{"id":"https://openalex.org/W1490467978","doi":"https://doi.org/10.1109/vlsit.2015.7223659","title":"A novel ALD SiBCN low-k spacer for parasitic capacitance reduction in FinFETs","display_name":"A novel ALD SiBCN low-k spacer for parasitic capacitance reduction in FinFETs","publication_year":2015,"publication_date":"2015-06-01","ids":{"openalex":"https://openalex.org/W1490467978","doi":"https://doi.org/10.1109/vlsit.2015.7223659","mag":"1490467978"},"language":"en","primary_location":{"id":"doi:10.1109/vlsit.2015.7223659","doi":"https://doi.org/10.1109/vlsit.2015.7223659","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsit.2015.7223659","pdf_url":null,"source":{"id":"https://openalex.org/S4306421008","display_name":"Symposium on VLSI Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 Symposium on VLSI Technology (VLSI Technology)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074267710","display_name":"T. Yamashita","orcid":"https://orcid.org/0000-0001-9049-4777","observed_orcids":["https://orcid.org/0000-0001-9049-4777"]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Yamashita","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113936369","display_name":"S. Mehta","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Mehta","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050878670","display_name":"Veeraraghavan S. Basker","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"V.S. Basker","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078561472","display_name":"Richard G. Southwick","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Southwick","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082003739","display_name":"Arvind Kumar","orcid":"https://orcid.org/0000-0001-6626-9799","observed_orcids":["https://orcid.org/0000-0001-6626-9799"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Kumar","raw_affiliation_strings":["SRDC, Albany Nano Tech, Albany, NY, USA","IBM SRDC, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SRDC, Albany Nano Tech, Albany, NY, USA","institution_ids":[]},{"raw_affiliation_string":"IBM SRDC, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114151073","display_name":"R. Kambhampati","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Kambhampati","raw_affiliation_strings":["GLOBALFOUNDRIES Inc., Albany Nano Tech, Albany, NY, USA","GLOBALFOUNDRIES Inc., Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"GLOBALFOUNDRIES Inc., Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I35662394"]},{"raw_affiliation_string":"GLOBALFOUNDRIES Inc., Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012136082","display_name":"Rajesh Sathiyanarayanan","orcid":"https://orcid.org/0000-0001-8092-4526","observed_orcids":["https://orcid.org/0000-0001-8092-4526"]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Sathiyanarayanan","raw_affiliation_strings":["SRDC, Albany Nano Tech, Albany, NY, USA","IBM SRDC, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SRDC, Albany Nano Tech, Albany, NY, USA","institution_ids":[]},{"raw_affiliation_string":"IBM SRDC, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046190638","display_name":"Jeff Johnson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Johnson","raw_affiliation_strings":["SRDC, Albany Nano Tech, Albany, NY, USA","IBM SRDC, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SRDC, Albany Nano Tech, Albany, NY, USA","institution_ids":[]},{"raw_affiliation_string":"IBM SRDC, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111917208","display_name":"Terence B. Hook","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Hook","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":null,"display_name":"S. Cohen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Cohen","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067424490","display_name":"J. Li","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Li","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061746009","display_name":"Anita Madan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Madan","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090632395","display_name":"Zhiyuan Zhu","orcid":"https://orcid.org/0000-0001-5866-1838","observed_orcids":["https://orcid.org/0000-0001-5866-1838"]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Z. Zhu","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109572821","display_name":"L. Tai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Tai","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Y. Yao","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Y. Yao","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025023334","display_name":"P. Chinthamanipeta","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"P. Chinthamanipeta","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031093843","display_name":"M. Hopstaken","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Hopstaken","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Z. Liu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Z. Liu","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038947493","display_name":"Darsen D. Lu","orcid":"https://orcid.org/0000-0002-1956-6093","observed_orcids":["https://orcid.org/0000-0002-1956-6093"]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Lu","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110263288","display_name":"F. Chen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"F. Chen","raw_affiliation_strings":["SRDC, Albany Nano Tech, Albany, NY, USA","IBM SRDC, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SRDC, Albany Nano Tech, Albany, NY, USA","institution_ids":[]},{"raw_affiliation_string":"IBM SRDC, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":null,"display_name":"S. Khan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Khan","raw_affiliation_strings":["SRDC, Albany Nano Tech, Albany, NY, USA","IBM SRDC, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SRDC, Albany Nano Tech, Albany, NY, USA","institution_ids":[]},{"raw_affiliation_string":"IBM SRDC, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010258734","display_name":"D. Canaperi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Canaperi","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064386721","display_name":"B. Haran","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. Haran","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036267166","display_name":"James H. Stathis","orcid":"https://orcid.org/0000-0001-8340-2475","observed_orcids":["https://orcid.org/0000-0001-8340-2475"]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Stathis","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039115242","display_name":"Phil J. Oldiges","orcid":"https://orcid.org/0000-0002-8935-3894","observed_orcids":["https://orcid.org/0000-0002-8935-3894"]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"P. Oldiges","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112218932","display_name":"C-H. Lin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C-H. Lin","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":null,"display_name":"S. Narasimha","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Narasimha","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM SRDC, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM SRDC, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084787422","display_name":"Andres Bryant","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. Bryant","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033626628","display_name":"W.K. Henson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"W.K. Henson","raw_affiliation_strings":["SRDC, Albany