{"id":"https://openalex.org/W183792129","doi":null,"title":"Mod\u00e9lisation particulaire et multidimensionnelle des d\u00e9charges hors \u00e9quilibre \u00e0 basse pression excit\u00e9es par champs \u00e9lectromagn\u00e9tiques","display_name":"Mod\u00e9lisation particulaire et multidimensionnelle des d\u00e9charges hors \u00e9quilibre \u00e0 basse pression excit\u00e9es par champs \u00e9lectromagn\u00e9tiques","publication_year":2011,"publication_date":"2011-01-01","ids":{"openalex":"https://openalex.org/W183792129","mag":"183792129"},"language":"fr","primary_location":{"id":"pmh:oai:thesesups.ups-tlse.fr:1241","doi":null,"is_oa":true,"landing_page_url":"http://thesesups.ups-tlse.fr/1241/1/Benyoucef_Djilali.pdf","pdf_url":"http://thesesups.ups-tlse.fr/1241/1/Benyoucef_Djilali.pdf","source":{"id":"https://openalex.org/S4306400942","display_name":"Th\u00e8ses en ligne de l'Universit\u00e9 Toulouse III (Universit\u00e9 Toulouse III)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I134560555","host_organization_name":"Universit\u00e9 Toulouse III - Paul Sabatier","host_organization_lineage":["https://openalex.org/I134560555"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"PhD Thesis"},"volume":null,"type":"dissertation","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://thesesups.ups-tlse.fr/1241/1/Benyoucef_Djilali.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5085017427","display_name":"Djilali Benyoucef","orcid":"https://orcid.org/0000-0001-5390-5629","observed_orcids":["https://orcid.org/0000-0001-5390-5629"]},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Djilali Benyoucef","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-5390-5629","affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":["https://openalex.org/A5085017427"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":3,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9878000020980835,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9878000020980835,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.006000000052154064,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10642","display_name":"Atmospheric-Pressure Plasma Applications","score":0.003100000089034438,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/radio-frequency-discharge","display_name":"RF discharge","score":0.5130000114440918},{"id":"https://openalex.org/keywords/low-pressure-discharge","display_name":"low-pressure discharge","score":0.6669999957084656},{"id":"https://openalex.org/keywords/crossed-electric-and-magnetic-fields","display_name":"crossed electric and magnetic fields","score":0.8240000009536743},{"id":"https://openalex.org/keywords/particle-in-cell-monte-carlo-simulation","display_name":"particle-in-cell/Monte Carlo simulation","score":0.6100000143051147},{"id":"https://openalex.org/keywords/space-charge-field","display_name":"space-charge field","score":0.5220000147819519},{"id":"https://openalex.org/keywords/electron-density","display_name":"electron density","score":0.6769999861717224},{"id":"https://openalex.org/keywords/plasma-confinement","display_name":"plasma confinement","score":0.5080000162124634},{"id":"https://openalex.org/keywords/ion-energy-distribution","display_name":"ion energy distribution","score":0.6790000200271606},{"id":"https://openalex.org/keywords/sputtering","display_name":"sputtering","score":0.8619999885559082},{"id":"https://openalex.org/keywords/thin-film-deposition","display_name":"thin film deposition","score":0.8980000019073486},{"id":"https://openalex.org/keywords/13-56-mhz","display_name":"13.56 MHz","score":0.7570000290870667}],"concepts":[{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.8264073133468628},{"id":"https://openalex.org/C15708023","wikidata":"https://www.wikidata.org/wiki/Q80083","display_name":"Humanities","level":1,"score":0.4420660138130188},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.3881192207336426},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2022586166858673},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.06869640946388245}],"mesh":[],"locations_count":3,"locations":[{"id":"pmh:oai:thesesups.ups-tlse.fr:1241","doi":null,"is_oa":true,"landing_page_url":"http://thesesups.ups-tlse.fr/1241/1/Benyoucef_Djilali.pdf","pdf_url":"http://thesesups.ups-tlse.fr/1241/1/Benyoucef_Djilali.pdf","source":{"id":"https://openalex.org/S4306400942","display_name":"Th\u00e8ses