{"id":"https://openalex.org/W1544590909","doi":"https://doi.org/10.1002/9783527667703.ch61","title":"Nanosession: Atomic Layer Deposition","display_name":"Nanosession: Atomic Layer Deposition","publication_year":2012,"publication_date":"2012-06-19","ids":{"openalex":"https://openalex.org/W1544590909","doi":"https://doi.org/10.1002/9783527667703.ch61","mag":"1544590909"},"language":"en","primary_location":{"id":"doi:10.1002/9783527667703.ch61","doi":"https://doi.org/10.1002/9783527667703.ch61","is_oa":false,"landing_page_url":"https://doi.org/10.1002/9783527667703.ch61","pdf_url":null,"source":{"id":"https://openalex.org/S4210203950","display_name":"Frontiers in Electronic Materials","issn_l":"2673-9895","issn":["2673-9895"],"is_oa":false,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj"],"host_organization":"https://openalex.org/P4310320527","host_organization_name":"Frontiers Media","host_organization_lineage":["https://openalex.org/P4310320527"],"host_organization_lineage_names":["Frontiers Media"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Frontiers in Electronic Materials","raw_type":"other"},"volume":{"id":"https://openalex.org/W635842987","display_name":"Frontiers in Electronic Materials"},"type":"book-chapter","is_traditional":true,"indexed_in":["crossref","doaj"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027075775","display_name":"Cheol Seong Hwang","orcid":"https://orcid.org/0000-0002-6254-9758","observed_orcids":["https://orcid.org/0000-0002-6254-9758"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Cheol Seong Hwang","raw_affiliation_strings":["Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042246317","display_name":"Woongkyu Lee","orcid":"https://orcid.org/0000-0001-7106-9564","observed_orcids":["https://orcid.org/0000-0001-7106-9564"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Woongkyu Lee","raw_affiliation_strings":["WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029784091","display_name":"Jeong Hwan Han","orcid":"https://orcid.org/0000-0002-8314-9235","observed_orcids":["https://orcid.org/0000-0002-8314-9235"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jeong Hwan Han","raw_affiliation_strings":["WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091321689","display_name":"Woojin Jeon","orcid":"https://orcid.org/0000-0002-8477-9124","observed_orcids":["https://orcid.org/0000-0002-8477-9124"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Woojin Jeon","raw_affiliation_strings":["WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021720692","display_name":"Yeon Woo Yoo","orcid":"https://orcid.org/0000-0003-4763-3940","observed_orcids":["https://orcid.org/0000-0003-4763-3940"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Yeon Woo Yoo","raw_affiliation_strings":["WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070618813","display_name":"Changhee Ko","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405274580","display_name":"Air Liquide Laboratories (Japan)","ror":"https://ror.org/01z7r2306","country_code":"JP","type":"company","lineage":["https://openalex.org/I4405274580"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Changhee Ko","raw_affiliation_strings":["Air Liquide, 28, Wadai, Tsukuba-Shi, Ibaraki Pref., 300-4247, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Liquide, 28, Wadai, Tsukuba-Shi, Ibaraki Pref., 300-4247, Japan","institution_ids":["https://openalex.org/I4405274580"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017540731","display_name":"Julien Gatineau","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405274580","display_name":"Air Liquide Laboratories (Japan)","ror":"https://ror.org/01z7r2306","country_code":"JP","type":"company","lineage":["https://openalex.org/I4405274580"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Julien Gatineau","raw_affiliation_strings":["Air Liquide, 28, Wadai, Tsukuba-Shi, Ibaraki Pref., 300-4247, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Liquide, 28, Wadai, Tsukuba-Shi, Ibaraki Pref., 300-4247, Japan","institution_ids":["https://openalex.org/I4405274580"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027075775","display_name":"Cheol Seong Hwang","orcid":"https://orcid.org/0000-0002-6254-9758","observed_orcids":["https://orcid.org/0000-0002-6254-9758"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Cheol Seong Hwang","raw_affiliation_strings":["Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5097400326","display_name":"B. Gouat","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2801287017","display_name":"Aixtron (Germany)","ror":"https://ror.org/02adgag39","country_code":"DE","type":"company","lineage":["https://openalex.org/I2801287017"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B. Gouat","raw_affiliation_strings":["AIXTRON SE, Herzogenrath, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AIXTRON SE, Herzogenrath, Germany","institution_ids":["https://openalex.org/I2801287017"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020381091","display_name":"Ulrich Weber","orcid":"https://orcid.org/0000-0001-7116-035X","observed_orcids":["https://orcid.org/0000-0001-7116-035X"]},"institutions":[{"id":"https://openalex.org/I2801287017","display_name":"Aixtron (Germany)","ror":"https://ror.org/02adgag39","country_code":"DE","type":"company","lineage":["https://openalex.org/I2801287017"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"U. Weber","raw_affiliation_strings":["AIXTRON