Nano Tech, Albany, NY, USA","IBM SRDC, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SRDC, Albany Nano Tech, Albany, NY, USA","institution_ids":[]},{"raw_affiliation_string":"IBM SRDC, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027482254","display_name":"Siva Kanakasabapathy","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Kanakasabapathy","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114253441","display_name":"Kota V. R. M. Murali","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K.V.R.M. Murali","raw_affiliation_strings":["SRDC, Albany Nano Tech, Albany, NY, USA","IBM SRDC, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SRDC, Albany Nano Tech, Albany, NY, USA","institution_ids":[]},{"raw_affiliation_string":"IBM SRDC, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067988101","display_name":"T. R. Gow","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"T. Gow","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086004236","display_name":"D. McHerron","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. McHerron","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113586249","display_name":"H. Bu","orcid":"https://orcid.org/0009-0009-6881-3415","observed_orcids":["https://orcid.org/0009-0009-6881-3415"]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Bu","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5015283797","display_name":"Manali Khare","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Khare","raw_affiliation_strings":["IBM Research, Albany Nano Tech, Albany, NY, USA","IBM Research, Albany Nano Tech, NY 12203, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research, Albany Nano Tech, Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]},{"raw_affiliation_string":"IBM Research, Albany Nano Tech, NY 12203, USA","institution_ids":["https://openalex.org/I4405285764"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.3305,"has_fulltext":false,"cited_by_count":23,"citation_normalized_percentile":{"value":0.92578832,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":87,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"T154","last_page":"T155"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.37209999561309814,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.37209999561309814,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.34790000319480896,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.21250000596046448,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/parasitic-capacitance-reduction","display_name":"parasitic capacitance reduction","score":0.9190000295639038},{"id":"https://openalex.org/keywords/finfet","display_name":"FinFET","score":0.9879999756813049},{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"atomic layer deposition","score":0.9459999799728394},{"id":"https://openalex.org/keywords/reactive-ion-etching","display_name":"reactive ion etching","score":0.8960000276565552},{"id":"https://openalex.org/keywords/replacement-metal-gate","display_name":"replacement metal gate","score":0.9139999747276306},{"id":"https://openalex.org/keywords/14-nm-technology-node","display_name":"14 nm technology node","score":0.8410000205039978},{"id":"https://openalex.org/keywords/device-reliability","display_name":"device reliability","score":0.4740000069141388},{"id":"https://openalex.org/keywords/spacer-design","display_name":"spacer design","score":0.5289999842643738}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.69980788230896},{"id":"https://openalex.org/C154318817","wikidata":"https://www.wikidata.org/wiki/Q2157249","display_name":"Parasitic capacitance","level":4,"score":0.6919447183609009},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6469593644142151},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.518059492111206},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.5048390030860901},{"id":"https://openalex.org/C51140833","wikidata":"https://www.wikidata.org/wiki/Q6822740","display_name":"Metal gate","level":5,"score":0.46912360191345215},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.43647706508636475},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.43323174118995667},{"id":"https://openalex.org/C2777042071","wikidata":"https://www.wikidata.org/wiki/Q6509304","display_name":"Leakage (economics)","level":2,"score":0.42829596996307373},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.4226672947406769},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.37477216124534607},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.3690439462661743},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.344118595123291},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2934296131134033},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1730177402496338},{"id":"https://openalex.org/C2361726","wikidata":"https://www.wikidata.org/wiki/Q5527031","display_name":"Gate oxide","level":4,"score":0.1274021863937378},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.11041668057441711},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09971752762794495},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.08644410967826843},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.07943403720855713},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsit.2015.7223659","doi":"https://doi.org/10.1109/vlsit.2015.7223659","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsit.2015.7223659","pdf_url":null,"source":{"id":"https://openalex.org/S4306421008","display_name":"Symposium on VLSI Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 Symposium on VLSI Technology (VLSI Technology)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W3008189758","https://openalex.org/W2152235899","https://openalex.org/W2088914356","https://openalex.org/W2590916400","https://openalex.org/W2154664062","https://openalex.org/W1972693794","https://openalex.org/W2745019717","https://openalex.org/W1990995275","https://openalex.org/W4240635057","https://openalex.org/W1570260497"],"abstract_inverted_index":{"FinFET":[0,76],"has":[1,24,43,67],"become":[2],"the":[3,55,62,85,91,111],"mainstream":[4],"logic":[5],"device":[6],"architecture":[7],"in":[8,30,84],"recent":[9],"technology":[10,92],"nodes":[11],"due":[12],"to":[13,53],"its":[14],"superior":[15],"electrostatic":[16],"and":[17,58,104,115],"leakage":[18],"control":[19],"[1,2,3,4].":[20],"However,":[21],"parasitic":[22],"capacitance":[23],"been":[25,44,68],"a":[26,36,71,79],"key":[27],"performance":[28,82],"detractor":[29],"3D":[31],"FinFETs.":[32],"In":[33],"this":[34],"work,":[35],"novel":[37],"low":[38],"temperature":[39],"ALD-based":[40],"SiBCN":[41],"material":[42,66,113],"identified,":[45],"with":[46,61,78,88],"an":[47],"optimized":[48],"spacer":[49,98],"RIE":[50],"process":[51],"developed":[52],"preserve":[54],"low-k":[56],"value":[57],"provide":[59],"compatibility":[60],"down-stream":[63],"processes.":[64],"The":[65],"integrated":[69],"into":[70],"manufacturable":[72],"14nm":[73],"replacement-metal-gate":[74],"(RMG)":[75],"baseline":[77],"demonstrated":[80],"~8%":[81],"improvement":[83],"RO":[86],"delay":[87],"reliability":[89,116],"meeting":[90],"requirement":[93],"[4].":[94],"A":[95],"guideline":[96],"for":[97,101],"design":[99],"consideration":[100],"10nm":[102],"node":[103],"beyond":[105],"is":[106],"also":[107],"provided":[108],"based":[109],"on":[110],"comprehensive":[112],"properties":[114],"evaluations.":[117]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":3},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":6},{"year":2016,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}