en ligne de l'Universit\u00e9 Toulouse III (Universit\u00e9 Toulouse III)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I134560555","host_organization_name":"Universit\u00e9 Toulouse III - Paul Sabatier","host_organization_lineage":["https://openalex.org/I134560555"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"PhD Thesis"},{"id":"pmh:oai:HAL:tel-03983557v1","doi":null,"is_oa":true,"landing_page_url":"https://hal.science/tel-03983557v1","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Plasmas. Universit\u00e9 de Toulouse III \u2013 Paul Sabatier, 2011. Fran\u00e7ais. ⟨NNT : 2011TOU30040⟩","raw_type":"info:eu-repo/semantics/doctoralThesis"},{"id":"mag:183792129","doi":null,"is_oa":false,"landing_page_url":"http://thesesups.ups-tlse.fr/1241/","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"pmh:oai:thesesups.ups-tlse.fr:1241","doi":null,"is_oa":true,"landing_page_url":"http://thesesups.ups-tlse.fr/1241/1/Benyoucef_Djilali.pdf","pdf_url":"http://thesesups.ups-tlse.fr/1241/1/Benyoucef_Djilali.pdf","source":{"id":"https://openalex.org/S4306400942","display_name":"Th\u00e8ses en ligne de l'Universit\u00e9 Toulouse III (Universit\u00e9 Toulouse III)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I134560555","host_organization_name":"Universit\u00e9 Toulouse III - Paul Sabatier","host_organization_lineage":["https://openalex.org/I134560555"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"PhD Thesis"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W183792129.pdf","grobid_xml":"https://content.openalex.org/works/W183792129.grobid-xml"},"referenced_works_count":75,"referenced_works":["https://openalex.org/W80524275","https://openalex.org/W342217916","https://openalex.org/W435049067","https://openalex.org/W1480160699","https://openalex.org/W1535446808","https://openalex.org/W1542200866","https://openalex.org/W1596280764","https://openalex.org/W1630785939","https://openalex.org/W1906219722","https://openalex.org/W1964454185","https://openalex.org/W1966362157","https://openalex.org/W1967994058","https://openalex.org/W1971001401","https://openalex.org/W1974353248","https://openalex.org/W1986816490","https://openalex.org/W1988455712","https://openalex.org/W1989791182","https://openalex.org/W1995206118","https://openalex.org/W1995303588","https://openalex.org/W1995684091","https://openalex.org/W2001200622","https://openalex.org/W2003301106","https://openalex.org/W2003514532","https://openalex.org/W2007153925","https://openalex.org/W2010311338","https://openalex.org/W2011398297","https://openalex.org/W2013999489","https://openalex.org/W2017981825","https://openalex.org/W2021073945","https://openalex.org/W2025849812","https://openalex.org/W2027664337","https://openalex.org/W2031036381","https://openalex.org/W2031799201","https://openalex.org/W2032227296","https://openalex.org/W2032633290","https://openalex.org/W2036937934","https://openalex.org/W2038900562","https://openalex.org/W2039102415","https://openalex.org/W2039549487","https://openalex.org/W2045969290","https://openalex.org/W2046017347","https://openalex.org/W2047301234","https://openalex.org/W2048635495","https://openalex.org/W2050668733","https://openalex.org/W2050957764","https://openalex.org/W2052116847","https://openalex.org/W2054913596","https://openalex.org/W2055266696","https://openalex.org/W2061139552","https://openalex.org/W2065501956","https://openalex.org/W2065729365","https://openalex.org/W2068413530","https://openalex.org/W2070231015","https://openalex.org/W2070273153","https://openalex.org/W2072220585","https://openalex.org/W2072582118","https://openalex.org/W2081742188","https://openalex.org/W2082494288","https://openalex.org/W2092796111","https://openalex.org/W2095595785","https://openalex.org/W2113703416","https://openalex.org/W2122540346","https://openalex.org/W2124550796","https://openalex.org/W2129874525","https://openalex.org/W2129973322","https://openalex.org/W2141258567","https://openalex.org/W2149772555","https://openalex.org/W2152178059","https://openalex.org/W2154011597","https://openalex.org/W2165215367","https://openalex.org/W2171411410","https://openalex.org/W2324085323","https