{"id":"https://openalex.org/W1966595358","doi":"https://doi.org/10.1103/physrevb.46.2061","title":"Hydrogen-related complexes as the stressing species in high-fluence, hydrogen-implanted, single-crystal silicon","display_name":"Hydrogen-related complexes as the stressing species in high-fluence, hydrogen-implanted, single-crystal silicon","publication_year":1992,"publication_date":"1992-07-15","ids":{"openalex":"https://openalex.org/W1966595358","doi":"https://doi.org/10.1103/physrevb.46.2061","mag":"1966595358","pmid":"https://pubmed.ncbi.nlm.nih.gov/10003881"},"language":"en","primary_location":{"id":"doi:10.1103/physrevb.46.2061","doi":"https://doi.org/10.1103/physrevb.46.2061","is_oa":false,"landing_page_url":"https://doi.org/10.1103/physrevb.46.2061","pdf_url":null,"source":{"id":"https://openalex.org/S4210174675","display_name":"Physical review. B, Condensed matter","issn_l":"0163-1829","issn":["0163-1829","1095-3795"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","ki-jl-2"],"host_organization":"https://openalex.org/P4310320261","host_organization_name":"American Physical Society","host_organization_lineage":["https://openalex.org/P4310320261"],"host_organization_lineage_names":["American Physical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Physical Review B","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","pubmed"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://hdl.handle.net/11380/11527","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111684915","display_name":"G. F. Cerofolini","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"G. F. Cerofolini","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018674793","display_name":"Laura Meda","orcid":"https://orcid.org/0000-0001-6623-9792","observed_orcids":["https://orcid.org/0000-0001-6623-9792"]},"institutions":[{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"L. Meda","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050482761","display_name":"R. Balboni","orcid":"https://orcid.org/0000-0003-3487-5561","observed_orcids":["https://orcid.org/0000-0003-3487-5561"]},"institutions":[{"id":"https://openalex.org/I122346577","display_name":"University of Modena and Reggio Emilia","ror":"https://ror.org/02d4c4y02","country_code":"IT","type":"education","lineage":["https://openalex.org/I122346577"]},{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"R. Balboni","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]},{"raw_affiliation_string":"Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy","institution_ids":["https://openalex.org/I122346577"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064418308","display_name":"Federico Corni","orcid":"https://orcid.org/0000-0003-1226-1585","observed_orcids":["https://orcid.org/0000-0003-1226-1585"]},"institutions":[{"id":"https://openalex.org/I122346577","display_name":"University of Modena and Reggio Emilia","ror":"https://ror.org/02d4c4y02","country_code":"IT","type":"education","lineage":["https://openalex.org/I122346577"]},{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"F. Corni","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]},{"raw_affiliation_string":"Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy","institution_ids":["https://openalex.org/I122346577"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073104666","display_name":"Stefano Frabboni","orcid":"https://orcid.org/0000-0002-9352-1125","observed_orcids":["https://orcid.org/0000-0002-9352-1125"]},"institutions":[{"id":"https://openalex.org/I122346577","display_name":"University of Modena and Reggio Emilia","ror":"https://ror.org/02d4c4y02","country_code":"IT","type":"education","lineage":["https://openalex.org/I122346577"]},{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"S. Frabboni","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]},{"raw_affiliation_string":"Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy","institution_ids":["https://openalex.org/I122346577"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108420211","display_name":"G. Ottaviani","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I122346577","display_name":"University of Modena and Reggio Emilia","ror":"https://ror.org/02d4c4y02","country_code":"IT","type":"education","lineage":["https://openalex.org/I122346577"]},{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"G. Ottaviani","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]},{"raw_affiliation_string":"Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy","institution_ids":["https://openalex.org/I122346577"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030594226","display_name":"R. Tonini","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I122346577","display_name":"University of Modena and Reggio Emilia","ror":"https://ror.org/02d4c4y02","country_code":"IT","type":"education","lineage":["https://openalex.org/I122346577"]},{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"R. Tonini","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]},{"raw_affiliation_string":"Dipartimento di Fisica, Universit\u00e0 di Modena, 41100 Modena MO, Italy","institution_ids":["https://openalex.org/I122346577"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040173421","display_name":"Mariano Anderle","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]},{"id":"https://openalex.org/I4405278068","display_name":"Istituto per la Ricerca Scientifica e