{"id":"https://openalex.org/W1970057735","doi":"https://doi.org/10.1016/0169-4332(93)90062-g","title":"Round robin investigation of silicon oxide on silicon reference materials for ellipsometry","display_name":"Round robin investigation of silicon oxide on silicon reference materials for ellipsometry","publication_year":1993,"publication_date":"1993-01-01","ids":{"openalex":"https://openalex.org/W1970057735","doi":"https://doi.org/10.1016/0169-4332(93)90062-g","mag":"1970057735"},"language":"en","primary_location":{"id":"doi:10.1016/0169-4332(93)90062-g","doi":"https://doi.org/10.1016/0169-4332(93)90062-g","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0169-4332(93)90062-g","pdf_url":null,"source":{"id":"https://openalex.org/S42323631","display_name":"Applied Surface Science","issn_l":"0169-4332","issn":["0169-4332","1873-5584"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-2","ki-jl-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Surface Science","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5023385301","display_name":"Jan Vanhellemont","orcid":"https://orcid.org/0000-0002-9998-3208","observed_orcids":["https://orcid.org/0000-0002-9998-3208"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Vanhellemont","raw_affiliation_strings":["Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057427132","display_name":"H.E. Maes","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"H.E. Maes","raw_affiliation_strings":["Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037463600","display_name":"Marc Schaekers","orcid":"https://orcid.org/0000-0002-1496-7816","observed_orcids":["https://orcid.org/0000-0002-1496-7816"]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. Schaekers","raw_affiliation_strings":["Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec, Kapeldreef 75, B\u20103001 Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016943647","display_name":"A. Armigliato","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133988","display_name":"Bologna Research Area","ror":"https://ror.org/03v4rcp75","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210133988","https://openalex.org/I4210155236"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"A. Armigliato","raw_affiliation_strings":["CNR Istituto LAMEL, Via Castagnoli 1, I-40126 Bologna, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNR Istituto LAMEL, Via Castagnoli 1, I-40126 Bologna, Italy","institution_ids":["https://openalex.org/I4210133988"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060981060","display_name":"Hans Cerva","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1325886976","display_name":"Siemens (Germany)","ror":"https://ror.org/059mq0909","country_code":"DE","type":"company","lineage":["https://openalex.org/I1325886976"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Cerva","raw_affiliation_strings":["Siemens Research Laboratories, Otto-Hahn-Ring 6, D-8000 M\u00fcnchen 83, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Siemens Research Laboratories, Otto-Hahn-Ring 6, D-8000 M\u00fcnchen 83, Germany","institution_ids":["https://openalex.org/I1325886976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024773977","display_name":"A.G. Cullis","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Cullis","raw_affiliation_strings":["Defence Research Agency, RSRE, St. Andrews Road, Malvern, Worcestershire WR14 3PS, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Defence Research Agency, RSRE, St. Andrews Road, Malvern, Worcestershire WR14 3PS, UK","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056479810","display_name":"J. C. G. de Sande","orcid":"https://orcid.org/0000-0002-5641-5032","observed_orcids":["https://orcid.org/0000-0002-5641-5032"]},"institutions":[{"id":"https://openalex.org/I121748325","display_name":"Universidad Complutense de Madrid","ror":"https://ror.org/02p0gd045","country_code":"ES","type":"education","lineage":["https://openalex.org/I121748325"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"J. de Sande","raw_affiliation_strings":["Universidad Complutense, Ciudad Universitaria, 28040 Madrid, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universidad Complutense, Ciudad Universitaria, 28040 Madrid, Spain","institution_ids":["https://openalex.org/I121748325"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073695309","display_name":"H.W. Dinges","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Dinges","raw_affiliation_strings":["Forschungsinstitut der BPD bei FTZ, PF 5000, D-6100 Darmstadt, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Forschungsinstitut der BPD bei FTZ, PF 5000, D-6100 Darmstadt, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055741712","display_name":"J. Hallais","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Hallais","raw_affiliation_strings":["LEP, 3 Avenue Descartes, BP 15, 94451 Limeil-Br\u00e9vannes, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LEP, 3 Avenue Descartes, BP 15, 94451 Limeil-Br\u00e9vannes, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085206994","display_name":"Vishal Nayar","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"V. Nayar","raw_affiliation_strings":["Defence Research Agency, RSRE, St. Andrews Road, Malvern, Worcestershire WR14 3PS, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Defence Research Agency, RSRE, St. Andrews Road, Malvern, Worcestershire WR14 3PS, UK","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108418254","display_name":"C. Pickering","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Pickering","raw_affiliation_strings":["Defence Research Agency, RSRE, St. Andrews Road, Malvern, Worcestershire WR14 3PS, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Defence Research Agency, RSRE, St. Andrews Road, Malvern, Worcestershire WR14 3PS, UK","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110269347","display_name":"Jean Louis Stehle","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210127368","display_name":"Sopra (France)","ror":"https://ror.org/02mhjkx12","country_code":"FR","type":"company","lineage":["https://openalex.org/I4210127368"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J.