://openalex.org/W2615371531","https://openalex.org/W2777543100","https://openalex.org/W3160839531"],"related_works":["https://openalex.org/W4392443395","https://openalex.org/W4376651617","https://openalex.org/W25509979","https://openalex.org/W48222493","https://openalex.org/W590281861","https://openalex.org/W7049019690","https://openalex.org/W4392443396","https://openalex.org/W104783626","https://openalex.org/W403327908","https://openalex.org/W417475254"],"abstract_inverted_index":{"L'objectif":[0],"est":[1,49,67,140,273],"de":[2,41,59,72,85,92,103,126,129,161,175,198,200,213,225,229,247,254,263,268,294,305,311],"d\u00e9velopper":[3],"un":[4,25,32,143],"mod\u00e8le":[5,66,115,139],"particulaire":[6,116],"en":[7,44,54,80,158,202,223,245,287,303],"g\u00e9om\u00e9trie":[8],"multidimensionnelle":[9],"pour":[10,75,233],"l'\u00e9tude":[11],"\u00e9nerg\u00e9tique":[12],"et":[13,29,150,190,211,240,243,266],"cin\u00e9tique":[14,94],"des":[15,39,46,78,95,147,183,193,196,234,289],"plasmas":[16,43],"froids":[17],"r\u00e9actifs":[18],"form\u00e9s":[19],"dans":[20,132,136,152,231,308],"les":[21,57,124,133,172,187,208,309],"d\u00e9charges":[22,134,215],"excit\u00e9es":[23],"par":[24,31,62,121,182,192],"champ":[26,33,102,205,250],"\u00e9lectrique":[27],"RF":[28,135,216],"confin\u00e9s":[30],"magn\u00e9tique":[34,251],"crois\u00e9.":[35],"Une":[36],"meilleure":[37],"compr\u00e9hension":[38],"propri\u00e9t\u00e9s":[40,209],"ces":[42],"fonction":[45,203,224,246],"param\u00e8tres":[47],"op\u00e9ratoires":[48],"indispensable":[50],"aux":[51],"nouvelles":[52],"applications":[53],"nano\u00e9lectronique":[55],"utilisant":[56],"d\u00e9p\u00f4ts":[58],"couches":[60],"minces":[61],"pulv\u00e9risation":[63],"cathodique.":[64],"Le":[65,90,138,259],"bas\u00e9":[68],"sur":[69,186],"la":[70,83,93,130,162,214,226,264,269,295],"m\u00e9thode":[71],"Monte":[73],"Carlo":[74],"le":[76,99,166],"traitement":[77],"collisions":[79],"optimisant":[81],"notamment":[82,177],"technique":[84],"calcul":[86,100],"du":[87,101,114,168,204,236,249],"libre":[88],"parcours.":[89],"couplage":[91],"particules":[96],"charg\u00e9es":[97],"avec":[98,123,146,195],"charges":[104],"d'espace":[105],"a":[106,117,297],"\u00e9galement":[107,298],"fait":[108,299],"l'objet":[109,300],"d'optimisations":[110],"sp\u00e9cifiques.":[111],"La":[112],"validation":[113],"\u00e9t\u00e9":[118,180,221,282],"d'abord":[119],"effectu\u00e9e":[120],"comparaison":[122],"mesures":[125,197],"densit\u00e9s":[127],"\u00e9lectroniques":[128],"litt\u00e9rature":[131],"l'argon.":[137],"appliqu\u00e9":[141],"\u00e0":[142,217,256,278,292],"r\u00e9acteur":[144],"cylindrique":[145],"\u00e9lectrodes":[148],"planes":[149],"parall\u00e8les":[151],"une":[153],"configuration":[154],"sym\u00e9trique":[155],"puis":[156],"asym\u00e9trique":[157],"tenant":[159],"compte":[160],"tension":[163],"d\u2019auto-polarisation.":[164],"Dans":[165],"cas":[167],"m\u00e9lange":[169,237],"Ar-O2":[170],"\u00e9tudi\u00e9,":[171],"sections":[173],"efficaces":[174],"collision":[176],"ion-gaz":[178],"ont":[179,220,281],"compl\u00e9t\u00e9es":[181],"calculs":[184],"bas\u00e9s":[185],"potentiels":[188],"d'interaction":[189],"valid\u00e9es":[191],"comparaisons":[194],"coefficient":[199],"transport":[201],"r\u00e9duit.":[206],"Ensuite,":[207],"\u00e9nerg\u00e9tiques":[210],"\u00e9lectriques":[212],"13,56":[218],"MHz":[219],"analys\u00e9es":[222],"pression":[227],"partielle":[228],"O2":[230],"Ar":[232],"pressions":[235],"entre":[238],"50":[239,257,279],"100":[241],"mTorr":[242],"surtout":[244],"l'amplitude":[248],"crois\u00e9":[252],"allant":[253],"0":[255],"Gauss.":[258],"confinement":[260],"au":[261],"centre":[262],"d\u00e9charge":[265],"l'augmentation":[267],"densit\u00e9":[270],"plasma":[271],"qui":[272],"10":[274],"fois":[275],"plus":[276],"grande":[277],"Gauss":[280],"clairement":[283],"montr\u00e9s.":[284],"Les":[285],"distributions":[286],"\u00e9nergie":[288],"diff\u00e9rents":[290],"ions":[291],"proximit\u00e9":[293],"cathode":[296],"d'analyses":[301],"sp\u00e9cifiques":[302],"raison":[304],"leurs":[306],"r\u00f4les":[307],"processus":[310],"pulv\u00e9risation.":[312]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2018,"cited_by_count":2}],"updated_date":"2026-10-25T09:29:13.331239","created_date":"2016-06-24T00:00:00"}