{"id":"https://openalex.org/W1970128362","doi":"https://doi.org/10.4028/www.scientific.net/amr.979.244","title":"Determination of Thickness and Optical Properties of Tantalum Oxide Thin Films by Spectroscopic Ellipsometry","display_name":"Determination of Thickness and Optical Properties of Tantalum Oxide Thin Films by Spectroscopic Ellipsometry","publication_year":2014,"publication_date":"2014-06-24","ids":{"openalex":"https://openalex.org/W1970128362","doi":"https://doi.org/10.4028/www.scientific.net/amr.979.244","mag":"1970128362"},"language":"en","primary_location":{"id":"doi:10.4028/www.scientific.net/amr.979.244","doi":"https://doi.org/10.4028/www.scientific.net/amr.979.244","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/amr.979.244","pdf_url":null,"source":{"id":"https://openalex.org/S67425620","display_name":"Advanced materials research","issn_l":"1022-6680","issn":["1022-6680","1662-8985"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Materials Research","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.4028/www.scientific.net/amr.979.244","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5078269433","display_name":"Chanunthorn Chananonnawathorn","orcid":"https://orcid.org/0000-0002-5724-065X","observed_orcids":["https://orcid.org/0000-0002-5724-065X"]},"institutions":[{"id":"https://openalex.org/I108108428","display_name":"Thammasat University","ror":"https://ror.org/002yp7f20","country_code":"TH","type":"education","lineage":["https://openalex.org/I108108428"]}],"countries":["TH"],"is_corresponding":true,"raw_author_name":"Chanunthorn Chananonnawathorn","raw_affiliation_strings":["Tammasat University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tammasat University","institution_ids":["https://openalex.org/I108108428"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004092244","display_name":"Narathon Khemasiri","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I91538806","display_name":"King Mongkut's Institute of Technology Ladkrabang","ror":"https://ror.org/055mf0v62","country_code":"TH","type":"education","lineage":["https://openalex.org/I91538806"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Narathon Khemasiri","raw_affiliation_strings":["King Mongkut\u2019s Institute of Technology Ladkrabang","[King Mongkut's Institute of Technology, Ladkrabang]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"King Mongkut\u2019s Institute of Technology Ladkrabang","institution_ids":["https://openalex.org/I91538806"]},{"raw_affiliation_string":"[King Mongkut's Institute of Technology, Ladkrabang]","institution_ids":["https://openalex.org/I91538806"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047018877","display_name":"Thanat Srichaiyaperk","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I108108428","display_name":"Thammasat University","ror":"https://ror.org/002yp7f20","country_code":"TH","type":"education","lineage":["https://openalex.org/I108108428"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Thanat Srichaiyaperk","raw_affiliation_strings":["Tammasat University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tammasat University","institution_ids":["https://openalex.org/I108108428"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090654462","display_name":"Benjarong Samransuksamer","orcid":"https://orcid.org/0009-0004-0185-9383","observed_orcids":["https://orcid.org/0009-0004-0185-9383"]},"institutions":[{"id":"https://openalex.org/I60837268","display_name":"King Mongkut's University of Technology Thonburi","ror":"https://ror.org/0057ax056","country_code":"TH","type":"education","lineage":["https://openalex.org/I60837268"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Benjarong Samransuksamer","raw_affiliation_strings":["King Mongkut\u2019sUniversity of Technology Thonburi"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"King Mongkut\u2019sUniversity of Technology Thonburi","institution_ids":["https://openalex.org/I60837268"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017445632","display_name":"Mati Horprathum","orcid":"https://orcid.org/0000-0003-1507-3555","observed_orcids":["https://orcid.org/0000-0003-1507-3555"]},"institutions":[{"id":"https://openalex.org/I14316845","display_name":"National Electronics and Computer Technology Center","ror":"https://ror.org/04z82ry91","country_code":"TH","type":"government","lineage":["https://openalex.org/I1332092204","https://openalex.org/I14316845"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Mati Horprathum","raw_affiliation_strings":["National Electronics and Computer Technology Center (NECTEC)","National Electronics and Computer Technology Center (NECTEC)#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Electronics and Computer Technology Center (NECTEC)","institution_ids":["https://openalex.org/I14316845"]},{"raw_affiliation_string":"National Electronics and Computer Technology Center (NECTEC)#TAB#","institution_ids":["https://openalex.org/I14316845"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073080058","display_name":"Pitak Eiamchai","orcid":"https://orcid.org/0000-0001-9419-3760","observed_orcids":["https://orcid.org/0000-0001-9419-3760"]},"institutions":[{"id":"https://openalex.org/I14316845","display_name":"National Electronics and Computer Technology Center","ror":"https://ror.org/04z82ry91","country_code":"TH","type":"government","lineage":["https://openalex.org/I1332092204","https://openalex.org/I14316845"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Pitak