-L. Stehl\u00e9","raw_affiliation_strings":["SOPRA, 68 Rue Pierre-Joigneaux, F-92270 Bois-Colombes, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SOPRA, 68 Rue Pierre-Joigneaux, F-92270 Bois-Colombes, France","institution_ids":["https://openalex.org/I4210127368"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062395092","display_name":"Jef Van Landuyt","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Van Landuyt","raw_affiliation_strings":["RUCA, Groenenborgerlaan 171, B-2020 Antwerpen, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"RUCA, Groenenborgerlaan 171, B-2020 Antwerpen, Belgium","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103159230","display_name":"Christopher Walker","orcid":"https://orcid.org/0000-0003-1514-099X","observed_orcids":["https://orcid.org/0000-0003-1514-099X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Walker","raw_affiliation_strings":["STC Technology Ltd., London Road, Harlow, Essex CM17 9NA, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STC Technology Ltd., London Road, Harlow, Essex CM17 9NA, UK","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111381577","display_name":"H. W. Werner","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Werner","raw_affiliation_strings":["Philips, Postbus 80.000, NL-5600 JA Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Philips, Postbus 80.000, NL-5600 JA Eindhoven, Netherlands","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5025509543","display_name":"P. Salieri","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Salieri","raw_affiliation_strings":["BCR, Commission of the European Communities, Westraat 200, B-1049 Brussel, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"BCR, Commission of the European Communities, Westraat 200, B-1049 Brussel, Belgium","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":5,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3930,"currency":"USD","value_usd":3930},"apc_paid":null,"fwci":1.2285,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.74511305,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"63","issue":"1-4","first_page":"45","last_page":"51"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.002099999925121665,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-oxide-films","display_name":"silicon oxide films","score":0.7170000076293945},{"id":"https://openalex.org/keywords/film-thickness-measurement","display_name":"film thickness measurement","score":0.7570000290870667},{"id":"https://openalex.org/keywords/round-robin-study","display_name":"round robin study","score":0.7820000052452087},{"id":"https://openalex.org/keywords/spectroscopic-ellipsometry","display_name":"spectroscopic ellipsometry","score":0.9980000257492065},{"id":"https://openalex.org/keywords/transmission-electron-microscopy","display_name":"transmission electron microscopy","score":0.8119999766349792},{"id":"https://openalex.org/keywords/high-resolution-tem","display_name":"high-resolution TEM","score":0.8820000290870667},{"id":"https://openalex.org/keywords/thermal-oxidation","display_name":"thermal oxidation","score":0.9089999794960022},{"id":"https://openalex.org/keywords/measurement-accuracy-and-reproducibility","display_name":"measurement accuracy and reproducibility","score":0.7300000190734863}],"concepts":[{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.8027653694152832},{"id":"https://openalex.org/C18293161","wikidata":"https://www.wikidata.org/wiki/Q898774","display_name":"Ellipsometry","level":3,"score":0.6941836476325989},{"id":"https://openalex.org/C2779105228","wikidata":"https://www.wikidata.org/wiki/Q2286029","display_name":"Silicon oxide","level":4,"score":0.6189068555831909},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6152883172035217},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.5177992582321167},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.39575183391571045},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.37138107419013977},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.19914552569389343},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.152099609375},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.13708540797233582}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1016/0169-4332(93)90062-g","doi":"https://doi.org/10.1016/0169-4332(93)90062-g","is_oa":false,"landing_page_url":"https://doi.org/10.1016/0169-4332(93)90062-g","pdf_url":null,"source":{"id":"https://openalex.org/S42323631","display_name":"Applied Surface Science","issn_l":"0169-4332","issn":["0169-4332","1873-5584"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-2","ki-jl-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Surface Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W2046770486","https://openalex.org/W2052051991","https://openalex.org/W2057393582","https://openalex.org/W2162123284"],"related_works":["https://openalex.org/W2055810732","https://openalex.org/W1957153652","https://openalex.org/W7096086255","https://openalex.org/W2056666396","https://openalex.org/W2098527484","https://openalex.org/W1978264357","https://openalex.org/W1481783796","https://openalex.org/W2046770486","https://openalex.org/W4246556003","https://openalex.org/W2053654326"],"abstract_inverted_index":null,"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-10-17T09:40:24.721904","created_date":"2016-06-24T00:00:00"}