{"id":"https://openalex.org/W1966507779","doi":"https://doi.org/10.1016/j.jcis.2011.11.082","title":"Selective patterning of Si-based biosensor surfaces using isotropic silicon etchants","display_name":"Selective patterning of Si-based biosensor surfaces using isotropic silicon etchants","publication_year":2011,"publication_date":"2011-12-12","ids":{"openalex":"https://openalex.org/W1966507779","doi":"https://doi.org/10.1016/j.jcis.2011.11.082","mag":"1966507779","pmid":"https://pubmed.ncbi.nlm.nih.gov/22196345","pmcid":"https://www.ncbi.nlm.nih.gov/pmc/articles/3265681"},"language":"en","primary_location":{"id":"doi:10.1016/j.jcis.2011.11.082","doi":"https://doi.org/10.1016/j.jcis.2011.11.082","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.jcis.2011.11.082","pdf_url":null,"source":{"id":"https://openalex.org/S204609040","display_name":"Journal of Colloid and Interface Science","issn_l":"0021-9797","issn":["0021-9797","1095-7103"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-1","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Colloid and Interface Science","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3265681","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5013692884","display_name":"Bradley Walters Biggs","orcid":"https://orcid.org/0000-0003-4201-6273","observed_orcids":["https://orcid.org/0000-0003-4201-6273"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Bradley W. Biggs","raw_affiliation_strings":["Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017437898","display_name":"Heather K. Hunt","orcid":"https://orcid.org/0000-0001-8412-2774","observed_orcids":["https://orcid.org/0000-0001-8412-2774"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]},{"id":"https://openalex.org/I76835614","display_name":"University of Missouri","ror":"https://ror.org/02ymw8z06","country_code":"US","type":"education","lineage":["https://openalex.org/I76835614"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Heather K. Hunt","raw_affiliation_strings":["Department of Biological Engineering, University of Missouri, Columbia, MO 65211, USA","Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biological Engineering, University of Missouri, Columbia, MO 65211, USA","institution_ids":["https://openalex.org/I76835614"]},{"raw_affiliation_string":"Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101679309","display_name":"Andrea M. Armani","orcid":"https://orcid.org/0000-0001-9890-5104","observed_orcids":["https://orcid.org/0000-0001-9890-5104"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Andrea M. Armani","raw_affiliation_strings":["Ming Hsieh Department of Electrical Engineering\u2013Electrophysics, University of Southern California, Los Angeles, CA 90089, USA","Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ming Hsieh Department of Electrical Engineering\u2013Electrophysics, University of Southern California, Los Angeles, CA 90089, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA","institution_ids":["https://openalex.org/I1174212"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5101679309"],"corresponding_institution_ids":["https://openalex.org/I1174212"],"apc_list":{"value":4470,"currency":"USD","value_usd":4470},"apc_paid":null,"fwci":0.6554,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.63504762,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"369","issue":"1","first_page":"477","last_page":"481"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12012","display_name":"Diatoms and Algae Research","score":0.16590000689029694,"subfield":{"id":"https://openalex.org/subfields/2502","display_name":"Biomaterials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12012","display_name":"Diatoms and Algae Research","score":0.16590000689029694,"subfield":{"id":"https://openalex.org/subfields/2502","display_name":"Biomaterials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.12349999696016312,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.1160999983549118,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silane-coupling-agent","display_name":"silane coupling agent","score":0.9850000143051147},{"id":"https://openalex.org/keywords/bioconjugation","display_name":"bioconjugation","score":0.7929999828338623},{"id":"https://openalex.org/keywords/label-free-biosensor","display_name":"label-free biosensor","score":0.7250000238418579},{"id":"https://openalex.org/keywords/surface-functionalization","display_name":"surface functionalization","score":0.7360000014305115}],"concepts":[{"id":"https://openalex.org/C160756335","wikidata":"https://www.wikidata.org/wiki/Q669391","display_name":"Biosensor","level":2,"score":0.9247725605964661},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.7479388117790222},{"id":"https://openalex.org/C23963754","wikidata":"https://www.wikidata.org/wiki/Q4914729","display_name":"Bioconjugation","level":2,"score":0.7314914464950562},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6532485485076904},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.569819450378418},{"id":"https://openalex.org/C2778024649","wikidata":"https://www.wikidata.org/wiki/Q410572","display_name":"Silane","level":2,"score":0.5019817352294922},{"id":"https://openalex.org/C115537861","wikidata":"https://www.wikidata.org/wiki/Q7645993","display_name":"Surface