{"id":"https://openalex.org/W1787697381","doi":"https://doi.org/10.1109/rfic.2000.854447","title":"Ka-band RF MEMS phase shifters for phased array applications","display_name":"Ka-band RF MEMS phase shifters for phased array applications","publication_year":2002,"publication_date":"2002-11-07","ids":{"openalex":"https://openalex.org/W1787697381","doi":"https://doi.org/10.1109/rfic.2000.854447","mag":"1787697381"},"language":"en","primary_location":{"id":"doi:10.1109/rfic.2000.854447","doi":"https://doi.org/10.1109/rfic.2000.854447","is_oa":false,"landing_page_url":"https://doi.org/10.1109/rfic.2000.854447","pdf_url":null,"source":{"id":"https://openalex.org/S4210202669","display_name":"Digest of papers - IEEE Radio Frequency Integrated Circuits Symposium","issn_l":"1529-2517","issn":["1529-2517","2375-0995"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2000 IEEE Radio Frequency Integrated Circuits (RFIC) Symposium Digest of Papers (Cat. No.00CH37096)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004938418","display_name":"Brandon W. Pillans","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891764","display_name":"Raytheon (United States)","ror":"https://ror.org/03gkvrb60","country_code":"US","type":"company","lineage":["https://openalex.org/I1306686416","https://openalex.org/I4388891764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. Pillans","raw_affiliation_strings":["Raytheon Systems Company, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Raytheon Systems Company, USA","institution_ids":["https://openalex.org/I4388891764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109231787","display_name":"Susan M. Eshelman","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891764","display_name":"Raytheon (United States)","ror":"https://ror.org/03gkvrb60","country_code":"US","type":"company","lineage":["https://openalex.org/I1306686416","https://openalex.org/I4388891764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Eshelman","raw_affiliation_strings":["Raytheon Systems Company, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Raytheon Systems Company, USA","institution_ids":["https://openalex.org/I4388891764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054579044","display_name":"Andrew Malczewski","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891764","display_name":"Raytheon (United States)","ror":"https://ror.org/03gkvrb60","country_code":"US","type":"company","lineage":["https://openalex.org/I1306686416","https://openalex.org/I4388891764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Malczewski","raw_affiliation_strings":["Raytheon Systems Company, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Raytheon Systems Company, USA","institution_ids":["https://openalex.org/I4388891764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032797004","display_name":"John C. Ehmke","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891764","display_name":"Raytheon (United States)","ror":"https://ror.org/03gkvrb60","country_code":"US","type":"company","lineage":["https://openalex.org/I1306686416","https://openalex.org/I4388891764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Ehmke","raw_affiliation_strings":["Raytheon Systems Company, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Raytheon Systems Company, USA","institution_ids":["https://openalex.org/I4388891764"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108075844","display_name":"C. Goldsmith","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4388891764","display_name":"Raytheon (United States)","ror":"https://ror.org/03gkvrb60","country_code":"US","type":"company","lineage":["https://openalex.org/I1306686416","https://openalex.org/I4388891764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Goldsmith","raw_affiliation_strings":["Raytheon Systems Company, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Raytheon Systems Company, USA","institution_ids":["https://openalex.org/I4388891764"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4388891764"],"apc_list":null,"apc_paid":null,"fwci":1.5018,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.8011506,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":null,"issue":null,"first_page":"195","last_page":"199"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/rf-mems-phase-shifter","display_name":"RF MEMS phase shifter","score":0.9350000023841858},{"id":"https://openalex.org/keywords/ka-band","display_name":"Ka-band","score":0.984000027179718},{"id":"https://openalex.org/keywords/capacitive-switches","display_name":"capacitive switches","score":0.7440000176429749},{"id":"https://openalex.org/keywords/insertion-loss","display_name":"insertion loss","score":0.8159999847412109},{"id":"https://openalex.org/keywords/return-loss","display_name":"return