01ay87255","country_code":"DZ","type":"facility","lineage":["https://openalex.org/I4210102186"]}],"countries":["DZ"],"is_corresponding":false,"raw_author_name":"K. Henda","raw_affiliation_strings":["Plasma Discharges Group, DMIL, CDTA, P.O. Box 17, Baba hassen, Algiers, Algeria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Plasma Discharges Group, DMIL, CDTA, P.O. Box 17, Baba hassen, Algiers, Algeria","institution_ids":["https://openalex.org/I4210102186"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042724946","display_name":"R. Kesri","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I157169809","display_name":"University of Sciences and Technology Houari Boumediene","ror":"https://ror.org/02kb89c09","country_code":"DZ","type":"education","lineage":["https://openalex.org/I157169809"]}],"countries":["DZ"],"is_corresponding":false,"raw_author_name":"R. Kesri","raw_affiliation_strings":["LECTCM, USTHB, P.O. Box 32, El Alia, BabEzzouar, Algiers, Algeria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LECTCM, USTHB, P.O. Box 32, El Alia, BabEzzouar, Algiers, Algeria","institution_ids":["https://openalex.org/I157169809"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022193283","display_name":"S. Shrivastava","orcid":"https://orcid.org/0000-0002-2172-8565","observed_orcids":["https://orcid.org/0000-0002-2172-8565"]},"institutions":[{"id":"https://openalex.org/I192619145","display_name":"University of the Witwatersrand","ror":"https://ror.org/03rp50x72","country_code":"ZA","type":"education","lineage":["https://openalex.org/I192619145"]}],"countries":["ZA"],"is_corresponding":false,"raw_author_name":"S. Shrivastava","raw_affiliation_strings":["Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa","institution_ids":["https://openalex.org/I192619145"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037185841","display_name":"Rudolph Marthinus Erasmus","orcid":"https://orcid.org/0000-0001-7455-766X","observed_orcids":["https://orcid.org/0000-0001-7455-766X"]},"institutions":[{"id":"https://openalex.org/I192619145","display_name":"University of the Witwatersrand","ror":"https://ror.org/03rp50x72","country_code":"ZA","type":"education","lineage":["https://openalex.org/I192619145"]}],"countries":["ZA"],"is_corresponding":false,"raw_author_name":"R.M. Erasmus","raw_affiliation_strings":["Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa","institution_ids":["https://openalex.org/I192619145"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108676947","display_name":"J. D. Comins","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192619145","display_name":"University of the Witwatersrand","ror":"https://ror.org/03rp50x72","country_code":"ZA","type":"education","lineage":["https://openalex.org/I192619145"]}],"countries":["ZA"],"is_corresponding":false,"raw_author_name":"J.D. Comins","raw_affiliation_strings":["Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of the Witwatersrand, Johannesburg, Wits2050, South Africa","institution_ids":["https://openalex.org/I192619145"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.2673,"has_fulltext":true,"cited_by_count":12,"citation_normalized_percentile":{"value":0.77836512,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"121","issue":"1","first_page":"172","last_page":"174"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13470","display_name":"Surface Treatment and Coatings","score":0.003599999938160181,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/rf-magnetron-sputtering","display_name":"RF magnetron sputtering","score":0.8840000033378601},{"id":"https://openalex.org/keywords/reactive-sputtering","display_name":"reactive sputtering","score":0.9750000238418579},{"id":"https://openalex.org/keywords/substrate-bias-voltage","display_name":"substrate bias voltage","score":0.7829999923706055},{"id":"https://openalex.org/keywords/coating-adhesion","display_name":"coating adhesion","score":0.7730000019073486},{"id":"https://openalex.org/keywords/steel-substrates","display_name":"steel substrates","score":0.8299999833106995},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.8579999804496765},{"id":"https://openalex.org/keywords/microhardness","display_name":"microhardness","score":0.9599999785423279},{"id":"https://openalex.org/keywords/coating-microstructure","display_name":"coating