modification","level":2,"score":0.459094375371933},{"id":"https://openalex.org/C49853544","wikidata":"https://www.wikidata.org/wiki/Q206229","display_name":"Biomolecule","level":2,"score":0.4419420659542084},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4171536862850189},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.23757681250572205},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1634867787361145},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D012822","descriptor_name":"Silicon Dioxide","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D013499","descriptor_name":"Surface Properties","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":true}],"locations_count":4,"locations":[{"id":"doi:10.1016/j.jcis.2011.11.082","doi":"https://doi.org/10.1016/j.jcis.2011.11.082","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.jcis.2011.11.082","pdf_url":null,"source":{"id":"https://openalex.org/S204609040","display_name":"Journal of Colloid and Interface Science","issn_l":"0021-9797","issn":["0021-9797","1095-7103"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-1","ki-jl-1","medline","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Colloid and Interface Science","raw_type":"journal-article"},{"id":"pmid:22196345","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22196345","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of colloid and interface science","raw_type":"Journal Article"},{"id":"pmh:oai:europepmc.org:2580498","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3265681","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:3265681","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3265681","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"J Colloid Interface Sci","raw_type":"Text"}],"best_oa_location":{"id":"pmh:oai:europepmc.org:2580498","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3265681","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":null,"raw_type":"Text"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G5031237818","display_name":"ULTRASENSITIVE NANOLASERS FOR EPIGENETICS INVESTIGATIONS","funder_award_id":"1dp2od007391-01","funder_id":"https://openalex.org/F4320332161","funder_display_name":"National Institutes of Health"},{"id":"https://openalex.org/G9000069748","display_name":null,"funder_award_id":"DP2 OD007391","funder_id":"https://openalex.org/F4320332161","funder_display_name":"National Institutes of Health"}],"funders":[{"id":"https://openalex.org/F4320332161","display_name":"National Institutes of Health","ror":"https://ror.org/01cwqze88"},{"id":"https://openalex.org/F4320333811","display_name":"Beckman Institute, California Institute of Technology","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":38,"referenced_works":["https://openalex.org/W599550356","https://openalex.org/W1554342785","https://openalex.org/W1875933026","https://openalex.org/W1964043876","https://openalex.org/W1977504424","https://openalex.org/W1981606423","https://openalex.org/W1983433740","https://openalex.org/W2007107835","https://openalex.org/W2009558651","https://openalex.org/W2009681973","https://openalex.org/W2021449313","https://openalex.org/W2024002388","https://openalex.org/W2028249658","https://openalex.org/W2041137211","https://openalex.org/W2045830543","https://openalex.org/W2047038810","https://openalex.org/W2047914375","https://openalex.org/W2056659301","https://openalex.org/W2060802064","https://openalex.org/W2062845592","https://openalex.org/W2069761655","https://openalex.org/W2070828761","https://openalex.org/W2072463909","https://openalex.org/W2077959173","https://openalex.org/W2080402582","https://openalex.org/W2083096182","https://openalex.org/W2094239159","https://openalex.org/W2095627673","https://openalex.org/W2103739638","https://openalex.org/W2106079961","https://openalex.org/W2122146362","https://openalex.org/W2136608702","https://openalex.org/W2151450226","https://openalex.org/W2166708818","https://openalex.org/W2317933022","https://openalex.org/W2323864835","https://openalex.org/W2950740811","https://openalex.org/W4233359233"],"related_works":["https://openalex.org/W3214158260","https://openalex.org/W1780726580","https://openalex.org/W2073853786","https://openalex.org/W3022192765","https://openalex.org/W2010195113","https://openalex.org/W2011095404","https://openalex.org/W2072247360","https://openalex.org/W2079874170","https://openalex.org/W2996210599","https://openalex.org/W2011615675"],"abstract_inverted_index":null,"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-31T12:09:11.096373","created_date":"2016-06-24T00:00:00"}