loss","score":0.9459999799728394},{"id":"https://openalex.org/keywords/phased-arrays","display_name":"phased arrays","score":0.8080000281333923},{"id":"https://openalex.org/keywords/mmic","display_name":"MMIC","score":0.5609999895095825},{"id":"https://openalex.org/keywords/device-packaging","display_name":"device packaging","score":0.7289999723434448}],"concepts":[{"id":"https://openalex.org/C90327742","wikidata":"https://www.wikidata.org/wiki/Q947396","display_name":"Insertion loss","level":2,"score":0.905870795249939},{"id":"https://openalex.org/C103864889","wikidata":"https://www.wikidata.org/wiki/Q4480524","display_name":"Phase shift module","level":3,"score":0.8995976448059082},{"id":"https://openalex.org/C196901423","wikidata":"https://www.wikidata.org/wiki/Q3933836","display_name":"Return loss","level":3,"score":0.8173863887786865},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6561304330825806},{"id":"https://openalex.org/C128450285","wikidata":"https://www.wikidata.org/wiki/Q1945036","display_name":"Monolithic microwave integrated circuit","level":4,"score":0.6242071986198425},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5840740203857422},{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.5502797961235046},{"id":"https://openalex.org/C33441834","wikidata":"https://www.wikidata.org/wiki/Q693004","display_name":"Transmission line","level":2,"score":0.49530521035194397},{"id":"https://openalex.org/C55494473","wikidata":"https://www.wikidata.org/wiki/Q727898","display_name":"Phased array","level":3,"score":0.4927857220172882},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.48318353295326233},{"id":"https://openalex.org/C194986542","wikidata":"https://www.wikidata.org/wiki/Q229932","display_name":"4-bit","level":3,"score":0.4621067941188812},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.44797131419181824},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4311792552471161},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.42937353253364563},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.40205666422843933},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.37487027049064636},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2718321681022644},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.18069776892662048},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.18019357323646545},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13597458600997925},{"id":"https://openalex.org/C21822782","wikidata":"https://www.wikidata.org/wiki/Q131214","display_name":"Antenna (radio)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/rfic.2000.854447","doi":"https://doi.org/10.1109/rfic.2000.854447","is_oa":false,"landing_page_url":"https://doi.org/10.1109/rfic.2000.854447","pdf_url":null,"source":{"id":"https://openalex.org/S4210202669","display_name":"Digest of papers - IEEE Radio Frequency Integrated Circuits Symposium","issn_l":"1529-2517","issn":["1529-2517","2375-0995"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2000 IEEE Radio Frequency Integrated Circuits (RFIC) Symposium Digest of Papers (Cat. No.00CH37096)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W2003503719","https://openalex.org/W2097914026","https://openalex.org/W2099647116","https://openalex.org/W2126227846"],"related_works":["https://openalex.org/W2112787627","https://openalex.org/W2128097663","https://openalex.org/W2162777215","https://openalex.org/W2766331209","https://openalex.org/W2801263247","https://openalex.org/W2024288379","https://openalex.org/W1597356108","https://openalex.org/W2119340770","https://openalex.org/W2130208301","https://openalex.org/W2739340342"],"abstract_inverted_index":{"RF":[0,14,30],"MEMS":[1,31],"switches":[2,33],"provide":[3],"a":[4,37],"cheap":[5],"and":[6,15],"effective":[7],"way":[8,85],"to":[9,86],"substantially":[10],"reduce":[11],"loss":[12,25,48,70,84],"in":[13,22],"microwave":[16],"MMICs.":[17],"In":[18],"this":[19],"paper,":[20],"progress":[21],"building":[23],"low":[24,83],"Ka-band":[26],"phase":[27,43,64],"shifters":[28],"using":[29],"capacitive":[32],"is":[34,90],"demonstrated.":[35],"Using":[36],"switched":[38],"transmission":[39],"line":[40],"4-bit":[41],"resonant":[42],"shifter,":[44],"an":[45,67],"average":[46,68],"insertion":[47,69],"of":[49,71],"2.25":[50],"dB":[51,58,73,78],"was":[52],"obtained":[53],"with":[54,74],"better":[55,75],"than":[56,76],"15":[57],"return":[59,79],"loss.":[60,80],"A":[61,81],"similar":[62],"3-bit":[63],"shifter":[65],"produced":[66],"1.7":[72],"13":[77],"simple,":[82],"package":[87],"these":[88],"devices":[89],"also":[91],"presented.":[92]},"counts_by_year":[{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-10-27T15:51:10.671819","created_date":"2016-06-24T00:00:00"}