SE, Herzogenrath, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AIXTRON SE, Herzogenrath, Germany","institution_ids":["https://openalex.org/I2801287017"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006447144","display_name":"P. K. Baumann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2801287017","display_name":"Aixtron (Germany)","ror":"https://ror.org/02adgag39","country_code":"DE","type":"company","lineage":["https://openalex.org/I2801287017"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Peter K. Baumann","raw_affiliation_strings":["AIXTRON SE, Herzogenrath, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AIXTRON SE, Herzogenrath, Germany","institution_ids":["https://openalex.org/I2801287017"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022414227","display_name":"M. Heuken","orcid":"https://orcid.org/0000-0001-9739-9692","observed_orcids":["https://orcid.org/0000-0001-9739-9692"]},"institutions":[{"id":"https://openalex.org/I2801287017","display_name":"Aixtron (Germany)","ror":"https://ror.org/02adgag39","country_code":"DE","type":"company","lineage":["https://openalex.org/I2801287017"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Heuken","raw_affiliation_strings":["AIXTRON SE, Herzogenrath, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AIXTRON SE, Herzogenrath, Germany","institution_ids":["https://openalex.org/I2801287017"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101768722","display_name":"Bochao Lu","orcid":"https://orcid.org/0000-0002-6805-6065","observed_orcids":["https://orcid.org/0000-0002-6805-6065"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B. Lu","raw_affiliation_strings":["AIXTRON Inc., Sunnyvale, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AIXTRON Inc., Sunnyvale, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":null,"display_name":"S. Hoffmann\u2010Eifert","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Hoffmann\u2010Eifert","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111446106","display_name":"M. Reiners","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Reiners","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":null,"display_name":"N. Aslam","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"N. Aslam","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057476437","display_name":"Irina K\u00e4rkk\u00e4nen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"I. K\u00e4rkk\u00e4nen","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100781822","display_name":"Jong\u2010Hoon Kim","orcid":"https://orcid.org/0000-0001-6088-7676","observed_orcids":["https://orcid.org/0000-0001-6088-7676"]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J. H. Kim","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":null,"display_name":"R. Waser","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Waser","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","RWTH Aachen, Institut fu\u0308r Elektrotechnik II, Sommerfeldstr. 24, 52074 Aachen, Germany","Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany","RWTH Aachen, Institut f\u00fcr Elektrotechnik II, Sommerfeldstr. 24, 52074 Aachen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"RWTH Aachen, Institut fu\u0308r Elektrotechnik II, Sommerfeldstr. 24, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg Institut (PGI-7), Forschungszentrum J\u00fclich and JARA-FIT, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"RWTH Aachen, Institut f\u00fcr Elektrotechnik II, Sommerfeldstr. 24, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112283875","display_name":"Marcel Reiners","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Reiners","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","Peter Gr\u00fcnberg-Institut and JARA-FIT, Forschungszentrum J\u00fclich, 52425 J\u00fclich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg-Institut and JARA-FIT, Forschungszentrum J\u00fclich, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":null,"display_name":"N. Aslam","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"N. Aslam","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","Peter Gr\u00fcnberg-Institut and JARA-FIT, Forschungszentrum J\u00fclich, 52425 J\u00fclich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg-Institut and JARA-FIT, Forschungszentrum J\u00fclich, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":null,"display_name":"S. Hoffmann\u2010Eifert","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Hoffmann\u2010Eifert","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","Peter Gr\u00fcnberg-Institut and JARA-FIT, Forschungszentrum J\u00fclich, 52425 J\u00fclich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg-Institut and JARA-FIT, Forschungszentrum J\u00fclich, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]}]},{"author_position":"middle","author":{"id":null,"display_name":"R. Waser","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I171892758","display_name":"Forschungszentrum J\u00fclich","ror":"https://ror.org/02nv7yv05","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758"]},{"id":"https://openalex.org/I4210133912","display_name":"J\u00fclich Aachen Research Alliance","ror":"https://ror.org/02r0e4r58","country_code":"DE","type":"facility","lineage":["https://openalex.org/I1305996414","https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Waser","raw_affiliation_strings":["Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","RWTH Aachen, Institut fu\u0308r Elektrotechnik II, Sommerfeldstr. 