{"id":"https://openalex.org/W1968066971","doi":"https://doi.org/10.1116/1.1492562","title":"Comparison of Static and Dynamic Calibration Methods for Ionization Gauges","display_name":"Comparison of Static and Dynamic Calibration Methods for Ionization Gauges","publication_year":1967,"publication_date":"1967-11-01","ids":{"openalex":"https://openalex.org/W1968066971","doi":"https://doi.org/10.1116/1.1492562","mag":"1968066971"},"language":"en","primary_location":{"id":"doi:10.1116/1.1492562","doi":"https://doi.org/10.1116/1.1492562","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.1492562","pdf_url":null,"source":{"id":"https://openalex.org/S52593085","display_name":"Journal of Vacuum Science and Technology","issn_l":"0022-5355","issn":["0022-5355","2331-1754"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science and Technology","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063304520","display_name":"Chr. Meinke","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Meinke","raw_affiliation_strings":["E. Leybold\u2019s Nachfolger, Cologne, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"E. Leybold\u2019s Nachfolger, Cologne, Germany","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112742158","display_name":"G. Reich","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"G. Reich","raw_affiliation_strings":["E. Leybold\u2019s Nachfolger, Cologne, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"E. Leybold\u2019s Nachfolger, Cologne, Germany","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.2626,"has_fulltext":false,"cited_by_count":26,"citation_normalized_percentile":{"value":0.88164666,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"4","issue":"6","first_page":"356","last_page":"359"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.9541000127792358,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.9541000127792358,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T12019","display_name":"Calibration and Measurement Techniques","score":0.027699999511241913,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.00839999970048666,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ionization-gauge","display_name":"ionization gauge","score":0.9950000047683716},{"id":"https://openalex.org/keywords/gauge-calibration","display_name":"gauge calibration","score":0.9150000214576721},{"id":"https://openalex.org/keywords/dynamic-calibration","display_name":"dynamic calibration","score":0.796999990940094},{"id":"https://openalex.org/keywords/vacuum-pressure-measurement","display_name":"vacuum pressure measurement","score":0.671999990940094},{"id":"https://openalex.org/keywords/gauge-sensitivity","display_name":"gauge sensitivity","score":0.7260000109672546},{"id":"https://openalex.org/keywords/circular-orifice","display_name":"circular orifice","score":0.8809999823570251}],"concepts":[{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.8316959142684937},{"id":"https://openalex.org/C154020017","wikidata":"https://www.wikidata.org/wiki/Q520171","display_name":"Repeatability","level":2,"score":0.8121355175971985},{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.7780148983001709},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6076715588569641},{"id":"https://openalex.org/C194242075","wikidata":"https://www.wikidata.org/wiki/Q546776","display_name":"Body orifice","level":2,"score":0.5496469736099243},{"id":"https://openalex.org/C198291218","wikidata":"https://www.wikidata.org/wiki/Q190382","display_name":"Ionization","level":3,"score":0.4837358295917511},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4831082820892334},{"id":"https://openalex.org/C158522163","wikidata":"https://www.wikidata.org/wiki/Q2406217","display_name":"Static pressure","level":2,"score":0.47147679328918457},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.4690345525741577},{"id":"https://openalex.org/C23531484","wikidata":"https://www.wikidata.org/wiki/Q3196863","display_name":"Calibration curve","level":3,"score":0.4570169746875763},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.44983890652656555},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.38214799761772156},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.35265666246414185},{"id":"https://openalex.org/C119128265","wikidata":"https://www.wikidata.org/wiki/Q900165","display_name":"Detection limit","level":2,"score":0.31295186281204224},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.2604164779186249},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2230398952960968},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.16140347719192505},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.11122849583625793},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.10720738768577576},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08937296271324158},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.08748969435691833},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0666772723197937},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.1492562","doi":"https://doi.org/10.1116/1.1492562","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.1492562","pdf_url":null,"source":{"id":"https://openalex.org/S52593085","display_name":"Journal of Vacuum Science and Technology","issn_l":"0022-5355","issn":["0022-5355","2331-1754"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science and Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.5899999737739563}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4251286262","https://openalex.org/W2090535170","https://openalex.org/W2067196378","https://openalex.org/W1970656478","https://openalex.org/W276331491","https://openalex.org/W853688451","https://openalex.org/W753433137","https://openalex.org/W2392568513","https://openalex.org/W2142505997","https://openalex.org/W2030111266"],"abstract_inverted_index":{"Ionization":[0],"gauges":[1,37],"have":[2],"been":[3,41],"calibrated":[4,39],"by":[5,43,78,93],"a":[6,18,44,48,52,56],"static":[7,95,113],"expansion":[8],"method":[9,64,99,114],"in":[10],"the":[11,27,36,70,86,94,112],"pressure":[12],"range":[13],"of":[14,21,26,35,62,69,72,88,108,123],"10\u22122\u201310\u22126":[15],"Torr":[16,110,121],"with":[17,90],"absolute":[19],"accuracy":[20,61],"\u00b1":[22,66],"3%.":[23],"The":[24,33,60,82,97],"repeatability":[25],"linear":[28],"calibration":[29],"curve":[30],"is":[31,65,76],"1%.":[32],"sensitivity":[34,75],"thus":[38],"has":[40,115],"checked":[42],"dynamic":[45,98],"method,":[46],"comprising":[47],"flow":[49,73],"measurement":[50],"through":[51],"porous":[53],"plug":[54],"and":[55,74],"calculated":[57],"circular":[58],"orifice.":[59],"this":[63],"7%.":[67],"Evaluation":[68],"measurements":[71],"done":[77],"an":[79],"electronic":[80],"computer.":[81],"results":[83],"agree":[84],"within":[85],"limits":[87],"error":[89],"those":[91],"obtained":[92],"method.":[96],"can":[100],"be":[101],"used":[102],"for":[103],"calibrations":[104],"down":[105],"to":[106],"pressures":[107],"10\u221210":[109],"while":[111],"its":[116],"lower":[117],"limit":[118],"at":[119],"10\u22126":[120],"because":[122],"sorption":[124],"phenomena.":[125]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-02T10:15:12.560889","created_date":"2016-06-24T00:00:00"}