{"id":"https://openalex.org/W1965784196","doi":"https://doi.org/10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w","title":"3D characterization of a W/TiN/ Ti/Si contact structure using MULSAM","display_name":"3D characterization of a W/TiN/ Ti/Si contact structure using MULSAM","publication_year":1998,"publication_date":"1998-05-15","ids":{"openalex":"https://openalex.org/W1965784196","doi":"https://doi.org/10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w","mag":"1965784196"},"language":"en","primary_location":{"id":"doi:10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w","doi":"https://doi.org/10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w","is_oa":false,"landing_page_url":"https://doi.org/10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w","pdf_url":null,"source":{"id":"https://openalex.org/S114406758","display_name":"Surface and Interface Analysis","issn_l":"0142-2421","issn":["0142-2421","1096-9918"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-1","norway-1","poland-40","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Interface Analysis","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5075539510","display_name":"R. H. Roberts","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I52099693","display_name":"University of York","ror":"https://ror.org/04m01e293","country_code":"GB","type":"education","lineage":["https://openalex.org/I52099693"]}],"countries":["GB"],"is_corresponding":true,"raw_author_name":"R. H. Roberts","raw_affiliation_strings":["Department of Physics, University of York, Heslington, York YO1 5DD, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of York, Heslington, York YO1 5DD, UK","institution_ids":["https://openalex.org/I52099693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068812566","display_name":"Martin Prutton","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I52099693","display_name":"University of York","ror":"https://ror.org/04m01e293","country_code":"GB","type":"education","lineage":["https://openalex.org/I52099693"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"M. Prutton","raw_affiliation_strings":["Department of Physics, University of York, Heslington, York YO1 5DD, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of York, Heslington, York YO1 5DD, UK","institution_ids":["https://openalex.org/I52099693"]}]},{"author_position":"middle","author":{"id":null,"display_name":"D. K. Wilkinson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I52099693","display_name":"University of York","ror":"https://ror.org/04m01e293","country_code":"GB","type":"education","lineage":["https://openalex.org/I52099693"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"D. K. Wilkinson","raw_affiliation_strings":["Department of Physics, University of York, Heslington, York YO1 5DD, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of York, Heslington, York YO1 5DD, UK","institution_ids":["https://openalex.org/I52099693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032898580","display_name":"I. R. Barkshire","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891827","display_name":"GEC (United Kingdom)","ror":"https://ror.org/017kjzz63","country_code":"GB","type":"company","lineage":["https://openalex.org/I1306339040","https://openalex.org/I4388891827"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"I. R. Barkshire","raw_affiliation_strings":["GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK","institution_ids":["https://openalex.org/I4388891827"]}]},{"author_position":"middle","author":{"id":null,"display_name":"C. J. Hill","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891827","display_name":"GEC (United Kingdom)","ror":"https://ror.org/017kjzz63","country_code":"GB","type":"company","lineage":["https://openalex.org/I1306339040","https://openalex.org/I4388891827"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"C. J. Hill","raw_affiliation_strings":["GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK","institution_ids":["https://openalex.org/I4388891827"]}]},{"author_position":"middle","author":{"id":null,"display_name":"P. J. Pearson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891827","display_name":"GEC (United Kingdom)","ror":"https://ror.org/017kjzz63","country_code":"GB","type":"company","lineage":["https://openalex.org/I1306339040","https://openalex.org/I4388891827"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"P. J. Pearson","raw_affiliation_strings":["GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK","institution_ids":["https://openalex.org/I4388891827"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036565928","display_name":"P. D. Augustus","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891827","display_name":"GEC (United Kingdom)","ror":"https://ror.org/017kjzz63","country_code":"GB","type":"company","lineage":["https://openalex.org/I1306339040","https://openalex.org/I4388891827"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"P. D. Augustus","raw_affiliation_strings":["GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK","institution_ids":["https://openalex.org/I4388891827"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111778945","display_name":"Derek K. Skinner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891827","display_name":"GEC (United Kingdom)","ror":"https://ror.org/017kjzz63","country_code":"GB","type":"company","lineage":["https://openalex.org/I1306339040","https://openalex.org/I4388891827"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"D. K. Skinner","raw_affiliation_strings":["GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GEC Marconi Materials Technology Ltd., Caswell, Northants, NN12 8EQ, UK","institution_ids":["https://openalex.org/I4388891827"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031402304","display_name":"K. Stribley","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891827","display_name":"GEC (United Kingdom)","ror":"https://ror.org/017kjzz63","country_code":"GB","type":"company","lineage":["https://openalex.org/I1306339040","https://openalex.org/I4388891827"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"K. Stribley","raw_affiliation_strings":["GEC