microstructure","score":0.8270000219345093}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.825921893119812},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6811327934265137},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6349446177482605},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07009413838386536},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.05037054419517517},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.12693/aphyspola.121.172","doi":"https://doi.org/10.12693/aphyspola.121.172","is_oa":true,"landing_page_url":"https://doi.org/10.12693/aphyspola.121.172","pdf_url":"https://doi.org/10.12693/aphyspola.121.172","source":{"id":"https://openalex.org/S63733671","display_name":"Acta Physica Polonica A","issn_l":"0587-4246","issn":["0587-4246","1898-794X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310317485","host_organization_name":"Polish Academy of Sciences","host_organization_lineage":["https://openalex.org/P4310317485"],"host_organization_lineage_names":["Polish Academy of Sciences"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Acta Physica Polonica A","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.12693/aphyspola.121.172","doi":"https://doi.org/10.12693/aphyspola.121.172","is_oa":true,"landing_page_url":"https://doi.org/10.12693/aphyspola.121.172","pdf_url":"https://doi.org/10.12693/aphyspola.121.172","source":{"id":"https://openalex.org/S63733671","display_name":"Acta Physica Polonica A","issn_l":"0587-4246","issn":["0587-4246","1898-794X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310317485","host_organization_name":"Polish Academy of Sciences","host_organization_lineage":["https://openalex.org/P4310317485"],"host_organization_lineage_names":["Polish Academy of Sciences"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Acta Physica Polonica A","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1972014149.pdf","grobid_xml":"https://content.openalex.org/works/W1972014149.grobid-xml"},"referenced_works_count":16,"referenced_works":["https://openalex.org/W121418609","https://openalex.org/W170895204","https://openalex.org/W1627713722","https://openalex.org/W1964428049","https://openalex.org/W1976076635","https://openalex.org/W1992885223","https://openalex.org/W2001875781","https://openalex.org/W2007919536","https://openalex.org/W2024316935","https://openalex.org/W2061359288","https://openalex.org/W2062147083","https://openalex.org/W2070306670","https://openalex.org/W2070440004","https://openalex.org/W2072902986","https://openalex.org/W2089853456","https://openalex.org/W2318614287"],"related_works":["https://openalex.org/W2005082815","https://openalex.org/W1976736394","https://openalex.org/W2065296841","https://openalex.org/W2757317800","https://openalex.org/W2064807130","https://openalex.org/W2032156892","https://openalex.org/W1627713722","https://openalex.org/W2079691139","https://openalex.org/W2017112740","https://openalex.org/W2528620991"],"abstract_inverted_index":{"Titanium":[0],"carbide":[1],"(TiC)":[2],"hard":[3],"coatings":[4,19,90],"have":[5,20],"been":[6,21],"obtained":[7,41],"on":[8,28,63,85],"steel":[9],"and":[10,35,51,69,91],"silicon":[11],"substrates":[12],"by":[13,42,76],"rf":[14],"magnetron":[15],"sputtering":[16,44,66],"process.Two":[17],"layer":[18,31,39,60],"deposited":[22],"in":[23,49],"order":[24],"to":[25,101],"improve":[26],"adhesion":[27],"steel.The":[29],"lower":[30],"was":[32,40,74],"titanium":[33,47],"metal":[34],"the":[36,46,58,64,81,86,92,103],"upper":[37],"TiC":[38,59],"reactive":[43,65],"of":[45,88,94],"target":[48],"Ar":[50],"methane":[52],"gas":[53,67],"mixture.The":[54],"study":[55],"confirmed":[56],"that":[57,80],"composition":[61,68],"depends":[62,84],"substrate":[70,96],"bias":[71,95],"voltage.Film":[72],"microhardness":[73],"measured":[75],"microindentation.Measurement":[77],"results":[78],"showed":[79],"hardness":[82],"coating":[83],"microstructure":[87],"our":[89],"polarization":[93],"is":[97],"an":[98],"important":[99],"parameter":[100],"control":[102],"microstructure.":[104]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2021,"cited_by_count":2},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}