{"id":"https://openalex.org/W1968355607","doi":"https://doi.org/10.1063/1.118935","title":"Amorphous carbon thin films containing benzene rings for use as low-dielectric-constant interlayer dielectrics","display_name":"Amorphous carbon thin films containing benzene rings for use as low-dielectric-constant interlayer dielectrics","publication_year":1997,"publication_date":"1997-05-12","ids":{"openalex":"https://openalex.org/W1968355607","doi":"https://doi.org/10.1063/1.118935","mag":"1968355607"},"language":"en","primary_location":{"id":"doi:10.1063/1.118935","doi":"https://doi.org/10.1063/1.118935","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.118935","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077580590","display_name":"Kazuhiko Endo","orcid":"https://orcid.org/0000-0002-3517-3580","observed_orcids":["https://orcid.org/0000-0002-3517-3580"]},"institutions":[{"id":"https://openalex.org/I118347220","display_name":"NEC (Japan)","ror":"https://ror.org/04jndar25","country_code":"JP","type":"company","lineage":["https://openalex.org/I118347220"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuhiko Endo","raw_affiliation_strings":["Microelectronics Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microelectronics Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan","institution_ids":["https://openalex.org/I118347220"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110181401","display_name":"Toru Tatsumi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I118347220","display_name":"NEC (Japan)","ror":"https://ror.org/04jndar25","country_code":"JP","type":"company","lineage":["https://openalex.org/I118347220"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toru Tatsumi","raw_affiliation_strings":["Microelectronics Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microelectronics Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305, Japan","institution_ids":["https://openalex.org/I118347220"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I118347220"],"apc_list":null,"apc_paid":null,"fwci":3.0364,"has_fulltext":false,"cited_by_count":37,"citation_normalized_percentile":{"value":0.91522245,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":87,"max":96},"biblio":{"volume":"70","issue":"19","first_page":"2616","last_page":"2618"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/amorphous-carbon-films","display_name":"amorphous carbon films","score":0.8690000176429749},{"id":"https://openalex.org/keywords/hydrogenated-amorphous-carbon","display_name":"hydrogenated amorphous carbon","score":0.9419999718666077},{"id":"https://openalex.org/keywords/benzene-ring","display_name":"benzene ring","score":0.949999988079071},{"id":"https://openalex.org/keywords/aromatic-functionalization","display_name":"aromatic functionalization","score":0.4749999940395355},{"id":"https://openalex.org/keywords/low-k-dielectrics","display_name":"low-k dielectrics","score":0.7979999780654907},{"id":"https://openalex.org/keywords/interlayer-dielectric","display_name":"interlayer dielectric","score":0.9950000047683716},{"id":"https://openalex.org/keywords/thermal-stability","display_name":"thermal stability","score":0.9259999990463257},{"id":"https://openalex.org/keywords/dielectric-constant","display_name":"dielectric constant","score":0.9610000252723694},{"id":"https://openalex.org/keywords/hydrogen-concentration","display_name":"hydrogen concentration","score":0.9490000009536743},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"plasma-enhanced chemical vapor deposition","score":0.8939999938011169},{"id":"https://openalex.org/keywords/aromatic-precursors","display_name":"aromatic precursors","score":0.6880000233650208}],"concepts":[{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.8505558967590332},{"id":"https://openalex.org/C2777691172","wikidata":"https://www.wikidata.org/wiki/Q2270","display_name":"Benzene","level":2,"score":0.7903897166252136},{"id":"https://openalex.org/C201931942","wikidata":"https://www.wikidata.org/wiki/Q798012","display_name":"Amorphous carbon","level":3,"score":0.7299461364746094},{"id":"https://openalex.org/C59061564","wikidata":"https://www.wikidata.org/wiki/Q7783071","display_name":"Thermal stability","level":2,"score":0.7187203168869019},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.7060031890869141},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6970986723899841},{"id":"https://openalex.org/C75937256","wikidata":"https://www.wikidata.org/wiki/Q1440781","display_name":"Carbon film","level":3,"score":0.6248648762702942},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.6202988624572754},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5283268690109253},{"id":"https://openalex.org/C140205800","wikidata":"https://www.wikidata.org/wiki/Q5860","display_name":"Carbon fibers","level":3,"score":0.525434672832489},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.4918484687805176},{"id":"https://openalex.org/C168651791","wikidata":"https://www.wikidata.org/wiki/Q211569","display_name":"Permittivity","level":3,"score":0.463569700717926},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3714398443698883},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3682017922401428},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.2631559371948242},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2611115574836731},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1968616247177124},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1708681583404541},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.08009195327758789},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.07662069797515869},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/1.118935","doi":"https://doi.org/10.1063/1.118935","is_oa":false,"landing_page_url":"https://doi.org/10.1063/1.118935","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1964525623","https://openalex.org/W1981212084","https://openalex.org/W2030432184","https://openalex.org/W2030555600","https://openalex.org/W2041769641","https://openalex.org/W2045989447","https://openalex.org/W2083211240"],"related_works":["https://openalex.org/W2897541478","https://openalex.org/W2077202538","https://openalex.org/W2030151467","https://openalex.org/W2060645928","https://openalex.org/W7018847899","https://openalex.org/W2316276263","https://openalex.org/W2074375448","https://openalex.org/W2018636889","https://openalex.org/W1984842144","https://openalex.org/W2113775888"],"abstract_inverted_index":{"The":[0,20,38,58],"effect":[1],"on":[2],"the":[3,61,75,79],"thermal":[4,46,65],"and":[5,34,52,64],"dielectric":[6,62],"properties":[7],"of":[8,56,67,78],"incorporating":[9],"benzene":[10,21,43],"rings":[11,22,44],"in":[12,60],"hydrogenated":[13],"amorphous":[14],"carbon":[15],"(a-C:H)":[16],"films":[17,27,69],"was":[18],"investigated.":[19],"were":[23],"introduced":[24],"into":[25],"a-C:H":[26,39,68],"by":[28],"using":[29],"plasma-enhanced":[30],"chemical":[31],"vapor":[32],"deposition":[33],"aromatic":[35],"source":[36],"compounds.":[37],"film":[40],"that":[41],"contained":[42],"had":[45],"stability":[47,66],"up":[48],"to":[49,71,74],"400":[50],"\u00b0C":[51],"a":[53],"low-dielectric":[54],"constant":[55,63],"3.0.":[57],"difference":[59],"appeared":[70],"be":[72],"due":[73],"hydrogen":[76],"concentration":[77],"films.":[80]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}