Plessey Semiconductors Ltd., Roborough, Plymouth PL6 7BQ, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GEC Plessey Semiconductors Ltd., Roborough, Plymouth PL6 7BQ, UK","institution_ids":["https://openalex.org/I4388891827"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5075539510"],"corresponding_institution_ids":["https://openalex.org/I52099693"],"apc_list":{"value":3580,"currency":"USD","value_usd":3580},"apc_paid":null,"fwci":0.7533,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.63207547,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"26","issue":"6","first_page":"461","last_page":"470"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.6571999788284302,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.6571999788284302,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.301800012588501,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13552","display_name":"Advanced Materials Characterization Techniques","score":0.010400000028312206,"subfield":{"id":"https://openalex.org/subfields/2500","display_name":"General Materials Science"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/titanium-adhesion-layer","display_name":"titanium adhesion layer","score":0.6890000104904175},{"id":"https://openalex.org/keywords/cross-sectional-tem","display_name":"cross-sectional TEM","score":0.5680000185966492},{"id":"https://openalex.org/keywords/interfacial-layer-thickness","display_name":"interfacial layer thickness","score":0.7919999957084656},{"id":"https://openalex.org/keywords/diffusion-barrier","display_name":"diffusion barrier","score":0.7170000076293945},{"id":"https://openalex.org/keywords/three-dimensional-characterization","display_name":"3D characterization","score":0.6389999985694885},{"id":"https://openalex.org/keywords/ultra-large-scale-integrated-circuits","display_name":"ultra-large-scale integrated circuits","score":0.7179999947547913}],"concepts":[{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.7628904581069946},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.6862053871154785},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5246924757957458},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.38765817880630493},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.32196635007858276},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3102138042449951},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.29205453395843506}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w","doi":"https://doi.org/10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w","is_oa":false,"landing_page_url":"https://doi.org/10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.0.co;2-w","pdf_url":null,"source":{"id":"https://openalex.org/S114406758","display_name":"Surface and Interface Analysis","issn_l":"0142-2421","issn":["0142-2421","1096-9918"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-1","norway-1","poland-40","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Interface Analysis","raw_type":"journal-article"},{"id":"doi:10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.3.co;2-n","doi":"https://doi.org/10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.3.co;2-n","is_oa":false,"landing_page_url":"https://doi.org/10.1002/(sici)1096-9918(19980515)26:6<461::aid-sia390>3.3.co;2-n","pdf_url":null,"source":{"id":"https://openalex.org/S114406758","display_name":"Surface and Interface Analysis","issn_l":"0142-2421","issn":["0142-2421","1096-9918"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-c","jufo-1","norway-1","poland-40","russia-white-list-3","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Interface Analysis","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320300","display_name":"European Commission","ror":"https://ror.org/00k4n6c32"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2028916316","https://openalex.org/W2094516408","https://openalex.org/W2013436669","https://openalex.org/W2038683958","https://openalex.org/W1985330623","https://openalex.org/W2099103365","https://openalex.org/W7142682293","https://openalex.org/W2001018259","https://openalex.org/W3036060039","https://openalex.org/W2007907374"],"abstract_inverted_index":{"The":[0,90,125],"W/TiN/Ti/Si":[1],"contact":[2,123],"structures":[3,144],"needed":[4],"for":[5,28],"ultra-large-scale":[6],"integrated":[7],"circuits":[8],"have":[9,108],"been":[10,41],"studied":[11],"using":[12,31,44],"cross-sectional":[13],"transmission":[14],"electron":[15,21,35],"microscopy":[16],"(TEM)":[17],"and":[18,34,38,80,142],"multi-spectral":[19],"Auger":[20,33],"microscopy.":[22],"Access":[23],"to":[24,60,107,117],"the":[25,52,62,66,74,81,84,88,96,114,122,140],"Ti/Si":[26],"interface":[27],"chemical":[29],"characterization":[30,138],"SEM,":[32],"energy-loss":[36],"imaging":[37],"spectroscopy":[39],"has":[40],"achieved":[42],"by":[43],"a":[45,103,109,118,136],"novel":[46],"method":[47],"of":[48,51,73,76,83,95,127,139],"bevelled":[49],"polishing":[50],"silicon":[53],"substrate":[54],"material.":[55],"Cross-sectional":[56],"TEM":[57],"was":[58],"used":[59],"calibrate":[61],"depth":[63],"scale":[64],"in":[65,121,145],"MULSAM":[67],"image":[68],"sets,":[69],"so":[70],"allowing":[71],"measurements":[72],"thicknesses":[75],"various":[77],"interfacial":[78],"layers":[79],"penetration":[82],"ohmic":[85],"contacts":[86],"into":[87],"silicon.":[89],"TiN":[91],"layer,":[92],"providing":[93],"adhesion":[94],"tungsten":[97,115],"as":[98,100,102],"well":[99],"acting":[101],"diffusion":[104],"barrier,":[105],"appears":[106],"domed":[110],"shape,":[111],"which":[112],"penetrates":[113],"overlayer":[116],"greater":[119],"extent":[120],"centres.":[124],"results":[126],"this":[128],"work,":[129],"combined":[130],"with":[131],"earlier,":[132],"related,":[133],"studies,":[134],"enable":[135],"three-dimensional":[137],"bottom":[141],"sidewall":[143],"these":[146],"contacts.":[147],"\u00a9":[148],"1998":[149],"John":[150],"Wiley":[151],"&":[152],"Sons,":[153],"Ltd.":[154]},"counts_by_year":[],"updated_date":"2026-10-27T15:51:10.671819","created_date":"2016-06-24T00:00:00"}