Eiamchai","raw_affiliation_strings":["National Electronics and Computer Technology Center (NECTEC)","National Electronics and Computer Technology Center (NECTEC)#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Electronics and Computer Technology Center (NECTEC)","institution_ids":["https://openalex.org/I14316845"]},{"raw_affiliation_string":"National Electronics and Computer Technology Center (NECTEC)#TAB#","institution_ids":["https://openalex.org/I14316845"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055343691","display_name":"Saksorn Limwichean","orcid":"https://orcid.org/0000-0001-6899-7853","observed_orcids":["https://orcid.org/0000-0001-6899-7853"]},"institutions":[{"id":"https://openalex.org/I14316845","display_name":"National Electronics and Computer Technology Center","ror":"https://ror.org/04z82ry91","country_code":"TH","type":"government","lineage":["https://openalex.org/I1332092204","https://openalex.org/I14316845"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Saksorn Limwichean","raw_affiliation_strings":["National Electronics and Computer Technology Center (NECTEC)","National Electronics and Computer Technology Center (NECTEC)#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Electronics and Computer Technology Center (NECTEC)","institution_ids":["https://openalex.org/I14316845"]},{"raw_affiliation_string":"National Electronics and Computer Technology Center (NECTEC)#TAB#","institution_ids":["https://openalex.org/I14316845"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000395601","display_name":"Kamon Aiempanakit","orcid":"https://orcid.org/0000-0002-5709-5528","observed_orcids":["https://orcid.org/0000-0002-5709-5528"]},"institutions":[{"id":"https://openalex.org/I108108428","display_name":"Thammasat University","ror":"https://ror.org/002yp7f20","country_code":"TH","type":"education","lineage":["https://openalex.org/I108108428"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Kamon Aiempanakit","raw_affiliation_strings":["Tammasat University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tammasat University","institution_ids":["https://openalex.org/I108108428"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5051327260","display_name":"Pongpan Chindaudom","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I14316845","display_name":"National Electronics and Computer Technology Center","ror":"https://ror.org/04z82ry91","country_code":"TH","type":"government","lineage":["https://openalex.org/I1332092204","https://openalex.org/I14316845"]}],"countries":["TH"],"is_corresponding":false,"raw_author_name":"Pongpan Chindaudom","raw_affiliation_strings":["National Electronics and Computer Technology Center (NECTEC)","National Electronics and Computer Technology Center (NECTEC)#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Electronics and Computer Technology Center (NECTEC)","institution_ids":["https://openalex.org/I14316845"]},{"raw_affiliation_string":"National Electronics and Computer Technology Center (NECTEC)#TAB#","institution_ids":["https://openalex.org/I14316845"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5078269433"],"corresponding_institution_ids":["https://openalex.org/I108108428"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.07793817,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"979","issue":null,"first_page":"244","last_page":"247"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":0.961899995803833,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":0.961899995803833,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.014399999752640724,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.00430000014603138,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tantalum-oxide-thin-films","display_name":"tantalum oxide thin films","score":0.9179999828338623},{"id":"https://openalex.org/keywords/ta2o5","display_name":"tantalum pentoxide","score":0.9620000123977661},{"id":"https://openalex.org/keywords/film-thickness-measurement","display_name":"film thickness measurement","score":0.8209999799728394},{"id":"https://openalex.org/keywords/optical-constants","display_name":"optical constants","score":0.9449999928474426},{"id":"https://openalex.org/keywords/refractive-index","display_name":"refractive index","score":0.9639999866485596},{"id":"https://openalex.org/keywords/cauchy-dispersion","display_name":"Cauchy dispersion","score":0.9869999885559082},{"id":"https://openalex.org/keywords/swanepoel-method","display_name":"Swanepoel method","score":0.8190000057220459},{"id":"https://openalex.org/keywords/reactive-dc-magnetron-sputtering","display_name":"reactive DC magnetron sputtering","score":0.8050000071525574},{"id":"https://openalex.org/keywords/film-inhomogeneity","display_name":"film inhomogeneity","score":0.7020000219345093},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.5619999766349792},{"id":"https://openalex.org/keywords/glass-substrates","display_name":"glass substrates","score":0.9279999732971191}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8373095989227295},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.7348231077194214},{"id":"https://openalex.org/C514619126","wikidata":"https://www.wikidata.org/wiki/Q1123","display_name":"Tantalum","level":2,"score":0.6767367124557495},{"id":"https://openalex.org/C18293161","wikidata":"https://www.wikidata.org/wiki/Q898774","display_name":"Ellipsometry","level":3,"score":0.6461770534515381},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.6001409888267517},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5270555019378662},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.5059854388237},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4986567497253418},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.44479602575302124},{"id":"https://openalex.org/C177562468","wikidata":"https://www.wikidata.org/wiki/Q182893","display_name":"Dispersion (optics)","level":2,"score":0.42953547835350037},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4246442914009094},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.4104292392730713},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.40705394744873047},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.24429064989089966},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19332772493362427},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.16947326064109802},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.09349086880683899},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.07721066474914551},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.4028/www.scientific.net/amr.979.244","doi":"https://doi.org/10.4028/www.scientific.net/amr.979.244","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/amr.979.244","pdf_url":null,"source":{"id":"https://openalex.org/S67425620","display_name":"Advanced materials research","issn_l":"1022-6680","issn":["1022-6680","1662-8985"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Materials Research","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.4028/www.scientific.net/amr.979.244","doi":"https://doi.org/10.4028/www.scientific.net/amr.979.244","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/amr.979.244","pdf_url":null,"source":{"id":"https://openalex.org/S67425620","display_name":"Advanced materials research","issn_l":"1022-6680","issn":["1022-6680","1662-8985"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Materials Research","raw_type":"journal-article"},"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1981971271","https://openalex.org/W2006517289","https://openalex.org/W2008563309","https://openalex.org/W2034907123","https://openalex.org/W2042462857","https://openalex.org/W2051196419","https://openalex.org/W2066958333","https://openalex.org/W2083842027","https://openalex.org/W2337895847"],"related_works":["https://openalex.org/W2153056196","https://openalex.org/W4321450167","https://openalex.org/W2560326741","https://openalex.org/W2055039974","https://openalex.org/W2115274069","https://openalex.org/W2100725969","https://openalex.org/W2100931161","https://openalex.org/W2330366874","https://openalex.org/W2323183992","https://openalex.org/W1987991743"],"abstract_inverted_index":{"Tantalum":[0],"oxide":[1],"(Ta":[2],"2":[3,164,253],"O":[4,165,254],"5":[5,166,255],")":[6],"thin":[7,44,75,167,256],"films":[8,45,84],"were":[9,46,87],"prepared,":[10],"at":[11],"different":[12],"deposition":[13],"time,":[14],"by":[15,63,90],"a":[16,24,216],"DC":[17],"reactive":[18],"magnetron":[19],"sputtering.":[20],"During":[21],"the":[22,67,74,106,110,113,120,129,139,148,151,158,174,178,183,187,190,199,205,211,221,237,245,251],"deposition,":[23],"high-quality":[25],"tantalum":[26],"target":[27],"was":[28,155,170,195],"sputtered":[29],"under":[30],"argon":[31],"and":[32,39,52,60,100,122,182,224,241,247],"oxygen":[33],"ambience":[34],"on":[35,56],"to":[36,97,104,127,132,218],"silicon":[37],"(100)":[38],"glass":[40],"substrates.":[41],"The":[42,83,161],"prepared":[43],"systematically":[47],"characterized":[48],"for":[49,204],"both":[50,119,220,244],"physical":[51,69,107,153,193,246],"optical":[53,115,130,188,248],"properties":[54,249],"based":[55],"spectroscopic":[57],"ellipsometry":[58],"(SE),":[59],"consequently":[61],"confirmed":[62,89],"several":[64],"methods.":[65],"With":[66,112],"SE":[68,114,149,152,238],"models,":[70,116],"we":[71,117],"could":[72],"determine":[73,219,243],"film":[76,168,222],"thickness":[77,85,108,169,223],"as":[78,80,157],"well":[79],"their":[81],"inhomogeneity.":[82],"results":[86],"directly":[88,134],"field-emission":[91],"scanning":[92],"electron":[93],"microscopy":[94],"(FE-SEM)":[95],"used":[96,103],"observe":[98],"cross-sections,":[99],"surface":[101,184],"profiler":[102],"measure":[105],"of":[109,250],"films.":[111,257],"applied":[118],"Cauchy":[121],"Tauc-Lorentz":[123],"dispersions":[124],"in":[125],"order":[126],"obtain":[128],"constants,":[131],"be":[133],"compared":[135],"with":[136,173,198],"those":[137],"from":[138,147,177,229],"Swanepoel":[140],"method":[141],"(SM).":[142],"Our":[143],"result":[144,176],"showed":[145],"that":[146,236],"analyses,":[150],"model":[154,194,203],"obtained":[156,162],"multi-layer":[159],"configurations.":[160],"Ta":[163,252],"closely":[171],"related":[172],"measured":[175],"FE-SEM":[179],"cross-sectional":[180],"micrographs":[181],"profiler.":[185],"For":[186],"characteristic,":[189],"double":[191],"layer":[192],"best":[196],"optimized":[197],"Tauc":[200],"Lorentz":[201],"dispersion":[202],"most":[206],"accurate":[207],"results.":[208],"In":[209],"comparison,":[210],"SM":[212],"technique":[213,239],"also":[214],"demonstrated":[215],"capability":[217],"its":[225],"refractive":[226],"index":[227],"only":[228],"some":[230],"samples.":[231],"Therefore,":[232],"this":[233],"study":[234],"proved":[235],"successfully":[240],"accurately":[242]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-10-01T08:54:57.152042","created_date":"2025-10-10T00:00:00"}