24, 52074 Aachen, Germany","Peter Gr\u00fcnberg-Institut and JARA-FIT, Forschungszentrum J\u00fclich, 52425 J\u00fclich, Germany","RWTH Aachen, Institut f\u00fcr Elektrotechnik II, Sommerfeldstr. 24, 52074 Aachen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Peter Gru\u0308nberg Institut (PGI-7), Forschungszentrum Ju\u0308lich and JARA-FIT, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"Peter Gru\u0308nberg-Institut and JARA-FIT, Forschungszentrum Ju\u0308lich, 52425 Ju\u0308lich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"RWTH Aachen, Institut fu\u0308r Elektrotechnik II, Sommerfeldstr. 24, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]},{"raw_affiliation_string":"Peter Gr\u00fcnberg-Institut and JARA-FIT, Forschungszentrum J\u00fclich, 52425 J\u00fclich, Germany","institution_ids":["https://openalex.org/I171892758","https://openalex.org/I4210133912"]},{"raw_affiliation_string":"RWTH Aachen, Institut f\u00fcr Elektrotechnik II, Sommerfeldstr. 24, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052793863","display_name":"Taeyong Eom","orcid":"https://orcid.org/0000-0002-9646-9553","observed_orcids":["https://orcid.org/0000-0002-9646-9553"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Taeyong Eom","raw_affiliation_strings":["Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020694263","display_name":"Taehong Gwon","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Taehong Gwon","raw_affiliation_strings":["Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051680334","display_name":"Si Jung Yoo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Si Jung Yoo","raw_affiliation_strings":["Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000097180","display_name":"Moo\u2010Sung Kim","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Moo\u2010Sung Kim","raw_affiliation_strings":["Air Products Korea, 15 Nongseo-dong, Giheung-gu, Yongin-si, Gyeonggi-do, 446-920, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Products Korea, 15 Nongseo-dong, Giheung-gu, Yongin-si, Gyeonggi-do, 446-920, Republic of Korea","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111703198","display_name":"Manchao Xiao","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210113028","display_name":"Air Products (United States)","ror":"https://ror.org/01ydrx675","country_code":"US","type":"company","lineage":["https://openalex.org/I4210113028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Manchao Xiao","raw_affiliation_strings":["Air Products and Chemicals, Inc., 1969 Palomar Oaks Way, Carlsbad, CA 92011, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Products and Chemicals, Inc., 1969 Palomar Oaks Way, Carlsbad, CA 92011, USA","institution_ids":["https://openalex.org/I4210113028"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109283471","display_name":"Iain Buchanan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210113028","display_name":"Air Products (United States)","ror":"https://ror.org/01ydrx675","country_code":"US","type":"company","lineage":["https://openalex.org/I4210113028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Iain Buchanan","raw_affiliation_strings":["Air Products and Chemicals, Inc., 1969 Palomar Oaks Way, Carlsbad, CA 92011, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Products and Chemicals, Inc., 1969 Palomar Oaks Way, Carlsbad, CA 92011, USA","institution_ids":["https://openalex.org/I4210113028"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5027075775","display_name":"Cheol Seong Hwang","orcid":"https://orcid.org/0000-0002-6254-9758","observed_orcids":["https://orcid.org/0000-0002-6254-9758"]},"institutions":[{"id":"https://openalex.org/I139264467","display_name":"Seoul National University","ror":"https://ror.org/04h9pn542","country_code":"KR","type":"education","lineage":["https://openalex.org/I139264467"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Cheol Seong Hwang","raw_affiliation_strings":["Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science & Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]},{"raw_affiliation_string":"WCU Hybrid Materials Program, Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-744, Korea","institution_ids":["https://openalex.org/I139264467"]}]}],"institutions":[],"countries_distinct_count":4,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5027075775"],"corresponding_institution_ids":["https://openalex.org/I139264467"],"apc_list":{"value":1950,"currency":"CHF","value_usd":2353},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.21835697,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"419","last_page":"428"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9775000214576721,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9775000214576721,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.013100000098347664,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.0012000000569969416,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"atomic layer deposition","score":1.0},{"id":"https://openalex.org/keywords/transition-metal-oxide-thin-films","display_name":"transition metal oxide thin films","score":0.925000011920929},{"id":"https://openalex.org/keywords/resistive-switching","display_name":"resistive