Tecnologica","ror":"https://ror.org/04vrpj005","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4405278068"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"M. Anderle","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","IRST\u2013Divisione di Scienza dei Materiali, 38050 Povo TN, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]},{"raw_affiliation_string":"IRST\u2013Divisione di Scienza dei Materiali, 38050 Povo TN, Italy","institution_ids":["https://openalex.org/I4405278068"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5016162643","display_name":"Roberto Canteri","orcid":"https://orcid.org/0000-0002-0895-8884","observed_orcids":["https://orcid.org/0000-0002-0895-8884"]},"institutions":[{"id":"https://openalex.org/I4405270409","display_name":"Eni Rewind (Italy)","ror":"https://ror.org/00mtkrz32","country_code":"IT","type":"company","lineage":["https://openalex.org/I4405270409"]},{"id":"https://openalex.org/I4405278068","display_name":"Istituto per la Ricerca Scientifica e Tecnologica","ror":"https://ror.org/04vrpj005","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4405278068"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"R. Canteri","raw_affiliation_strings":["Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","IRST\u2013Divisione di Scienza dei Materiali, 38050 Povo TN, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Functional Materials Laboratory, Istituto Guido Donegani, EniChem, 20097 San Donato MI, Italy","institution_ids":["https://openalex.org/I4405270409"]},{"raw_affiliation_string":"IRST\u2013Divisione di Scienza dei Materiali, 38050 Povo TN, Italy","institution_ids":["https://openalex.org/I4405278068"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.1797,"has_fulltext":false,"cited_by_count":85,"citation_normalized_percentile":{"value":0.83587205,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"46","issue":"4","first_page":"2061","last_page":"2070"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.7035999894142151,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.7035999894142151,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.12759999930858612,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.09910000115633011,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hydrogen-implantation","display_name":"hydrogen implantation","score":0.7860000133514404},{"id":"https://openalex.org/keywords/silicon","display_name":"silicon","score":0.48500001430511475},{"id":"https://openalex.org/keywords/hydrogen-related-defects","display_name":"hydrogen defects","score":0.8119999766349792},{"id":"https://openalex.org/keywords/displacement-field","display_name":"displacement field","score":0.7139999866485596},{"id":"https://openalex.org/keywords/radiation-damage","display_name":"radiation damage","score":0.7480000257492065},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.8769999742507935},{"id":"https://openalex.org/keywords/reverse-annealing","display_name":"reverse annealing","score":0.7639999985694885},{"id":"https://openalex.org/keywords/extended-defects","display_name":"extended defects","score":0.703000009059906},{"id":"https://openalex.org/keywords/defect-formation-kinetics","display_name":"defect formation kinetics","score":0.6480000019073486}],"concepts":[{"id":"https://openalex.org/C22078206","wikidata":"https://www.wikidata.org/wiki/Q1418023","display_name":"Fluence","level":3,"score":0.7055994272232056},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6581622362136841},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6525828838348389},{"id":"https://openalex.org/C2776523803","wikidata":"https://www.wikidata.org/wiki/Q1324945","display_name":"Elastic recoil detection","level":3,"score":0.6477215886116028},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.6286645531654358},{"id":"https://openalex.org/C2780547777","wikidata":"https://www.wikidata.org/wiki/Q368967","display_name":"Rutherford backscattering spectrometry","level":3,"score":0.6062284708023071},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.5742802619934082},{"id":"https://openalex.org/C2781028716","wikidata":"https://www.wikidata.org/wiki/Q900607","display_name":"Channelling","level":3,"score":0.5146456956863403},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.4933702051639557},{"id":"https://openalex.org/C73922627","wikidata":"https://www.wikidata.org/wiki/Q754943","display_name":"Single crystal","level":2,"score":0.48090195655822754},{"id":"https://openalex.org/C2780839960","wikidata":"https://www.wikidata.org/wiki/Q2004543","display_name":"Nuclear reaction analysis","level":3,"score":0.47228795289993286},{"id":"https://openalex.org/C153428861","wikidata":"https://www.wikidata.org/wiki/Q152749","display_name":"Radiation damage","level":3,"score":0.46601417660713196},{"id":"https://openalex.org/C77671233","wikidata":"https://www.wikidata.org/wiki/Q556046","display_name":"Secondary ion mass spectrometry","level":3,"score":0.45284736156463623},{"id":"https://openalex.org/C2776668124","wikidata":"https://www.wikidata.org/wiki/Q749601","display_name":"Recoil","level":2,"score":0.43689605593681335},{"id":"https://openalex.org/C164675345","wikidata":"https://www.wikidata.org/wiki/Q898226","display_name":"Crystallographic defect","level":2,"score":0.43383458256721497},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.4324636161327362},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.429997980594635},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.42271941900253296},{"id":"https://openalex.org/C2781285689","wikidata":"https://www.wikidata.org/wiki/Q21921428","display_name":"Crystal (programming