{"id":"https://openalex.org/W1636025580","doi":null,"title":"Overview and analysis of readout circuits for capacitive sensing in MEMS gyroscopes (MEMS angular velocity sensors)","display_name":"Overview and analysis of readout circuits for capacitive sensing in MEMS gyroscopes (MEMS angular velocity sensors)","publication_year":2009,"publication_date":"2009-01-01","ids":{"openalex":"https://openalex.org/W1636025580","mag":"1636025580"},"language":"en","primary_location":{"id":"mag:3141653971","doi":null,"is_oa":false,"landing_page_url":"http://yadda.icm.edu.pl/yadda/element/bwmeta1.element.ieee-000005069739","pdf_url":null,"source":{"id":"https://openalex.org/S4306419757","display_name":"International Conference on Perspective Technologies and Methods in MEMS Design","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"International Conference on Perspective Technologies and Methods in MEMS Design","raw_type":null},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041698770","display_name":"Mykhaylo Lobur","orcid":"https://orcid.org/0000-0001-7516-1093","observed_orcids":["https://orcid.org/0000-0001-7516-1093"]},"institutions":[{"id":"https://openalex.org/I98435010","display_name":"Lviv Polytechnic National University","ror":"https://ror.org/0542q3127","country_code":"UA","type":"education","lineage":["https://openalex.org/I98435010"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"Mykhaylo Lobur","raw_affiliation_strings":["Department of CAD Systems, Lviv Polytechnic National University, 12, S. Bandery Str., 79013, UKRAINE"],"raw_orcid":"https://orcid.org/0000-0001-7516-1093","affiliations":[{"raw_affiliation_string":"Department of CAD Systems, Lviv Polytechnic National University, 12, S. Bandery Str., 79013, UKRAINE","institution_ids":["https://openalex.org/I98435010"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018596476","display_name":"Andriy Holovatyy","orcid":"https://orcid.org/0000-0001-6143-648X","observed_orcids":["https://orcid.org/0000-0001-6143-648X"]},"institutions":[{"id":"https://openalex.org/I98435010","display_name":"Lviv Polytechnic National University","ror":"https://ror.org/0542q3127","country_code":"UA","type":"education","lineage":["https://openalex.org/I98435010"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"Andriy Holovatyy","raw_affiliation_strings":["Department of CAD Systems, Lviv Polytechnic National University, 12, S. Bandery Str., 79013, UKRAINE"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of CAD Systems, Lviv Polytechnic National University, 12, S. Bandery Str., 79013, UKRAINE","institution_ids":["https://openalex.org/I98435010"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I98435010"],"apc_list":null,"apc_paid":null,"fwci":1.8739,"has_fulltext":false,"cited_by_count":24,"citation_normalized_percentile":{"value":0.82343659,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"161","last_page":"163"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.8529999852180481,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.8529999852180481,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.0949999988079071,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.030400000512599945,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-gyroscope","display_name":"MEMS gyroscope","score":0.9359999895095825},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"capacitive sensing","score":0.8899999856948853},{"id":"https://openalex.org/keywords/readout-circuit","display_name":"readout circuit","score":0.9909999966621399},{"id":"https://openalex.org/keywords/low-noise-readout","display_name":"low-noise readout","score":0.8600000143051147},{"id":"https://openalex.org/keywords/angular-velocity-sensor","display_name":"angular velocity sensor","score":0.847000002861023},{"id":"https://openalex.org/keywords/capacitive-mems-sensors","display_name":"MEMS capacitive sensors","score":0.5370000004768372}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.9157110452651978},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8947910070419312},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8464186191558838},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.6226251125335693},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.6099006533622742},{"id":"https://openalex.org/C2780191706","wikidata":"https://www.wikidata.org/wiki/Q191658","display_name":"Chopper","level":3,"score":0.5957711935043335},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.46699634194374084},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4657462537288666},{"id":"https://openalex.org/C5594486","wikidata":"https://www.wikidata.org/wiki/Q161635","display_name":"Angular velocity","level":2,"score":0.43748271465301514},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.4238448143005371},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.37902143597602844},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.33643174171447754},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3232209086418152},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.29207801818847656},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.23066970705986023},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1975773274898529},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.11797201633453369},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.07980567216873169},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"mag:3141653971","doi":null,"is_oa":false,"landing_page_url":"http://yadda.icm.edu.pl/yadda/element/bwmeta1.element.ieee-000005069739","pdf_url":null,"source":{"id":"https://openalex.org/S4306419757","display_name":"International Conference on Perspective Technologies and Methods in MEMS Design","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"International Conference on Perspective Technologies and Methods in MEMS Design","raw_type":null},{"id":"mag:1636025580","doi":null,"is_oa":false,"landing_page_url":"https://ieeexplore.ieee.org/document/5069739/","pdf_url":null,"source":{"id":"https://openalex.org/S4306419757","display_name":"International Conference on Perspective Technologies and Methods in MEMS Design","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"International Conference on Perspective Technologies and Methods in MEMS Design","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2288218172"],"related_works":["https://openalex.org/W2018155614","https://openalex.org/W2370982775","https://openalex.org/W4415224692","https://openalex.org/W2154411231","https://openalex.org/W3003326692","https://openalex.org/W2010319647","https://openalex.org/W2170745941","https://openalex.org/W2393461711","https://openalex.org/W2094859772","https://openalex.org/W2095524574"],"abstract_inverted_index":{"In":[0],"the":[1,7],"article,":[2],"overview":[3],"and":[4,21],"analysis":[5],"of":[6,9],"performance":[8],"capacitive":[10,32],"sensing":[11],"circuits":[12],"for":[13,31],"MEMS":[14,35],"gyroscopes":[15,36],"are":[16,23],"presented.":[17],"Their":[18],"performance,":[19],"advantages":[20],"disadvantages":[22],"given.":[24],"The":[25],"low-noise":[26],"chopper":[27],"stabilized":[28],"readout":[29],"circuit":[30],"measurements":[33],"in":[34],"is":[37],"proposed.":[38]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":4},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}