{"id":"https://openalex.org/W1892460909","doi":"https://doi.org/10.1109/vlsit.1998.689182","title":"A high-performance sub-0.25 \u03bcm CMOS technology with multiple thresholds and copper interconnects","display_name":"A high-performance sub-0.25 \u03bcm CMOS technology with multiple thresholds and copper interconnects","publication_year":2002,"publication_date":"2002-11-27","ids":{"openalex":"https://openalex.org/W1892460909","doi":"https://doi.org/10.1109/vlsit.1998.689182","mag":"1892460909"},"language":"en","primary_location":{"id":"doi:10.1109/vlsit.1998.689182","doi":"https://doi.org/10.1109/vlsit.1998.689182","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsit.1998.689182","pdf_url":null,"source":{"id":"https://openalex.org/S4306421008","display_name":"Symposium on VLSI Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5114137367","display_name":"L.T. Su","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Su","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078284844","display_name":"Reinhard Schulz","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Schulz","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110052791","display_name":"James W. Adkisson","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Adkisson","raw_affiliation_strings":["Essex Junction, VT, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Essex Junction, VT, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004949495","display_name":"K. Beyer","orcid":"https://orcid.org/0000-0002-2695-2478","observed_orcids":["https://orcid.org/0000-0002-2695-2478"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. Beyer","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086956770","display_name":"Glenn A. Biery","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"G. Biery","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023706516","display_name":"William Cote","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"W. Cote","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040713914","display_name":"Emmanuel F. Crabb\u00e9","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Crabbe","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089315602","display_name":"Daniel C. Edelstein","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Edelstein","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013865959","display_name":"John Ellis-Monaghan","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Ellis-Monaghan","raw_affiliation_strings":["Essex Junction, VT, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Essex Junction, VT, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000950087","display_name":"E. Eld","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Eld","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060329598","display_name":"Douglas Foster","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Foster","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058602785","display_name":"Rainer Gehres","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Gehres","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050788191","display_name":"Ronald D. Goldblatt","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Goldblatt","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":null,"display_name":"N. Greco","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"N. Greco","raw_affiliation_strings":["Essex Junction, VT, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Essex Junction, VT, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":null,"display_name":"C. Guenther","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Guenther","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047465826","display_name":"John E. Heidenreich","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Heidenreich","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020491357","display_name":"J. L. Herman","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Herman","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061287843","display_name":"D. Kiesling","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Kiesling","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":null,"display_name":"L. Lin","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"L. Lin","raw_affiliation_strings":["Essex Junction, VT, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Essex Junction, VT, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109225160","display_name":"Shih-Hsun Lo","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S.-H. Lo","raw_affiliation_strings":["Essex Junction, VT, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Essex Junction, VT, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045385892","display_name":"Johnathan McKenna","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. McKenna","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055495173","display_name":"C. Megivern","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Megivern","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109627862","display_name":"H. Ng","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Ng","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055444383","display_name":"James M. Oberschmidt","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Oberschmidt","raw_affiliation_strings":["Essex Junction, VT, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Essex Junction, VT, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030773148","display_name":"Ayan Ray","orcid":"https://orcid.org/0000-0002-5247-0261","observed_orcids":["https://orcid.org/0000-0002-5247-0261"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Ray","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062191448","display_name":"Norman J. Rohrer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"N. Rohrer","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063867698","display_name":"K. Tallman","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. Tallman","raw_affiliation_strings":["IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070168461","display_name":"T. Wagner","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"T. Wagner","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5081141641","display_name":"Bijan Davari","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. Davari","raw_affiliation_strings":["IBM Semiconductor Research and Development Center (SRDC)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Semiconductor Research and Development Center (SRDC)","institution_ids":["https://openalex.org/I1341412227"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":4.2672,"has_fulltext":false,"cited_by_count":26,"citation_normalized_percentile":{"value":0.95023172,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"18","last_page":"19"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9071999788284302,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9071999788284302,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10363","display_name":"Low-power high-performance VLSI design","score":0.08030000329017639,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.0032999999821186066,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/copper-interconnects","display_name":"copper interconnects","score":0.9940000176429749},{"id":"https://openalex.org/keywords/inverter-delay","display_name":"inverter delay","score":0.8999999761581421},{"id":"https://openalex.org/keywords/high-performance-microprocessors","display_name":"high-performance microprocessors","score":0.8489999771118164}],"concepts":[{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.794684648513794},{"id":"https://openalex.org/C11190779","wikidata":"https://www.wikidata.org/wiki/Q664575","display_name":"Inverter","level":3,"score":0.6309225559234619},{"id":"https://openalex.org/C68043766","wikidata":"https://www.wikidata.org/wiki/Q267416","display_name":"Static random-access memory","level":2,"score":0.6177306175231934},{"id":"https://openalex.org/C2780728072","wikidata":"https://www.wikidata.org/wiki/Q5297","display_name":"Microprocessor","level":2,"score":0.6098200678825378},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5164996981620789},{"id":"https://openalex.org/C544778455","wikidata":"https://www.wikidata.org/wiki/Q753","display_name":"Copper","level":2,"score":0.4773067235946655},{"id":"https://openalex.org/C99844830","wikidata":"https://www.wikidata.org/wiki/Q102441924","display_name":"Scaling","level":2,"score":0.42375096678733826},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.38938167691230774},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.38499706983566284},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.3772822916507721},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3737407922744751},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3690170347690582},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.31165942549705505},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsit.1998.689182","doi":"https://doi.org/10.1109/vlsit.1998.689182","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsit.1998.689182","pdf_url":null,"source":{"id":"https://openalex.org/S4306421008","display_name":"Symposium on VLSI Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.651199996471405}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2171357178","https://openalex.org/W2533938810","https://openalex.org/W4241586847"],"related_works":["https://openalex.org/W2033624734","https://openalex.org/W2536216494","https://openalex.org/W2104523642","https://openalex.org/W2533043278","https://openalex.org/W2540410941","https://openalex.org/W2155048907","https://openalex.org/W2543555062","https://openalex.org/W1972171740","https://openalex.org/W2535102073","https://openalex.org/W2101038492"],"abstract_inverted_index":{"A":[0],"sub-0.25":[1],"/spl":[2,26],"mu/m":[3],"technology":[4,39],"in":[5,40,50],"manufacturing":[6],"that":[7],"is":[8,14,29],"targeted":[9],"for":[10],"high-performance":[11],"CMOS":[12],"applications":[13],"discussed.":[15],"Aggressive":[16],"groundrule":[17],"scaling":[18],"including":[19],"SRAM":[20],"cell":[21],"size":[22],"down":[23],"to":[24,43],"5.4":[25],"mu/m/sup":[27],"2/":[28],"combined":[30],"with":[31],"multiple":[32],"threshold":[33],"voltage":[34],"devices":[35],"and":[36,58],"the":[37,41],"first":[38],"industry":[42],"offer":[44],"copper":[45],"interconnects.":[46],"These":[47],"features":[48],"result":[49],"minimum":[51],"unloaded":[52],"inverter":[53],"delay":[54],"of":[55],"12.7":[56],"ps":[57],"enable":[59],"microprocessor":[60],"frequencies":[61],"above":[62],"480":[63],"MHz.":[64]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2}],"updated_date":"2026-10-06T10:28:23.643775","created_date":"2016-06-24T00:00:00"}