language)","level":2,"score":0.41254034638404846},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.40210777521133423},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.3248416781425476},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.32147249579429626},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.15102818608283997},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.14403852820396423},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.12101739645004272},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.11130836606025696},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.10054048895835876},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09253004193305969},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1103/physrevb.46.2061","doi":"https://doi.org/10.1103/physrevb.46.2061","is_oa":false,"landing_page_url":"https://doi.org/10.1103/physrevb.46.2061","pdf_url":null,"source":{"id":"https://openalex.org/S4210174675","display_name":"Physical review. B, Condensed matter","issn_l":"0163-1829","issn":["0163-1829","1095-3795"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","ki-jl-2"],"host_organization":"https://openalex.org/P4310320261","host_organization_name":"American Physical Society","host_organization_lineage":["https://openalex.org/P4310320261"],"host_organization_lineage_names":["American Physical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Physical Review B","raw_type":"journal-article"},{"id":"pmid:10003881","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/10003881","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Physical review. B, Condensed matter","raw_type":"Journal Article"},{"id":"pmh:oai:iris.unimore.it:11380/11527","doi":null,"is_oa":true,"landing_page_url":"http://hdl.handle.net/11380/11527","pdf_url":null,"source":{"id":"https://openalex.org/S4306400718","display_name":"IRIS UNIMORE (University of Modena and Reggio Emilia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I122346577","host_organization_name":"University of Modena and Reggio Emilia","host_organization_lineage":["https://openalex.org/I122346577"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"pmh:oai:iris.unimore.it:11380/11527","doi":null,"is_oa":true,"landing_page_url":"http://hdl.handle.net/11380/11527","pdf_url":null,"source":{"id":"https://openalex.org/S4306400718","display_name":"IRIS UNIMORE (University of Modena and Reggio Emilia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I122346577","host_organization_name":"University of Modena and Reggio Emilia","host_organization_lineage":["https://openalex.org/I122346577"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W219566225","https://openalex.org/W1963604615","https://openalex.org/W1974205323","https://openalex.org/W1974298957","https://openalex.org/W1974336078","https://openalex.org/W1978381903","https://openalex.org/W1980186219","https://openalex.org/W1983363491","https://openalex.org/W1983877035","https://openalex.org/W1989996423","https://openalex.org/W1992083355","https://openalex.org/W1995779547","https://openalex.org/W1996655637","https://openalex.org/W2017061509","https://openalex.org/W2019299618","https://openalex.org/W2022601495","https://openalex.org/W2038489783","https://openalex.org/W2042659629","https://openalex.org/W2048607366","https://openalex.org/W2059174954","https://openalex.org/W2059307837","https://openalex.org/W2063331031","https://openalex.org/W2072751620","https://openalex.org/W2084863839","https://openalex.org/W2085199216","https://openalex.org/W2086342878","https://openalex.org/W2087945108","https://openalex.org/W2093871741","https://openalex.org/W4205575156","https://openalex.org/W4253974074"],"related_works":["https://openalex.org/W2063331031","https://openalex.org/W2010488325","https://openalex.org/W50177128","https://openalex.org/W2073819376","https://openalex.org/W1996655637","https://openalex.org/W2026669905","https://openalex.org/W1981748187","https://openalex.org/W1995394324","https://openalex.org/W2034226886","https://openalex.org/W2087105549"],"abstract_inverted_index":{"This":[0],"work":[1],"is":[2,57],"devoted":[3],"to":[4,59,84,89,104],"the":[5,8,25,32,50,62,66,79,85,98],"characterization":[6],"of":[7],"Si:H":[9],"system":[10],"obtained":[11],"by":[12,38,53,74],"high-fluence,":[13],"low-energy,":[14],"hydrogen":[15,22],"implantation":[16,72],"into":[17],"single-crystal":[18],"silicon.":[19],"The":[20,46,82],"implanted":[21,80],"profile":[23],"and":[24,42,78],"ones":[26],"resulting":[27],"after":[28,70],"thermal":[29],"annealing":[30],"in":[31,49,97],"range":[33,99],"100--800":[34],"\\ifmmode^\\circ\\else\\textdegree\\fi{}C":[35],"are":[36],"detected":[37],"secondary-ion":[39],"mass":[40],"spectrometry":[41],"elastic-recoil":[43],"detection":[44],"analysis.":[45],"displacement":[47,86],"field":[48,87],"crystal,":[51],"measured":[52],"channeling":[54],"Rutherford-backscattering":[55],"spectrometry,":[56],"found":[58],"depend":[60],"on":[61],"direct":[63],"radiation":[64],"damage,":[65],"extended":[67],"defects":[68,91],"formed":[69],"ion":[71],"(revealed":[73],"transmission":[75],"electron":[76],"microscopy),":[77],"species.":[81],"contribution":[83],"due":[88,103],"hydrogen-related":[90],"has":[92],"a":[93],"characteristic":[94],"``reverse":[95],"annealing''":[96],"100--400":[100],"\\ifmmode^\\circ\\else\\textdegree\\fi{}C,":[101],"essentially":[102],"their":[105],"formation":[106],"kinetics.":[107]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":4},{"year":2013,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}