switching","score":0.9890000224113464},{"id":"https://openalex.org/keywords/phase-change-memory","display_name":"phase-change memory","score":0.9629999995231628},{"id":"https://openalex.org/keywords/non-volatile-memory","display_name":"non-volatile memory","score":0.8270000219345093},{"id":"https://openalex.org/keywords/nanostructured-materials","display_name":"nanostructured materials","score":0.703000009059906},{"id":"https://openalex.org/keywords/thin-film-deposition","display_name":"thin film deposition","score":0.6190000176429749}],"concepts":[{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.9524314403533936},{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.7901077270507812},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6590315103530884},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.652073323726654},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.6026148200035095},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5769016742706299},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.558568000793457},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5254936814308167},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.49598273634910583},{"id":"https://openalex.org/C182019814","wikidata":"https://www.wikidata.org/wiki/Q1143830","display_name":"Resistive random-access memory","level":3,"score":0.47795557975769043},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.4683016836643219},{"id":"https://openalex.org/C64142963","wikidata":"https://www.wikidata.org/wiki/Q1153902","display_name":"Phase-change memory","level":3,"score":0.4405614137649536},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.42458951473236084},{"id":"https://openalex.org/C177950962","wikidata":"https://www.wikidata.org/wiki/Q10997658","display_name":"Non-volatile memory","level":2,"score":0.4113452434539795},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.3579479455947876},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.16394633054733276},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08209511637687683},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1002/9783527667703.ch61","doi":"https://doi.org/10.1002/9783527667703.ch61","is_oa":false,"landing_page_url":"https://doi.org/10.1002/9783527667703.ch61","pdf_url":null,"source":{"id":"https://openalex.org/S4210203950","display_name":"Frontiers in Electronic Materials","issn_l":"2673-9895","issn":["2673-9895"],"is_oa":false,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj"],"host_organization":"https://openalex.org/P4310320527","host_organization_name":"Frontiers Media","host_organization_lineage":["https://openalex.org/P4310320527"],"host_organization_lineage_names":["Frontiers Media"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Frontiers in Electronic Materials","raw_type":"other"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W2012562151","https://openalex.org/W2032151330","https://openalex.org/W2044394993","https://openalex.org/W2051220390","https://openalex.org/W2074357625","https://openalex.org/W2075081826","https://openalex.org/W2080564856","https://openalex.org/W2091201490","https://openalex.org/W2147829317","https://openalex.org/W2158453890","https://openalex.org/W2330045491"],"related_works":["https://openalex.org/W2298132826","https://openalex.org/W2532134808","https://openalex.org/W7045600903","https://openalex.org/W4394751614","https://openalex.org/W1572530281","https://openalex.org/W2231532192","https://openalex.org/W2113935288","https://openalex.org/W2322569908","https://openalex.org/W2146473402","https://openalex.org/W2066649429"],"abstract_inverted_index":{"This":[0],"chapter":[1,65],"briefly":[2],"reviews":[3],"diverse":[4],"application":[5],"fields":[6],"of":[7,55,116],"atomic":[8,47,128],"layer":[9,129],"deposition":[10,29,58],"(ALD)":[11],"for":[12,41,60,82],"modern":[13],"semiconductor":[14,138],"devices.":[15,63,124],"The":[16,64,87],"ALD":[17,70],"often":[18],"adopts":[19],"a":[20,37],"lower":[21],"process":[22,59],"temperature":[23],"compared":[24],"to":[25,96],"the":[26,42,52,98,101,106,117],"chemical":[27],"vapor":[28],"in":[30],"an":[31],"atomically":[32],"controlled":[33],"manner":[34],"making":[35],"it":[36],"more":[38],"desirable":[39],"method":[40],"low":[43],"thermal":[44],"budget":[45],"and":[46],"thickness":[48],"control,":[49],"which":[50],"are":[51,91],"key":[53],"ingredients":[54],"thin":[56,74],"film":[57],"future":[61,83],"microelectronic":[62],"discusses":[66],"recent":[67],"results":[68],"on":[69,100,105],"transition":[71],"metal":[72],"oxide":[73],"films":[75],"integrated":[76],"into":[77],"cross":[78],"point":[79],"MIM":[80,131],"structures":[81],"resistive":[84,88],"switching":[85,89],"applications.":[86],"properties":[90],"analyzed":[92],"by":[93],"I-V":[94],"sweeps":[95],"examine":[97],"dependence":[99],"thicknesses":[102],"as":[103],"well":[104],"nanostructure.":[107],"Phase":[108],"change":[109,136],"random":[110],"access":[111],"memory":[112,123],"(PCRAM)":[113],"is":[114],"one":[115],"most":[118],"probable":[119],"next":[120],"generation":[121],"nonvolatile":[122],"Controlled":[125],"Vocabulary":[126],"Terms":[127],"deposition;":[130],"structures;":[132],"nanostructured":[133],"materials;":[134],"phase":[135],"memories;":[137],"devices":[139]},"counts_by_year":[],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}